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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 500 | older 500) (20 | 50 | 100 | 250 | 500)- 14:38, 11 January 2024 John d talk contribs moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences (more descriptive title)
- 11:02, 11 January 2024 Biljana talk contribs created page File:IBD Troubleshooting Guide.pdf
- 11:02, 11 January 2024 Biljana talk contribs uploaded File:IBD Troubleshooting Guide.pdf
- 11:02, 11 January 2024 Biljana talk contribs created page File:IBD SOP.pdf
- 11:02, 11 January 2024 Biljana talk contribs uploaded File:IBD SOP.pdf
- 10:57, 11 January 2024 Biljana talk contribs created page File:IBD SOP.docx
- 10:57, 11 January 2024 Biljana talk contribs uploaded File:IBD SOP.docx
- 15:26, 9 January 2024 Biljana talk contribs created page File:Autostep 200 Stepper manual focus.pdf
- 15:26, 9 January 2024 Biljana talk contribs uploaded File:Autostep 200 Stepper manual focus.pdf
- 14:44, 9 January 2024 Sawyer l talk contribs uploaded a new version of File:DUV Flood Expose SOP Rev C.pdf
- 16:46, 8 January 2024 Biljana talk contribs created page File:Focus and exposure optimization- Autostep200-II.pdf
- 16:46, 8 January 2024 Biljana talk contribs uploaded File:Focus and exposure optimization- Autostep200-II.pdf
- 16:34, 8 January 2024 Biljana talk contribs created page File:General information about AUTOSTEP 200.pdf
- 16:34, 8 January 2024 Biljana talk contribs uploaded File:General information about AUTOSTEP 200.pdf
- 15:53, 8 January 2024 Biljana talk contribs created page File:AUTOSTEP 200 User Accessible Commands 010524.pdf
- 15:53, 8 January 2024 Biljana talk contribs uploaded File:AUTOSTEP 200 User Accessible Commands 010524.pdf
- 15:43, 8 January 2024 Biljana talk contribs created page File:Autostep200 Training Old Training Manual.pdf
- 15:43, 8 January 2024 Biljana talk contribs uploaded File:Autostep200 Training Old Training Manual.pdf
- 12:39, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:39, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:33, 8 January 2024 Biljana talk contribs created page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:33, 8 January 2024 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:33, 8 January 2024 Biljana talk contribs deleted page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:33, 8 January 2024 Biljana talk contribs deleted page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:30, 8 January 2024 Biljana talk contribs created page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:30, 8 January 2024 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:19, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:19, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 11:58, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf
- 11:58, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf
- 11:41, 8 January 2024 Biljana talk contribs created page File:Autostep 200 - Setting up the Job.pdf
- 11:41, 8 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Setting up the Job.pdf
- 11:41, 8 January 2024 Biljana talk contribs deleted page File:Autostep 200 - Setting up the Job.pdf
- 11:35, 8 January 2024 Biljana talk contribs created page File:Autostep 200 - Setting up the Job.pdf
- 11:35, 8 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Setting up the Job.pdf
- 10:59, 8 January 2024 Biljana talk contribs uploaded a new version of File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 Biljana talk contribs created page File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 Biljana talk contribs uploaded File:Running the JOB- One Page Instructions.pdf
- 17:39, 5 January 2024 Biljana talk contribs created page File:Autostep 200 - Standard Operating Procedure-2023.pdf
- 17:39, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Standard Operating Procedure-2023.pdf
- 17:20, 5 January 2024 Biljana talk contribs created page File:Autostep200+chucks+shims.pdf
- 17:20, 5 January 2024 Biljana talk contribs uploaded File:Autostep200+chucks+shims.pdf
- 17:12, 5 January 2024 Biljana talk contribs created page File:Autostep 200 chucks-2023.pdf
- 17:12, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 chucks-2023.pdf
- 17:00, 5 January 2024 Biljana talk contribs created page File:Autostep 200 Chucks table.pdf
- 17:00, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 Chucks table.pdf
- 16:30, 5 January 2024 Biljana talk contribs created page File:Autostep 200 Running a JOB One Page Instructions.pdf
- 16:30, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 Running a JOB One Page Instructions.pdf
- 15:43, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 010524.pdf
- 15:43, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 010524.pdf
- 15:40, 5 January 2024 Biljana talk contribs deleted page File:GCA 6300 Standard Operating Procedure 122823.pdf (have two files with the same name)
- 15:39, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:39, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:38, 5 January 2024 Biljana talk contribs deleted page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:34, 5 January 2024 Biljana talk contribs uploaded a new version of File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:28, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Available chucks 2023.pdf
- 15:28, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Available chucks 2023.pdf
- 15:26, 5 January 2024 Biljana talk contribs created page File:GCA 6300+chucks+shims 2023 (1).pdf
- 15:26, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300+chucks+shims 2023 (1).pdf
- 15:11, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Chucks table 2023.pdf
- 15:11, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Chucks table 2023.pdf
- 15:07, 5 January 2024 Biljana talk contribs created page File:GCA 6300+chucks+shims 2023.xlsx
- 15:07, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300+chucks+shims 2023.xlsx
- 15:07, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Available chucks 2023.pptx
- 15:07, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Available chucks 2023.pptx
- 18:16, 4 January 2024 John d talk contribs created page User:John d Demis D. John (redirect to Demis_D._John) Tags: New redirect Visual edit: Switched
- 17:38, 4 January 2024 Biljana talk contribs created page File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 Biljana talk contribs uploaded File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 small substrates.pdf
- 17:38, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 small substrates.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 15:39, 4 January 2024 Sawyer l talk contribs created page File:DUV Flood Expose SOP Rev C.pdf
- 15:39, 4 January 2024 Sawyer l talk contribs uploaded File:DUV Flood Expose SOP Rev C.pdf
- 14:40, 4 January 2024 John d talk contribs uploaded a new version of File:Vernier Template.gds (Corrected first tooth had 0 offset)
- 11:36, 4 January 2024 John d talk contribs created page Surfscan Errors and Workarounds (added keuyboard workaround) Tag: Visual edit
- 11:31, 4 January 2024 John d talk contribs deleted page KLA-Tencor Surfscan - Standard Operating Procedure (Moved data to another page: content was: "This tool can be used for scanning 4", 6" and 8" wafers. Pieces could be also scanned, but they need to be mounted on either 4" or 8" wafer. The maximum thickness of a wafer (or a wafer+mounted piece) is up to 1mm. ==SURFSCAN 6200== LOG IN using the access code: '''boss''' ( if the keyboard is not working use the virtual keyboard on the monitor). Double click on the icon...", and the only contributor was "Biljana"...)
- 15:37, 29 December 2023 Biljana talk contribs created page File:GCA 6300 - Commands.pdf
- 15:37, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 - Commands.pdf
- 12:46, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 12:46, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 122823.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA6300 Optimizing the process 6.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA6300 Optimizing the process 6.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Shutdown and Start up.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Shutdown and Start up.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Reboot frozen keyboard.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Reboot frozen keyboard.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.pdf
- 12:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 General Information about system 4.pdf
- 12:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 General Information about system 4.pdf
- 12:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Running a JOB 3.pdf
- 12:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Running a JOB 3.pdf
- 11:54, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.docx
- 11:54, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.docx
- 17:15, 21 December 2023 Biljana talk contribs deleted page File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
- 17:14, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 Small substrates.pdf
- 17:14, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 Small substrates.pdf
- 17:14, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 2 and 3inch wafers.pdf
- 17:14, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 2 and 3inch wafers.pdf
- 17:13, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 4inch wafers.pdf
- 17:13, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 4inch wafers.pdf
- 17:12, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
- 17:12, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
- 16:01, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 6inch wafers.pdf
- 16:01, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 6inch wafers.pdf
- 15:59, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 8inch wafers.pdf
- 15:59, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 8inch wafers.pdf
- 15:51, 21 December 2023 Biljana talk contribs deleted page Surfscan 6200 8inch wafers
- 15:50, 21 December 2023 Biljana talk contribs created page Surfscan 6200 8inch wafers (Created page with "SURFSCAN 6200 for 8inch wafers IMPORTANT: Do not use it for thick wafers (thickness > 1um )! 1. LOG IN using the access code: boss (if the keyboard is not working use the virt...")
- 12:12, 30 November 2023 John d talk contribs created page YES Recipe Screenshots: STD-O2 (screenshots of "STD-O2-180C-3KW-30sec" and "STD-O2-100C-3KW-15min") Tag: Visual edit
- 12:11, 30 November 2023 John d talk contribs created page File:STD-O2-180C-3KW-30sec - steps.jpg
- 12:11, 30 November 2023 John d talk contribs uploaded File:STD-O2-180C-3KW-30sec - steps.jpg
- 12:10, 30 November 2023 John d talk contribs created page File:STD-O2-180C-3KW-30sec - header.jpg
- 12:10, 30 November 2023 John d talk contribs uploaded File:STD-O2-180C-3KW-30sec - header.jpg
- 12:09, 30 November 2023 John d talk contribs created page File:STD-O2-100C-3KW-15min - steps.jpg
- 12:09, 30 November 2023 John d talk contribs uploaded File:STD-O2-100C-3KW-15min - steps.jpg
- 12:09, 30 November 2023 John d talk contribs created page File:STD-O2-100C-3KW-15min - header.jpg
- 12:09, 30 November 2023 John d talk contribs uploaded File:STD-O2-100C-3KW-15min - header.jpg
- 12:08, 30 November 2023 John d talk contribs created page YES Recipe Screenshots: STD-N2-O2 (screenshots of "STD-N2-O2-100C-0.7KW-15sec" and "STD-N2-O2-180C-3KW-1min") Tag: Visual edit
- 12:07, 30 November 2023 John d talk contribs created page File:STD-N2-O2-100C-0.7KW-15sec - steps.jpg
- 12:07, 30 November 2023 John d talk contribs uploaded File:STD-N2-O2-100C-0.7KW-15sec - steps.jpg
- 12:06, 30 November 2023 John d talk contribs created page File:STD-N2-O2-100C-0.7KW-15sec - header.jpg
- 12:06, 30 November 2023 John d talk contribs uploaded File:STD-N2-O2-100C-0.7KW-15sec - header.jpg
- 12:05, 30 November 2023 John d talk contribs created page File:STD-N2-O2-180C-3KW-1min - steps.jpg
- 12:05, 30 November 2023 John d talk contribs uploaded File:STD-N2-O2-180C-3KW-1min - steps.jpg
- 12:03, 30 November 2023 John d talk contribs created page File:STD-N2-O2-180C-3KW-1min - header.jpg
- 12:03, 30 November 2023 John d talk contribs uploaded File:STD-N2-O2-180C-3KW-1min - header.jpg
- 14:59, 21 November 2023 User account Zeumault a talk contribs was created
- 13:36, 21 November 2023 John d talk contribs created page File:YES Pocket Carrier Wafers - 50mm pocket.jpg
- 13:36, 21 November 2023 John d talk contribs uploaded File:YES Pocket Carrier Wafers - 50mm pocket.jpg
- 13:35, 21 November 2023 John d talk contribs created page File:YES Pocket Carrier Wafers - 90mm pocket.jpg
- 13:35, 21 November 2023 John d talk contribs uploaded File:YES Pocket Carrier Wafers - 90mm pocket.jpg
- 17:59, 16 November 2023 John d talk contribs uploaded a new version of File:Nanofabrication Facility Project Description.xlsx (Rev 2023-11-16, added Accounts Payable line)
- 10:35, 13 November 2023 Millerski w talk contribs created page File:Oxford Ion Mill SOP.pdf
- 10:35, 13 November 2023 Millerski w talk contribs uploaded File:Oxford Ion Mill SOP.pdf
- 15:46, 9 November 2023 Hopkins a talk contribs created page File:EDS SOP.jpg
- 15:46, 9 November 2023 Hopkins a talk contribs uploaded File:EDS SOP.jpg
- 12:22, 8 November 2023 John d talk contribs uploaded a new version of File:Techtopia Vid - Thumbnail PlayButton.jpg (resized to match COE vid thumbnail)
- 12:21, 8 November 2023 John d talk contribs uploaded a new version of File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg (added play button)
- 11:33, 8 November 2023 John d talk contribs created page File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg
- 11:33, 8 November 2023 John d talk contribs uploaded File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg
- 11:32, 8 November 2023 John d talk contribs created page File:Techtopia Vid - Thumbnail PlayButton.jpg
- 11:32, 8 November 2023 John d talk contribs uploaded File:Techtopia Vid - Thumbnail PlayButton.jpg
- 15:26, 2 November 2023 John d talk contribs created page File:MLA150 - 160D0F15 stitching notch - 01.jpg
- 15:26, 2 November 2023 John d talk contribs uploaded File:MLA150 - 160D0F15 stitching notch - 01.jpg
- 13:45, 2 November 2023 John d talk contribs deleted page SSI Solaris 150 - Operating Procedure (Moved data to another page: content was: "'''Solaris (SSI) RTP Operating Instructions''' 1)Â Â On the main system press the green power on button. You will hear a loud click and hear air flowing. If you do not hear anything after pressing the green button, try rotating the EMO button and then press the green power on button again. 2)Â Â Press down on the door lever and gently pull out the wafer tray. Verify that a previou...", and the only contributor was "Lingg"...)
- 17:08, 1 November 2023 John d talk contribs deleted page UNAVAILABLE - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) (Equipment is not available anymore: content was: "{{tool |name=Optical Profilometer - Filmetrics Profilm3D |picture=Filmetrics_Profilm3D_System_Photo.png |type = Inspection, Test and Characterization |super= |location=UNAVAILABLE |description = Optical Profilometer |manufacturer = [http://filmetrics.com Filmetrics Inc.] |model = Profilm3D |toolid= }} '''THIS TOOL HAS BEEN REMOVED FROM THE LAB AND IS UNAVAILABLE as of 2019.'''...", and the only contributor was "[[Special:Contributions/John d...)
- 17:07, 1 November 2023 John d talk contribs deleted page Profilm3D - Quick Start - Surface Roughness Measurement (PSI Mode) (Equipment is not available anymore: content was: " '''THIS TOOL IS CURRENTLY UNAVAILABLE.''' Please see the <u>Olympus LEXT Confocal Microscope</u> for similar capabilities. ==Measurement Procedure== *Turn objective to 10x *Select Recipe - '''''PSI Roughness''''' or '''''WLI Step Height''''' (re-selecting reloads defaults, removing the ''<unsaved>'' label) **If it asks you to rotate the objective, click "''Update Recipe''" to keep it on the...)
- 16:56, 1 November 2023 John d talk contribs deleted page Step Profile (Dektak IIA) (Equipment is not available anymore: content was: "{{tool|{{PAGENAME}} |picture=Dektak2A.jpg |type = Inspection, Test and Characterization |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 4 |email=silva@ece.ucsb.edu |description = Dektak Profilometer |manufacturer = Sloan (now Veeco) |materials = }} '''This tool has been decommissioned and removed from the lab, as of 2018-10-09.''' '''Information on this page is for reference/historical purposes only.''' = About = The Dektak is a...)
- 16:50, 1 November 2023 John d talk contribs deleted page GCA 6300 Stepper Training MAnual-Full version (Broken redirect: content was: "GCA 6300 Stepper Training Manual - Full version. pdf", and the only contributor was "Biljana" (talk))
- 16:48, 1 November 2023 John d talk contribs deleted page File:Logitech WBS7 Bonder Schematic from Manual.png (Copyright violation)
- 15:43, 1 November 2023 John d talk contribs deleted page File:Olympus - BHM Microscope - Instruction Manual.pdf (Copyright violation: also not linked anywhere on site)
- 12:14, 1 November 2023 John d talk contribs deleted page File:CompleteEASE Manual.pdf (Copyright violation: proprietary requested removal by Woollam)
- 20:35, 30 October 2023 John d talk contribs created page Template:News - Older Articles (pasted news from ~2022 bthibeault culling)
- 20:21, 30 October 2023 John d talk contribs deleted page Template:Homepage RightSideBar (merged into main homepage, removed right side bar entriely. content was: "'''Other Links:''' * [http://signupmonkey.ece.ucsb.edu SignUpMonkey] * [http://nanofab.ucsb.edu NanoTech Homepage] * [http://www.ece.ucsb.edu UCSB EE Dept.] * [https://nanofab.ucsb.edu/services Get into the Lab] * [https://nanofab.ucsb.edu/services#fabrication-services Fabrication Services]", and the only contributor was "John d" (talk))
- 20:12, 30 October 2023 John d talk contribs created page Template:Homepage RightSideBar (Created page with "'''Other Links:''' * [http://signupmonkey.ece.ucsb.edu SignUpMonkey] * [http://nanofab.ucsb.edu NanoTech Homepage] * [http://www.ece.ucsb.edu UCSB EE Dept.] * [https://nanofab...")
- 20:06, 30 October 2023 John d talk contribs created page Template:Homepage GeneralInfo (pasted from template `FeaturedArticle`)
- 19:50, 30 October 2023 John d talk contribs created page Template:Homepage BottomBanner (pasted from template `nav2`, change contact to NanoFab-it@ece...)
- 19:44, 30 October 2023 John d talk contribs created page Template:Homepage Topbanners (pasted from `nav` template)
- 14:57, 30 October 2023 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf
- 14:56, 30 October 2023 Millerski w talk contribs created page File:XeF2 Etch Operating Instructions.pdf (Updated SOP)
- 14:56, 30 October 2023 Millerski w talk contribs uploaded File:XeF2 Etch Operating Instructions.pdf (Updated SOP)
- 14:56, 30 October 2023 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf
- 14:51, 30 October 2023 Millerski w talk contribs created page File:Tube Furnace Wafer Bonding SOP.pdf (Updated SOP)
- 14:51, 30 October 2023 Millerski w talk contribs uploaded File:Tube Furnace Wafer Bonding SOP.pdf (Updated SOP)
- 14:46, 30 October 2023 Millerski w talk contribs created page File:Logitech Wafer Bonder Operating Instructions.pdf
- 14:46, 30 October 2023 Millerski w talk contribs uploaded File:Logitech Wafer Bonder Operating Instructions.pdf
- 14:45, 30 October 2023 Millerski w talk contribs uploaded a new version of File:RTA SSI Operating Instructions.pdf (Updated SOP)
- 14:42, 30 October 2023 Millerski w talk contribs created page File:CDE ResMap Operating Instructions.pdf (SOP Update)
- 14:42, 30 October 2023 Millerski w talk contribs uploaded File:CDE ResMap Operating Instructions.pdf (SOP Update)
- 11:06, 30 October 2023 Sawyer l talk contribs created page File:EVG Plasma Activation SOP Rev E.pdf
- 11:06, 30 October 2023 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev E.pdf
- 15:10, 17 October 2023 Sawyer l talk contribs created page File:ADT SOP Rev J.pdf
- 15:10, 17 October 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev J.pdf
- 12:39, 16 October 2023 John d talk contribs moved page Amscope Quickstart Usage Guide to Measurements and Imaging with Amscope Camera - Quickstart Usage Guide (more descriptive title for printing)
- 14:26, 28 September 2023 Sawyer l talk contribs uploaded a new version of File:RIE 2 SOP Rev D.pdf
- 11:46, 27 September 2023 John d talk contribs protected Nanofab Staff Internal Pages [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) (hist)
- 11:02, 27 September 2023 Hopkins a talk contribs created page File:EDS SOP.pdf
- 11:02, 27 September 2023 Hopkins a talk contribs uploaded File:EDS SOP.pdf
- 08:21, 26 September 2023 Hopkins a talk contribs created page File:JEOL IT800SHL Operating Procedure.docx
- 08:21, 26 September 2023 Hopkins a talk contribs uploaded File:JEOL IT800SHL Operating Procedure.docx
- 08:15, 26 September 2023 Hopkins a talk contribs created page File:Loomis Scriber SOP.docx
- 08:15, 26 September 2023 Hopkins a talk contribs uploaded File:Loomis Scriber SOP.docx
- 15:41, 25 September 2023 John d talk contribs created page Nanofab New User Onboarding (inital page) Tag: Visual edit
- 14:05, 22 September 2023 John d talk contribs created page Photomask Ordering Procedure for UCSB Users (pasted procedure from email) Tag: Visual edit
- 18:26, 20 September 2023 John d talk contribs created page Homepage Draft1 (pasted Main_Page source code)
- 07:28, 20 September 2023 Hopkins a talk contribs created page File:Suss Bonder Recipe Guidelines.docx (Bonder Recipe Guidelines)
- 07:28, 20 September 2023 Hopkins a talk contribs uploaded File:Suss Bonder Recipe Guidelines.docx (Bonder Recipe Guidelines)
- 07:21, 20 September 2023 Hopkins a talk contribs created page File:Bonder Pressure Rules Vis Aid.docx (Bonder Pressure Rules Visual Aid)
- 07:21, 20 September 2023 Hopkins a talk contribs uploaded File:Bonder Pressure Rules Vis Aid.docx (Bonder Pressure Rules Visual Aid)
- 16:46, 18 September 2023 Barreraz talk contribs created page File:EB1 9-18-23.jpg (Post automation upgrade)
- 16:46, 18 September 2023 Barreraz talk contribs uploaded File:EB1 9-18-23.jpg (Post automation upgrade)
- 09:27, 18 September 2023 Barreraz talk contribs created page File:EB-1 operation instructions 9-18-23.pdf
- 09:27, 18 September 2023 Barreraz talk contribs uploaded File:EB-1 operation instructions 9-18-23.pdf
- 09:24, 18 September 2023 Barreraz talk contribs uploaded a new version of File:EB-1 Operation Instructions.pdf
- 12:50, 13 September 2023 John d talk contribs uploaded a new version of File:ASML IQC Focus Mean Correction screenshot.jpg (Cleaner straightened photo)
- 11:09, 13 September 2023 John d talk contribs created page File:ASML Stepper 3 - HELP button error log screenshot.png
- 11:09, 13 September 2023 John d talk contribs uploaded File:ASML Stepper 3 - HELP button error log screenshot.png
- 08:23, 13 September 2023 Sawyer l talk contribs created page File:Ultron 1042R Film specs.pdf
- 08:23, 13 September 2023 Sawyer l talk contribs uploaded File:Ultron 1042R Film specs.pdf
- 15:20, 12 September 2023 John d talk contribs moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL) (new tool., old tool replaced)
- 11:48, 8 September 2023 User account Ernestosan talk contribs was created
- 11:52, 30 August 2023 Mehalana v talk contribs created page Nanofab-IT - Add Device to Network (copy/pasted from parent page) Tag: Visual edit
- 09:16, 29 August 2023 Sawyer l talk contribs uploaded a new version of File:UV Ozone SOP Rev A.pdf
- 08:42, 29 August 2023 Sawyer l talk contribs created page File:UV Ozone SOP Rev A.pdf
- 08:42, 29 August 2023 Sawyer l talk contribs uploaded File:UV Ozone SOP Rev A.pdf
- 11:31, 25 August 2023 Sawyer l talk contribs created page File:EB2 SOP Rev H.pdf
- 11:31, 25 August 2023 Sawyer l talk contribs uploaded File:EB2 SOP Rev H.pdf
- 10:52, 22 August 2023 Sawyer l talk contribs uploaded a new version of File:ICP -1 Standard Etch Recipes.pdf
- 11:09, 17 August 2023 Sawyer l talk contribs created page File:ICP -1 Standard Etch Recipes.pdf
- 11:09, 17 August 2023 Sawyer l talk contribs uploaded File:ICP -1 Standard Etch Recipes.pdf
- 10:59, 16 August 2023 Hopkins a talk contribs created page File:IMG 0554.jpg
- 10:59, 16 August 2023 Hopkins a talk contribs uploaded File:IMG 0554.jpg
- 15:12, 15 August 2023 Ffoong talk contribs created page Wafer Cleaver Recipes (LSD-155LT) (New page for Loomis cleaver recipes) Tag: Visual edit
- 06:32, 3 August 2023 Sawyer l talk contribs created page File:ADT SOP Rev I.pdf
- 06:32, 3 August 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev I.pdf
- 09:33, 2 August 2023 Sawyer l talk contribs uploaded a new version of File:MA-6 SOP Rev D.pdf
- 07:54, 21 July 2023 Sawyer l talk contribs created page File:RIE 2 SOP Rev D.pdf
- 07:54, 21 July 2023 Sawyer l talk contribs uploaded File:RIE 2 SOP Rev D.pdf
- 16:49, 18 July 2023 John d talk contribs created page File:JEOL 7600F UserManual.pdf (v08.12, from Bill Mitchell)
- 16:49, 18 July 2023 John d talk contribs uploaded File:JEOL 7600F UserManual.pdf (v08.12, from Bill Mitchell)
- 08:57, 15 June 2023 Millerski w talk contribs created page File:RTA AET Operating Instructions.pdf (Operating Instructions)
- 08:57, 15 June 2023 Millerski w talk contribs uploaded File:RTA AET Operating Instructions.pdf (Operating Instructions)
- 16:33, 9 June 2023 Ffoong talk contribs created page Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture. (Created page with "left|thumb|900x900px|Positive ash rate vs differnt gas mixtures. Especially between O2 only vs O2/N2 gas mixtures") Tag: Visual edit
- 16:31, 9 June 2023 Ffoong talk contribs created page File:Gas mixture comparison.jpg
- 16:31, 9 June 2023 Ffoong talk contribs uploaded File:Gas mixture comparison.jpg
- 16:17, 9 June 2023 Ffoong talk contribs created page File:Au oxidation by O2-N2 ash.jpg
- 16:17, 9 June 2023 Ffoong talk contribs uploaded File:Au oxidation by O2-N2 ash.jpg
- 16:14, 9 June 2023 Ffoong talk contribs created page Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe. (Gold surface darkened after O2/N2 ashing recipe treatment, XPS data showed that Au can oxidize in the high oxidization condition)
- 23:36, 5 June 2023 John d talk contribs created page File:Surfscan 230113A7G2 after low particles.jpg
- 23:36, 5 June 2023 John d talk contribs uploaded File:Surfscan 230113A7G2 after low particles.jpg
- 23:35, 5 June 2023 John d talk contribs created page File:Surfscan - 230113A7 Gain4 high particles.jpg
- 23:35, 5 June 2023 John d talk contribs uploaded File:Surfscan - 230113A7 Gain4 high particles.jpg
- 10:00, 5 June 2023 Ffoong talk contribs created page SPR220-7 at 3kW various temperature without N2 gas (add data file) Tag: Visual edit
- 09:39, 5 June 2023 Ffoong talk contribs created page File:PPR 220-7 Etch Rates vs Temperature.jpg
- 09:39, 5 June 2023 Ffoong talk contribs uploaded File:PPR 220-7 Etch Rates vs Temperature.jpg
- 09:34, 5 June 2023 Ffoong talk contribs created page File:PPR220-7 Etch Rates vs Temperature.jpg
- 09:34, 5 June 2023 Ffoong talk contribs uploaded File:PPR220-7 Etch Rates vs Temperature.jpg
- 09:28, 5 June 2023 Ffoong talk contribs created page File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png
- 09:28, 5 June 2023 Ffoong talk contribs uploaded File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png
- 09:19, 5 June 2023 Ffoong talk contribs created page File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp.png
- 09:19, 5 June 2023 Ffoong talk contribs uploaded File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp.png
- 12:08, 2 June 2023 John d talk contribs uploaded a new version of File:PECVD1 SiN Stress vs. N2 plot.jpg (better formatting, colors axes mathcing markers etc)
- 11:52, 2 June 2023 John d talk contribs created page File:PECVD1 SiN Stress vs. N2 plot.jpg
- 11:52, 2 June 2023 John d talk contribs uploaded File:PECVD1 SiN Stress vs. N2 plot.jpg
- 20:11, 1 June 2023 John d talk contribs changed group membership for Ffoong from (none) to staff (staff user)
- 09:36, 26 May 2023 Sawyer l talk contribs uploaded a new version of File:MJB 3 IR Camera SOP Rev B.pdf
- 10:16, 24 May 2023 User account Mrsoler talk contribs was created
- 09:59, 22 May 2023 Millerski w talk contribs created page File:RTA SSI Operating Instructions.pdf
- 09:59, 22 May 2023 Millerski w talk contribs uploaded File:RTA SSI Operating Instructions.pdf
- 00:16, 20 May 2023 User account Yuxuan Xie talk contribs was created
- 16:30, 18 May 2023 John d talk contribs created page File:ASML CD Cals - Example Plot.jpg
- 16:30, 18 May 2023 John d talk contribs uploaded File:ASML CD Cals - Example Plot.jpg
- 16:28, 18 May 2023 John d talk contribs created page File:ASML CD Cals - Example Table.jpg
- 16:28, 18 May 2023 John d talk contribs uploaded File:ASML CD Cals - Example Table.jpg
- 09:04, 15 May 2023 Millerski w talk contribs created page File:Mechanical Polisher SOP Rev A.pdf
- 09:04, 15 May 2023 Millerski w talk contribs uploaded File:Mechanical Polisher SOP Rev A.pdf
- 22:05, 10 May 2023 John d talk contribs created page File:SEM1 JEOL IT800HSL.jpg (photo of SEM #1, JEOL IT800HSL)
- 22:05, 10 May 2023 John d talk contribs uploaded File:SEM1 JEOL IT800HSL.jpg (photo of SEM #1, JEOL IT800HSL)
- 21:58, 10 May 2023 John d talk contribs created page File:Amscope Stereoscope Photo.jpg
- 21:58, 10 May 2023 John d talk contribs uploaded File:Amscope Stereoscope Photo.jpg
- 21:54, 10 May 2023 John d talk contribs created page File:OlympusDSX1000.jpg (photo of Olympus DSX-1000 microscope)
- 21:54, 10 May 2023 John d talk contribs uploaded File:OlympusDSX1000.jpg (photo of Olympus DSX-1000 microscope)
- 21:51, 10 May 2023 John d talk contribs created page File:DektakXT.jpg (image of Dektak XT)
- 21:51, 10 May 2023 John d talk contribs uploaded File:DektakXT.jpg (image of Dektak XT)
- 12:34, 10 May 2023 John d talk contribs created page SEM 1 (JEOL IT800SHL) (iniital page copied from SEM2) Tag: Visual edit: Switched
- 10:34, 10 May 2023 Sawyer l talk contribs created page File:EB2 SOP Rev G.pdf
- 10:34, 10 May 2023 Sawyer l talk contribs uploaded File:EB2 SOP Rev G.pdf
- 10:00, 28 April 2023 John d talk contribs created page File:Vented font screnshot.jpg
- 10:00, 28 April 2023 John d talk contribs uploaded File:Vented font screnshot.jpg
- 09:57, 28 April 2023 John d talk contribs created page File:Vernier Template v2 screenshot.jpg
- 09:57, 28 April 2023 John d talk contribs uploaded File:Vernier Template v2 screenshot.jpg
- 09:54, 28 April 2023 John d talk contribs uploaded a new version of File:Vernier Template.gds (corrected text by flattening. Demis D John.)
- 09:51, 28 April 2023 John d talk contribs uploaded a new version of File:Vernier Template.gds (Vernier_Template_v2.gds - arrays instead of flat, and text for each layer)
- 12:44, 26 April 2023 John d talk contribs created page Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement (added basic description & steps referring to for details, Measuring_thin_metals_with_oxide_pre-measurement) Tag: Visual edit
- 23:27, 25 April 2023 John d talk contribs uploaded a new version of File:IBD Schematic.jpg (added numbering for each component)
- 23:23, 25 April 2023 John d talk contribs created page File:IBD Schematic.jpg
- 23:23, 25 April 2023 John d talk contribs uploaded File:IBD Schematic.jpg
- 14:51, 17 April 2023 John d talk contribs uploaded a new version of File:Vented font DDJ.gds (added "UCSB Nnanofab" in the comments)
- 20:11, 14 April 2023 John d talk contribs created page Automated Wafer Cleaver (Loomis LSD-155LT) (initial page) Tag: Visual edit: Switched
- 08:56, 14 April 2023 John d talk contribs changed group membership for Plenvik from (none) to staff (was never set when he joined)
- 13:09, 12 April 2023 User account Roark talk contribs was created
- 12:00, 11 April 2023 Barreraz talk contribs created page File:EBeam4 Operating Instructions 4-7-2023.pdf (Updated Operating Instructions for EBeam4)
- 12:00, 11 April 2023 Barreraz talk contribs uploaded File:EBeam4 Operating Instructions 4-7-2023.pdf (Updated Operating Instructions for EBeam4)
- 15:34, 4 April 2023 John d talk contribs deleted page Field Emission SEM 1 (FEI Sirion) (Equipment is not available anymore: content was: "{{tool2|{{PAGENAME}} |picture=SEM1.jpg |type = Inspection, Test and Characterization |super= Aidan Hopkins |super2= Bill Mitchell |location=Bay 1 |description = FEI Thermal Field Emission SEM Sirion with EDAX Falcon EDX system |manufacturer = FEI |materials = |toolid=4 }} =About= This system is a tri-use FESEM imaging and inspection system, EDX elemental analysis system, and small-area electron beam lithography system. The system uses a ther...)
- 15:34, 4 April 2023 John d talk contribs deleted page Field Emission SEM 1 (Equipment is not available anymore)
- 10:07, 2 April 2023 John d talk contribs created page File:Vented font DDJ.gds (Vented Font - a font good for liftoff (no enclosed holes), GDS CAD file)
- 10:07, 2 April 2023 John d talk contribs uploaded File:Vented font DDJ.gds (Vented Font - a font good for liftoff (no enclosed holes), GDS CAD file)
- 13:03, 21 March 2023 John d talk contribs created page File:Surfscan P1 SiN 221208Z5G4 after.jpg
- 13:03, 21 March 2023 John d talk contribs uploaded File:Surfscan P1 SiN 221208Z5G4 after.jpg
- 12:59, 21 March 2023 John d talk contribs created page File:Surfscan G4 before example - P1 230317E7G4 before.jpg
- 12:59, 21 March 2023 John d talk contribs uploaded File:Surfscan G4 before example - P1 230317E7G4 before.jpg
- 12:56, 21 March 2023 John d talk contribs uploaded a new version of File:UCSBTEST1.png (Typical Recipe UCSB Gain2 for larger particulates)
- 12:55, 21 March 2023 John d talk contribs uploaded a new version of File:UCSBTEST2 .png (Typical Surfscan results for UCSB Gain4 for smaller particulates)
- 11:52, 21 March 2023 Sawyer l talk contribs uploaded a new version of File:ICP -1 Gas Change N2-He-N2.pdf
- 11:51, 21 March 2023 Sawyer l talk contribs created page File:ICP -1 Gas Change CHF3-Ar.pdf
- 11:51, 21 March 2023 Sawyer l talk contribs uploaded File:ICP -1 Gas Change CHF3-Ar.pdf
- 11:50, 21 March 2023 Sawyer l talk contribs uploaded a new version of File:ICP -1 Gas Change CF4-SF6-CF4.pdf
- 10:12, 21 March 2023 Barreraz talk contribs created page File:EBeam5 Operating Procedures.pdf
- 10:12, 21 March 2023 Barreraz talk contribs uploaded File:EBeam5 Operating Procedures.pdf
- 16:05, 20 March 2023 John d talk contribs created page Oxford Etcher - Sample Size Effect on Etch Rate (pasted from old Process Control Dataa: Oxford_ICP_Etcher_-_Process_Control_Data) Tag: Visual edit: Switched
- 22:01, 18 March 2023 John d talk contribs created page User:Mehalana v (redirects to Vraj's correct staff page) Tags: New redirect Visual edit: Switched
- 13:59, 16 March 2023 Sawyer l talk contribs created page File:ADT SOP Rev H.pdf
- 13:59, 16 March 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev H.pdf
- 16:23, 13 March 2023 John d talk contribs uploaded a new version of File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx (one user had "corrupt file" problem, but was ok for me. re-uploading just in case.)
- 08:32, 10 March 2023 Sawyer l talk contribs created page File:RIE 2 SOP Rev C.pdf
- 08:32, 10 March 2023 Sawyer l talk contribs uploaded File:RIE 2 SOP Rev C.pdf
- 17:37, 9 March 2023 Barreraz talk contribs created page File:EB-1 Operation Instructions.pdf
- 17:37, 9 March 2023 Barreraz talk contribs uploaded File:EB-1 Operation Instructions.pdf
- 14:55, 8 March 2023 Sawyer l talk contribs created page File:Oxford Cluster Tool Operating Instructions Rev B.pdf
- 14:55, 8 March 2023 Sawyer l talk contribs uploaded File:Oxford Cluster Tool Operating Instructions Rev B.pdf
- 10:26, 2 March 2023 Sawyer l talk contribs uploaded a new version of File:EB2 SOP Rev F.pdf
- 11:52, 27 February 2023 User account Plenvik talk contribs was created
- 14:37, 15 February 2023 Sawyer l talk contribs created page File:EB2 SOP Rev F.pdf
- 14:37, 15 February 2023 Sawyer l talk contribs uploaded File:EB2 SOP Rev F.pdf
- 11:30, 8 February 2023 Sawyer l talk contribs created page File:YES SOP Rev E.pdf
- 11:30, 8 February 2023 Sawyer l talk contribs uploaded File:YES SOP Rev E.pdf
- 15:18, 2 February 2023 User account Ffoong talk contribs was created
- 11:19, 1 February 2023 John d talk contribs created page Foong Fatt (initial page copied from Demis D John) Tag: Visual edit: Switched
- 10:00, 31 January 2023 Hopkins a talk contribs created page File:DektakXT Operating Procedure.pdf (DektakXT SOP)
- 10:00, 31 January 2023 Hopkins a talk contribs uploaded File:DektakXT Operating Procedure.pdf (DektakXT SOP)
- 16:34, 25 January 2023 Hopkins a talk contribs moved page Step Profilometer (Dektak 6M) to Step Profilometer (DektakXT)
- 12:46, 20 January 2023 John d talk contribs created page File:Oxford-ICP-Etch Process Control Data Example.jpg
- 12:46, 20 January 2023 John d talk contribs uploaded File:Oxford-ICP-Etch Process Control Data Example.jpg
- 12:34, 20 January 2023 John d talk contribs created page File:ICP2 Process Control Data Example.jpg
- 12:34, 20 January 2023 John d talk contribs uploaded File:ICP2 Process Control Data Example.jpg
- 12:16, 20 January 2023 John d talk contribs created page File:ICP1 Process Control Data Example.jpg
- 12:16, 20 January 2023 John d talk contribs uploaded File:ICP1 Process Control Data Example.jpg
- 12:06, 20 January 2023 John d talk contribs created page File:FL-ICP Process Control Data Example.jpg
- 12:06, 20 January 2023 John d talk contribs uploaded File:FL-ICP Process Control Data Example.jpg
- 21:16, 19 January 2023 John d talk contribs changed group membership for Mehalana v from (none) to administrator and staff (Nanofab IT staff 2022-09)
- 16:05, 19 January 2023 User account Mehalana v talk contribs was created
- 14:42, 18 January 2023 User account Odabasi talk contribs was created
- 13:15, 17 January 2023 User account Ackerjames d talk contribs was created
- 09:52, 12 January 2023 Noahdutra talk contribs created page File:Cs pan1 011123 002.jpg
- 09:52, 12 January 2023 Noahdutra talk contribs uploaded File:Cs pan1 011123 002.jpg
- 09:52, 12 January 2023 Noahdutra talk contribs created page File:30D pan1 011123 002.jpg
- 09:52, 12 January 2023 Noahdutra talk contribs uploaded File:30D pan1 011123 002.jpg
- 09:48, 12 January 2023 Noahdutra talk contribs created page File:30D oxford 011123 002.jpg
- 09:48, 12 January 2023 Noahdutra talk contribs uploaded File:30D oxford 011123 002.jpg
- 09:45, 12 January 2023 Noahdutra talk contribs created page File:Cs oxford 011123 002.jpg
- 09:45, 12 January 2023 Noahdutra talk contribs uploaded File:Cs oxford 011123 002.jpg
- 15:02, 11 January 2023 Thibeault talk contribs created page File:Orientation Questionnaire.docx (To link users to orientation questionnaire)
- 15:02, 11 January 2023 Thibeault talk contribs uploaded File:Orientation Questionnaire.docx (To link users to orientation questionnaire)
- 13:14, 11 January 2023 Noahdutra talk contribs created page File:Cs pan2 011123 002.jpg
- 13:14, 11 January 2023 Noahdutra talk contribs uploaded File:Cs pan2 011123 002.jpg
- 13:14, 11 January 2023 Noahdutra talk contribs created page File:30 pan2 011123 002.jpg
- 13:14, 11 January 2023 Noahdutra talk contribs uploaded File:30 pan2 011123 002.jpg
- 15:03, 9 January 2023 Noahdutra talk contribs created page File:CS FICP 010923 003.jpg
- 15:03, 9 January 2023 Noahdutra talk contribs uploaded File:CS FICP 010923 003.jpg
- 15:02, 9 January 2023 Noahdutra talk contribs created page File:30D FICP 010923 002.jpg
- 15:02, 9 January 2023 Noahdutra talk contribs uploaded File:30D FICP 010923 002.jpg
- 08:38, 7 January 2023 User account Opremcak talk contribs was created
- 15:29, 3 January 2023 John d talk contribs created page File:MA6-FrontBack AlignMarks only.gds (CAD File for front/back alignment marks on Contact Aligner)
- 15:29, 3 January 2023 John d talk contribs uploaded File:MA6-FrontBack AlignMarks only.gds (CAD File for front/back alignment marks on Contact Aligner)
- 15:26, 3 January 2023 John d talk contribs created page File:Contact-AlignFront.gds (CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1")
- 15:26, 3 January 2023 John d talk contribs uploaded File:Contact-AlignFront.gds (CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1")
- 15:25, 3 January 2023 John d talk contribs created page File:EBL-GlobalMulti NEG.gds (CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1")
- 15:25, 3 January 2023 John d talk contribs uploaded File:EBL-GlobalMulti NEG.gds (CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1")
- 15:23, 3 January 2023 John d talk contribs created page File:EBL-GlobalMulti POS.gds (EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1")
- 15:23, 3 January 2023 John d talk contribs uploaded File:EBL-GlobalMulti POS.gds (EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1")
- 15:22, 3 January 2023 John d talk contribs created page File:GCA stepper align.gds (GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1")
- 15:22, 3 January 2023 John d talk contribs uploaded File:GCA stepper align.gds (GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1")
- 15:09, 16 December 2022 Noahdutra talk contribs created page File:CS FICP 121422 002.jpg
- 15:09, 16 December 2022 Noahdutra talk contribs uploaded File:CS FICP 121422 002.jpg
- 15:09, 16 December 2022 Noahdutra talk contribs created page File:30D FICP 121422 002.jpg
- 15:09, 16 December 2022 Noahdutra talk contribs uploaded File:30D FICP 121422 002.jpg
- 15:07, 16 December 2022 Noahdutra talk contribs created page File:CS FICP 120922 002.jpg
- 15:07, 16 December 2022 Noahdutra talk contribs uploaded File:CS FICP 120922 002.jpg
- 15:06, 16 December 2022 Noahdutra talk contribs created page File:30D FICP 120922 002.jpg
- 15:06, 16 December 2022 Noahdutra talk contribs uploaded File:30D FICP 120922 002.jpg
- 15:02, 16 December 2022 Noahdutra talk contribs created page File:CS pan1 121422 002.jpg
- 15:02, 16 December 2022 Noahdutra talk contribs uploaded File:CS pan1 121422 002.jpg
- 15:01, 16 December 2022 Noahdutra talk contribs created page File:30D pan1 121422 002.jpg
- 15:01, 16 December 2022 Noahdutra talk contribs uploaded File:30D pan1 121422 002.jpg
- 14:58, 16 December 2022 Noahdutra talk contribs created page File:CS pan1 120922 002.jpg
- 14:58, 16 December 2022 Noahdutra talk contribs uploaded File:CS pan1 120922 002.jpg
- 14:58, 16 December 2022 Noahdutra talk contribs created page File:30D pan1 120922 002.jpg
- 14:58, 16 December 2022 Noahdutra talk contribs uploaded File:30D pan1 120922 002.jpg
- 14:50, 16 December 2022 Noahdutra talk contribs created page File:CS pan2 121522 002.jpg
- 14:50, 16 December 2022 Noahdutra talk contribs uploaded File:CS pan2 121522 002.jpg
- 14:49, 16 December 2022 Noahdutra talk contribs created page File:30D pan2 121522 002.jpg
- 14:49, 16 December 2022 Noahdutra talk contribs uploaded File:30D pan2 121522 002.jpg
- 14:47, 16 December 2022 Noahdutra talk contribs created page File:CS pan2 120922 002.jpg
- 14:47, 16 December 2022 Noahdutra talk contribs uploaded File:CS pan2 120922 002.jpg
- 14:46, 16 December 2022 Noahdutra talk contribs created page File:30D pan2 120922 002.jpg
- 14:46, 16 December 2022 Noahdutra talk contribs uploaded File:30D pan2 120922 002.jpg
- 14:42, 16 December 2022 Noahdutra talk contribs created page File:30D oxford 121422 002.jpg
- 14:42, 16 December 2022 Noahdutra talk contribs uploaded File:30D oxford 121422 002.jpg
- 14:42, 16 December 2022 Noahdutra talk contribs created page File:CS oxford 121422 002.jpg
- 14:42, 16 December 2022 Noahdutra talk contribs uploaded File:CS oxford 121422 002.jpg
- 00:23, 16 December 2022 John d talk contribs created page E-Beam 5 (Plasys) (inital page and descriptions) Tag: Visual edit: Switched
- 11:34, 6 December 2022 John d talk contribs created page File:UCSB ASML DUV Stepper - Programming Worksheet.pptx (Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet.)
- 11:34, 6 December 2022 John d talk contribs uploaded File:UCSB ASML DUV Stepper - Programming Worksheet.pptx (Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet.)
- 16:19, 5 December 2022 Thibeault talk contribs created page File:FacilityPresentation.pdf
- 16:19, 5 December 2022 Thibeault talk contribs uploaded File:FacilityPresentation.pdf
- 16:07, 5 December 2022 Thibeault talk contribs created page File:CA Usage Map 2006-2018.png
- 16:07, 5 December 2022 Thibeault talk contribs uploaded File:CA Usage Map 2006-2018.png
- 16:00, 5 December 2022 Thibeault talk contribs deleted page File:CA Usage Map 2006-2018.png
- 15:59, 5 December 2022 Thibeault talk contribs created page File:CA Usage Map 2006-2018.png
- 15:59, 5 December 2022 Thibeault talk contribs uploaded File:CA Usage Map 2006-2018.png
- 15:59, 5 December 2022 Thibeault talk contribs deleted page File:CA Usage Map 2006-2018.png
- 15:57, 5 December 2022 Thibeault talk contribs uploaded a new version of File:CA Usage Map 2006-2018.png
- 15:54, 5 December 2022 Thibeault talk contribs created page File:Yearly Users by Affiliation Through 2018.png
- 15:54, 5 December 2022 Thibeault talk contribs uploaded File:Yearly Users by Affiliation Through 2018.png
- 15:52, 5 December 2022 Thibeault talk contribs deleted page File:Yearly Users by Affiliation Through 2018.png
- 15:51, 5 December 2022 Thibeault talk contribs deleted page File:Yearly Users by Affiliation Through 2018.png (Deleted old revision 20221205224902!Yearly_Users_by_Affiliation_Through_2018.png)
- 15:49, 5 December 2022 Thibeault talk contribs reverted File:Yearly Users by Affiliation Through 2018.png to an old version (Reverted to version as of 15:50, 18 January 2019 (PST))
- 15:48, 5 December 2022 Thibeault talk contribs uploaded a new version of File:Yearly Users by Affiliation Through 2018.png
- 12:14, 1 December 2022 John d talk contribs uploaded a new version of File:AXP4000pb-Datasheet.pdf (New datasheet, actually the "addiitonal information" sheet from Microchem Includes spin curves for ALL 4000 series PR's. from here: https://www.microchemicals.com/products/photoresists/az_p4110.html)
- 12:29, 23 November 2022 Sawyer l talk contribs created page File:ADT SOP Rev G.pdf
- 12:29, 23 November 2022 Sawyer l talk contribs uploaded File:ADT SOP Rev G.pdf
- 18:42, 21 November 2022 Noahdutra talk contribs created page File:CS oxford 111822 002.jpg
- 18:42, 21 November 2022 Noahdutra talk contribs uploaded File:CS oxford 111822 002.jpg
- 18:41, 21 November 2022 Noahdutra talk contribs created page File:30D oxford 111822 002.jpg
- 18:41, 21 November 2022 Noahdutra talk contribs uploaded File:30D oxford 111822 002.jpg
- 18:33, 21 November 2022 Noahdutra talk contribs created page File:CS unaxis 111822 003.jpg
- 18:33, 21 November 2022 Noahdutra talk contribs uploaded File:CS unaxis 111822 003.jpg
- 18:33, 21 November 2022 Noahdutra talk contribs created page File:30D unaxis 111822 002.jpg
- 18:33, 21 November 2022 Noahdutra talk contribs uploaded File:30D unaxis 111822 002.jpg
- 18:26, 21 November 2022 Noahdutra talk contribs created page File:CS pan2 111822 002.jpg
- 18:26, 21 November 2022 Noahdutra talk contribs uploaded File:CS pan2 111822 002.jpg
- 18:26, 21 November 2022 Noahdutra talk contribs created page File:30D pan2 111822 002.jpg
- 18:26, 21 November 2022 Noahdutra talk contribs uploaded File:30D pan2 111822 002.jpg
- 18:20, 21 November 2022 Noahdutra talk contribs created page File:CS pan1 111822 002.jpg
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- 18:09, 21 November 2022 Noahdutra talk contribs uploaded File:30D FICP 111822 002.jpg
- 13:52, 20 November 2022 John d talk contribs created page Vraj Mehalana (Added contact info & basic info guesses) Tag: Visual edit: Switched
- 18:21, 14 November 2022 Noahdutra talk contribs created page File:CS unaxis 111122 002.jpg
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- 10:51, 28 October 2022 Noahdutra talk contribs created page File:CS oxford 102422 002.jpg
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- 15:21, 27 October 2022 John d talk contribs moved page Ellipsometer (Woolam) - Measuring thin metals with oxide pre-measurement to Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement without leaving a redirect (Woollam misspelled as "woolam")
- 15:20, 27 October 2022 John d talk contribs created page Ellipsometer (Woolam) - Measuring thin metals with oxide pre-measurement (pasted Demis' instructions) Tag: Visual edit
- 20:52, 21 October 2022 Noahdutra talk contribs created page File:CS pan2 102122 002.jpg
- 20:52, 21 October 2022 Noahdutra talk contribs uploaded File:CS pan2 102122 002.jpg
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- 17:03, 18 October 2022 John d talk contribs created page Template:Tool2test (pasted from tool2)
- 13:25, 14 October 2022 Noahdutra talk contribs created page File:30D pan2 101022 002.jpg
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- 11:36, 7 October 2022 Noahdutra talk contribs created page File:45D Pan2o 092622 002.jpg
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- 10:37, 7 October 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev L (LS).docx.pdf
- 10:37, 7 October 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev L (LS).docx.pdf
- 23:41, 4 October 2022 John d talk contribs created page Nanofab Job Postings (linked to UCSB Jobs pages, instructios, listed Process Technician position) Tag: Visual edit