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- 17:34, 13 February 2024 diff hist +373 Nanofab Job Postings Intern - thin-fils: added description Tag: Visual edit
- 17:31, 13 February 2024 diff hist +174 Nanofab Job Postings →Process/Wafer Fab Engineer (Staff position): updated Tag: Visual edit
- 17:23, 13 February 2024 diff hist +21 Nanofab Job Postings →1) Processing Technician - Thin-Film & Etch Characterizations: added "staff" postion Tag: Visual edit
- 12:56, 13 February 2024 diff hist -1,338 Template:Announcements deleted defunct announcements
- 17:44, 12 February 2024 diff hist +296 Stepper 2 (AutoStep 200) link to stepper vs contact tutorial current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +295 Stepper 1 (GCA 6300) link to stepper vs. contact PPT current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +7 m Stepper 3 (ASML DUV) →General Capabilities/Overview: fixed link Tag: Visual edit
- 17:42, 12 February 2024 diff hist 0 m File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf John d moved page File:UCSB Stepper Reticle Layout vs Wafer Layout v5.pdf to File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf without leaving a redirect: better name current
- 17:41, 12 February 2024 diff hist +295 Stepper 3 (ASML DUV) link to stepper vs. contact litho PPT Tag: Visual edit
- 17:38, 12 February 2024 diff hist +56 N File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf Demis Tutorial on Contact vs Stepper litho
- 15:39, 12 February 2024 diff hist +116 Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement minor updates current Tag: Visual edit
- 15:37, 12 February 2024 diff hist +27 Ellipsometer (Woollam) →Operating Procedures: updated oxide pre-meas name to "refl enhance" current Tag: Visual edit
- 12:41, 10 February 2024 diff hist +80 Photolithography - Improving Adhesion Photoresist Adhesion →HMDS Process for PR Improving Adhesion: dehydration/O2 pasma midifcation current Tag: Visual edit
- 15:31, 7 February 2024 diff hist 0 m Dry Etching Recipes corrected links current Tag: Visual edit
- 15:30, 7 February 2024 diff hist +4 Dry Etching Recipes corected Panaosnic model numbers + links Tag: Visual edit
- 15:29, 7 February 2024 diff hist 0 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): changed model number to E646V Tag: Visual edit
- 15:28, 7 February 2024 diff hist +1 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): changed model number to E626I
- 15:19, 7 February 2024 diff hist +1 Tool List →ICP-RIE: corrected Pan model numbers & links
- 15:19, 7 February 2024 diff hist +42 N ICP Etch 2 (Panasonic E640) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current Tag: New redirect
- 15:19, 7 February 2024 diff hist 0 m ICP Etch 2 (Panasonic E626I) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current
- 15:18, 7 February 2024 diff hist +14 ICP Etch 2 (Panasonic E626I) added model number to tool info
- 15:18, 7 February 2024 diff hist +42 N ICP Etch 1 (Panasonic E626I) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current Tag: New redirect
- 15:18, 7 February 2024 diff hist 0 m ICP Etch 1 (Panasonic E646V) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current
- 15:18, 7 February 2024 diff hist +13 ICP Etch 1 (Panasonic E646V) added model
- 21:51, 5 February 2024 diff hist +177 Packaging Recipes →Dicing Saw Recipes (ADT 7100): mockup of dicing alignment guides (ASCII) Tag: Visual edit
- 21:11, 5 February 2024 diff hist +828 Packaging Recipes →Dicing Saw Recipes (ADT 7100): Added dicing instructions Tag: Visual edit
- 21:10, 5 February 2024 diff hist +92 N File:Example Dicing Instructions for UC Santa Barbara v1.pptx Example Dicing Instructions for UC Santa Barbara v1.pptx Demis D John, 2024-02 current
- 15:41, 4 February 2024 diff hist +93 MLA150 - Design Guidelines →Limitations & Workarounds: added screenshot of "Set Zero" button current Tag: Visual edit
- 15:40, 4 February 2024 diff hist +43 N File:MLA Set Zero button IMG 2352.jpg current
- 22:06, 2 February 2024 diff hist +16 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated link Tag: Visual edit
- 22:05, 2 February 2024 diff hist +2,449 MLA150 - Design Guidelines →Limitations: X-Y and Rotational alignment updates Tag: Visual edit
- 21:41, 2 February 2024 diff hist -160 m MLA150 - Troubleshooting minor additons/grammar Tag: Visual edit
- 09:08, 31 January 2024 diff hist +246 ICP Etching Recipes →Through Silicon Via (TSV) etch (DSEiii): what to do if see black grass Tag: Visual edit
- 09:06, 31 January 2024 diff hist +135 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned Al2O3 selectivity Tag: Visual edit
- 09:03, 31 January 2024 diff hist +393 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned using hardmask for patterning to edge, SiO2 selectivity mentioned Tag: Visual edit
- 16:24, 30 January 2024 diff hist +814 Thermal Processing Recipes →Tystar 8300: added wafer cleaning current Tag: Visual edit
- 09:15, 23 January 2024 diff hist +10 Template:Announcements →Gowning Refresh: added date to title
- 09:15, 23 January 2024 diff hist -641 Template:Announcements deleted gca maint
- 13:58, 22 January 2024 diff hist -203 Stepper 3 (ASML DUV) →Design Tools: moved JobCreator into software section, highlighted Mask Making page Tag: Visual edit
- 11:08, 17 January 2024 diff hist +235 Template:Announcements Oxford cobra sfotware bugs
- 11:07, 17 January 2024 diff hist -368 Template:Announcements EB1 UP, delete ASML UP
- 18:41, 12 January 2024 diff hist +377 Stepper 3 (ASML DUV) →Online Video Trainings: updated panopto login instructions Tag: Visual edit
- 18:39, 12 January 2024 diff hist +39 N File:2024-01 ASML Running Job Thumbnail.png current
- 18:35, 12 January 2024 diff hist +28 N File:2024-01 PanOpto - UCSB Login.png current
- 18:33, 12 January 2024 diff hist +33 N File:2024-01 PanOpto - Canvas dropdown.png current
- 18:00, 11 January 2024 diff hist +224 Template:Announcements ASML PM Jan 29
- 14:47, 11 January 2024 diff hist +255 Stepper 2 (AutoStep 200) →Operating Procedures: added sub sections Tag: Visual edit
- 14:38, 11 January 2024 diff hist +80 N Stepper 2 (Autostep 200) - Job Programming John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current Tag: New redirect
- 14:38, 11 January 2024 diff hist 0 m Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current
- 08:51, 11 January 2024 diff hist +16 Template:Announcements →DUV Flood: UP with new procedure
- 08:49, 11 January 2024 diff hist +289 Template:Announcements EBeam1 down/update
- 08:28, 11 January 2024 diff hist +257 Template:Announcements asml Up, gown refresh
- 21:55, 9 January 2024 diff hist +1,038 Services added links to Supplies to Bring FAQ page, and reworded heading titles for better TOC display, current Tag: Visual edit
- 18:19, 4 January 2024 diff hist -4 Template:Announcements →Job Opening: Process Engineer
- 18:19, 4 January 2024 diff hist +7 Template:Announcements →DUV Flood: UP with new procedure
- 18:18, 4 January 2024 diff hist 0 Template:Announcements →DUV Flood: UP with new procedure
- 18:17, 4 January 2024 diff hist +1 Template:Announcements
- 18:17, 4 January 2024 diff hist 0 Template:Announcements
- 18:16, 4 January 2024 diff hist +27 N User:John d Demis D. John redirect to Demis_D._John current Tags: New redirect Visual edit: Switched
- 17:51, 4 January 2024 diff hist +185 Template:Announcements asml update
- 17:41, 4 January 2024 diff hist -537 Template:Announcements updated DUV flood is UP, deleted old lab shutdown and PECVD maint messages
- 17:21, 4 January 2024 diff hist +224 Tool List Title --> Measurement & Characterization & description text Tag: Visual edit
- 17:15, 4 January 2024 diff hist -19 MediaWiki:Sidebar changed Inspection/Test/Char --> Metrology & Test current
- 14:44, 4 January 2024 diff hist +155 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): link to CAD files section, removed Vernier link (since its on CAD files section) current Tag: Visual edit
- 14:40, 4 January 2024 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds current
- 11:56, 4 January 2024 diff hist +15 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): placeholder for reticle handbook Tag: Visual edit
- 11:43, 4 January 2024 diff hist +457 Surface Analysis (KLA/Tencor Surfscan) →Documentation: added info, and inof on LPC wafers Tag: Visual edit
- 11:36, 4 January 2024 diff hist +133 N Surfscan Errors and Workarounds added keuyboard workaround current Tag: Visual edit
- 11:34, 4 January 2024 diff hist +95 Surface Analysis (KLA/Tencor Surfscan) reorg, remove old SOP, replaced with new PDF SOP's for each wafer size Tag: Visual edit
- 11:24, 22 December 2023 diff hist +17 Stepper 3 (ASML DUV) →Process Information: made wafer bow it's own section Tag: Visual edit
- 15:09, 6 December 2023 diff hist +694 Laser Etch Monitoring →Limitations: added laser spot wize current Tag: Visual edit
- 17:57, 5 December 2023 diff hist +64 Dry Etching Recipes FL-ICP SiN etch linked Tag: Visual edit
- 17:56, 5 December 2023 diff hist +462 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added Bill's SiN etch recipe Tag: Visual edit
- 10:28, 1 December 2023 diff hist +35 m Stepper 3 (ASML DUV) →Process Information: DO NOT RUN wafer with too high bow Tag: Visual edit
- 12:12, 30 November 2023 diff hist +669 N YES Recipe Screenshots: STD-O2 screenshots of "STD-O2-180C-3KW-30sec" and "STD-O2-100C-3KW-15min" current Tag: Visual edit
- 12:11, 30 November 2023 diff hist +40 N File:STD-O2-180C-3KW-30sec - steps.jpg current
- 12:10, 30 November 2023 diff hist +41 N File:STD-O2-180C-3KW-30sec - header.jpg current
- 12:09, 30 November 2023 diff hist +41 N File:STD-O2-100C-3KW-15min - steps.jpg current
- 12:09, 30 November 2023 diff hist +42 N File:STD-O2-100C-3KW-15min - header.jpg current
- 12:08, 30 November 2023 diff hist +725 N YES Recipe Screenshots: STD-N2-O2 screenshots of "STD-N2-O2-100C-0.7KW-15sec" and "STD-N2-O2-180C-3KW-1min" current Tag: Visual edit
- 12:07, 30 November 2023 diff hist +48 N File:STD-N2-O2-100C-0.7KW-15sec - steps.jpg current
- 12:06, 30 November 2023 diff hist +49 N File:STD-N2-O2-100C-0.7KW-15sec - header.jpg current
- 12:05, 30 November 2023 diff hist +56 N File:STD-N2-O2-180C-3KW-1min - steps.jpg current
- 12:03, 30 November 2023 diff hist +59 N File:STD-N2-O2-180C-3KW-1min - header.jpg current
- 12:02, 30 November 2023 diff hist +158 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): links to recipe screenshots for both N2-O2 & O2 Tag: Visual edit
- 17:53, 25 November 2023 diff hist 0 Usage Data and Statistics →Numbers of Annual Users: typo year current Tag: Visual edit
- 13:09, 22 November 2023 diff hist +73 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added "FL-ICP" for SEO current Tag: Visual edit
- 12:31, 22 November 2023 diff hist +237 Plasma Clean (YES EcoClean) →Etch Method: mentioned back of wafer exposure to gas current Tag: Visual edit
- 16:02, 21 November 2023 diff hist +221 MLA150 - Design Guidelines →Limitations: updated failed rotation text Tag: Visual edit
- 13:38, 21 November 2023 diff hist +704 Plasma Clean (YES EcoClean) images of carrier wafers Tag: Visual edit
- 13:36, 21 November 2023 diff hist +88 N File:YES Pocket Carrier Wafers - 50mm pocket.jpg current
- 13:35, 21 November 2023 diff hist +76 N File:YES Pocket Carrier Wafers - 90mm pocket.jpg current
- 08:59, 21 November 2023 diff hist +288 Frequently Asked Questions →What Supplies do I need to bring to the lab?: updates current Tag: Visual edit
- 22:09, 16 November 2023 diff hist +1 Template:Announcements moved PECVD2 annc up
- 22:06, 16 November 2023 diff hist 0 m Template:News current
- 22:02, 16 November 2023 diff hist 0 Template:News →NanoFab Featured in Regional Tech Videos: images fix with underscores (for RSS feed)
- 17:59, 16 November 2023 diff hist -7 m Template:Announcements →Year End Shutdown
- 17:59, 16 November 2023 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx current
- 16:46, 16 November 2023 diff hist +65 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added Ru oxidation in O2-only Tag: Visual edit
- 16:44, 16 November 2023 diff hist +125 Plasma Clean (YES EcoClean) →Recipes: preview of recipes page. Tag: Visual edit
- 10:26, 9 November 2023 diff hist +56 Template:News added videos signature for RSS feed
- 12:22, 8 November 2023 diff hist 0 File:Techtopia Vid - Thumbnail PlayButton.jpg John d uploaded a new version of File:Techtopia Vid - Thumbnail PlayButton.jpg current
- 12:21, 8 November 2023 diff hist 0 File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg John d uploaded a new version of File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg current
- 12:11, 8 November 2023 diff hist +355 Template:News →NanoFab Featured in Regional Tech Videos: table with thumbnail links to videos
- 11:33, 8 November 2023 diff hist +52 N File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg
- 11:32, 8 November 2023 diff hist +42 N File:Techtopia Vid - Thumbnail PlayButton.jpg
- 11:31, 8 November 2023 diff hist +2 m Template:News →NanoFab Featured in Regional Tech Videos
- 11:30, 8 November 2023 diff hist +442 Template:News NanoFab video promos
- 14:59, 7 November 2023 diff hist -13 Template:News →NanoFab staff awarded Goleta's Innovator of the Year 2023
- 14:58, 7 November 2023 diff hist +636 Template:News Demis innovator of the year
- 14:52, 7 November 2023 diff hist -157 Template:Announcements removed qhitespac and internal comments (since vraj's script was pushing them to the bottom, instead of top where they used to be for human-readable instructions))
- 14:49, 7 November 2023 diff hist -636 Template:Announcements lab card/iris access, Symmetry app and updates
- 14:41, 7 November 2023 diff hist +1,195 Main Page BIG update - pasted from Homepage_Draft1
- 18:25, 6 November 2023 diff hist +363 Frequently Asked Questions →How do I get my files from the NanoFab computers?: added “when will my FYP a folder show up?” Tag: Visual edit
- 20:55, 5 November 2023 diff hist -2 Wet Etching Recipes set "wet ethcing references" to H1 level, instead of being a sub-set of the Wet Etchign Table Tag: Visual edit
- 15:47, 2 November 2023 diff hist +65 m MLA150 - Troubleshooting →Stitching Tag: Visual edit
- 15:47, 2 November 2023 diff hist +321 MLA150 - Troubleshooting →Stitching: mention fix by overexposure + CD Bias Tag: Visual edit
- 15:28, 2 November 2023 diff hist +1 m MLA150 - Troubleshooting →Stitching Tag: Visual edit
- 15:28, 2 November 2023 diff hist +234 MLA150 - Troubleshooting →Stitching: added SEM of 400nm line/space with 50nm stitching bump Tag: Visual edit
- 15:26, 2 November 2023 diff hist +59 N File:MLA150 - 160D0F15 stitching notch - 01.jpg current
- 15:19, 2 November 2023 diff hist +772 MLA150 - Troubleshooting stitching secviton on y-oriented ridges Tag: Visual edit
- 15:14, 2 November 2023 diff hist +139 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: descriptions of the links Tag: Visual edit
- 13:59, 2 November 2023 diff hist +127 Homepage Draft1 moved "other links" into white-bg single-cells current
- 17:15, 1 November 2023 diff hist +58 Aidan Hopkins →Current Work: fixed broken tool links current Tag: Visual edit
- 17:09, 1 November 2023 diff hist +68 Maskless Aligner (Heidelberg MLA150) →Operating Procedures: mention user manuals Tag: Visual edit
- 17:02, 1 November 2023 diff hist -172 Microscopes →Microscope #1: Olympus BHMJL (Room 1111): deleted link to Olympus user manual (file deleted) current Tag: Visual edit
- 12:19, 1 November 2023 diff hist +222 UCSB Nanofab Wiki:About added NanoFab-it email link & website links. current
- 16:10, 31 October 2023 diff hist -1,748 MLA150 - Troubleshooting →Greyscale Lithography Limitations: moved content to Greyscale design guidelines page and linked to that. Tag: Visual edit
- 16:09, 31 October 2023 diff hist +1,888 MLA150 - Design Guidelines →Greyscale Lithography: pasted Limitations from Troubleshootig page Tag: Visual edit
- 16:05, 31 October 2023 diff hist +2,028 MLA150 - Design Guidelines →Greyscale Lithography: added updates and suggestions Tag: Visual edit
- 08:36, 31 October 2023 diff hist +8 Ellipsometer (Woollam) Force table of contents display
- 20:49, 30 October 2023 diff hist +4 Template:News italics old article link
- 20:47, 30 October 2023 diff hist -5 Template:News remove HR
- 20:47, 30 October 2023 diff hist +4 Homepage Draft1 Tag: Visual edit: Switched
- 20:41, 30 October 2023 diff hist +3 Homepage Draft1 Tag: Visual edit
- 20:40, 30 October 2023 diff hist +458 Template:News - Older Articles pasted old articles from `news` current
- 20:39, 30 October 2023 diff hist -2,788 Template:News moved older articles to "old articles page"
- 20:38, 30 October 2023 diff hist +79 Template:News link to older articles
- 20:35, 30 October 2023 diff hist +7,781 N Template:News - Older Articles pasted news from ~2022 bthibeault culling
- 20:30, 30 October 2023 diff hist +10 m Calculators + Utilities →KLayout Tag: Visual edit
- 20:28, 30 October 2023 diff hist -14 m Calculators + Utilities →KLayout Design Tips Tag: Visual edit
- 20:27, 30 October 2023 diff hist -1 MediaWiki:Sidebar merge "NanoFab usage" into "data+info" section
- 20:26, 30 October 2023 diff hist -28 MediaWiki:Sidebar moved Process Control & Calcs --> "Data and Info" section
- 20:23, 30 October 2023 diff hist -167 Template:Homepage Topbanners deleted COVID policies current
- 20:20, 30 October 2023 diff hist -16 Homepage Draft1 Tag: Visual edit: Switched
- 20:17, 30 October 2023 diff hist +80 Homepage Draft1 removed right sidebar (redundant links), moved links into main table
- 20:07, 30 October 2023 diff hist +5 Homepage Draft1 `featuredArticle`-->`Homepage_GeneralInfo`
- 20:06, 30 October 2023 diff hist +1,269 N Template:Homepage GeneralInfo pasted from template `FeaturedArticle` current
- 20:03, 30 October 2023 diff hist +58 Homepage Draft1 recipes table width = 100%, vertical-align=top
- 19:59, 30 October 2023 diff hist +901 Homepage Draft1 added table of equip/recipes/data Tag: Visual edit
- 19:50, 30 October 2023 diff hist +17 Homepage Draft1 `nav2` --> `Homepage_BottomBanner` Tag: Visual edit: Switched
- 19:50, 30 October 2023 diff hist +477 N Template:Homepage BottomBanner pasted from template `nav2`, change contact to NanoFab-it@ece... current
- 19:46, 30 October 2023 diff hist +16 Homepage Draft1 cahnged `nav` template to `Homepage_Topbanners`
- 19:44, 30 October 2023 diff hist +1,780 N Template:Homepage Topbanners pasted from `nav` template
- 19:37, 30 October 2023 diff hist +106 Template:Announcements →Job Opening: Process Engineer: link to job openings page
- 14:56, 27 October 2023 diff hist +762 Frequently Asked Questions added Net ID PW reset instructions (from Claudia email) 2023-10-27 Tag: Visual edit
- 10:34, 27 October 2023 diff hist -2 MLA150 - Design Guidelines →Alignment Marks Tag: Visual edit
- 10:33, 27 October 2023 diff hist +219 MLA150 - Design Guidelines →Automatic Alignment: mentioned expose bitmaps Tag: Visual edit
- 14:55, 26 October 2023 diff hist +535 Nanofab Job Postings added Process Engineer position 2023-10 Tag: Visual edit
- 10:21, 18 October 2023 diff hist -8 Template:Announcements →ProbeStation scheduled IT maintenance: removed "hello all" and bulleted the dates
- 16:57, 16 October 2023 diff hist +17 m Measurements and Imaging with Amscope Camera - Quickstart Usage Guide figure caption clarify current Tag: Visual edit
- 12:41, 16 October 2023 diff hist +39 m Microscopes Text replacement - "Amscope Quickstart Usage Guide" to "Measurements and Imaging with Amscope Camera - Quickstart Usage Guide"
- 12:41, 16 October 2023 diff hist +117 m UCSB NanoFab Microscope Training Text replacement - "Amscope Quickstart Usage Guide" to "Measurements and Imaging with Amscope Camera - Quickstart Usage Guide" current
- 12:39, 16 October 2023 diff hist +83 N Amscope Quickstart Usage Guide John d moved page Amscope Quickstart Usage Guide to Measurements and Imaging with Amscope Camera - Quickstart Usage Guide: more descriptive title for printing current Tag: New redirect
- 12:39, 16 October 2023 diff hist 0 m Measurements and Imaging with Amscope Camera - Quickstart Usage Guide John d moved page Amscope Quickstart Usage Guide to Measurements and Imaging with Amscope Camera - Quickstart Usage Guide: more descriptive title for printing
- 12:28, 16 October 2023 diff hist +247 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide camera rotation Tag: Visual edit
- 13:53, 13 October 2023 diff hist +128 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Swabbing: remove more rather than less current Tag: Visual edit
- 14:52, 12 October 2023 diff hist +10 m Nanofab New User Onboarding current Tag: Visual edit
- 11:44, 11 October 2023 diff hist +14 Template:Announcements →Unaxis ICP-PECVD is DOWN: changed to UP
- 12:13, 4 October 2023 diff hist +1 m Template:News
- 12:13, 4 October 2023 diff hist +434 Template:News added chips act MEC award
- 12:10, 4 October 2023 diff hist +5 m News Feed current
- 12:07, 4 October 2023 diff hist +2 m News Feed →CHIPS Act Award Announced: UCSB NanoFab Tag: Visual edit
- 12:06, 4 October 2023 diff hist +415 News Feed chips act
- 14:51, 29 September 2023 diff hist +321 Stepper 3 (ASML DUV) →Online Video Trainings: privatized the Video Trianings, note on how to reaquire access. Tag: Visual edit
- 11:08, 28 September 2023 diff hist +210 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added proces snotes / 99% PR mask issue Tag: Visual edit
- 16:02, 27 September 2023 diff hist 0 m Usage Data and Statistics →Numbers of Annual Users Tag: Visual edit
- 11:46, 27 September 2023 diff hist 0 m Nanofab Staff Internal Pages Protected "Nanofab Staff Internal Pages" ([Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite))
- 09:37, 27 September 2023 diff hist +62 Nanofab New User Onboarding silva's corrections Tag: Visual edit
- 09:31, 27 September 2023 diff hist -82 Staff List moved Aidan --> Equip, deleted Lingg Tag: Visual edit
- 20:48, 26 September 2023 diff hist -22 Holographic Lith/PL Setup (Custom) cusotme system, updated supervisor current
- 20:45, 26 September 2023 diff hist +13 Photoluminescence PL Setup (Custom) current
- 20:45, 26 September 2023 diff hist +29 Photoluminescence PL Setup (Custom)
- 20:45, 26 September 2023 diff hist -45 Photoluminescence PL Setup (Custom) supervisor = Demis
- 20:43, 26 September 2023 diff hist +113 Holographic Lith/PL Setup (Custom) →Detailed Specifications: minor updates to specs Tag: Visual edit
- 11:51, 26 September 2023 diff hist +23 Nanofab Staff Internal Pages moved onboarding to new "administration" section Tag: Visual edit
- 15:41, 25 September 2023 diff hist +2,217 N Nanofab New User Onboarding inital page Tag: Visual edit
- 14:49, 25 September 2023 diff hist +56 Nanofab Job Postings all positions filled Tag: Visual edit
- 13:47, 25 September 2023 diff hist +226 Nanofab Staff Internal Pages →Useful UCSB Pages: link to New User Onboarding pages Tag: Visual edit
- 14:11, 22 September 2023 diff hist +19 m GCA 6300 Mask Making Guidance current
- 14:09, 22 September 2023 diff hist +15 m Autostep 200 Mask Making Guidance
- 14:08, 22 September 2023 diff hist +122 Contact Aligner (SUSS MA-6) →Documentation: link to UCSB mask ordering procedure current Tag: Visual edit
- 14:08, 22 September 2023 diff hist +122 Suss Aligners (SUSS MJB-3) →Documentation: link to mask ordering info for UCSB users Tag: Visual edit
- 14:06, 22 September 2023 diff hist +110 Autostep 200 Mask Making Guidance link to UCSB purchasing info Tag: Visual edit
- 14:06, 22 September 2023 diff hist +81 GCA 6300 Mask Making Guidance link to purchainf for UCSB users Tag: Visual edit
- 14:05, 22 September 2023 diff hist +941 N Photomask Ordering Procedure for UCSB Users pasted procedure from email current Tag: Visual edit
- 21:39, 21 September 2023 diff hist +21 IBD: Calibrating Optical Thickness added category Process
- 21:36, 21 September 2023 diff hist +145 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) current Tag: Visual edit
- 21:33, 21 September 2023 diff hist +10 Ion Beam Deposition (Veeco NEXUS) →Recipes Tag: Visual edit
- 21:32, 21 September 2023 diff hist +12 Laser Etch Monitoring added CObra to location list Tag: Visual edit
- 21:32, 21 September 2023 diff hist +1,242 Laser Etch Monitoring added Limitations section Tag: Visual edit
- 18:32, 20 September 2023 diff hist 0 Template:News fixed links
- 18:31, 20 September 2023 diff hist +143 Template:News new JEOL SEM's
- 18:26, 20 September 2023 diff hist +1,829 N Homepage Draft1 pasted Main_Page source code
- 16:46, 20 September 2023 diff hist +308 Holographic Lith/PL Setup (Custom) header level set correctly, link to recipes page Tag: Visual edit
- 06:44, 19 September 2023 diff hist +22 Stepper Recipes →Positive Resist (ASML DUV): UV26 updates from data sheet Tag: Visual edit
- 17:15, 15 September 2023 diff hist +150 IBD: Calibrating Optical Thickness fixed formula newlines Tag: Visual edit: Switched
- 17:08, 15 September 2023 diff hist +105 IBD: Calibrating Optical Thickness formatting updates to equations Tag: Visual edit
- 17:03, 15 September 2023 diff hist +20 m IBD: Calibrating Optical Thickness Tag: Visual edit
- 17:03, 15 September 2023 diff hist +158 IBD: Calibrating Optical Thickness added publication policy Tag: Visual edit
- 15:16, 15 September 2023 diff hist +898 Calculators + Utilities →CAD Design Tips: minor updates, mentioend AutoCAD Tag: Visual edit
- 10:41, 15 September 2023 diff hist +513 ASML 5500: Recovering from an Error updated, linked to Error Logs section current Tag: Visual edit
- 10:36, 15 September 2023 diff hist +31 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Logs: made name more descriptive current Tag: Visual edit
- 13:02, 13 September 2023 diff hist -12 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Exposing with corrected Focus Offset from IQC Tag: Visual edit: Switched
- 12:59, 13 September 2023 diff hist +17 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings Tag: Visual edit
- 12:55, 13 September 2023 diff hist +52 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration explain software login Tag: Visual edit
- 12:54, 13 September 2023 diff hist +5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: indent image Tag: Visual edit: Switched
- 12:52, 13 September 2023 diff hist -3 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: moved IQC screenshot up Tag: Visual edit
- 12:50, 13 September 2023 diff hist 0 File:ASML IQC Focus Mean Correction screenshot.jpg John d uploaded a new version of File:ASML IQC Focus Mean Correction screenshot.jpg current
- 12:46, 13 September 2023 diff hist +4 m Stepper 3 (ASML DUV) →Process Information Tag: Visual edit
- 12:45, 13 September 2023 diff hist +546 Stepper 3 (ASML DUV) →Process Information: Updated Wafer Bow requirements Tag: Visual edit
- 11:17, 13 September 2023 diff hist +1,395 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added error log reading section Tag: Visual edit
- 11:09, 13 September 2023 diff hist +81 N File:ASML Stepper 3 - HELP button error log screenshot.png current
- 15:33, 12 September 2023 diff hist +14 Tool List →Electron Microscopy: renamed and fixed link for SEM2 Tag: Visual edit
- 15:32, 12 September 2023 diff hist -1,849 Field Emission SEM 2 (JEOL IT800SHL) copied page from SEM1, linked to SEM1 page.
- 15:20, 12 September 2023 diff hist +50 N Field Emission SEM 2 (JEOL 7600F) John d moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL): new tool., old tool replaced current Tag: New redirect
- 15:20, 12 September 2023 diff hist 0 m Field Emission SEM 2 (JEOL IT800SHL) John d moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL): new tool., old tool replaced
- 08:14, 12 September 2023 diff hist +45 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings Tag: Visual edit
- 16:46, 11 September 2023 diff hist +436 NanoFab Process Group Examples for Users section, with Links to Example Trello Job Board & example google drive folder. current Tag: Visual edit
- 10:08, 9 September 2023 diff hist +299 Oxygen Plasma System Recipes →N2/O2 Recipes: clarified recipe renaming, and hearing of wafers Tag: Visual edit
- 15:02, 6 September 2023 diff hist -14 m Template:Announcements →Dicing Saw (ADT) Upgrade 10/9 - PLEASE READ: deleted "PLEASE READ"
- 09:10, 2 September 2023 diff hist +951 KLayout Design Tips How to print text Tag: Visual edit
- 09:02, 2 September 2023 diff hist -25 m Calculators + Utilities →KLayout Tag: Visual edit
- 15:33, 28 August 2023 diff hist +42 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:: explained Quick vs Detailed Tag: Visual edit
- 14:53, 28 August 2023 diff hist +9 m ICP Etching Recipes →Through Silicon Via etch (DSEiii) Tag: Visual edit
- 14:52, 28 August 2023 diff hist +164 ICP Etching Recipes →Through Silicon Via etch (DSEiii): added link to publication policy Tag: Visual edit
- 14:43, 28 August 2023 diff hist +25 ICP Etching Recipes →Through Silicon Via etch (DSEiii): mention PR thickness requirement Tag: Visual edit
- 14:36, 28 August 2023 diff hist +26 Stepper 2 (AutoStep 200) Operating Procedures heading for useful links Tag: Visual edit
- 14:34, 28 August 2023 diff hist +251 Stepper 2 (AutoStep 200) Operating Procedures links to other pages at top Tag: Visual edit
- 17:16, 21 August 2023 diff hist +4 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
- 17:16, 21 August 2023 diff hist +149 Frequently Asked Questions →Publications acknowledging the Nanofab: link to LIGO papers with >1000 authors Tag: Visual edit
- 11:14, 20 August 2023 diff hist +84 Stepper 3 (ASML DUV) →Process Information: added maximu. Dose & disallowed EVL PR’s Tag: Visual edit
- 11:08, 20 August 2023 diff hist +177 Stepper 3 (ASML DUV) Added KrF and some more info on piece part, and removed unnecessary heading Tag: Visual edit
- 10:07, 15 August 2023 diff hist +10 MediaWiki:Sidebar Added link to process control data pages
- 10:04, 15 August 2023 diff hist +134 Process Group - Process Control Data move TOC below intro Tag: Visual edit: Switched
- 10:03, 15 August 2023 diff hist +139 Process Group - Process Control Data description of process control data
- 09:58, 15 August 2023 diff hist +61 MediaWiki:Sidebar Added link to process control data pages
- 09:56, 9 August 2023 diff hist +183 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated that X-Y alignment may work, just not rotation. Tag: Visual edit
- 07:14, 9 August 2023 diff hist -16 Oxygen Plasma System Recipes →O2-Only Recipes: removed "To be added", as these recipes are currently on the tool Tag: Visual edit
- 17:07, 8 August 2023 diff hist +443 Sputtering Recipes added Sputter 3 ignition issues Tag: Visual edit