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- 17:34, 13 February 2024 diff hist +373 Nanofab Job Postings Intern - thin-fils: added description Tag: Visual edit
- 17:31, 13 February 2024 diff hist +174 Nanofab Job Postings →Process/Wafer Fab Engineer (Staff position): updated Tag: Visual edit
- 17:23, 13 February 2024 diff hist +21 Nanofab Job Postings →1) Processing Technician - Thin-Film & Etch Characterizations: added "staff" postion Tag: Visual edit
- 12:56, 13 February 2024 diff hist -1,338 Template:Announcements deleted defunct announcements
- 17:44, 12 February 2024 diff hist +296 Stepper 2 (AutoStep 200) link to stepper vs contact tutorial current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +295 Stepper 1 (GCA 6300) link to stepper vs. contact PPT current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +7 m Stepper 3 (ASML DUV) →General Capabilities/Overview: fixed link Tag: Visual edit
- 17:42, 12 February 2024 diff hist 0 m File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf John d moved page File:UCSB Stepper Reticle Layout vs Wafer Layout v5.pdf to File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf without leaving a redirect: better name current
- 17:41, 12 February 2024 diff hist +295 Stepper 3 (ASML DUV) link to stepper vs. contact litho PPT Tag: Visual edit
- 17:38, 12 February 2024 diff hist +56 N File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf Demis Tutorial on Contact vs Stepper litho
- 15:39, 12 February 2024 diff hist +116 Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement minor updates current Tag: Visual edit
- 15:37, 12 February 2024 diff hist +27 Ellipsometer (Woollam) →Operating Procedures: updated oxide pre-meas name to "refl enhance" current Tag: Visual edit
- 12:41, 10 February 2024 diff hist +80 Photolithography - Improving Adhesion Photoresist Adhesion →HMDS Process for PR Improving Adhesion: dehydration/O2 pasma midifcation current Tag: Visual edit
- 15:31, 7 February 2024 diff hist 0 m Dry Etching Recipes corrected links current Tag: Visual edit
- 15:30, 7 February 2024 diff hist +4 Dry Etching Recipes corected Panaosnic model numbers + links Tag: Visual edit
- 15:29, 7 February 2024 diff hist 0 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): changed model number to E646V Tag: Visual edit
- 15:28, 7 February 2024 diff hist +1 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): changed model number to E626I
- 15:19, 7 February 2024 diff hist +1 Tool List →ICP-RIE: corrected Pan model numbers & links
- 15:19, 7 February 2024 diff hist +42 N ICP Etch 2 (Panasonic E640) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current Tag: New redirect
- 15:19, 7 February 2024 diff hist 0 m ICP Etch 2 (Panasonic E626I) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current
- 15:18, 7 February 2024 diff hist +14 ICP Etch 2 (Panasonic E626I) added model number to tool info
- 15:18, 7 February 2024 diff hist +42 N ICP Etch 1 (Panasonic E626I) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current Tag: New redirect
- 15:18, 7 February 2024 diff hist 0 m ICP Etch 1 (Panasonic E646V) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current
- 15:18, 7 February 2024 diff hist +13 ICP Etch 1 (Panasonic E646V) added model
- 21:51, 5 February 2024 diff hist +177 Packaging Recipes →Dicing Saw Recipes (ADT 7100): mockup of dicing alignment guides (ASCII) Tag: Visual edit
- 21:11, 5 February 2024 diff hist +828 Packaging Recipes →Dicing Saw Recipes (ADT 7100): Added dicing instructions Tag: Visual edit
- 21:10, 5 February 2024 diff hist +92 N File:Example Dicing Instructions for UC Santa Barbara v1.pptx Example Dicing Instructions for UC Santa Barbara v1.pptx Demis D John, 2024-02 current
- 15:41, 4 February 2024 diff hist +93 MLA150 - Design Guidelines →Limitations & Workarounds: added screenshot of "Set Zero" button current Tag: Visual edit
- 15:40, 4 February 2024 diff hist +43 N File:MLA Set Zero button IMG 2352.jpg current
- 22:06, 2 February 2024 diff hist +16 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated link Tag: Visual edit
- 22:05, 2 February 2024 diff hist +2,449 MLA150 - Design Guidelines →Limitations: X-Y and Rotational alignment updates Tag: Visual edit
- 21:41, 2 February 2024 diff hist -160 m MLA150 - Troubleshooting minor additons/grammar Tag: Visual edit
- 09:08, 31 January 2024 diff hist +246 ICP Etching Recipes →Through Silicon Via (TSV) etch (DSEiii): what to do if see black grass Tag: Visual edit
- 09:06, 31 January 2024 diff hist +135 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned Al2O3 selectivity Tag: Visual edit
- 09:03, 31 January 2024 diff hist +393 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned using hardmask for patterning to edge, SiO2 selectivity mentioned Tag: Visual edit
- 16:24, 30 January 2024 diff hist +814 Thermal Processing Recipes →Tystar 8300: added wafer cleaning current Tag: Visual edit
- 09:15, 23 January 2024 diff hist +10 Template:Announcements →Gowning Refresh: added date to title
- 09:15, 23 January 2024 diff hist -641 Template:Announcements deleted gca maint
- 13:58, 22 January 2024 diff hist -203 Stepper 3 (ASML DUV) →Design Tools: moved JobCreator into software section, highlighted Mask Making page Tag: Visual edit
- 11:08, 17 January 2024 diff hist +235 Template:Announcements Oxford cobra sfotware bugs
- 11:07, 17 January 2024 diff hist -368 Template:Announcements EB1 UP, delete ASML UP
- 18:41, 12 January 2024 diff hist +377 Stepper 3 (ASML DUV) →Online Video Trainings: updated panopto login instructions Tag: Visual edit
- 18:39, 12 January 2024 diff hist +39 N File:2024-01 ASML Running Job Thumbnail.png current
- 18:35, 12 January 2024 diff hist +28 N File:2024-01 PanOpto - UCSB Login.png current
- 18:33, 12 January 2024 diff hist +33 N File:2024-01 PanOpto - Canvas dropdown.png current
- 18:00, 11 January 2024 diff hist +224 Template:Announcements ASML PM Jan 29
- 14:47, 11 January 2024 diff hist +255 Stepper 2 (AutoStep 200) →Operating Procedures: added sub sections Tag: Visual edit
- 14:38, 11 January 2024 diff hist +80 N Stepper 2 (Autostep 200) - Job Programming John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current Tag: New redirect
- 14:38, 11 January 2024 diff hist 0 m Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current
- 08:51, 11 January 2024 diff hist +16 Template:Announcements →DUV Flood: UP with new procedure
- 08:49, 11 January 2024 diff hist +289 Template:Announcements EBeam1 down/update
- 08:28, 11 January 2024 diff hist +257 Template:Announcements asml Up, gown refresh
- 21:55, 9 January 2024 diff hist +1,038 Services added links to Supplies to Bring FAQ page, and reworded heading titles for better TOC display, current Tag: Visual edit
- 18:19, 4 January 2024 diff hist -4 Template:Announcements →Job Opening: Process Engineer
- 18:19, 4 January 2024 diff hist +7 Template:Announcements →DUV Flood: UP with new procedure
- 18:18, 4 January 2024 diff hist 0 Template:Announcements →DUV Flood: UP with new procedure
- 18:17, 4 January 2024 diff hist +1 Template:Announcements
- 18:17, 4 January 2024 diff hist 0 Template:Announcements
- 18:16, 4 January 2024 diff hist +27 N User:John d Demis D. John redirect to Demis_D._John current Tags: New redirect Visual edit: Switched
- 17:51, 4 January 2024 diff hist +185 Template:Announcements asml update
- 17:41, 4 January 2024 diff hist -537 Template:Announcements updated DUV flood is UP, deleted old lab shutdown and PECVD maint messages
- 17:21, 4 January 2024 diff hist +224 Tool List Title --> Measurement & Characterization & description text Tag: Visual edit
- 17:15, 4 January 2024 diff hist -19 MediaWiki:Sidebar changed Inspection/Test/Char --> Metrology & Test current
- 14:44, 4 January 2024 diff hist +155 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): link to CAD files section, removed Vernier link (since its on CAD files section) current Tag: Visual edit
- 14:40, 4 January 2024 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds current
- 11:56, 4 January 2024 diff hist +15 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): placeholder for reticle handbook Tag: Visual edit
- 11:43, 4 January 2024 diff hist +457 Surface Analysis (KLA/Tencor Surfscan) →Documentation: added info, and inof on LPC wafers Tag: Visual edit
- 11:36, 4 January 2024 diff hist +133 N Surfscan Errors and Workarounds added keuyboard workaround current Tag: Visual edit
- 11:34, 4 January 2024 diff hist +95 Surface Analysis (KLA/Tencor Surfscan) reorg, remove old SOP, replaced with new PDF SOP's for each wafer size Tag: Visual edit
- 11:24, 22 December 2023 diff hist +17 Stepper 3 (ASML DUV) →Process Information: made wafer bow it's own section Tag: Visual edit
- 15:09, 6 December 2023 diff hist +694 Laser Etch Monitoring →Limitations: added laser spot wize current Tag: Visual edit
- 17:57, 5 December 2023 diff hist +64 Dry Etching Recipes FL-ICP SiN etch linked Tag: Visual edit
- 17:56, 5 December 2023 diff hist +462 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added Bill's SiN etch recipe Tag: Visual edit
- 10:28, 1 December 2023 diff hist +35 m Stepper 3 (ASML DUV) →Process Information: DO NOT RUN wafer with too high bow Tag: Visual edit
- 12:12, 30 November 2023 diff hist +669 N YES Recipe Screenshots: STD-O2 screenshots of "STD-O2-180C-3KW-30sec" and "STD-O2-100C-3KW-15min" current Tag: Visual edit
- 12:11, 30 November 2023 diff hist +40 N File:STD-O2-180C-3KW-30sec - steps.jpg current
- 12:10, 30 November 2023 diff hist +41 N File:STD-O2-180C-3KW-30sec - header.jpg current
- 12:09, 30 November 2023 diff hist +41 N File:STD-O2-100C-3KW-15min - steps.jpg current
- 12:09, 30 November 2023 diff hist +42 N File:STD-O2-100C-3KW-15min - header.jpg current
- 12:08, 30 November 2023 diff hist +725 N YES Recipe Screenshots: STD-N2-O2 screenshots of "STD-N2-O2-100C-0.7KW-15sec" and "STD-N2-O2-180C-3KW-1min" current Tag: Visual edit
- 12:07, 30 November 2023 diff hist +48 N File:STD-N2-O2-100C-0.7KW-15sec - steps.jpg current
- 12:06, 30 November 2023 diff hist +49 N File:STD-N2-O2-100C-0.7KW-15sec - header.jpg current
- 12:05, 30 November 2023 diff hist +56 N File:STD-N2-O2-180C-3KW-1min - steps.jpg current
- 12:03, 30 November 2023 diff hist +59 N File:STD-N2-O2-180C-3KW-1min - header.jpg current
- 12:02, 30 November 2023 diff hist +158 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): links to recipe screenshots for both N2-O2 & O2 Tag: Visual edit
- 17:53, 25 November 2023 diff hist 0 Usage Data and Statistics →Numbers of Annual Users: typo year current Tag: Visual edit
- 13:09, 22 November 2023 diff hist +73 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added "FL-ICP" for SEO current Tag: Visual edit
- 12:31, 22 November 2023 diff hist +237 Plasma Clean (YES EcoClean) →Etch Method: mentioned back of wafer exposure to gas current Tag: Visual edit
- 16:02, 21 November 2023 diff hist +221 MLA150 - Design Guidelines →Limitations: updated failed rotation text Tag: Visual edit
- 13:38, 21 November 2023 diff hist +704 Plasma Clean (YES EcoClean) images of carrier wafers Tag: Visual edit
- 13:36, 21 November 2023 diff hist +88 N File:YES Pocket Carrier Wafers - 50mm pocket.jpg current
- 13:35, 21 November 2023 diff hist +76 N File:YES Pocket Carrier Wafers - 90mm pocket.jpg current
- 08:59, 21 November 2023 diff hist +288 Frequently Asked Questions →What Supplies do I need to bring to the lab?: updates current Tag: Visual edit
- 22:09, 16 November 2023 diff hist +1 Template:Announcements moved PECVD2 annc up
- 22:06, 16 November 2023 diff hist 0 m Template:News current
- 22:02, 16 November 2023 diff hist 0 Template:News →NanoFab Featured in Regional Tech Videos: images fix with underscores (for RSS feed)
- 17:59, 16 November 2023 diff hist -7 m Template:Announcements →Year End Shutdown
- 17:59, 16 November 2023 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx current
- 16:46, 16 November 2023 diff hist +65 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added Ru oxidation in O2-only Tag: Visual edit
- 16:44, 16 November 2023 diff hist +125 Plasma Clean (YES EcoClean) →Recipes: preview of recipes page. Tag: Visual edit