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- 14:14, 11 October 2019 diff hist 0 N File:On Chip Hybrid Silicon Quantum Dot Comb Laser With 14 Error Free Channels.pdf current
- 14:14, 11 October 2019 diff hist +198 Photonics Presentations
- 14:00, 11 October 2019 diff hist 0 N File:Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf current
- 13:59, 11 October 2019 diff hist -1 THz Physics Presentations current
- 13:59, 11 October 2019 diff hist +187 N THz Physics Presentations Created page with "*{{File|Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf|Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer - Changyun Yoo - Sherwin Group - UCSB -..."
- 13:54, 11 October 2019 diff hist +51 Research →Research Presentations
- 15:17, 10 October 2019 diff hist 0 N File:Memory-Based Neuromorphic Hardware for Advanced Neural Network Models.pdf current
- 15:15, 10 October 2019 diff hist +207 Electronics Presentations
- 15:05, 10 October 2019 diff hist +177 N Electronics Presentations Created page with "*{{File|THz Transistors and Template Assisted Selective Epitaxy.pdf|THz Transistors and Template Assisted Selective Epitaxy - Brian Markman - Rodwell Group - UCSB - Sept. 2019}}"
- 15:04, 10 October 2019 diff hist +51 Research →Research Presentations
- 15:02, 10 October 2019 diff hist +128 Photonics Presentations
- 15:02, 10 October 2019 diff hist +141 Photonics Presentations
- 15:00, 10 October 2019 diff hist +164 N Photonics Presentations Created page with "*{{File|High Power PICs for Free Space.pdf|High Power Photonic Integrated Circuits for Free Space Communications - Hongwei Zhao - Klamkin Group - UCSB - Oct. 2019}}"
- 14:58, 10 October 2019 diff hist -9 Research →Research Presentations
- 17:29, 9 October 2019 diff hist +10 Research →Research Presentations
- 17:24, 9 October 2019 diff hist +7 Research →Research Presentations
- 17:22, 9 October 2019 diff hist +7 Research
- 17:21, 9 October 2019 diff hist 0 Research
- 10:09, 9 October 2019 diff hist 0 N File:High Power PICs for Free Space.pdf current
- 09:04, 9 October 2019 diff hist +253 Tech Talks Seminar Series
- 15:16, 8 October 2019 diff hist 0 N File:TechTalk20191010.jpg current
- 15:14, 8 October 2019 diff hist +91 Tech Talks Seminar Series
- 13:44, 20 September 2019 diff hist +35 Plasma Clean (YES EcoClean)
- 13:41, 20 September 2019 diff hist +199 Plasma Clean (YES EcoClean) added links Tag: Visual edit
- 17:33, 18 September 2019 diff hist -1 YES-150C-Various-Resists minor edit spelling Tag: Visual edit
- 17:33, 18 September 2019 diff hist +90 YES-SPR220-Various-Temps minor edit Tag: Visual edit
- 17:32, 18 September 2019 diff hist +93 YES-150C-Various-Resists minor edit Tag: Visual edit
- 17:29, 18 September 2019 diff hist -13 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean) Tag: Visual edit
- 17:28, 18 September 2019 diff hist 0 N File:YES-SPR220vsTemp.jpg current
- 17:28, 18 September 2019 diff hist +29 N YES-SPR220-Various-Temps Created page with "File:YES-SPR220vsTemp.jpg"
- 17:26, 18 September 2019 diff hist 0 N File:YES150CResists.jpg current
- 17:26, 18 September 2019 diff hist +27 N YES-150C-Various-Resists Created page with "File:YES150CResists.jpg"
- 17:22, 18 September 2019 diff hist +102 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean) Tag: Visual edit
- 17:00, 18 September 2019 diff hist +28 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean) Tag: Visual edit
- 21:33, 16 September 2019 diff hist -453 Sputtering Recipes Take Sputter 2 off of TOC list,but keep recipes on page at bottom Tag: Visual edit
- 21:31, 16 September 2019 diff hist 0 Sputtering Recipes
- 21:28, 16 September 2019 diff hist -3,952 Vacuum Deposition Recipes Delete Sputter1 and 2 Tag: Visual edit
- 21:27, 16 September 2019 diff hist -266 Dry Etching Recipes delete RIE1 Tag: Visual edit
- 21:26, 16 September 2019 diff hist -23 RIE Etching Recipes
- 21:23, 16 September 2019 diff hist 0 Dry Etching Recipes minor edit Tag: Visual edit
- 21:22, 16 September 2019 diff hist +38 Dry Etching Recipes minor change Tag: Visual edit
- 21:18, 16 September 2019 diff hist +72 Dry Etching Recipes
- 21:17, 16 September 2019 diff hist +61 Dry Etching Recipes lkink change Tag: Visual edit
- 21:13, 16 September 2019 diff hist +69 Oxygen Plasma System Recipes
- 21:11, 16 September 2019 diff hist +197 Dry Etching Recipes Tag: Visual edit: Switched
- 21:04, 16 September 2019 diff hist +974 N Plasma Clean (YES EcoClean) Created page with "{{tool|{{PAGENAME}} |picture=YES_EcoClean.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 5 |email=silva@ece.ucsb.edu |description = EcoClean As..."
- 20:59, 16 September 2019 diff hist +32 Tool List →Reactive Ion Etching (RIE)
- 20:55, 16 September 2019 diff hist 0 N File:TechTalk20190926.jpg current
- 20:54, 16 September 2019 diff hist +92 Tech Talks Seminar Series
- 16:09, 16 September 2019 diff hist 0 N File:THz Transistors and Template Assisted Selective Epitaxy.pdf current
- 16:07, 16 September 2019 diff hist +268 Tech Talks Seminar Series
- 21:46, 8 September 2019 diff hist -98 Tech Talks Seminar Series →Thursday, Sept. 5, 12pm, ESB1001, Light Lunch Provided
- 21:45, 8 September 2019 diff hist +99 Tech Talks Seminar Series →High Performance Lasers on Silicon
- 21:42, 8 September 2019 diff hist 0 N File:TechTalk20190912.jpg current
- 21:41, 8 September 2019 diff hist +92 Tech Talks Seminar Series
- 21:39, 8 September 2019 diff hist 0 N File:High Performance Lasers on Silicon Slides.pdf current
- 21:37, 8 September 2019 diff hist 0 N File:Semiconductor Supermirrors.pdf current
- 21:36, 8 September 2019 diff hist +75 Tech Talks Seminar Series
- 11:53, 6 September 2019 diff hist +44 Tech Talks Seminar Series →Thursday, Sept. 5, 12pm, ESB1001, Light Lunch Provided
- 11:47, 6 September 2019 diff hist +60 Tech Talks Seminar Series Tag: Visual edit: Switched
- 11:40, 6 September 2019 diff hist 0 MediaWiki:Sidebar
- 11:40, 6 September 2019 diff hist +39 MediaWiki:Sidebar
- 16:35, 5 September 2019 diff hist -10,709 PECVD Recipes →SiN deposition (Unaxis VLR): Delete obsolete recipes from page Tag: Visual edit
- 16:51, 3 September 2019 diff hist +32 PubList2018 formatting Tag: Visual edit
- 16:50, 3 September 2019 diff hist -19 PubList2018 formatting Tag: Visual edit
- 16:49, 3 September 2019 diff hist +39,512 PubList2018 Added all 2018 pub lists Tag: Visual edit
- 16:41, 3 September 2019 diff hist +38,474 N PubList2018 Added Publist2018 page Tag: Visual edit
- 16:17, 3 September 2019 diff hist +342 N Research Added Research Page Tag: Visual edit
- 14:16, 3 September 2019 diff hist +14 Lab Rules →Transporting Chemicals from bench to bench: minor sentence edit Tag: Visual edit
- 14:10, 3 September 2019 diff hist -78 m Lab Rules →Containers and Labeling: Small policy update for labeling of containers and for transporting of chemicals between benches. Tag: Visual edit
- 16:22, 29 August 2019 diff hist 0 N File:TechTalk20190905.jpg current
- 16:22, 29 August 2019 diff hist +92 N Tech Talks Seminar Series Add page for tech talk fliers
- 16:18, 29 August 2019 diff hist +48 Template:Links Adding link TechTalk Page
- 09:33, 31 July 2019 diff hist +69 Microscopes Added scope software link to documentation Tag: Visual edit
- 09:30, 31 July 2019 diff hist +292 m UCSB NanoFab Microscope Training →General Focusing: addition of language in multiple spots encouraging users to ALWAYS start with low magnification Tag: Visual edit
- 14:46, 23 July 2019 diff hist +404 Microscopes →Microscope #2: Nikon Optiphot 200 (Bay 7): Deleted Jenoptic references, added AM Scope refs and links. Still needs table for pixel calibtrations versus mag for each scope.... Tag: Visual edit
- 09:20, 10 July 2019 diff hist -127 Template:Announcements
- 08:08, 21 June 2019 diff hist -210 Template:Announcements
- 09:46, 18 April 2019 diff hist +126 Lab Rules →Chemical Storage: added clause to general chemical storage line Tag: Visual edit
- 09:41, 18 April 2019 diff hist +56 Lab Rules →Nanofab Paper: added clause on cardboard Tag: Visual edit
- 15:39, 2 April 2019 diff hist +635 Lab Rules →Containers and Labeling: added transporting open container policy Tag: Visual edit
- 15:58, 15 March 2019 diff hist -261 Template:Announcements →ASML DUV: PM March 12 to 15th
- 13:57, 8 March 2019 diff hist +10 Template:Announcements →ASML DUV: PM March 12 to 15th
- 17:23, 20 February 2019 diff hist 0 Stepper 3 (ASML DUV) bay number of stepper Tag: Visual edit
- 15:11, 30 January 2019 diff hist +88 m Usage Data and Statistics →External Use of Facility Tag: Visual edit
- 18:22, 29 January 2019 diff hist +72 Usage Data and Statistics →External Use of Facility
- 18:20, 29 January 2019 diff hist +53 m Usage Data and Statistics →External Use of Facility Tag: Visual edit
- 18:18, 29 January 2019 diff hist +307 Usage Data and Statistics →External Use of Facility: Added Ca map Tag: Visual edit
- 18:14, 29 January 2019 diff hist +54 Usage Data and Statistics →External Use of Facility
- 18:10, 29 January 2019 diff hist -96 m Usage Data and Statistics →External Use of Facility Tag: Visual edit
- 18:02, 29 January 2019 diff hist +441 Usage Data and Statistics Added usage map - US Tag: Visual edit
- 17:58, 29 January 2019 diff hist +95 N File:US Usage Map 2006-2018.png current
- 13:58, 25 January 2019 diff hist -318 m Brian Thibeault →Current Work Tag: Visual edit
- 13:44, 25 January 2019 diff hist +21 m Brian Thibeault →About
- 09:36, 25 January 2019 diff hist 0 m Usage Data and Statistics Tag: Visual edit
- 09:35, 25 January 2019 diff hist +11 m Usage Data and Statistics replaced graph Tag: Visual edit
- 09:34, 25 January 2019 diff hist +77 N File:2018 User Chart by Discipline.png current
- 17:21, 18 January 2019 diff hist 0 m Usage Data and Statistics →Numbers of Annual Users Tag: Visual edit
- 17:20, 18 January 2019 diff hist -1 m Usage Data and Statistics Tag: Visual edit
- 17:14, 18 January 2019 diff hist +34 m Usage Data and Statistics Tag: Visual edit
- 17:11, 18 January 2019 diff hist 0 m Usage Data and Statistics Tag: Visual edit
- 17:11, 18 January 2019 diff hist +1 m Usage Data and Statistics Tag: Visual edit
- 17:09, 18 January 2019 diff hist +770 Usage Data and Statistics Added usage graphs and text Tag: Visual edit
- 17:00, 18 January 2019 diff hist +57 N File:User Percentages by Discipline 2018.png current
- 13:00, 28 November 2018 diff hist -556 Template:Announcements change announcements
- 18:24, 27 November 2018 diff hist +8,444 N Stocked Chemical List Added table to stocked chemical list page Tag: Visual edit
- 18:21, 27 November 2018 diff hist +4 Chemical List →Inventory List: Added link to page for stocked chemcials Tag: Visual edit
- 10:52, 8 November 2018 diff hist 0 N File:DS-K101-304-Anti-Reflective-Coating.pdf current
- 15:54, 4 October 2018 diff hist -131 Chemical List →Material Safety Datasheets: delete old incomplete list link
- 15:51, 4 October 2018 diff hist +136 Chemical List →Material Safety Datasheets: test N-Z list
- 15:48, 4 October 2018 diff hist +136 Chemical List →Material Safety Datasheets: testing A-M folder
- 16:40, 26 September 2018 diff hist -261 Template:Announcements Updated status on CARY500, RIE5 and PECVD - deleted old announcements
- 09:19, 24 September 2018 diff hist 0 N File:Nanofab Policies Chemical Hygiene Plan 9 13 18.pdf current
- 09:18, 24 September 2018 diff hist 0 Lab Rules OLD 2018 Update Final Lab Policies Docment
- 09:55, 20 September 2018 diff hist +4 Lithography Recipes →Chemical Datasheets: changed DS-K101 to reflect new product number
- 09:43, 20 September 2018 diff hist +20 Template:Announcements Update RIE3 status
- 08:31, 18 September 2018 diff hist +318 Template:Announcements Added RIE3 and Sputter4 Issues
- 09:36, 8 September 2018 diff hist 0 N File:Nanofab Policies Chemical Hygiene Plan 8 31 18.pdf current
- 09:35, 8 September 2018 diff hist 0 Lab Rules OLD 2018 uploading new lab policy doc
- 08:36, 6 September 2018 diff hist 0 N File:BCB-rework.pdf current
- 08:36, 6 September 2018 diff hist +52 Lithography Recipes →Chemical Datasheets: Added BCB rework doc from DOW to list
- 17:37, 4 September 2018 diff hist -99 Chemical List - OLD 2018-09-05 →UNSORTED
- 17:29, 31 August 2018 diff hist +99 Chemical List - OLD 2018-09-05 Testing link to MSDS folder Tag: Visual edit
- 17:08, 21 August 2018 diff hist -14 m Template:Announcements →Ebeam#2: heater repair scheduled
- 17:06, 21 August 2018 diff hist -8 m Template:Announcements update EB2
- 08:03, 21 August 2018 diff hist -81 Wet Benches →General Information
- 11:09, 3 August 2018 diff hist -34,565 Lab Rules OLD 2018 deleted all except pdf. Old verion on _backup Tag: Visual edit
- 11:07, 3 August 2018 diff hist +35,139 N Lab Rules backup Created page with "For a printable PDF version of the Lab Rules, please '''CLICK HERE''' While working in the Nanofab, you are surr..." current
- 15:34, 7 June 2018 diff hist +90 Template:Announcements
- 14:22, 6 June 2018 diff hist -107 Template:Announcements
- 11:06, 4 June 2018 diff hist -101 Template:Announcements
- 14:52, 26 May 2018 diff hist -20 Template:Announcements
- 11:05, 26 May 2018 diff hist +200 Template:Announcements
- 10:41, 26 May 2018 diff hist +29 Template:Announcements
- 10:41, 26 May 2018 diff hist +168 Template:Announcements
- 10:38, 26 May 2018 diff hist -28 Template:Announcements
- 09:54, 25 May 2018 diff hist -30 Vacuum Deposition Recipes minor link edit sputter5 Tag: Visual edit
- 09:52, 25 May 2018 diff hist +19 m Vacuum Deposition Recipes link to sputter5 recipes Tag: Visual edit
- 09:49, 25 May 2018 diff hist -140 Sputtering Recipes
- 17:27, 24 May 2018 diff hist -34 Template:Announcements →Stepper #2: Up
- 17:25, 24 May 2018 diff hist -248 Template:Announcements →PECVD#2: Open Soon
- 16:49, 14 May 2018 diff hist +147 Vacuum Deposition Recipes Fixed ALD Links to proper headings Tag: Visual edit
- 16:44, 14 May 2018 diff hist +10 Vacuum Deposition Recipes Pt ALD link Tag: Visual edit
- 16:37, 10 May 2018 diff hist -404 Template:Announcements deleted old messaged, updated PECVD2
- 16:34, 10 May 2018 diff hist -95 Template:Announcements →PECVD#2: Down, Retraining required
- 11:46, 20 April 2018 diff hist -178 Template:Announcements
- 17:18, 19 April 2018 diff hist -731 Template:Announcements
- 17:16, 19 April 2018 diff hist -156 Template:Announcements
- 16:50, 19 April 2018 diff hist 0 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials) Tag: Visual edit
- 16:43, 19 April 2018 diff hist -80 ICP Etching Recipes →GaSb Etch (Unaxis VLR) Tag: Visual edit
- 14:35, 19 April 2018 diff hist 0 N File:BCB-adhesion.pdf current
- 14:34, 19 April 2018 diff hist +56 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 13:14, 19 April 2018 diff hist -5 m RIE 5 (PlasmaTherm) →About Tag: Visual edit
- 14:18, 3 April 2018 diff hist -56 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 14:16, 3 April 2018 diff hist +7 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 14:14, 3 April 2018 diff hist -57 m Lithography Recipes →Chemical Datasheets Tag: Visual edit
- 14:12, 3 April 2018 diff hist +256 m E-Beam 1 (Sharon) →About Tag: Visual edit
- 14:10, 3 April 2018 diff hist +47 m E-Beam Evaporation Recipes →Materials Table (E-Beam #1) Tag: Visual edit
- 09:23, 29 March 2018 diff hist +4 Template:Announcements →ASML: Up
- 09:22, 29 March 2018 diff hist +2 Template:Announcements →ASML: Up
- 09:21, 29 March 2018 diff hist -89 Template:Announcements →ASML: Leveling Error
- 15:11, 17 January 2018 diff hist +67 Dry Etching Recipes
- 15:02, 17 January 2018 diff hist 0 N File:10-Si Etch Single Step Smooth Sidewall DSEIII.pdf current
- 15:02, 17 January 2018 diff hist 0 N File:10-Si Etch Bosch DSEIII.pdf current
- 15:01, 17 January 2018 diff hist +144 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)
- 17:32, 11 December 2017 diff hist -19 Template:Announcements →GCA 6300 Stepper #1
- 17:31, 11 December 2017 diff hist -28 Template:Announcements →Announcements
- 13:07, 11 December 2017 diff hist -32 Template:Announcements →Announcements
- 15:46, 28 November 2017 diff hist 0 N Category:Pages generating RSS feeds Created blank page current
- 11:02, 28 November 2017 diff hist -30 Template:News
- 11:00, 28 November 2017 diff hist -10 Template:News
- 10:58, 28 November 2017 diff hist -29 Template:News
- 10:56, 28 November 2017 diff hist -5 Template:News
- 15:20, 6 November 2017 diff hist +116 Dry Etching Recipes
- 15:18, 6 November 2017 diff hist +10 Dry Etching Recipes
- 15:16, 6 November 2017 diff hist +98 Dry Etching Recipes
- 15:13, 6 November 2017 diff hist -5 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)
- 15:12, 6 November 2017 diff hist -1 ICP Etching Recipes
- 15:10, 6 November 2017 diff hist +142 ICP Etching Recipes
- 15:03, 6 November 2017 diff hist +56 Dry Etching Recipes Tag: Visual edit: Switched
- 10:45, 6 November 2017 diff hist 0 DSEIII (PlasmaTherm/Deep Silicon Etcher)
- 10:43, 6 November 2017 diff hist +2,424 N DSEIII (PlasmaTherm/Deep Silicon Etcher) Created page with "{{tool|{{PAGENAME}} |picture=DSEIII.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = Deep Silicon..."
- 10:34, 6 November 2017 diff hist +47 Tool List →Dry Etch
- 11:18, 10 October 2017 diff hist -9 Tube Furnace (Tystar 8300) →See Also
- 17:04, 29 September 2017 diff hist +66 Template:News
- 16:52, 29 September 2017 diff hist -8 MediaWiki:Sidebar
- 16:51, 29 September 2017 diff hist +15 MediaWiki:Sidebar
- 16:49, 29 September 2017 diff hist +70 MediaWiki:Sidebar
- 16:32, 29 September 2017 diff hist +1 Stepper 3 (ASML DUV) →About
- 10:47, 22 September 2017 diff hist -26 Template:Links
- 17:01, 21 September 2017 diff hist -25 m Vacuum Deposition Recipes Tag: Visual edit
- 17:01, 21 September 2017 diff hist -50 m Vacuum Deposition Recipes Tag: Visual edit
- 11:30, 8 September 2017 diff hist +4 Lithography Recipes →Chemical Datasheets Tag: Visual edit: Switched
- 11:26, 8 September 2017 diff hist -1 Lithography Recipes Tag: Visual edit: Switched
- 11:18, 8 September 2017 diff hist -71 Lithography Recipes →Chemical Datasheets
- 11:17, 8 September 2017 diff hist 0 File:UV26-Positive-Resist-Datasheet.pdf Thibeault uploaded a new version of File:UV26-Positive-Resist-Datasheet.pdf current
- 11:16, 8 September 2017 diff hist 0 N File:UV26-Positive-Resist-Datasheet.pdf
- 11:16, 8 September 2017 diff hist +53 Lithography Recipes →Chemical Datasheets
- 11:10, 8 September 2017 diff hist 0 m Vacuum Deposition Recipes Tag: Visual edit: Switched
- 14:48, 12 June 2017 diff hist +52 Lithography Recipes →Photolithography Recipes
- 14:37, 12 June 2017 diff hist 0 N File:NR9-1000PY-AS200-stepperrecipe.pdf current
- 14:36, 12 June 2017 diff hist +319 Stepper Recipes
- 14:31, 12 July 2016 diff hist 0 N File:Survey052016.pdf current
- 14:30, 12 July 2016 diff hist +20 Template:News
- 14:28, 12 July 2016 diff hist +51 Template:News
- 16:59, 3 June 2016 diff hist +40 ICP Etch 2 (Panasonic E626I) →Detailed Specifications
- 16:58, 3 June 2016 diff hist +92 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications
- 16:55, 3 June 2016 diff hist 0 ICP Etching Recipes
- 16:52, 3 June 2016 diff hist 0 N File:10-Si Etch Bosch Release DRIE.pdf current
- 16:51, 3 June 2016 diff hist +114 ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch)
- 14:33, 3 June 2016 diff hist -47 Stepper 3 (ASML DUV) →About
- 14:31, 3 June 2016 diff hist +359 Stepper 3 (ASML DUV) →About
- 14:25, 3 June 2016 diff hist +318 Stepper 3 (ASML DUV) →About
- 11:51, 3 June 2016 diff hist 0 N File:ASML Job Set-Up Guide simple v1.pdf current
- 11:49, 3 June 2016 diff hist +96 Stepper 3 (ASML DUV) →Operating Procedures
- 12:01, 22 February 2016 diff hist 0 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:36, 22 February 2016 diff hist +130 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:37, 16 December 2015 diff hist +60 Dry Etching Recipes
- 15:36, 16 December 2015 diff hist +76 Dry Etching Recipes
- 15:36, 16 December 2015 diff hist +60 Dry Etching Recipes
- 15:35, 16 December 2015 diff hist -2 Other Dry Etching Recipes
- 15:35, 16 December 2015 diff hist +10 Other Dry Etching Recipes
- 15:34, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:33, 16 December 2015 diff hist +92 Dry Etching Recipes
- 15:33, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:32, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:19, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:18, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:18, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:17, 16 December 2015 diff hist +52 Dry Etching Recipes
- 15:16, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:15, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:14, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:14, 16 December 2015 diff hist 0 Dry Etching Recipes
- 15:13, 16 December 2015 diff hist +2 Dry Etching Recipes
- 18:12, 15 December 2015 diff hist +32 Vacuum Deposition Recipes
- 18:10, 15 December 2015 diff hist -16 Vacuum Deposition Recipes
- 18:09, 15 December 2015 diff hist +12 Vacuum Deposition Recipes
- 18:06, 15 December 2015 diff hist -3 Vacuum Deposition Recipes
- 18:05, 15 December 2015 diff hist +6 Vacuum Deposition Recipes
- 18:03, 15 December 2015 diff hist -33 Vacuum Deposition Recipes
- 18:02, 15 December 2015 diff hist -35 Vacuum Deposition Recipes
- 18:01, 15 December 2015 diff hist 0 Vacuum Deposition Recipes
- 18:00, 15 December 2015 diff hist -36 Vacuum Deposition Recipes
- 17:59, 15 December 2015 diff hist -35 Vacuum Deposition Recipes
- 17:58, 15 December 2015 diff hist +1 Vacuum Deposition Recipes
- 17:55, 15 December 2015 diff hist +243 Vacuum Deposition Recipes
- 17:52, 15 December 2015 diff hist +23 Vacuum Deposition Recipes
- 17:51, 15 December 2015 diff hist +46 Vacuum Deposition Recipes
- 17:50, 15 December 2015 diff hist +8 Vacuum Deposition Recipes
- 17:49, 15 December 2015 diff hist +4 Vacuum Deposition Recipes
- 17:36, 15 December 2015 diff hist +117 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL)
- 17:34, 15 December 2015 diff hist +164 Vacuum Deposition Recipes
- 17:13, 15 December 2015 diff hist 0 Vacuum Deposition Recipes
- 17:12, 15 December 2015 diff hist +98 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 17:08, 15 December 2015 diff hist 0 N File:Fe and Co Films using Sputter-3.pdf current
- 17:07, 15 December 2015 diff hist +322 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:52, 15 December 2015 diff hist -29 Lithography Recipes →Low-K Dielectric
- 16:51, 15 December 2015 diff hist -43 Lithography Recipes →Chemical Datasheets
- 16:31, 15 December 2015 diff hist 0 N File:DUV42P-Anti-Reflective-Coating.pdf current
- 16:30, 15 December 2015 diff hist -2 Lithography Recipes →Chemical Datasheets
- 16:29, 15 December 2015 diff hist +100 Lithography Recipes →Chemical Datasheets
- 15:53, 11 December 2015 diff hist +22 PECVD Recipes →SiN (100% SiH4 )
- 15:53, 11 December 2015 diff hist +23 PECVD Recipes →SiN (2% SiH4 - No-Ar - Extra N2)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4)
- 15:13, 11 December 2015 diff hist +64 Lithography Recipes →Low-K Dielectric
- 15:11, 11 December 2015 diff hist -27 Lithography Recipes →Low-K Dielectric
- 15:08, 11 December 2015 diff hist +18 Lithography Recipes →Low-K Dielectric
- 15:05, 11 December 2015 diff hist +9 Lithography Recipes →Low-K Dielectric
- 15:01, 11 December 2015 diff hist +43 Lithography Recipes →Low-K Dielectric
- 14:56, 11 December 2015 diff hist +9 Lithography Recipes →Chemical Datasheets
- 14:55, 11 December 2015 diff hist +10 Lithography Recipes →Chemical Datasheets
- 14:52, 11 December 2015 diff hist +43 ICP Etch 2 (Panasonic E626I) →Detailed Specifications
- 14:51, 11 December 2015 diff hist +122 ICP Etch 2 (Panasonic E626I) →About
- 09:15, 27 August 2015 diff hist +163 Lithography Recipes →Photolithography Recipes
- 09:13, 27 August 2015 diff hist +1 Lithography Recipes →Chemical Datasheets
- 09:12, 27 August 2015 diff hist 0 N File:PEK-162-Positive-Resist-Datasheet.pdf current
- 09:11, 27 August 2015 diff hist +284 Lithography Recipes →Chemical Datasheets
- 08:45, 27 August 2015 diff hist +25 Dry Etching Recipes
- 16:23, 26 August 2015 diff hist -16 Lithography Recipes →Chemical Datasheets
- 16:20, 26 August 2015 diff hist +102 Lithography Recipes →Photolithography Recipes
- 16:02, 26 August 2015 diff hist +54 Lithography Recipes →Chemical Datasheets
- 16:01, 26 August 2015 diff hist 0 N File:NR9-6000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-3000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-1000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist +144 Lithography Recipes →Chemical Datasheets
- 15:55, 26 August 2015 diff hist +5 Lithography Recipes →Photolithography Recipes
- 15:54, 26 August 2015 diff hist +5 Lithography Recipes →Chemical Datasheets
- 15:52, 26 August 2015 diff hist +311 Template:FeaturedArticle
- 15:40, 26 August 2015 diff hist -103 Template:News
- 12:12, 26 August 2015 diff hist +340 Vacuum Deposition Recipes
- 12:07, 26 August 2015 diff hist +520 Vacuum Deposition Recipes
- 14:43, 10 July 2015 diff hist -44 E-Beam 2 (Custom) →About
- 14:40, 10 July 2015 diff hist -33 Stepper 2 (AutoStep 200)
- 14:39, 10 July 2015 diff hist -31 Stepper 1 (GCA 6300)
- 14:38, 10 July 2015 diff hist -2 Chemical-Mechanical Polisher (Logitech)
- 14:26, 10 July 2015 diff hist +206 Deep UV Optical Microscope (Olympus) →About
- 14:25, 10 July 2015 diff hist +196 Deep UV Optical Microscope (Olympus)
- 14:23, 10 July 2015 diff hist +246 Fluorescence Microscope (Olympus MX51) →About
- 14:21, 10 July 2015 diff hist -3 Surface Analysis (KLA/Tencor Surfscan)
- 14:20, 10 July 2015 diff hist +149 Surface Analysis (KLA/Tencor Surfscan) →About
- 14:18, 10 July 2015 diff hist +110 SEM Sample Coater (Hummer)
- 10:45, 10 July 2015 diff hist -12 Vacuum Deposition Recipes
- 10:43, 10 July 2015 diff hist +20 Vacuum Deposition Recipes
- 10:41, 10 July 2015 diff hist +51 Vacuum Deposition Recipes
- 10:36, 10 July 2015 diff hist +405 Vacuum Deposition Recipes
- 17:08, 9 July 2015 diff hist +5 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:48, 9 July 2015 diff hist +656 Vacuum Deposition Recipes
- 16:39, 9 July 2015 diff hist +140 Vacuum Deposition Recipes
- 16:34, 9 July 2015 diff hist +137 Vacuum Deposition Recipes
- 16:29, 9 July 2015 diff hist +77 Vacuum Deposition Recipes
- 16:15, 9 July 2015 diff hist +39 Vacuum Deposition Recipes
- 15:52, 9 July 2015 diff hist +8 Other Dry Etching Recipes
- 15:51, 9 July 2015 diff hist +23 Other Dry Etching Recipes
- 15:49, 9 July 2015 diff hist +1 Dry Etching Recipes
- 14:58, 9 July 2015 diff hist +20 Dry Etching Recipes
- 14:57, 9 July 2015 diff hist +182 Dry Etching Recipes
- 13:58, 9 July 2015 diff hist +7 CAIBE (Oxford Ion Mill) →About
- 13:55, 9 July 2015 diff hist +9 CAIBE (Oxford Ion Mill)
- 13:54, 9 July 2015 diff hist 0 N File:CAIBE.jpg current
- 12:26, 9 July 2015 diff hist -71 CAIBE (Oxford Ion Mill)
- 12:25, 9 July 2015 diff hist 0 CAIBE (Oxford Ion Mill)
- 12:20, 9 July 2015 diff hist -604 CAIBE (Oxford Ion Mill)
- 11:52, 9 July 2015 diff hist +3,122 N CAIBE (Oxford Ion Mill) Created page with "{{tool|{{PAGENAME}} |picture=RIE3.jpg |type = Dry Etch |super= Brian Lingg |phone= 805-893-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = RIE #3 Fluorine-Ba..."
- 10:46, 9 July 2015 diff hist +30 Tool List →Dry Etch
- 16:47, 10 April 2015 diff hist +3 Stepper 3 (ASML DUV) →Operating Procedures
- 16:47, 10 April 2015 diff hist 0 N File:ASML Job Set-Up Guide v2.pdf current
- 17:27, 2 April 2015 diff hist -5 Stepper 3 (ASML DUV)
- 17:26, 2 April 2015 diff hist 0 N File:ASML Mask Making Guidelines.pdf current
- 17:25, 2 April 2015 diff hist +67 Stepper 3 (ASML DUV) →Operating Procedures
- 10:47, 25 February 2015 diff hist 0 Lithography Recipes →Photolithography Recipes
- 10:46, 25 February 2015 diff hist 0 Lithography Recipes
- 12:57, 24 December 2014 diff hist +157 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 12:41, 23 December 2014 diff hist 0 N File:SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf current
- 12:00, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf current
- 12:00, 23 December 2014 diff hist +23 Sputtering Recipes →SiO2 Deposition (Sputter 3)
- 11:44, 23 December 2014 diff hist +212 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:07, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Uniformity-rev-1.pdf current
- 11:06, 23 December 2014 diff hist +216 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:02, 23 December 2014 diff hist +317 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:45, 22 December 2014 diff hist +37 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:42, 22 December 2014 diff hist 0 N File:Ti-Au-Sputtering-Films-AJA2-rev1.pdf current
- 11:42, 22 December 2014 diff hist +95 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 11:39, 22 December 2014 diff hist +213 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:27, 22 December 2014 diff hist 0 N File:Sputter-2-AlN-Endeavor-rev1.pdf current
- 11:27, 22 December 2014 diff hist -4 Sputtering Recipes →AlNx Deposition (Sputter 2)
- 16:25, 15 April 2014 diff hist +499 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:36, 1 April 2014 diff hist +19 PECVD 1 (PlasmaTherm 790) →Documentation
- 15:19, 1 April 2014 diff hist -71 Sputter 4 (AJA ATC 2200-V) →Documentation
- 14:08, 1 April 2014 diff hist +24 Nano-Imprint (Nanonex NX2000) →About
- 14:07, 1 April 2014 diff hist +51 Nano-Imprint (Nanonex NX2000) →About
- 13:56, 1 April 2014 diff hist +102 Stepper 2 (AutoStep 200) →About
- 13:54, 1 April 2014 diff hist -9 Stepper 1 (GCA 6300) →About
- 16:34, 21 March 2014 diff hist +139 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:34, 21 March 2014 diff hist +140 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:32, 21 March 2014 diff hist +128 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:27, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf current
- 16:27, 21 March 2014 diff hist 0 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 16:14, 21 March 2014 diff hist +3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:09, 21 March 2014 diff hist +4 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:08, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf current
- 16:08, 21 March 2014 diff hist +3 Sputtering Recipes →W Deposition (Sputter 4)
- 11:12, 21 March 2014 diff hist 0 N File:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf current
- 11:12, 21 March 2014 diff hist 0 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 11:11, 21 March 2014 diff hist +108 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 10:54, 21 March 2014 diff hist -27 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 10:54, 21 March 2014 diff hist +50 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 15:36, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:36, 18 March 2014 diff hist 0 N File:Al-AFM-Variation-Deposition-Rate-Rev1.pdf current
- 15:36, 18 March 2014 diff hist +105 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:19, 18 March 2014 diff hist +111 E-Beam Evaporation Recipes
- 15:18, 18 March 2014 diff hist -112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:17, 18 March 2014 diff hist 0 N File:Al-thickness-variation-with-rate.jpg current
- 15:16, 18 March 2014 diff hist +112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:00, 18 March 2014 diff hist +140 E-Beam Evaporation Recipes
- 14:55, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 14:54, 18 March 2014 diff hist 0 N File:Vapor-Pressure-Chart-2.xlsx current
- 14:52, 18 March 2014 diff hist 0 File:Vapor-Pressure-Chart.xlsx Thibeault uploaded a new version of "File:Vapor-Pressure-Chart.xlsx" current
- 14:49, 18 March 2014 diff hist +18 N File:Vapor-Pressure-Chart.xlsx alphabetical order
- 11:46, 18 March 2014 diff hist +7 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:45, 18 March 2014 diff hist -36 E-Beam Evaporation Recipes →Materials Table (E-Beam #4)
- 11:44, 18 March 2014 diff hist +35 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:42, 18 March 2014 diff hist +3 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:40, 18 March 2014 diff hist +66 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:32, 18 March 2014 diff hist -65 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:26, 18 March 2014 diff hist -35 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:24, 18 March 2014 diff hist +13 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:19, 18 March 2014 diff hist +93 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:18, 18 March 2014 diff hist +25 E-Beam Evaporation Recipes
- 13:41, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:40, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 13:39, 17 March 2014 diff hist +309 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:38, 17 March 2014 diff hist -26 Sputtering Recipes →Sputter 3 Process Table
- 13:35, 17 March 2014 diff hist -599 Sputtering Recipes →Sputter 3 Process Table
- 13:34, 17 March 2014 diff hist -93 Sputtering Recipes →Sputter 3 Process Table
- 13:30, 17 March 2014 diff hist -1 Sputtering Recipes →Sputter 3 Process Table
- 13:29, 17 March 2014 diff hist +27 Sputtering Recipes →Sputter 3 Process Table
- 13:28, 17 March 2014 diff hist +4 Sputtering Recipes
- 11:57, 17 March 2014 diff hist +1,000 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:44, 12 March 2014 diff hist -241 DUV Flood Expose →Spectra Images
- 11:44, 12 March 2014 diff hist +242 Suss Aligners (SUSS MJB-3) →Detailed Specifications
- 14:12, 11 March 2014 diff hist 0 ICP-PECVD (Unaxis VLR) →Detailed Specifications
- 13:51, 11 March 2014 diff hist -58 E-Beam Evaporation Recipes →Materials Table (E-Beam #3)
- 13:46, 11 March 2014 diff hist 0 Stepper 3 (ASML DUV)
- 13:42, 11 March 2014 diff hist 0 Stepper 2 (AutoStep 200) →Detailed Specifications
- 13:41, 11 March 2014 diff hist +1 Stepper 2 (AutoStep 200) →About
- 10:45, 30 January 2014 diff hist +57 Vapor HF Etch (uETCH)
- 10:43, 30 January 2014 diff hist +1,547 N HF Vapor Etch Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub..."
- 11:34, 28 January 2014 diff hist +129 Lithography Recipes →Nanoimprinting
- 11:33, 28 January 2014 diff hist 0 N File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx current
- 10:59, 28 January 2014 diff hist +68 Lithography Recipes →Chemical Datasheets
- 10:58, 28 January 2014 diff hist 0 N File:OrmoPrime-NIL-Adhesion-RevA.pdf current
- 10:57, 28 January 2014 diff hist +49 Lithography Recipes →Chemical Datasheets
- 10:56, 28 January 2014 diff hist 0 N File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf current
- 10:13, 28 January 2014 diff hist +24 Lithography Recipes →Chemical Datasheets
- 10:12, 28 January 2014 diff hist 0 N File:Mr-UVCur21.pdf current
- 10:11, 28 January 2014 diff hist +36 Lithography Recipes →Chemical Datasheets
- 11:10, 27 January 2014 diff hist +7 Lithography Recipes →Low-K Dielectric
- 11:01, 27 January 2014 diff hist +63 Lithography Recipes →Low-K Dielectric
- 10:59, 27 January 2014 diff hist 0 N File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx current
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:42, 24 October 2013 diff hist -238 ICP Etching Recipes →Sapphire Etch (Panasonic 1)
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:38, 24 October 2013 diff hist 0 N File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf current
- 16:38, 24 October 2013 diff hist +130 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 16:36, 24 October 2013 diff hist +49 Dry Etching Recipes
- 15:25, 24 October 2013 diff hist 0 N File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf current
- 15:25, 24 October 2013 diff hist +168 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:23, 24 October 2013 diff hist +54 Dry Etching Recipes
- 13:40, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf current
- 13:40, 24 October 2013 diff hist +151 ICP Etching Recipes →GaAs-AlGaAs Etch (Panasonic 1)
- 11:34, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf current
- 11:34, 24 October 2013 diff hist +149 ICP Etching Recipes →AlGaAs Etch (Panasonic 1)
- 10:14, 24 October 2013 diff hist 0 N File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf current
- 10:13, 24 October 2013 diff hist +140 ICP Etching Recipes →GaN Etch (Panasonic 1)
- 17:09, 23 October 2013 diff hist +10 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 17:08, 23 October 2013 diff hist +46 Dry Etching Recipes
- 17:05, 23 October 2013 diff hist 0 N File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf current
- 17:05, 23 October 2013 diff hist +121 RIE Etching Recipes →RIE 2 (MRC)
- 17:04, 23 October 2013 diff hist +49 Dry Etching Recipes
- 16:40, 23 October 2013 diff hist 0 N File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf current
- 16:40, 23 October 2013 diff hist +169 RIE Etching Recipes →RIE 2 (MRC)
- 16:40, 23 October 2013 diff hist -168 RIE Etching Recipes →RIE 3 (MRC)
- 16:39, 23 October 2013 diff hist +169 RIE Etching Recipes
- 16:37, 23 October 2013 diff hist +82 Dry Etching Recipes
- 16:19, 23 October 2013 diff hist +48 Dry Etching Recipes
- 16:15, 23 October 2013 diff hist +51 Dry Etching Recipes
- 16:11, 23 October 2013 diff hist 0 N File:Panasonic1-TiW-W-Etch-Plasma-RIE-RevA.pdf current
- 16:11, 23 October 2013 diff hist +122 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 16:09, 23 October 2013 diff hist +1 Dry Etching Recipes
- 16:09, 23 October 2013 diff hist +54 Dry Etching Recipes
- 09:57, 23 October 2013 diff hist -44 RIE Etching Recipes
- 09:32, 23 October 2013 diff hist +34 RIE Etching Recipes →CdZnTe Etching (RIE 2)
- 09:32, 23 October 2013 diff hist +36 RIE Etching Recipes →AlGaAs Etching (RIE 5)
- 09:31, 23 October 2013 diff hist +36 RIE Etching Recipes →GaN Etching (RIE 5)
- 09:30, 23 October 2013 diff hist +2 ICP Etching Recipes →Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
- 09:29, 23 October 2013 diff hist +45 ICP Etching Recipes →Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
- 09:28, 23 October 2013 diff hist +32 ICP Etching Recipes →Al Etch (Panasonic 1)
- 09:28, 23 October 2013 diff hist +30 ICP Etching Recipes →Cr Etch (Panasonic 1)
- 09:27, 23 October 2013 diff hist +19 ICP Etching Recipes →Ti Etch (Panasonic 1)
- 09:27, 23 October 2013 diff hist +30 ICP Etching Recipes →AlGaAs Etch (Panasonic 1)
- 09:26, 23 October 2013 diff hist +28 ICP Etching Recipes →GaN Etch (Panasonic 1)
- 09:25, 23 October 2013 diff hist +29 ICP Etching Recipes →GaAs Etch (Panasonic 2)
- 09:25, 23 October 2013 diff hist +33 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:24, 23 October 2013 diff hist +56 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:23, 23 October 2013 diff hist +11 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:22, 23 October 2013 diff hist +39 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:16, 23 October 2013 diff hist +18 ICP Etching Recipes →InP Etch (H2 Ar)
- 15:05, 22 October 2013 diff hist 0 N File:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf current
- 15:05, 22 October 2013 diff hist 0 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:04, 22 October 2013 diff hist +174 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:01, 22 October 2013 diff hist +48 Dry Etching Recipes
- 13:30, 22 October 2013 diff hist +29 ICP Etching Recipes →SiO2 Etching (Panasonic 1)
- 13:29, 22 October 2013 diff hist +22 ICP Etching Recipes →SiNx Etching (Panasonic 2)
- 13:29, 22 October 2013 diff hist +50 ICP Etching Recipes →SiO2 Etching (Panasonic 2)
- 13:28, 22 October 2013 diff hist +10 ICP Etching Recipes →SiNx Etching (Panasonic 2)
- 11:42, 22 October 2013 diff hist +48 Dry Etching Recipes
- 11:40, 22 October 2013 diff hist 0 N File:Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf current
- 11:39, 22 October 2013 diff hist +142 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 11:20, 22 October 2013 diff hist +100 ICP Etching Recipes →SiO2 Etching (Panasonic 2)
- 11:18, 22 October 2013 diff hist 0 N File:Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf current
- 15:52, 27 September 2013 diff hist +93 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:51, 27 September 2013 diff hist +48 Dry Etching Recipes
- 15:49, 27 September 2013 diff hist 0 N File:Panasonic-1-Ti-Etch-Deep-RevA.pdf current
- 14:41, 27 September 2013 diff hist -1 Dry Etching Recipes
- 14:03, 27 September 2013 diff hist +46 Dry Etching Recipes
- 14:03, 27 September 2013 diff hist +134 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 11:56, 27 September 2013 diff hist 0 ICP Etching Recipes →Al Etch (Panasonic 1)
- 11:54, 27 September 2013 diff hist 0 ICP Etching Recipes →Al Etch (Panasonic 1)
- 11:53, 27 September 2013 diff hist 0 N File:Panasonic-1-Al-Etch-RevA.pdf current
- 11:51, 27 September 2013 diff hist +2 Dry Etching Recipes
- 11:50, 27 September 2013 diff hist +47 Dry Etching Recipes
- 11:49, 27 September 2013 diff hist +83 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:00, 27 September 2013 diff hist +11 ICP Etching Recipes →SiO2 Etching (Panasonic 1)
- 11:49, 30 August 2013 diff hist +16 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 11:48, 30 August 2013 diff hist -6 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:47, 30 August 2013 diff hist -1 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:47, 30 August 2013 diff hist -161 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:22, 30 August 2013 diff hist +48 Dry Etching Recipes