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- 08:37, 11 November 2022 diff hist +16 m Template:Announcements
- 08:35, 11 November 2022 diff hist -822 Template:Announcements deleted ASML msgs, MLA150 msg
- 08:35, 11 November 2022 diff hist +148 Template:Announcements Vet day holiday
- 21:23, 10 November 2022 diff hist -5 m Wet Etching Recipes →Organic removal Tag: Visual edit
- 15:12, 9 November 2022 diff hist +182 Template:Announcements evg down
- 15:11, 9 November 2022 diff hist +32 m Stepper 3 (ASML DUV) →Training Procedure Tag: Visual edit
- 15:07, 9 November 2022 diff hist +497 Stepper 3 (ASML DUV) →Online Video Trainings: added "training procedure" section Tag: Visual edit
- 14:41, 8 November 2022 diff hist +1 m Automated Coat/Develop System (S-Cubed Flexi) →Recipes current Tag: Visual edit
- 14:41, 8 November 2022 diff hist -1 m Automated Coat/Develop System (S-Cubed Flexi)
- 14:41, 8 November 2022 diff hist +267 Automated Coat/Develop System (S-Cubed Flexi) link to recipes table Tag: Visual edit
- 14:39, 8 November 2022 diff hist +10 m S-Cubed Flexi - Operating Procedure current Tag: Visual edit
- 14:39, 8 November 2022 diff hist -541 S-Cubed Flexi - Operating Procedure →Allowed Recipes: link to recipes Tag: Visual edit
- 14:38, 8 November 2022 diff hist +128 Lithography Recipes link to Auto-coater recipes Tag: Visual edit
- 14:36, 8 November 2022 diff hist +2 m Lithography Recipes rmeove TOC
- 14:36, 8 November 2022 diff hist -2 Lithography Recipes add TOC tmeporarily
- 14:35, 8 November 2022 diff hist +3,162 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): added recipes table Tag: Visual edit
- 14:19, 8 November 2022 diff hist +256 Automated Coat/Develop System (S-Cubed Flexi) indicated which PR's/chems are availabelf for general use Tag: Visual edit
- 13:19, 8 November 2022 diff hist +199 Stepper Recipes →Positive Resist (ASML DUV): added UV26 Tag: Visual edit: Switched
- 13:25, 4 November 2022 diff hist -258 Template:Announcements ASML PM Complete
- 19:13, 3 November 2022 diff hist -410 Template:Announcements deleted JEOL talk
- 16:25, 1 November 2022 diff hist -3 Template:Announcements SEM#1 up
- 08:47, 29 October 2022 diff hist 0 Template:Announcements moved ASML maint higher and increased date
- 08:46, 29 October 2022 diff hist +410 Template:Announcements JEOL EBL Seminar
- 08:35, 29 October 2022 diff hist +85 ICP Etching Recipes →Photoresist and ARC etching (Panasonic 2): link to DUV42P and added thickness Tag: Visual edit
- 08:33, 29 October 2022 diff hist +4 Lithography Recipes →Photolithography Recipes: corrected DUV42p link Tag: Visual edit
- 16:01, 27 October 2022 diff hist +132 Template:Announcements SEM1 down
- 15:44, 27 October 2022 diff hist +291 Nanofab Job Postings added direct link to job posting Tag: Visual edit
- 15:21, 27 October 2022 diff hist +1 Ellipsometer (Woollam) corrected link Tag: Visual edit
- 15:21, 27 October 2022 diff hist 0 m Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement John d moved page Ellipsometer (Woolam) - Measuring thin metals with oxide pre-measurement to Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement without leaving a redirect: Woollam misspelled as "woolam"
- 15:20, 27 October 2022 diff hist +2,069 N Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement pasted Demis' instructions Tag: Visual edit
- 15:17, 27 October 2022 diff hist +140 Ellipsometer (Woollam) →Operating Procedures: added link to oxide-pre-meas instructions Tag: Visual edit
- 08:48, 27 October 2022 diff hist +127 Template:Announcements Au Plating bench down
- 17:11, 26 October 2022 diff hist +62 ICP-PECVD (Unaxis VLR) →About: added SiO2 gap-fill note Tag: Visual edit
- 14:17, 25 October 2022 diff hist +43 Atomic Layer Deposition Recipes →SiO2 deposition (ALD CHAMBER 3): added temperature-variation/recipes avaialble on tool Tag: Visual edit
- 12:03, 25 October 2022 diff hist +60 E-Beam 2 (Custom) →Materials Table: fixed recipes link, bolded heating/oxygen Tag: Visual edit
- 11:59, 25 October 2022 diff hist +91 E-Beam Evaporation Recipes →Materials Table (E-Beam #2): note that data is outdated current Tag: Visual edit
- 11:44, 25 October 2022 diff hist +108 Wet Etching Recipes →Table of Wet Etching Recipes: added header row to bottom Tag: Visual edit: Switched
- 11:42, 25 October 2022 diff hist +141 Wet Etching Recipes move table to top, recipes to bottom, subheadings, added PureStrip info Tag: Visual edit
- 15:59, 24 October 2022 diff hist +4 Mechanical Polisher (Allied) update to {{tool2}}, set Room = 1111
- 01:14, 19 October 2022 diff hist +192 Template:Tool2 →Version: added todo, and newlines current
- 01:11, 19 October 2022 diff hist -4 DUMMY TOOL current
- 01:11, 19 October 2022 diff hist +84 DUMMY TOOL
- 01:10, 19 October 2022 diff hist +4 Template:Tool2 if no recipes, display "Recipes: N/A"
- 01:07, 19 October 2022 diff hist +185 Template:Tool2test current
- 01:06, 19 October 2022 diff hist +4 DUMMY TOOL
- 01:05, 19 October 2022 diff hist -4 DUMMY TOOL
- 01:03, 19 October 2022 diff hist -14 Template:Tool2 remove width=200
- 01:01, 19 October 2022 diff hist -25 Template:Tool2 remove if:recipes
- 00:58, 19 October 2022 diff hist +25 Template:Tool2
- 00:57, 19 October 2022 diff hist +3 Template:Tool2
- 00:55, 19 October 2022 diff hist 0 Template:Tool2
- 00:53, 19 October 2022 diff hist -22 Template:Tool2
- 00:51, 19 October 2022 diff hist +24 Template:Tool2 bolded "sign up for this tool"
- 00:47, 19 October 2022 diff hist +195 Template:Tool2 Made Mfg,Model,Description optional & italics, not bold
- 00:44, 19 October 2022 diff hist +4 Template:Tool2test
- 00:43, 19 October 2022 diff hist -2 Template:Tool2test
- 00:41, 19 October 2022 diff hist 0 Template:Tool2test
- 00:38, 19 October 2022 diff hist +9 Template:Tool2test
- 00:35, 19 October 2022 diff hist +8 DUMMY TOOL
- 00:34, 19 October 2022 diff hist +127 Template:Tool2test make mfg/model not bold and optional (in conditioanls
- 00:30, 19 October 2022 diff hist +37 DUMMY TOOL
- 00:28, 19 October 2022 diff hist +89 Wet Benches →Wafer Toxic Corrosive Benches: changed to tool2, added MikeDay as backup, added materials,mfg,description
- 00:23, 19 October 2022 diff hist +157 Template:Tool2 added "IF" conditional around "recipes" section.
- 00:21, 19 October 2022 diff hist 0 Template:Tool2test
- 00:20, 19 October 2022 diff hist 0 Template:Tool2test
- 00:18, 19 October 2022 diff hist 0 Template:Tool2test
- 00:17, 19 October 2022 diff hist +11 m DUMMY TOOL added type, to remove Category text
- 17:06, 18 October 2022 diff hist +25 Template:Tool2test
- 17:05, 18 October 2022 diff hist -83 DUMMY TOOL try with blank args
- 17:04, 18 October 2022 diff hist +4 DUMMY TOOL trying tool2 updates, tool2test
- 17:03, 18 October 2022 diff hist +7,182 N Template:Tool2test pasted from tool2
- 16:27, 17 October 2022 diff hist +180 Template:Announcements MLA150 software update notes
- 16:24, 17 October 2022 diff hist -229 Template:Announcements Therma Evap 1 up
- 16:23, 17 October 2022 diff hist +232 Template:Announcements ASML maint
- 16:01, 15 October 2022 diff hist +245 Stepper Recipes →Stepper 3 (ASML DUV): LinkedIn to Design Tools section Tag: Visual edit
- 21:53, 13 October 2022 diff hist +55 Lithography Recipes →Chemicals Stocked + Datasheets: added AZ4620 + link to datasheet Tag: Visual edit
- 21:50, 13 October 2022 diff hist -528 Lithography Recipes →General Photolithography Techniques: deleted EBR section, combined it into this section Tag: Visual edit
- 21:49, 13 October 2022 diff hist +451 Photolithography - Manual Edge-Bead Removal Techniques added reasons for EBR and TOC
- 21:43, 13 October 2022 diff hist +2 m Lithography Recipes delete TOC
- 21:42, 13 October 2022 diff hist -2 Lithography Recipes TEMP TOC to get link
- 21:42, 13 October 2022 diff hist +215 Lithography Recipes Other PR processes, added link to reflow info Tag: Visual edit
- 11:14, 8 October 2022 diff hist +37 m Frequently Asked Questions →Authorship on Publications: minor updates Tag: Visual edit
- 20:51, 6 October 2022 diff hist -29 Stepper 2 (AutoStep 200) removed "work in progress" for Mask Making page Tag: Visual edit
- 20:51, 6 October 2022 diff hist +441 Autostep 200 Mask Making Guidance →CAD Files: todo: missing 'reticle handbook" Tag: Visual edit: Switched
- 10:52, 6 October 2022 diff hist -565 Maskless Aligner (Heidelberg MLA150) →Video Trainings: deleted old video link, notice of re-recording Tag: Visual edit
- 23:55, 4 October 2022 diff hist +223 Template:Announcements added NanoFab job openings
- 23:52, 4 October 2022 diff hist -4 m Template:Announcements
- 23:42, 4 October 2022 diff hist 0 Staff List →Process Group: Ning Cao --> OPEN POSITION Tag: Visual edit
- 23:41, 4 October 2022 diff hist +1,071 N Nanofab Job Postings linked to UCSB Jobs pages, instructios, listed Process Technician position Tag: Visual edit
- 23:06, 4 October 2022 diff hist +70 ASML DUV: Edge Bead Removal via Photolithography current Tag: Visual edit
- 23:04, 4 October 2022 diff hist +171 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Tag: Visual edit
- 23:01, 4 October 2022 diff hist +12 m Lithography Recipes →Edge-Bead Removal: bolded Tag: Visual edit
- 23:00, 4 October 2022 diff hist +41 m Lithography Recipes remove TOC, fix EBR link Tag: Visual edit: Switched
- 22:58, 4 October 2022 diff hist -2 Lithography Recipes TEMP TOC force
- 22:58, 4 October 2022 diff hist +949 Lithography Recipes added edge-bead removal section Tag: Visual edit
- 22:50, 4 October 2022 diff hist -32 DSEIII (PlasmaTherm/Deep Silicon Etcher) fixed link to SOP Tag: Visual edit
- 22:49, 4 October 2022 diff hist +52 N File:Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current Tag: New redirect
- 22:49, 4 October 2022 diff hist 0 m File:PT-DSEiii - Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current
- 22:47, 4 October 2022 diff hist +186 Photolithography - Manual Edge-Bead Removal Techniques linked to DUV Litho EBR Tag: Visual edit
- 13:26, 4 October 2022 diff hist +2 Chemical List →Material Safety Datasheets current Tag: Visual edit