Difference between revisions of "Tool List"
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*[[Ashers (Technics PEII)]] | *[[Ashers (Technics PEII)]] | ||
*[[UV Ozone Reactor]] | *[[UV Ozone Reactor]] | ||
| + | *[[CAIBE (Oxford Ion Mill)]] | ||
| width="400" | | | width="400" | | ||
*[[ICP Etch 1 (Panasonic E626I)]] | *[[ICP Etch 1 (Panasonic E626I)]] | ||
Revision as of 10:46, 9 July 2015
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
- Wafer Bonder (SUSS SB6-8E)