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- 10:34, 1 April 2024 diff hist +997 Wet Etching Recipes →Gold Plating Bench (Technic SEMCON 1000): added basic recipe steps for seed/plate/etch current Tag: Visual edit
- 10:27, 1 April 2024 diff hist +177 Gold Plating Bench link to recipes page current Tag: Visual edit
- 10:27, 1 April 2024 diff hist +28 Wet Etching Recipes →Gold Plating: changed name to include mfg/model Tag: Visual edit
- 17:03, 21 March 2024 diff hist +58 Stepper Recipes →Negative Resist (ASML DUV): UVN dev time current Tag: Visual edit
- 15:05, 20 March 2024 diff hist +149 MLA150 - Troubleshooting →Causes: added OAF driving off wafer current Tag: Visual edit
- 15:04, 20 March 2024 diff hist +172 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): link to Troubleshooting/OOFocus section Tag: Visual edit
- 17:27, 14 March 2024 diff hist +429 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): added FEM comment Tag: Visual edit
- 17:17, 14 March 2024 diff hist -29 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): deleted Flood Expose column Tag: Visual edit
- 03:27, 13 March 2024 diff hist -1,261 Stepper 3 (ASML DUV) removed Wiki-hosted ASML procedures, linked to gDrive procedures (access restricted) Tag: Visual edit
- 16:16, 12 March 2024 diff hist +62 Nanofab Job Postings →Process/Wafer Fab Engineer Level 3 (Staff position): not reviewing apps Tag: Visual edit
- 16:13, 12 March 2024 diff hist +48 Main Page link to Job Postings current Tag: Visual edit
- 15:47, 12 March 2024 diff hist -1,402 Template:Announcements deleted duplicates and old >2wk old annc
- 09:54, 11 March 2024 diff hist +271 ICP Etching Recipes →Through Silicon Via (TSV) etch (DSEiii): added note on TSV rocess - discuss with staff before running Tag: Visual edit
- 09:42, 11 March 2024 diff hist +9 m Staff List →Process Group current Tag: Visual edit
- 09:42, 11 March 2024 diff hist +75 Staff List →Process Group: added mission statement Tag: Visual edit
- 10:19, 9 March 2024 diff hist -1 IBD: Calibrating Optical Thickness Corrected 1050/1100 FP correction current Tag: Visual edit
- 12:54, 7 March 2024 diff hist +861 Nanofab Job Postings added R&D2 pos Tag: Visual edit
- 11:15, 7 March 2024 diff hist +526 Tube Furnace (Tystar 8300) process limits added current Tag: Visual edit
- 18:43, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf John d uploaded a new version of File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf current
- 18:35, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf John d uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf current
- 18:33, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf John d uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf
- 18:22, 5 March 2024 diff hist 0 File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf John d uploaded a new version of File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf
- 16:25, 4 March 2024 diff hist +47 m Packaging Recipes →Dicing Saw Recipes (ADT 7100)
- 13:55, 1 March 2024 diff hist +148 Oxygen Plasma System Recipes →N2/O2 Recipes: note that wafers get hotter than recipe name indicates. Tag: Visual edit
- 12:07, 1 March 2024 diff hist +3 Suss Aligners (SUSS MJB-3) →IR Aligner: removed hammamatsu current Tag: Visual edit
- 12:06, 1 March 2024 diff hist +285 Suss Aligners (SUSS MJB-3) →IR Aligner: added photo of front-to-back IR camera alignment inspection Tag: Visual edit
- 12:04, 1 March 2024 diff hist +81 N File:IR Alignment check 01 - crop.png current
- 11:52, 1 March 2024 diff hist +85 Tool List →Optical Microscopy: link to MJB-IR IR scope current Tag: Visual edit
- 11:30, 1 March 2024 diff hist +51 N File:OlympusDSX1000.jpg New photo with non-proprietary image. current
- 21:08, 29 February 2024 diff hist +19 m Field Emission SEM 2 (JEOL IT800SHL) current Tag: Visual edit
- 21:07, 29 February 2024 diff hist +419 SEM 1 (JEOL IT800SHL) →Operating Procedures: linked to CalTech stuf correction vid with tops Tag: Visual edit
- 13:46, 29 February 2024 diff hist +132 Oxygen Plasma System Recipes →N2/O2 effect on Gold contacts & Substrate Temperature: minor additions to clarify gold optical absorption Tag: Visual edit
- 12:29, 27 February 2024 diff hist +135 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): added link to GS page Tag: Visual edit
- 17:24, 23 February 2024 diff hist +14 Template:Announcements re-added "startfeed" <startfeed />
- 12:20, 23 February 2024 diff hist -23 Template:Announcements moved RIE5 below DSE and ICP1
- 12:18, 23 February 2024 diff hist -589 Template:Announcements deleted EB4, other tools up. Updated ICP1 and DSE from emails.
- 12:16, 23 February 2024 diff hist +15 m Critical Point Dryer current Tag: Visual edit
- 12:15, 23 February 2024 diff hist +182 Critical Point Dryer mention tool removed, link to QSF CPD Tag: Visual edit
- 12:13, 23 February 2024 diff hist -93 Tool List →Measurement & Characterization: deleted goniometer Tag: Visual edit
- 12:12, 23 February 2024 diff hist +189 Plasma Clean (Gasonics 2000) mention tool removed, link to YES and Pan1 Ashing current Tag: Visual edit
- 12:10, 23 February 2024 diff hist +95 SEM 1 (JEOL IT800SHL) mentioned nabity litho Tag: Visual edit
- 12:08, 23 February 2024 diff hist -19 Tool List →Direct-Write Lithography: link to SEM 1 Tag: Visual edit
- 12:08, 23 February 2024 diff hist -4 Tool List →Lithography: removed "FEI" text Tag: Visual edit
- 12:50, 16 February 2024 diff hist +69 Calculators + Utilities →Python Scripts: made scripts into header 2 Tag: Visual edit
- 15:17, 15 February 2024 diff hist +12 m DSEIII (PlasmaTherm/Deep Silicon Etcher) added model number current
- 15:15, 15 February 2024 diff hist +191 DSEIII (PlasmaTherm/Deep Silicon Etcher) added example SEM Tag: Visual edit
- 15:12, 15 February 2024 diff hist -5 Category:Inspection, Test and Characterization fixed link current Tag: Redirect target changed
- 15:10, 15 February 2024 diff hist +1 Main Page fixed Metro/Test link Tag: Visual edit
- 15:06, 15 February 2024 diff hist -6 m ICP Etching Recipes →High Rate Bosch Etch (DSEIII) Tag: Visual edit: Switched
- 15:05, 15 February 2024 diff hist +291 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): added SEM of Bosch etched posts Tag: Visual edit
- 15:00, 15 February 2024 diff hist +77 N File:DSEiii Bosch Ecth SEM Example 01.png current
- 14:58, 14 February 2024 diff hist +1 m Template:Announcements →E-Beam #4 (CHA) - UP
- 14:58, 14 February 2024 diff hist -149 Template:Announcements EB4 up
- 17:34, 13 February 2024 diff hist +373 Nanofab Job Postings Intern - thin-fils: added description Tag: Visual edit
- 17:31, 13 February 2024 diff hist +174 Nanofab Job Postings →Process/Wafer Fab Engineer (Staff position): updated Tag: Visual edit
- 17:23, 13 February 2024 diff hist +21 Nanofab Job Postings →1) Processing Technician - Thin-Film & Etch Characterizations: added "staff" postion Tag: Visual edit
- 12:56, 13 February 2024 diff hist -1,338 Template:Announcements deleted defunct announcements
- 17:44, 12 February 2024 diff hist +296 Stepper 2 (AutoStep 200) link to stepper vs contact tutorial current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +295 Stepper 1 (GCA 6300) link to stepper vs. contact PPT current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +7 m Stepper 3 (ASML DUV) →General Capabilities/Overview: fixed link Tag: Visual edit
- 17:42, 12 February 2024 diff hist 0 m File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf John d moved page File:UCSB Stepper Reticle Layout vs Wafer Layout v5.pdf to File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf without leaving a redirect: better name current
- 17:41, 12 February 2024 diff hist +295 Stepper 3 (ASML DUV) link to stepper vs. contact litho PPT Tag: Visual edit
- 17:38, 12 February 2024 diff hist +56 N File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf Demis Tutorial on Contact vs Stepper litho
- 15:39, 12 February 2024 diff hist +116 Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement minor updates current Tag: Visual edit
- 15:37, 12 February 2024 diff hist +27 Ellipsometer (Woollam) →Operating Procedures: updated oxide pre-meas name to "refl enhance" current Tag: Visual edit
- 12:41, 10 February 2024 diff hist +80 Photolithography - Improving Adhesion Photoresist Adhesion →HMDS Process for PR Improving Adhesion: dehydration/O2 pasma midifcation current Tag: Visual edit
- 15:31, 7 February 2024 diff hist 0 m Dry Etching Recipes corrected links current Tag: Visual edit
- 15:30, 7 February 2024 diff hist +4 Dry Etching Recipes corected Panaosnic model numbers + links Tag: Visual edit
- 15:29, 7 February 2024 diff hist 0 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): changed model number to E646V Tag: Visual edit
- 15:28, 7 February 2024 diff hist +1 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): changed model number to E626I
- 15:19, 7 February 2024 diff hist +1 Tool List →ICP-RIE: corrected Pan model numbers & links
- 15:19, 7 February 2024 diff hist +42 N ICP Etch 2 (Panasonic E640) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current Tag: New redirect
- 15:19, 7 February 2024 diff hist 0 m ICP Etch 2 (Panasonic E626I) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current
- 15:18, 7 February 2024 diff hist +14 ICP Etch 2 (Panasonic E626I) added model number to tool info
- 15:18, 7 February 2024 diff hist +42 N ICP Etch 1 (Panasonic E626I) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current Tag: New redirect
- 15:18, 7 February 2024 diff hist 0 m ICP Etch 1 (Panasonic E646V) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current
- 15:18, 7 February 2024 diff hist +13 ICP Etch 1 (Panasonic E646V) added model
- 21:51, 5 February 2024 diff hist +177 Packaging Recipes →Dicing Saw Recipes (ADT 7100): mockup of dicing alignment guides (ASCII) Tag: Visual edit
- 21:11, 5 February 2024 diff hist +828 Packaging Recipes →Dicing Saw Recipes (ADT 7100): Added dicing instructions Tag: Visual edit
- 21:10, 5 February 2024 diff hist +92 N File:Example Dicing Instructions for UC Santa Barbara v1.pptx Example Dicing Instructions for UC Santa Barbara v1.pptx Demis D John, 2024-02 current
- 15:41, 4 February 2024 diff hist +93 MLA150 - Design Guidelines →Limitations & Workarounds: added screenshot of "Set Zero" button current Tag: Visual edit
- 15:40, 4 February 2024 diff hist +43 N File:MLA Set Zero button IMG 2352.jpg current
- 22:06, 2 February 2024 diff hist +16 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated link Tag: Visual edit
- 22:05, 2 February 2024 diff hist +2,449 MLA150 - Design Guidelines →Limitations: X-Y and Rotational alignment updates Tag: Visual edit
- 21:41, 2 February 2024 diff hist -160 m MLA150 - Troubleshooting minor additons/grammar Tag: Visual edit
- 09:08, 31 January 2024 diff hist +246 ICP Etching Recipes →Through Silicon Via (TSV) etch (DSEiii): what to do if see black grass Tag: Visual edit
- 09:06, 31 January 2024 diff hist +135 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned Al2O3 selectivity Tag: Visual edit
- 09:03, 31 January 2024 diff hist +393 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned using hardmask for patterning to edge, SiO2 selectivity mentioned Tag: Visual edit
- 16:24, 30 January 2024 diff hist +814 Thermal Processing Recipes →Tystar 8300: added wafer cleaning current Tag: Visual edit
- 09:15, 23 January 2024 diff hist +10 Template:Announcements →Gowning Refresh: added date to title
- 09:15, 23 January 2024 diff hist -641 Template:Announcements deleted gca maint
- 13:58, 22 January 2024 diff hist -203 Stepper 3 (ASML DUV) →Design Tools: moved JobCreator into software section, highlighted Mask Making page Tag: Visual edit
- 11:08, 17 January 2024 diff hist +235 Template:Announcements Oxford cobra sfotware bugs
- 11:07, 17 January 2024 diff hist -368 Template:Announcements EB1 UP, delete ASML UP
- 18:41, 12 January 2024 diff hist +377 Stepper 3 (ASML DUV) →Online Video Trainings: updated panopto login instructions Tag: Visual edit
- 18:39, 12 January 2024 diff hist +39 N File:2024-01 ASML Running Job Thumbnail.png current
- 18:35, 12 January 2024 diff hist +28 N File:2024-01 PanOpto - UCSB Login.png current
- 18:33, 12 January 2024 diff hist +33 N File:2024-01 PanOpto - Canvas dropdown.png current
- 18:00, 11 January 2024 diff hist +224 Template:Announcements ASML PM Jan 29
- 14:47, 11 January 2024 diff hist +255 Stepper 2 (AutoStep 200) →Operating Procedures: added sub sections Tag: Visual edit