Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 62: Line 62:
 
| width="400" |  
 
| width="400" |  
 
*[[ICP Etch 1 (Panasonic E626I)]]  
 
*[[ICP Etch 1 (Panasonic E626I)]]  
*[[ICP Etch 2 (Panasonic E620)]]  
+
*[[ICP Etch 2 (Panasonic E640)]]  
 
*[[ICP-Etch (Unaxis VLR)]]
 
*[[ICP-Etch (Unaxis VLR)]]
 
*[[Plasma Clean (Gasonics 2000)]]  
 
*[[Plasma Clean (Gasonics 2000)]]  

Revision as of 15:44, 17 May 2016

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization