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- 15:27, 14 September 2021 diff hist -281 Template:Announcements →Stepper 1: Maintenance 9/16th
- 15:27, 14 September 2021 diff hist -369 Template:Announcements →Stepper 2: Maintenance 9/13th
- 10:02, 14 September 2021 diff hist +4 m Staff List →Equipment Group Tag: Visual edit
- 10:01, 14 September 2021 diff hist +218 N Bill Millerski Add Page for Bill Millerski
- 09:56, 14 September 2021 diff hist +76 Staff List Add Bill Millerski Tag: Visual edit
- 16:42, 13 September 2021 diff hist +12 m Staff List →Process Group Tag: Visual edit
- 14:59, 31 August 2021 diff hist -5,646 Template:News saved old news and deleted older news from this feed
- 14:58, 31 August 2021 diff hist +9,033 N Template:News 20210831 Created page with "<startfeed /> <!---feedBurner name="UCSBNanofab-NewsFeed" /--> <!-- Description of the RSS feed --> ''News from the U.C. Santa Barbara Nanofabrication Facility.'' <!-- these c..." current
- 11:31, 31 August 2021 diff hist -236 Template:Announcements
- 14:12, 4 August 2021 diff hist +15 m COVID-19 User Policies Tag: Visual edit
- 09:35, 29 June 2021 diff hist +56 m Lab Rules →Hotplate use Tag: Visual edit
- 09:33, 29 June 2021 diff hist +75 m Lab Rules →Rules and allocation Tag: Visual edit
- 09:33, 29 June 2021 diff hist +1,182 Lab Rules →Wet Benches: policy changes on glassware collection Tag: Visual edit
- 09:30, 29 June 2021 diff hist +473 m Lab Rules →Lab Suspensions Tag: Visual edit
- 09:26, 29 June 2021 diff hist +1,151 Lab Rules →Rules and allocation: added language for fees for retrieving boxes Tag: Visual edit
- 14:15, 24 June 2021 diff hist +42 Template:Announcements →New COVID Protocols
- 14:08, 24 June 2021 diff hist -9 m COVID-19 User Policies →NanoFab Policies Tag: Visual edit
- 14:07, 24 June 2021 diff hist -48 m COVID-19 User Policies →NanoFab Policies: minor Tag: Visual edit
- 14:06, 24 June 2021 diff hist -336 COVID-19 User Policies →Announcements: updated Tag: Visual edit
- 14:03, 24 June 2021 diff hist +98 COVID-19 User Policies →Policy Updates Tag: Visual edit
- 14:02, 24 June 2021 diff hist 0 File:User Protocols Coronavirus 2020-09-14-1.pdf Thibeault uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf current
- 12:01, 15 June 2021 diff hist 0 File:User Protocols Coronavirus 2020-09-14-1.pdf Thibeault uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf
- 14:11, 7 June 2021 diff hist +724 m Lab Rules →ASML Mask Storage: more small changes Tag: Visual edit
- 13:55, 7 June 2021 diff hist +842 m Lab Rules →Procedure for the Use and Handling of Precious Metals: more minor changes and clarifications Tag: Visual edit
- 13:32, 7 June 2021 diff hist +282 m Lab Rules →Procedure for the Use and Handling of Precious Metals Tag: Visual edit
- 13:30, 7 June 2021 diff hist +3 m Lab Rules →User Responsibility for Receiving Communications Tag: Visual edit
- 13:27, 7 June 2021 diff hist +1,210 m Lab Rules →Machine error response and reporting issues: more minor changes/clarifications Tag: Visual edit
- 13:19, 7 June 2021 diff hist +2,774 m Lab Rules →Photoresist Coating or Spinning: various minor changes and clarifications Tag: Visual edit
- 13:00, 7 June 2021 diff hist -926 m Lab Rules →General Information: minor changes Tag: Visual edit
- 15:56, 17 May 2021 diff hist -2 m Services Reverted edits by Thibeault (talk) to last revision by John d Tag: Rollback
- 14:38, 14 May 2021 diff hist +2 m Services →Industry and non-U.C. Academic Institutions Tag: Visual edit
- 15:23, 13 May 2021 diff hist +281 m Template:Announcements added New COVID protocol announcement
- 15:19, 13 May 2021 diff hist 0 File:User Protocols Coronavirus 2020-09-14-1.pdf Thibeault uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf
- 15:17, 13 May 2021 diff hist -12 m COVID-19 User Policies →Announcements Tag: Visual edit
- 15:16, 13 May 2021 diff hist -43 COVID-19 User Policies →Announcements
- 15:15, 13 May 2021 diff hist -231 m COVID-19 User Policies →NanoFab Policies: new policy adjustments Tag: Visual edit
- 10:09, 16 April 2021 diff hist -179 m Atomic Layer Deposition Recipes Removed statement on cycle time for plasma versus thermal deposition. Tag: Visual edit
- 13:06, 11 December 2020 diff hist +132 Lab Rules →Transfer to Small(Personal) Bottles: Explicitly added to not allow large resist bottles to warm up. Tag: Visual edit
- 22:39, 18 November 2020 diff hist +3 m Template:Announcements Added closure for Thanksgiving
- 22:38, 18 November 2020 diff hist +296 Template:Announcements
- 12:13, 9 November 2020 diff hist 0 File:COVID19 ESB Building User Self Admittance Protocol v2.pdf Thibeault uploaded a new version of File:COVID19 ESB Building User Self Admittance Protocol v2.pdf
- 12:12, 9 November 2020 diff hist 0 File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf Thibeault uploaded a new version of File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf
- 12:11, 9 November 2020 diff hist -106 m COVID-19 User Policies →NanoFab Policies Tag: Visual edit
- 12:09, 9 November 2020 diff hist 0 File:User Protocols Coronavirus 2020-09-14-1.pdf Thibeault uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf
- 11:13, 17 September 2020 diff hist 0 File:User Protocols Coronavirus 2020-09-14-1.pdf Thibeault uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf
- 10:47, 30 March 2020 diff hist -92 Lithography Recipes
- 14:44, 26 March 2020 diff hist +550 Brian Thibeault →About current Tag: Visual edit
- 14:22, 26 March 2020 diff hist +13 Template:Announcements →Unaxis ICP-PECVD
- 14:20, 26 March 2020 diff hist -76 Template:Announcements →ASML Maintenance: March 30th
- 16:42, 21 February 2020 diff hist 0 N File:2000 pixel mkids.pdf current
- 16:42, 21 February 2020 diff hist +152 Tech Talks Seminar Series
- 12:09, 20 February 2020 diff hist +95 Tool List
- 15:22, 13 February 2020 diff hist +10 Contact Aligner (SUSS MA-6) →About
- 12:34, 30 January 2020 diff hist -98 Atomic Layer Deposition (Oxford FlexAL) →About
- 17:59, 15 January 2020 diff hist -130 Lab Rules removed link to ehs on LHAT section... link was broken and is not needed here in any case. We provide all PPE for users in our lab. Tag: Visual edit
- 11:51, 4 December 2019 diff hist 0 Brian Thibeault
- 16:10, 27 November 2019 diff hist +930 PubList2018 →External Users - Journal Publications: Add pubs to list current Tag: Visual edit
- 15:33, 27 November 2019 diff hist +5 Template:News →TechTalk: Dr. Garett Cole & Dr. Songtao Liu
- 15:31, 27 November 2019 diff hist +144 Template:News →TechTalk: Dr. Garett Cole & Dr. Songtao Liu
- 15:24, 27 November 2019 diff hist 0 N File:TechTalk20191205.jpg current
- 15:24, 27 November 2019 diff hist +116 Tech Talks Seminar Series
- 17:03, 26 November 2019 diff hist +128 Template:Announcements
- 15:17, 30 October 2019 diff hist +17 Electronics Presentations current
- 15:17, 30 October 2019 diff hist +134 Electronics Presentations
- 15:17, 30 October 2019 diff hist -16 Tech Talks Seminar Series →Presented Slides
- 15:16, 30 October 2019 diff hist 0 N File:N-Polar HEMTs mm-Wave.pdf current
- 15:15, 30 October 2019 diff hist +158 Tech Talks Seminar Series →Thursday, Oct. 10, 12pm, ESB1001, Light Lunch Provided
- 10:05, 29 October 2019 diff hist -19 Oven 4 (Thermo-Fisher HeraTherm) →Specifications
- 09:04, 24 October 2019 diff hist 0 N File:Bowers Group Highlights 2019.pdf current
- 09:04, 24 October 2019 diff hist +85 Photonics Presentations current
- 15:07, 21 October 2019 diff hist +121 Photonics Presentations
- 15:06, 21 October 2019 diff hist 0 N File:IR Imaging and Laser Sensing.pdf current
- 14:14, 11 October 2019 diff hist 0 N File:On Chip Hybrid Silicon Quantum Dot Comb Laser With 14 Error Free Channels.pdf current
- 14:14, 11 October 2019 diff hist +198 Photonics Presentations
- 14:00, 11 October 2019 diff hist 0 N File:Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf current
- 13:59, 11 October 2019 diff hist -1 THz Physics Presentations current
- 13:59, 11 October 2019 diff hist +187 N THz Physics Presentations Created page with "*{{File|Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf|Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer - Changyun Yoo - Sherwin Group - UCSB -..."
- 13:54, 11 October 2019 diff hist +51 Research →Research Presentations
- 15:17, 10 October 2019 diff hist 0 N File:Memory-Based Neuromorphic Hardware for Advanced Neural Network Models.pdf current
- 15:15, 10 October 2019 diff hist +207 Electronics Presentations
- 15:05, 10 October 2019 diff hist +177 N Electronics Presentations Created page with "*{{File|THz Transistors and Template Assisted Selective Epitaxy.pdf|THz Transistors and Template Assisted Selective Epitaxy - Brian Markman - Rodwell Group - UCSB - Sept. 2019}}"
- 15:04, 10 October 2019 diff hist +51 Research →Research Presentations
- 15:02, 10 October 2019 diff hist +128 Photonics Presentations
- 15:02, 10 October 2019 diff hist +141 Photonics Presentations
- 15:00, 10 October 2019 diff hist +164 N Photonics Presentations Created page with "*{{File|High Power PICs for Free Space.pdf|High Power Photonic Integrated Circuits for Free Space Communications - Hongwei Zhao - Klamkin Group - UCSB - Oct. 2019}}"
- 14:58, 10 October 2019 diff hist -9 Research →Research Presentations
- 17:29, 9 October 2019 diff hist +10 Research →Research Presentations
- 17:24, 9 October 2019 diff hist +7 Research →Research Presentations
- 17:22, 9 October 2019 diff hist +7 Research
- 17:21, 9 October 2019 diff hist 0 Research
- 10:09, 9 October 2019 diff hist 0 N File:High Power PICs for Free Space.pdf current
- 09:04, 9 October 2019 diff hist +253 Tech Talks Seminar Series
- 15:16, 8 October 2019 diff hist 0 N File:TechTalk20191010.jpg current
- 15:14, 8 October 2019 diff hist +91 Tech Talks Seminar Series
- 13:44, 20 September 2019 diff hist +35 Plasma Clean (YES EcoClean)
- 13:41, 20 September 2019 diff hist +199 Plasma Clean (YES EcoClean) added links Tag: Visual edit
- 17:33, 18 September 2019 diff hist -1 YES-150C-Various-Resists minor edit spelling Tag: Visual edit
- 17:33, 18 September 2019 diff hist +90 YES-SPR220-Various-Temps minor edit Tag: Visual edit
- 17:32, 18 September 2019 diff hist +93 YES-150C-Various-Resists minor edit Tag: Visual edit
- 17:29, 18 September 2019 diff hist -13 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean) Tag: Visual edit
- 17:28, 18 September 2019 diff hist 0 N File:YES-SPR220vsTemp.jpg current
- 17:28, 18 September 2019 diff hist +29 N YES-SPR220-Various-Temps Created page with "File:YES-SPR220vsTemp.jpg"
- 17:26, 18 September 2019 diff hist 0 N File:YES150CResists.jpg current
- 17:26, 18 September 2019 diff hist +27 N YES-150C-Various-Resists Created page with "File:YES150CResists.jpg"
- 17:22, 18 September 2019 diff hist +102 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean) Tag: Visual edit
- 17:00, 18 September 2019 diff hist +28 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean) Tag: Visual edit
- 21:33, 16 September 2019 diff hist -453 Sputtering Recipes Take Sputter 2 off of TOC list,but keep recipes on page at bottom Tag: Visual edit
- 21:31, 16 September 2019 diff hist 0 Sputtering Recipes
- 21:28, 16 September 2019 diff hist -3,952 Vacuum Deposition Recipes Delete Sputter1 and 2 Tag: Visual edit
- 21:27, 16 September 2019 diff hist -266 Dry Etching Recipes delete RIE1 Tag: Visual edit
- 21:26, 16 September 2019 diff hist -23 RIE Etching Recipes
- 21:23, 16 September 2019 diff hist 0 Dry Etching Recipes minor edit Tag: Visual edit
- 21:22, 16 September 2019 diff hist +38 Dry Etching Recipes minor change Tag: Visual edit
- 21:18, 16 September 2019 diff hist +72 Dry Etching Recipes
- 21:17, 16 September 2019 diff hist +61 Dry Etching Recipes lkink change Tag: Visual edit
- 21:13, 16 September 2019 diff hist +69 Oxygen Plasma System Recipes
- 21:11, 16 September 2019 diff hist +197 Dry Etching Recipes Tag: Visual edit: Switched
- 21:04, 16 September 2019 diff hist +974 N Plasma Clean (YES EcoClean) Created page with "{{tool|{{PAGENAME}} |picture=YES_EcoClean.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 5 |email=silva@ece.ucsb.edu |description = EcoClean As..."
- 20:59, 16 September 2019 diff hist +32 Tool List →Reactive Ion Etching (RIE)
- 20:55, 16 September 2019 diff hist 0 N File:TechTalk20190926.jpg current
- 20:54, 16 September 2019 diff hist +92 Tech Talks Seminar Series
- 16:09, 16 September 2019 diff hist 0 N File:THz Transistors and Template Assisted Selective Epitaxy.pdf current
- 16:07, 16 September 2019 diff hist +268 Tech Talks Seminar Series
- 21:46, 8 September 2019 diff hist -98 Tech Talks Seminar Series →Thursday, Sept. 5, 12pm, ESB1001, Light Lunch Provided
- 21:45, 8 September 2019 diff hist +99 Tech Talks Seminar Series →High Performance Lasers on Silicon
- 21:42, 8 September 2019 diff hist 0 N File:TechTalk20190912.jpg current
- 21:41, 8 September 2019 diff hist +92 Tech Talks Seminar Series
- 21:39, 8 September 2019 diff hist 0 N File:High Performance Lasers on Silicon Slides.pdf current
- 21:37, 8 September 2019 diff hist 0 N File:Semiconductor Supermirrors.pdf current
- 21:36, 8 September 2019 diff hist +75 Tech Talks Seminar Series
- 11:53, 6 September 2019 diff hist +44 Tech Talks Seminar Series →Thursday, Sept. 5, 12pm, ESB1001, Light Lunch Provided
- 11:47, 6 September 2019 diff hist +60 Tech Talks Seminar Series Tag: Visual edit: Switched
- 11:40, 6 September 2019 diff hist 0 MediaWiki:Sidebar
- 11:40, 6 September 2019 diff hist +39 MediaWiki:Sidebar
- 16:35, 5 September 2019 diff hist -10,709 PECVD Recipes →SiN deposition (Unaxis VLR): Delete obsolete recipes from page Tag: Visual edit
- 16:51, 3 September 2019 diff hist +32 PubList2018 formatting Tag: Visual edit
- 16:50, 3 September 2019 diff hist -19 PubList2018 formatting Tag: Visual edit
- 16:49, 3 September 2019 diff hist +39,512 PubList2018 Added all 2018 pub lists Tag: Visual edit
- 16:41, 3 September 2019 diff hist +38,474 N PubList2018 Added Publist2018 page Tag: Visual edit
- 16:17, 3 September 2019 diff hist +342 N Research Added Research Page Tag: Visual edit
- 14:16, 3 September 2019 diff hist +14 Lab Rules →Transporting Chemicals from bench to bench: minor sentence edit Tag: Visual edit
- 14:10, 3 September 2019 diff hist -78 m Lab Rules →Containers and Labeling: Small policy update for labeling of containers and for transporting of chemicals between benches. Tag: Visual edit
- 16:22, 29 August 2019 diff hist 0 N File:TechTalk20190905.jpg current
- 16:22, 29 August 2019 diff hist +92 N Tech Talks Seminar Series Add page for tech talk fliers
- 16:18, 29 August 2019 diff hist +48 Template:Links Adding link TechTalk Page
- 09:33, 31 July 2019 diff hist +69 Microscopes Added scope software link to documentation Tag: Visual edit
- 09:30, 31 July 2019 diff hist +292 m UCSB NanoFab Microscope Training →General Focusing: addition of language in multiple spots encouraging users to ALWAYS start with low magnification Tag: Visual edit
- 14:46, 23 July 2019 diff hist +404 Microscopes →Microscope #2: Nikon Optiphot 200 (Bay 7): Deleted Jenoptic references, added AM Scope refs and links. Still needs table for pixel calibtrations versus mag for each scope.... Tag: Visual edit
- 09:20, 10 July 2019 diff hist -127 Template:Announcements
- 08:08, 21 June 2019 diff hist -210 Template:Announcements
- 09:46, 18 April 2019 diff hist +126 Lab Rules →Chemical Storage: added clause to general chemical storage line Tag: Visual edit
- 09:41, 18 April 2019 diff hist +56 Lab Rules →Nanofab Paper: added clause on cardboard Tag: Visual edit
- 15:39, 2 April 2019 diff hist +635 Lab Rules →Containers and Labeling: added transporting open container policy Tag: Visual edit
- 15:58, 15 March 2019 diff hist -261 Template:Announcements →ASML DUV: PM March 12 to 15th
- 13:57, 8 March 2019 diff hist +10 Template:Announcements →ASML DUV: PM March 12 to 15th
- 17:23, 20 February 2019 diff hist 0 Stepper 3 (ASML DUV) bay number of stepper Tag: Visual edit
- 15:11, 30 January 2019 diff hist +88 m Usage Data and Statistics →External Use of Facility Tag: Visual edit
- 18:22, 29 January 2019 diff hist +72 Usage Data and Statistics →External Use of Facility
- 18:20, 29 January 2019 diff hist +53 m Usage Data and Statistics →External Use of Facility Tag: Visual edit
- 18:18, 29 January 2019 diff hist +307 Usage Data and Statistics →External Use of Facility: Added Ca map Tag: Visual edit
- 18:14, 29 January 2019 diff hist +54 Usage Data and Statistics →External Use of Facility
- 18:10, 29 January 2019 diff hist -96 m Usage Data and Statistics →External Use of Facility Tag: Visual edit
- 18:02, 29 January 2019 diff hist +441 Usage Data and Statistics Added usage map - US Tag: Visual edit
- 17:58, 29 January 2019 diff hist +95 N File:US Usage Map 2006-2018.png current
- 13:58, 25 January 2019 diff hist -318 m Brian Thibeault →Current Work Tag: Visual edit
- 13:44, 25 January 2019 diff hist +21 m Brian Thibeault →About
- 09:36, 25 January 2019 diff hist 0 m Usage Data and Statistics Tag: Visual edit
- 09:35, 25 January 2019 diff hist +11 m Usage Data and Statistics replaced graph Tag: Visual edit
- 09:34, 25 January 2019 diff hist +77 N File:2018 User Chart by Discipline.png current
- 17:21, 18 January 2019 diff hist 0 m Usage Data and Statistics →Numbers of Annual Users Tag: Visual edit
- 17:20, 18 January 2019 diff hist -1 m Usage Data and Statistics Tag: Visual edit
- 17:14, 18 January 2019 diff hist +34 m Usage Data and Statistics Tag: Visual edit
- 17:11, 18 January 2019 diff hist 0 m Usage Data and Statistics Tag: Visual edit
- 17:11, 18 January 2019 diff hist +1 m Usage Data and Statistics Tag: Visual edit
- 17:09, 18 January 2019 diff hist +770 Usage Data and Statistics Added usage graphs and text Tag: Visual edit
- 17:00, 18 January 2019 diff hist +57 N File:User Percentages by Discipline 2018.png current
- 13:00, 28 November 2018 diff hist -556 Template:Announcements change announcements
- 18:24, 27 November 2018 diff hist +8,444 N Stocked Chemical List Added table to stocked chemical list page Tag: Visual edit
- 18:21, 27 November 2018 diff hist +4 Chemical List →Inventory List: Added link to page for stocked chemcials Tag: Visual edit
- 10:52, 8 November 2018 diff hist 0 N File:DS-K101-304-Anti-Reflective-Coating.pdf current
- 15:54, 4 October 2018 diff hist -131 Chemical List →Material Safety Datasheets: delete old incomplete list link
- 15:51, 4 October 2018 diff hist +136 Chemical List →Material Safety Datasheets: test N-Z list
- 15:48, 4 October 2018 diff hist +136 Chemical List →Material Safety Datasheets: testing A-M folder
- 16:40, 26 September 2018 diff hist -261 Template:Announcements Updated status on CARY500, RIE5 and PECVD - deleted old announcements
- 09:19, 24 September 2018 diff hist 0 N File:Nanofab Policies Chemical Hygiene Plan 9 13 18.pdf current
- 09:18, 24 September 2018 diff hist 0 Lab Rules OLD 2018 Update Final Lab Policies Docment
- 09:55, 20 September 2018 diff hist +4 Lithography Recipes →Chemical Datasheets: changed DS-K101 to reflect new product number
- 09:43, 20 September 2018 diff hist +20 Template:Announcements Update RIE3 status
- 08:31, 18 September 2018 diff hist +318 Template:Announcements Added RIE3 and Sputter4 Issues
- 09:36, 8 September 2018 diff hist 0 N File:Nanofab Policies Chemical Hygiene Plan 8 31 18.pdf current
- 09:35, 8 September 2018 diff hist 0 Lab Rules OLD 2018 uploading new lab policy doc
- 08:36, 6 September 2018 diff hist 0 N File:BCB-rework.pdf current
- 08:36, 6 September 2018 diff hist +52 Lithography Recipes →Chemical Datasheets: Added BCB rework doc from DOW to list
- 17:37, 4 September 2018 diff hist -99 Chemical List - OLD 2018-09-05 →UNSORTED
- 17:29, 31 August 2018 diff hist +99 Chemical List - OLD 2018-09-05 Testing link to MSDS folder Tag: Visual edit
- 17:08, 21 August 2018 diff hist -14 m Template:Announcements →Ebeam#2: heater repair scheduled
- 17:06, 21 August 2018 diff hist -8 m Template:Announcements update EB2
- 08:03, 21 August 2018 diff hist -81 Wet Benches →General Information
- 11:09, 3 August 2018 diff hist -34,565 Lab Rules OLD 2018 deleted all except pdf. Old verion on _backup Tag: Visual edit
- 11:07, 3 August 2018 diff hist +35,139 N Lab Rules backup Created page with "For a printable PDF version of the Lab Rules, please '''CLICK HERE''' While working in the Nanofab, you are surr..." current
- 15:34, 7 June 2018 diff hist +90 Template:Announcements
- 14:22, 6 June 2018 diff hist -107 Template:Announcements
- 11:06, 4 June 2018 diff hist -101 Template:Announcements
- 14:52, 26 May 2018 diff hist -20 Template:Announcements
- 11:05, 26 May 2018 diff hist +200 Template:Announcements
- 10:41, 26 May 2018 diff hist +29 Template:Announcements
- 10:41, 26 May 2018 diff hist +168 Template:Announcements
- 10:38, 26 May 2018 diff hist -28 Template:Announcements
- 09:54, 25 May 2018 diff hist -30 Vacuum Deposition Recipes minor link edit sputter5 Tag: Visual edit
- 09:52, 25 May 2018 diff hist +19 m Vacuum Deposition Recipes link to sputter5 recipes Tag: Visual edit
- 09:49, 25 May 2018 diff hist -140 Sputtering Recipes
- 17:27, 24 May 2018 diff hist -34 Template:Announcements →Stepper #2: Up
- 17:25, 24 May 2018 diff hist -248 Template:Announcements →PECVD#2: Open Soon
- 16:49, 14 May 2018 diff hist +147 Vacuum Deposition Recipes Fixed ALD Links to proper headings Tag: Visual edit
- 16:44, 14 May 2018 diff hist +10 Vacuum Deposition Recipes Pt ALD link Tag: Visual edit
- 16:37, 10 May 2018 diff hist -404 Template:Announcements deleted old messaged, updated PECVD2
- 16:34, 10 May 2018 diff hist -95 Template:Announcements →PECVD#2: Down, Retraining required
- 11:46, 20 April 2018 diff hist -178 Template:Announcements
- 17:18, 19 April 2018 diff hist -731 Template:Announcements
- 17:16, 19 April 2018 diff hist -156 Template:Announcements
- 16:50, 19 April 2018 diff hist 0 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials) Tag: Visual edit
- 16:43, 19 April 2018 diff hist -80 ICP Etching Recipes →GaSb Etch (Unaxis VLR) Tag: Visual edit
- 14:35, 19 April 2018 diff hist 0 N File:BCB-adhesion.pdf current
- 14:34, 19 April 2018 diff hist +56 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 13:14, 19 April 2018 diff hist -5 m RIE 5 (PlasmaTherm) →About Tag: Visual edit
- 14:18, 3 April 2018 diff hist -56 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 14:16, 3 April 2018 diff hist +7 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 14:14, 3 April 2018 diff hist -57 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 14:12, 3 April 2018 diff hist +256 m E-Beam 1 (Sharon) →About Tag: Visual edit
- 14:10, 3 April 2018 diff hist +47 m E-Beam Evaporation Recipes →Materials Table (E-Beam #1) Tag: Visual edit
- 09:23, 29 March 2018 diff hist +4 Template:Announcements →ASML: Up
- 09:22, 29 March 2018 diff hist +2 Template:Announcements →ASML: Up
- 09:21, 29 March 2018 diff hist -89 Template:Announcements →ASML: Leveling Error
- 15:11, 17 January 2018 diff hist +67 Dry Etching Recipes
- 15:02, 17 January 2018 diff hist 0 N File:10-Si Etch Single Step Smooth Sidewall DSEIII.pdf current
- 15:02, 17 January 2018 diff hist 0 N File:10-Si Etch Bosch DSEIII.pdf current
- 15:01, 17 January 2018 diff hist +144 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)
- 17:32, 11 December 2017 diff hist -19 Template:Announcements →GCA 6300 Stepper #1
- 17:31, 11 December 2017 diff hist -28 Template:Announcements →Announcements
- 13:07, 11 December 2017 diff hist -32 Template:Announcements →Announcements
- 15:46, 28 November 2017 diff hist 0 N Category:Pages generating RSS feeds Created blank page current
- 11:02, 28 November 2017 diff hist -30 Template:News
- 11:00, 28 November 2017 diff hist -10 Template:News
- 10:58, 28 November 2017 diff hist -29 Template:News
- 10:56, 28 November 2017 diff hist -5 Template:News
- 15:20, 6 November 2017 diff hist +116 Dry Etching Recipes
- 15:18, 6 November 2017 diff hist +10 Dry Etching Recipes
- 15:16, 6 November 2017 diff hist +98 Dry Etching Recipes
- 15:13, 6 November 2017 diff hist -5 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)
- 15:12, 6 November 2017 diff hist -1 ICP Etching Recipes
- 15:10, 6 November 2017 diff hist +142 ICP Etching Recipes
- 15:03, 6 November 2017 diff hist +56 Dry Etching Recipes Tag: Visual edit: Switched
- 10:45, 6 November 2017 diff hist 0 DSEIII (PlasmaTherm/Deep Silicon Etcher)
- 10:43, 6 November 2017 diff hist +2,424 N DSEIII (PlasmaTherm/Deep Silicon Etcher) Created page with "{{tool|{{PAGENAME}} |picture=DSEIII.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = Deep Silicon..."
- 10:34, 6 November 2017 diff hist +47 Tool List →Dry Etch
- 11:18, 10 October 2017 diff hist -9 Tube Furnace (Tystar 8300) →See Also
- 17:04, 29 September 2017 diff hist +66 Template:News
- 16:52, 29 September 2017 diff hist -8 MediaWiki:Sidebar
- 16:51, 29 September 2017 diff hist +15 MediaWiki:Sidebar
- 16:49, 29 September 2017 diff hist +70 MediaWiki:Sidebar
- 16:32, 29 September 2017 diff hist +1 Stepper 3 (ASML DUV) →About
- 10:47, 22 September 2017 diff hist -26 Template:Links
- 17:01, 21 September 2017 diff hist -25 m Vacuum Deposition Recipes Tag: Visual edit
- 17:01, 21 September 2017 diff hist -50 m Vacuum Deposition Recipes Tag: Visual edit
- 11:30, 8 September 2017 diff hist +4 Lithography Recipes →Chemical Datasheets Tag: Visual edit: Switched
- 11:26, 8 September 2017 diff hist -1 Lithography Recipes Tag: Visual edit: Switched
- 11:18, 8 September 2017 diff hist -71 Lithography Recipes →Chemical Datasheets
- 11:17, 8 September 2017 diff hist 0 File:UV26-Positive-Resist-Datasheet.pdf Thibeault uploaded a new version of File:UV26-Positive-Resist-Datasheet.pdf current
- 11:16, 8 September 2017 diff hist 0 N File:UV26-Positive-Resist-Datasheet.pdf
- 11:16, 8 September 2017 diff hist +53 Lithography Recipes →Chemical Datasheets
- 11:10, 8 September 2017 diff hist 0 m Vacuum Deposition Recipes Tag: Visual edit: Switched
- 14:48, 12 June 2017 diff hist +52 Lithography Recipes →Photolithography Recipes
- 14:37, 12 June 2017 diff hist 0 N File:NR9-1000PY-AS200-stepperrecipe.pdf current
- 14:36, 12 June 2017 diff hist +319 Stepper Recipes
- 14:31, 12 July 2016 diff hist 0 N File:Survey052016.pdf current
- 14:30, 12 July 2016 diff hist +20 Template:News
- 14:28, 12 July 2016 diff hist +51 Template:News
- 16:59, 3 June 2016 diff hist +40 ICP Etch 2 (Panasonic E626I) →Detailed Specifications
- 16:58, 3 June 2016 diff hist +92 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications
- 16:55, 3 June 2016 diff hist 0 ICP Etching Recipes
- 16:52, 3 June 2016 diff hist 0 N File:10-Si Etch Bosch Release DRIE.pdf current
- 16:51, 3 June 2016 diff hist +114 ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch)
- 14:33, 3 June 2016 diff hist -47 Stepper 3 (ASML DUV) →About
- 14:31, 3 June 2016 diff hist +359 Stepper 3 (ASML DUV) →About
- 14:25, 3 June 2016 diff hist +318 Stepper 3 (ASML DUV) →About
- 11:51, 3 June 2016 diff hist 0 N File:ASML Job Set-Up Guide simple v1.pdf current
- 11:49, 3 June 2016 diff hist +96 Stepper 3 (ASML DUV) →Operating Procedures
- 12:01, 22 February 2016 diff hist 0 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:36, 22 February 2016 diff hist +130 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:37, 16 December 2015 diff hist +60 Dry Etching Recipes
- 15:36, 16 December 2015 diff hist +76 Dry Etching Recipes
- 15:36, 16 December 2015 diff hist +60 Dry Etching Recipes
- 15:35, 16 December 2015 diff hist -2 Other Dry Etching Recipes
- 15:35, 16 December 2015 diff hist +10 Other Dry Etching Recipes
- 15:34, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:33, 16 December 2015 diff hist +92 Dry Etching Recipes
- 15:33, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:32, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:19, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:18, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:18, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:17, 16 December 2015 diff hist +52 Dry Etching Recipes
- 15:16, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:15, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:14, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:14, 16 December 2015 diff hist 0 Dry Etching Recipes
- 15:13, 16 December 2015 diff hist +2 Dry Etching Recipes
- 18:12, 15 December 2015 diff hist +32 Vacuum Deposition Recipes
- 18:10, 15 December 2015 diff hist -16 Vacuum Deposition Recipes
- 18:09, 15 December 2015 diff hist +12 Vacuum Deposition Recipes
- 18:06, 15 December 2015 diff hist -3 Vacuum Deposition Recipes
- 18:05, 15 December 2015 diff hist +6 Vacuum Deposition Recipes
- 18:03, 15 December 2015 diff hist -33 Vacuum Deposition Recipes
- 18:02, 15 December 2015 diff hist -35 Vacuum Deposition Recipes
- 18:01, 15 December 2015 diff hist 0 Vacuum Deposition Recipes
- 18:00, 15 December 2015 diff hist -36 Vacuum Deposition Recipes
- 17:59, 15 December 2015 diff hist -35 Vacuum Deposition Recipes
- 17:58, 15 December 2015 diff hist +1 Vacuum Deposition Recipes
- 17:55, 15 December 2015 diff hist +243 Vacuum Deposition Recipes
- 17:52, 15 December 2015 diff hist +23 Vacuum Deposition Recipes
- 17:51, 15 December 2015 diff hist +46 Vacuum Deposition Recipes
- 17:50, 15 December 2015 diff hist +8 Vacuum Deposition Recipes
- 17:49, 15 December 2015 diff hist +4 Vacuum Deposition Recipes
- 17:36, 15 December 2015 diff hist +117 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL)
- 17:34, 15 December 2015 diff hist +164 Vacuum Deposition Recipes
- 17:13, 15 December 2015 diff hist 0 Vacuum Deposition Recipes
- 17:12, 15 December 2015 diff hist +98 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 17:08, 15 December 2015 diff hist 0 N File:Fe and Co Films using Sputter-3.pdf current
- 17:07, 15 December 2015 diff hist +322 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:52, 15 December 2015 diff hist -29 Lithography Recipes →Low-K Dielectric
- 16:51, 15 December 2015 diff hist -43 Lithography Recipes →Chemical Datasheets
- 16:31, 15 December 2015 diff hist 0 N File:DUV42P-Anti-Reflective-Coating.pdf current
- 16:30, 15 December 2015 diff hist -2 Lithography Recipes →Chemical Datasheets
- 16:29, 15 December 2015 diff hist +100 Lithography Recipes →Chemical Datasheets
- 15:53, 11 December 2015 diff hist +22 PECVD Recipes →SiN (100% SiH4 )
- 15:53, 11 December 2015 diff hist +23 PECVD Recipes →SiN (2% SiH4 - No-Ar - Extra N2)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4)
- 15:13, 11 December 2015 diff hist +64 Lithography Recipes →Low-K Dielectric
- 15:11, 11 December 2015 diff hist -27 Lithography Recipes →Low-K Dielectric
- 15:08, 11 December 2015 diff hist +18 Lithography Recipes →Low-K Dielectric
- 15:05, 11 December 2015 diff hist +9 Lithography Recipes →Low-K Dielectric
- 15:01, 11 December 2015 diff hist +43 Lithography Recipes →Low-K Dielectric
- 14:56, 11 December 2015 diff hist +9 Lithography Recipes →Chemical Datasheets
- 14:55, 11 December 2015 diff hist +10 Lithography Recipes →Chemical Datasheets
- 14:52, 11 December 2015 diff hist +43 ICP Etch 2 (Panasonic E626I) →Detailed Specifications
- 14:51, 11 December 2015 diff hist +122 ICP Etch 2 (Panasonic E626I) →About
- 09:15, 27 August 2015 diff hist +163 Lithography Recipes →Photolithography Recipes
- 09:13, 27 August 2015 diff hist +1 Lithography Recipes →Chemical Datasheets
- 09:12, 27 August 2015 diff hist 0 N File:PEK-162-Positive-Resist-Datasheet.pdf current
- 09:11, 27 August 2015 diff hist +284 Lithography Recipes →Chemical Datasheets
- 08:45, 27 August 2015 diff hist +25 Dry Etching Recipes
- 16:23, 26 August 2015 diff hist -16 Lithography Recipes →Chemical Datasheets
- 16:20, 26 August 2015 diff hist +102 Lithography Recipes →Photolithography Recipes
- 16:02, 26 August 2015 diff hist +54 Lithography Recipes →Chemical Datasheets
- 16:01, 26 August 2015 diff hist 0 N File:NR9-6000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-3000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-1000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist +144 Lithography Recipes →Chemical Datasheets
- 15:55, 26 August 2015 diff hist +5 Lithography Recipes →Photolithography Recipes
- 15:54, 26 August 2015 diff hist +5 Lithography Recipes →Chemical Datasheets
- 15:52, 26 August 2015 diff hist +311 Template:FeaturedArticle
- 15:40, 26 August 2015 diff hist -103 Template:News
- 12:12, 26 August 2015 diff hist +340 Vacuum Deposition Recipes
- 12:07, 26 August 2015 diff hist +520 Vacuum Deposition Recipes
- 14:43, 10 July 2015 diff hist -44 E-Beam 2 (Custom) →About
- 14:40, 10 July 2015 diff hist -33 Stepper 2 (AutoStep 200)
- 14:39, 10 July 2015 diff hist -31 Stepper 1 (GCA 6300)
- 14:38, 10 July 2015 diff hist -2 Chemical-Mechanical Polisher (Logitech)
- 14:26, 10 July 2015 diff hist +206 Deep UV Optical Microscope (Olympus) →About
- 14:25, 10 July 2015 diff hist +196 Deep UV Optical Microscope (Olympus)
- 14:23, 10 July 2015 diff hist +246 Fluorescence Microscope (Olympus MX51) →About
- 14:21, 10 July 2015 diff hist -3 Surface Analysis (KLA/Tencor Surfscan)
- 14:20, 10 July 2015 diff hist +149 Surface Analysis (KLA/Tencor Surfscan) →About
- 14:18, 10 July 2015 diff hist +110 SEM Sample Coater (Hummer)
- 10:45, 10 July 2015 diff hist -12 Vacuum Deposition Recipes
- 10:43, 10 July 2015 diff hist +20 Vacuum Deposition Recipes
- 10:41, 10 July 2015 diff hist +51 Vacuum Deposition Recipes
- 10:36, 10 July 2015 diff hist +405 Vacuum Deposition Recipes
- 17:08, 9 July 2015 diff hist +5 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:48, 9 July 2015 diff hist +656 Vacuum Deposition Recipes
- 16:39, 9 July 2015 diff hist +140 Vacuum Deposition Recipes
- 16:34, 9 July 2015 diff hist +137 Vacuum Deposition Recipes
- 16:29, 9 July 2015 diff hist +77 Vacuum Deposition Recipes
- 16:15, 9 July 2015 diff hist +39 Vacuum Deposition Recipes
- 15:52, 9 July 2015 diff hist +8 Other Dry Etching Recipes
- 15:51, 9 July 2015 diff hist +23 Other Dry Etching Recipes
- 15:49, 9 July 2015 diff hist +1 Dry Etching Recipes
- 14:58, 9 July 2015 diff hist +20 Dry Etching Recipes
- 14:57, 9 July 2015 diff hist +182 Dry Etching Recipes
- 13:58, 9 July 2015 diff hist +7 CAIBE (Oxford Ion Mill) →About
- 13:55, 9 July 2015 diff hist +9 CAIBE (Oxford Ion Mill)
- 13:54, 9 July 2015 diff hist 0 N File:CAIBE.jpg current
- 12:26, 9 July 2015 diff hist -71 CAIBE (Oxford Ion Mill)
- 12:25, 9 July 2015 diff hist 0 CAIBE (Oxford Ion Mill)
- 12:20, 9 July 2015 diff hist -604 CAIBE (Oxford Ion Mill)
- 11:52, 9 July 2015 diff hist +3,122 N CAIBE (Oxford Ion Mill) Created page with "{{tool|{{PAGENAME}} |picture=RIE3.jpg |type = Dry Etch |super= Brian Lingg |phone= 805-893-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = RIE #3 Fluorine-Ba..."
- 10:46, 9 July 2015 diff hist +30 Tool List →Dry Etch
- 16:47, 10 April 2015 diff hist +3 Stepper 3 (ASML DUV) →Operating Procedures
- 16:47, 10 April 2015 diff hist 0 N File:ASML Job Set-Up Guide v2.pdf current
- 17:27, 2 April 2015 diff hist -5 Stepper 3 (ASML DUV)
- 17:26, 2 April 2015 diff hist 0 N File:ASML Mask Making Guidelines.pdf current
- 17:25, 2 April 2015 diff hist +67 Stepper 3 (ASML DUV) →Operating Procedures
- 10:47, 25 February 2015 diff hist 0 Lithography Recipes →Photolithography Recipes
- 10:46, 25 February 2015 diff hist 0 Lithography Recipes
- 12:57, 24 December 2014 diff hist +157 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 12:41, 23 December 2014 diff hist 0 N File:SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf current
- 12:00, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf current
- 12:00, 23 December 2014 diff hist +23 Sputtering Recipes →SiO2 Deposition (Sputter 3)
- 11:44, 23 December 2014 diff hist +212 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:07, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Uniformity-rev-1.pdf current
- 11:06, 23 December 2014 diff hist +216 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:02, 23 December 2014 diff hist +317 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:45, 22 December 2014 diff hist +37 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:42, 22 December 2014 diff hist 0 N File:Ti-Au-Sputtering-Films-AJA2-rev1.pdf current
- 11:42, 22 December 2014 diff hist +95 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 11:39, 22 December 2014 diff hist +213 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:27, 22 December 2014 diff hist 0 N File:Sputter-2-AlN-Endeavor-rev1.pdf current
- 11:27, 22 December 2014 diff hist -4 Sputtering Recipes →AlNx Deposition (Sputter 2)
- 16:25, 15 April 2014 diff hist +499 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:36, 1 April 2014 diff hist +19 PECVD 1 (PlasmaTherm 790) →Documentation
- 15:19, 1 April 2014 diff hist -71 Sputter 4 (AJA ATC 2200-V) →Documentation
- 14:08, 1 April 2014 diff hist +24 Nano-Imprint (Nanonex NX2000) →About
- 14:07, 1 April 2014 diff hist +51 Nano-Imprint (Nanonex NX2000) →About
- 13:56, 1 April 2014 diff hist +102 Stepper 2 (AutoStep 200) →About
- 13:54, 1 April 2014 diff hist -9 Stepper 1 (GCA 6300) →About
- 16:34, 21 March 2014 diff hist +139 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:34, 21 March 2014 diff hist +140 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:32, 21 March 2014 diff hist +128 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:27, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf current
- 16:27, 21 March 2014 diff hist 0 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 16:14, 21 March 2014 diff hist +3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:09, 21 March 2014 diff hist +4 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:08, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf current
- 16:08, 21 March 2014 diff hist +3 Sputtering Recipes →W Deposition (Sputter 4)
- 11:12, 21 March 2014 diff hist 0 N File:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf current
- 11:12, 21 March 2014 diff hist 0 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 11:11, 21 March 2014 diff hist +108 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 10:54, 21 March 2014 diff hist -27 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 10:54, 21 March 2014 diff hist +50 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 15:36, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:36, 18 March 2014 diff hist 0 N File:Al-AFM-Variation-Deposition-Rate-Rev1.pdf current
- 15:36, 18 March 2014 diff hist +105 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:19, 18 March 2014 diff hist +111 E-Beam Evaporation Recipes
- 15:18, 18 March 2014 diff hist -112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:17, 18 March 2014 diff hist 0 N File:Al-thickness-variation-with-rate.jpg current
- 15:16, 18 March 2014 diff hist +112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:00, 18 March 2014 diff hist +140 E-Beam Evaporation Recipes
- 14:55, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 14:54, 18 March 2014 diff hist 0 N File:Vapor-Pressure-Chart-2.xlsx current
- 14:52, 18 March 2014 diff hist 0 File:Vapor-Pressure-Chart.xlsx Thibeault uploaded a new version of "File:Vapor-Pressure-Chart.xlsx" current
- 14:49, 18 March 2014 diff hist +18 N File:Vapor-Pressure-Chart.xlsx alphabetical order
- 11:46, 18 March 2014 diff hist +7 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:45, 18 March 2014 diff hist -36 E-Beam Evaporation Recipes →Materials Table (E-Beam #4)
- 11:44, 18 March 2014 diff hist +35 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:42, 18 March 2014 diff hist +3 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:40, 18 March 2014 diff hist +66 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:32, 18 March 2014 diff hist -65 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:26, 18 March 2014 diff hist -35 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:24, 18 March 2014 diff hist +13 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:19, 18 March 2014 diff hist +93 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:18, 18 March 2014 diff hist +25 E-Beam Evaporation Recipes
- 13:41, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:40, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 13:39, 17 March 2014 diff hist +309 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:38, 17 March 2014 diff hist -26 Sputtering Recipes →Sputter 3 Process Table
- 13:35, 17 March 2014 diff hist -599 Sputtering Recipes →Sputter 3 Process Table
- 13:34, 17 March 2014 diff hist -93 Sputtering Recipes →Sputter 3 Process Table
- 13:30, 17 March 2014 diff hist -1 Sputtering Recipes →Sputter 3 Process Table
- 13:29, 17 March 2014 diff hist +27 Sputtering Recipes →Sputter 3 Process Table
- 13:28, 17 March 2014 diff hist +4 Sputtering Recipes
- 11:57, 17 March 2014 diff hist +1,000 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:44, 12 March 2014 diff hist -241 DUV Flood Expose →Spectra Images
- 11:44, 12 March 2014 diff hist +242 Suss Aligners (SUSS MJB-3) →Detailed Specifications
- 14:12, 11 March 2014 diff hist 0 ICP-PECVD (Unaxis VLR) →Detailed Specifications
- 13:51, 11 March 2014 diff hist -58 E-Beam Evaporation Recipes →Materials Table (E-Beam #3)
- 13:46, 11 March 2014 diff hist 0 Stepper 3 (ASML DUV)
- 13:42, 11 March 2014 diff hist 0 Stepper 2 (AutoStep 200) →Detailed Specifications
- 13:41, 11 March 2014 diff hist +1 Stepper 2 (AutoStep 200) →About
- 10:45, 30 January 2014 diff hist +57 Vapor HF Etch (uETCH)
- 10:43, 30 January 2014 diff hist +1,547 N HF Vapor Etch Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub..."
- 11:34, 28 January 2014 diff hist +129 Lithography Recipes →Nanoimprinting
- 11:33, 28 January 2014 diff hist 0 N File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx current
- 10:59, 28 January 2014 diff hist +68 Lithography Recipes →Chemical Datasheets
- 10:58, 28 January 2014 diff hist 0 N File:OrmoPrime-NIL-Adhesion-RevA.pdf current
- 10:57, 28 January 2014 diff hist +49 Lithography Recipes →Chemical Datasheets
- 10:56, 28 January 2014 diff hist 0 N File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf current
- 10:13, 28 January 2014 diff hist +24 Lithography Recipes →Chemical Datasheets
- 10:12, 28 January 2014 diff hist 0 N File:Mr-UVCur21.pdf current
- 10:11, 28 January 2014 diff hist +36 Lithography Recipes →Chemical Datasheets
- 11:10, 27 January 2014 diff hist +7 Lithography Recipes →Low-K Dielectric
- 11:01, 27 January 2014 diff hist +63 Lithography Recipes →Low-K Dielectric
- 10:59, 27 January 2014 diff hist 0 N File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx current
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:42, 24 October 2013 diff hist -238 ICP Etching Recipes →Sapphire Etch (Panasonic 1)
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:38, 24 October 2013 diff hist 0 N File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf current
- 16:38, 24 October 2013 diff hist +130 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 16:36, 24 October 2013 diff hist +49 Dry Etching Recipes
- 15:25, 24 October 2013 diff hist 0 N File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf current