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- 16:17, 24 August 2022 diff hist -874 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration wafer handler reset - link to new page Tag: Visual edit
- 16:13, 24 August 2022 diff hist -626 ASML Stepper 3 Standard Operating Procedure pasted from Word Doc rev. 2022-08-23 DJ Tag: Visual edit
- 11:25, 23 August 2022 diff hist +11 Oven 4 (Thermo-Fisher HeraTherm) added toolid for SUM
- 08:44, 20 August 2022 diff hist +22 Dan Read current Tag: Visual edit
- 08:22, 20 August 2022 diff hist +6 Staff List →Facilities Group: bolded all managers/leads for each group Tag: Visual edit
- 09:36, 18 August 2022 diff hist +377 Template:Publications added Blumenthal: 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides current
- 23:28, 14 August 2022 diff hist +4 E-Beam Lithography System (JEOL JBX-6300FS) added "JBX-" to model # current
- 18:01, 10 August 2022 diff hist +257 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: winscp - multipel settings locations Tag: Visual edit
- 11:35, 6 August 2022 diff hist -5 m Sputter 3 (AJA ATC 2000-F) changed Documentation --> procedures to match the other tools Tag: Visual edit
- 11:34, 6 August 2022 diff hist +5 Sputter 5 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:34, 6 August 2022 diff hist +9 Sputter 4 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:33, 6 August 2022 diff hist +7 Sputter 3 (AJA ATC 2000-F) →Documentation: made training video section linkable Tag: Visual edit
- 14:02, 5 August 2022 diff hist +240 Nanofab Staff Internal Pages added Useful UCSB Pages > Faciltiies work requests Tag: Visual edit
- 12:33, 3 August 2022 diff hist +214 CC-PRIME OnBoarding 2022-08 →Location & Parking: added map and gMaps link Tag: Visual edit
- 12:24, 3 August 2022 diff hist +44 N File:CC-PRIME - Parking Lot 10 and CNSI - Annotated.png current
- 11:59, 3 August 2022 diff hist +8 Sputtering Recipes →Materials Table (Sputter 3): specified Tilt is in mm, since tool has both In & mm listed. Tag: Visual edit
- 11:58, 3 August 2022 diff hist -18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
- 11:57, 3 August 2022 diff hist +54 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): updated Au to 200W dep rate Tag: Visual edit
- 22:39, 2 August 2022 diff hist +7 DUMMY TOOL testing lenvik & Michael Barreraz
- 22:38, 2 August 2022 diff hist +54 Template:Tool2 added barreraz, millerksi, lenvik to allowed list (after updateing StaffContactInfo_DJ)
- 22:37, 2 August 2022 diff hist +357 Template:StaffContactInfo DJ added barreraz, millerski, lenvik current
- 22:27, 2 August 2022 diff hist +131 Template:Tool2 →Arguments with Specific Values: explanation where values come from
- 22:23, 2 August 2022 diff hist +125 Template:StaffContactInfo DJ added explanation
- 22:18, 2 August 2022 diff hist +509 Template:StaffContactInfo DJ added documentation, listing available staff names
- 22:04, 2 August 2022 diff hist +28 N Template:Tool2 DJ John d moved page Template:Tool2 DJ to Template:Tool2: make it the standard tool2 template current Tag: New redirect
- 22:04, 2 August 2022 diff hist 0 m Template:Tool2 John d moved page Template:Tool2 DJ to Template:Tool2: make it the standard tool2 template
- 21:59, 2 August 2022 diff hist -3 DUMMY TOOL change to tool2 tempalte
- 21:57, 2 August 2022 diff hist 0 m Template:Tool2 NLV John d moved page Template:Tool2 to Template:Tool2 NLV: deprecated old version current
- 15:58, 2 August 2022 diff hist +330 CC-PRIME OnBoarding 2022-08 art wafer photo Tag: Visual edit
- 15:56, 2 August 2022 diff hist +1,408 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 08:52, 2 August 2022 diff hist +83 N File:Directions to NanoFab - ESB map + P10 parking - Geo MapDev.png current
- 13:28, 1 August 2022 diff hist +26 CC-PRIME OnBoarding 2022-08 →Attire for In-Person Cleanroom Access Tag: Visual edit
- 13:06, 1 August 2022 diff hist +506 CC-PRIME OnBoarding 2022-08 guesses of Attire Tag: Visual edit
- 13:02, 1 August 2022 diff hist +237 CC-PRIME OnBoarding 2022-08 directions/parking Tag: Visual edit
- 12:40, 1 August 2022 diff hist +821 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 12:06, 1 August 2022 diff hist +328 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 11:59, 1 August 2022 diff hist +692 N CC-PRIME OnBoarding 2022-08 Created page with "The tasks needed for signing up for CNSI's Technician Cleanroom Training class is below. Contact [mailto:demis@ucsb.edu;rlschoeppner@ucsb.edu?subject=CCPRIME%20Cleanroom%20Tr..." Tag: Visual edit
- 16:45, 29 July 2022 diff hist +197 MLA150 - Large Image GDS Generation updated formatting/numbered list current Tag: Visual edit
- 11:56, 29 July 2022 diff hist -29 Photoluminescence PL Setup (Custom) →Pump Lasers Available: added 532nm laser Tag: Visual edit
- 09:00, 22 July 2022 diff hist -116 Template:Announcements updated ASML note
- 06:11, 22 July 2022 diff hist +118 MLA150 - Troubleshooting →Solutions for small substrates: starting exp on uniform area. Tag: Visual edit
- 11:06, 20 July 2022 diff hist +4 m Template:Tool2
- 11:06, 20 July 2022 diff hist -3 Stepper 2 (AutoStep 200) update to Tool2: added Lee Sawyer as Super2
- 16:25, 19 July 2022 diff hist +22 m Ashers (Technics PEII) →Detailed Specifications Tag: Visual edit
- 11:50, 19 July 2022 diff hist +1 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): added PR selectivity Tag: Visual edit
- 11:45, 19 July 2022 diff hist -3 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: updated Process Control Data text Tag: Visual edit
- 08:18, 17 July 2022 diff hist -17 m Probe Station & Curve Tracer →Operation Procedures & Manuals Tag: Visual edit
- 16:23, 9 July 2022 diff hist +43 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): mentioned PR mask Tag: Visual edit
- 11:09, 8 July 2022 diff hist +148 Thermal Processing Recipes →Thermal Oxidation of Silicon - Calculating Oxidation Times: link to BYU ox calc Tag: Visual edit
- 16:00, 7 July 2022 diff hist -424 Template:Announcements deleted PureStrip bath, Unaxis Dep
- 15:59, 7 July 2022 diff hist +134 Dry Etching Recipes added LiNbO3, SU8, BCB Tag: Visual edit
- 15:50, 7 July 2022 diff hist +121 Template:Recipe Table Explanation note that this template is no longer used current
- 15:48, 7 July 2022 diff hist +159 Lithography Recipes →Photolithography Recipes: removed recipe table explanation template Tag: Visual edit
- 15:46, 7 July 2022 diff hist +158 Dry Etching Recipes smaller fonts to make table more obvious Tag: Visual edit
- 15:44, 7 July 2022 diff hist +17 m Vacuum Deposition Recipes →Process Control Data: smaller font current Tag: Visual edit
- 15:44, 7 July 2022 diff hist +157 Vacuum Deposition Recipes →Deposition Tools/Materials Table: removed tempalte for smaller table explanation Tag: Visual edit
- 10:35, 7 July 2022 diff hist -1 m Ellipsometer (Woollam)
- 10:34, 7 July 2022 diff hist -19 Ellipsometer (Woollam) updated to tool2, added Aidan + Demis as super/super2
- 16:58, 6 July 2022 diff hist +263 MLA150 - Troubleshooting →Solution for 3-4 inch wafers: added CAD reduction by ≥10mm Tag: Visual edit
- 16:05, 6 July 2022 diff hist +11 Wet Etching Recipes force TOC above link to Master Table
- 16:04, 6 July 2022 diff hist -192 Wet Etching Recipes moved and emphasized link to master table. Tag: Visual edit: Switched
- 11:52, 6 July 2022 diff hist +22 Maskless Aligner (Heidelberg MLA150) added 2nd supervisor via {{tool2}} template, Lee Sawyer
- 08:16, 6 July 2022 diff hist +2,838 UCSB NanoFab Microscope Training Added Optical Filters & DIC sections Tag: Visual edit
- 08:04, 6 July 2022 diff hist +46 N File:Microscopes - DIC filters and light path.png current
- 07:49, 6 July 2022 diff hist +52 N File:Microscopes - Filter Out position-detent.png current
- 10:18, 5 July 2022 diff hist -64 Template:Announcements updateD ASML
- 09:45, 5 July 2022 diff hist +61 DUMMY TOOL testing Tag: Visual edit
- 17:19, 4 July 2022 diff hist +49 m Packaging Recipes →Wax-Mounting to Carrier: writing creidts Tag: Visual edit
- 17:16, 4 July 2022 diff hist +2,819 Packaging Recipes →Mounting/Unmounting Samples: added “wax mounting to carrier” Tag: Visual edit
- 07:47, 1 July 2022 diff hist +69 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): links to MJB/MA6 for Flood exp Tag: Visual edit
- 21:58, 30 June 2022 diff hist +211 Direct-Write Lithography Recipes →Positive Resist (MLA150): clarify “PEB” Tag: Visual edit
- 09:44, 28 June 2022 diff hist -179 Template:Announcements ASML update, system up, software fixed
- 18:59, 27 June 2022 diff hist +41 Template:Announcements asml UP, editing issue
- 03:09, 27 June 2022 diff hist +37 Template:Tool2 →Options
- 03:08, 27 June 2022 diff hist +148 Template:Tool2
- 03:06, 27 June 2022 diff hist +134 Template:Tool2 added example image
- 03:02, 27 June 2022 diff hist +41 N File:TOOL template - example image.png example of the tool infobox current
- 03:00, 27 June 2022 diff hist +21 Template:Tool2 added <includeonly>
- 02:56, 27 June 2022 diff hist +7 Template:StaffInfoSecondary DJ current
- 02:56, 27 June 2022 diff hist +15 Template:StaffInfo DJ current
- 02:55, 27 June 2022 diff hist +5 Template:StaffContactInfo DJ
- 02:55, 27 June 2022 diff hist 0 Template:StaffContactInfo DJ
- 02:54, 27 June 2022 diff hist +6 Template:StaffContactInfo DJ
- 02:54, 27 June 2022 diff hist -59 Template:StaffContactInfo DJ
- 02:54, 27 June 2022 diff hist +65 Template:StaffContactInfo DJ updated instructions
- 02:45, 27 June 2022 diff hist -1 DUMMY TOOL
- 02:44, 27 June 2022 diff hist +91 Template:Tool2 added classes to each table, for eventual CSS
- 02:41, 27 June 2022 diff hist 0 Template:Tool2
- 02:41, 27 June 2022 diff hist -38 Template:Tool2 Undo revision 160087 by John d (talk) Tag: Undo
- 02:40, 27 June 2022 diff hist +266 Template:Tool2 added row style="border-bottom: 1px solid grey"
- 02:38, 27 June 2022 diff hist +38 Template:Tool2 messing with tr borders
- 02:36, 27 June 2022 diff hist 0 Template:Tool2
- 02:35, 27 June 2022 diff hist +18 DUMMY TOOL
- 02:34, 27 June 2022 diff hist -18 DUMMY TOOL
- 02:34, 27 June 2022 diff hist -4 m Template:Tool2
- 02:33, 27 June 2022 diff hist +18 DUMMY TOOL added Super2=Ning Cao
- 02:32, 27 June 2022 diff hist +41 Template:Tool2 put "super2" into an {{if super2}}
- 02:31, 27 June 2022 diff hist -20 DUMMY TOOL remoed super2 to see what happens
- 02:28, 27 June 2022 diff hist -152 Template:StaffContactInfo DJ updated editing instructions
- 02:22, 27 June 2022 diff hist -183 m Template:StaffContactInfo DJ
- 02:17, 27 June 2022 diff hist 0 Template:Tool2 move table close to end
- 02:14, 27 June 2022 diff hist +10 Template:Tool2 add "SUM Link" col title
- 02:13, 27 June 2022 diff hist 0 Template:Tool2 testing: SUM width 200
- 02:11, 27 June 2022 diff hist -24 Template:Tool2 Undo revision 160071 by John d (talk) Tag: Undo
- 02:09, 27 June 2022 diff hist +3 Template:Tool2 Undo revision 160072 by John d (talk) Tag: Undo
- 02:09, 27 June 2022 diff hist -3 m Template:Tool2
- 02:06, 27 June 2022 diff hist +24 Template:Tool2 add SUM Link col title
- 02:05, 27 June 2022 diff hist -63 Template:Tool2 move SUM link out of table, use HR instead
- 02:03, 27 June 2022 diff hist +79 Template:Tool2 Undo revision 160068 by John d (talk) Tag: Undo
- 02:02, 27 June 2022 diff hist -79 Template:Tool2 SUM link in same table
- 02:01, 27 June 2022 diff hist 0 m Template:Tool2
- 02:01, 27 June 2022 diff hist -38 Template:Tool2 add col title for "recipes"
- 01:57, 27 June 2022 diff hist 0 m Template:Tool2
- 01:56, 27 June 2022 diff hist +8 m Template:Tool2
- 01:55, 27 June 2022 diff hist -2 m Template:Tool2
- 01:54, 27 June 2022 diff hist +6 m Template:Tool2
- 01:53, 27 June 2022 diff hist 0 Template:Tool2
- 01:53, 27 June 2022 diff hist +78 Template:Tool2 description: {{{{ IF ...}}} , and style smaller italics
- 01:48, 27 June 2022 diff hist -53 Template:StaffInfo DJ remove "phone" "email", make "primary supervisor" span 3 rows
- 01:46, 27 June 2022 diff hist -6 Template:StaffInfo DJ TESTING added "primary" supervisor
- 01:43, 27 June 2022 diff hist +13 DUMMY TOOL
- 01:42, 27 June 2022 diff hist 0 Template:Tool2 move Description, Mfg, Model above supervisors
- 01:40, 27 June 2022 diff hist -68 Template:Tool2 remove table split after supervisors, use HR instead
- 01:38, 27 June 2022 diff hist +18 m Template:Tool2
- 01:37, 27 June 2022 diff hist -86 Template:Tool2 try removing table break, use HR instead
- 01:34, 27 June 2022 diff hist -6 DUMMY TOOL
- 01:30, 27 June 2022 diff hist -28 m Template:Tool2
- 01:28, 27 June 2022 diff hist +27 m Template:Tool2
- 01:27, 27 June 2022 diff hist +1 m Template:Tool2
- 01:27, 27 June 2022 diff hist +18 Template:Tool2 combine super/super2 into one table
- 01:21, 27 June 2022 diff hist -26 Template:Tool2 Undo revision 160044 by John d (talk) Tag: Undo
- 01:20, 27 June 2022 diff hist -1 Template:Tool2 undo revision 157023 by John d (talk)
- 01:18, 27 June 2022 diff hist +1 m Template:Tool2
- 01:17, 27 June 2022 diff hist +26 Template:Tool2 tool info at top, then supervisors, then materials/categories
- 01:13, 27 June 2022 diff hist +131 m Template:StaffInfoSecondary DJ
- 01:12, 27 June 2022 diff hist +2 m Template:StaffInfo DJ
- 01:12, 27 June 2022 diff hist +32 Template:StaffInfo DJ
- 01:11, 27 June 2022 diff hist +1,132 Template:StaffContactInfo DJ updated docs on how to edit contact info
- 01:07, 27 June 2022 diff hist -566 Template:Tool2 updated documentation pointing to Template:StaffContactInfo_DJ
- 00:58, 27 June 2022 diff hist 0 m Template:StaffContactInfo DJ
- 00:58, 27 June 2022 diff hist +133 Template:StaffContactInfo DJ changed all {{{super}}}-->{{{1}}}, and added example sytax
- 00:54, 27 June 2022 diff hist -12 Template:StaffContactInfo DJ changed only Tony and Demis {{{super}}}--> {{{1}}}
- 00:52, 27 June 2022 diff hist +194 Template:StaffContactInfo DJ added includeonly & noinclude sections
- 00:51, 27 June 2022 diff hist +1,761 N Template:StaffContactInfo DJ copied #IFEQ section of "tool2_DJ"
- 00:50, 27 June 2022 diff hist -1,721 Template:Tool2 deleted Staff contact info {{ifeq}}, replaced with {{StaffContactInfo_DJ}}
- 00:40, 27 June 2022 diff hist +116 Template:Tool2
- 00:38, 27 June 2022 diff hist -6 Template:Tool2
- 00:38, 27 June 2022 diff hist -12 Template:StaffInfoSecondary DJ
- 00:34, 27 June 2022 diff hist +39 Template:StaffInfoSecondary DJ
- 00:26, 27 June 2022 diff hist +3 Template:Tool2
- 00:26, 27 June 2022 diff hist -3 Template:Tool2
- 00:26, 27 June 2022 diff hist 0 Template:Tool2
- 00:25, 27 June 2022 diff hist +3 Template:Tool2 new hr
- 00:23, 27 June 2022 diff hist +3 Template:Tool2 HR between super/super2
- 06:15, 25 June 2022 diff hist +7 Template:Announcements ASML update
- 21:08, 23 June 2022 diff hist -34 Template:Announcements asml update
- 07:50, 23 June 2022 diff hist +69 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): updated recipes, linked to SOP for travelers for each recipe Tag: Visual edit
- 07:42, 23 June 2022 diff hist +36 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated recipes available Tag: Visual edit
- 07:52, 22 June 2022 diff hist 0 Template:Tool2
- 07:51, 22 June 2022 diff hist -59 Template:Tool2
- 07:50, 22 June 2022 diff hist +36 Template:Tool2
- 07:49, 22 June 2022 diff hist -40 Template:Tool2 try removing StaffInfoSecondary "ifeq"
- 07:46, 22 June 2022 diff hist -1,952 Template:Tool2
- 07:45, 22 June 2022 diff hist +49 Template:Tool2
- 07:23, 22 June 2022 diff hist -1 m Template:StaffInfo DJ →Versions
- 07:22, 22 June 2022 diff hist -1 m Template:StaffInfo DJ
- 07:21, 22 June 2022 diff hist +27 Template:StaffInfoSecondary DJ added includeonly tags
- 07:21, 22 June 2022 diff hist +27 Template:StaffInfo DJ added includeonly tags
- 07:19, 22 June 2022 diff hist +20 DUMMY TOOL
- 07:18, 22 June 2022 diff hist +3 DUMMY TOOL
- 07:18, 22 June 2022 diff hist +4 DUMMY TOOL switch to tool2_DJ
- 07:17, 22 June 2022 diff hist +74 DUMMY TOOL →About Tag: Visual edit
- 07:15, 22 June 2022 diff hist +1,957 N DUMMY TOOL pasted nanonex source
- 07:14, 22 June 2022 diff hist +58 Template:Tool2 added "super2" to the example
- 07:12, 22 June 2022 diff hist +171 Template:Tool2 removed 3rd args and switch to all _DJ templates
- 07:05, 22 June 2022 diff hist +72 Template:StaffInfo DJ removed extra argument
- 06:48, 22 June 2022 diff hist +1 SEM Sample Coater (Hummer) trying "tool2" template
- 06:46, 22 June 2022 diff hist +64 Tool List →Vacuum Deposition: Added SEM Hummer coater, adn Thermal Evap heading Tag: Visual edit
- 06:41, 22 June 2022 diff hist +2,046 N Hummer SEM Sample Coater - Techniques to reduce charging in SEMs added BillM's technique current Tag: Visual edit
- 06:23, 22 June 2022 diff hist +775 SEM Sample Coater (Hummer) added more info and placeholder for SOP and link to techniqures to reduce chargign Tag: Visual edit
- 06:16, 22 June 2022 diff hist +39 Field Emission SEM 2 (JEOL IT800SHL) →Mechanical: added limited 4-inch wf movemnt Tag: Visual edit
- 06:15, 22 June 2022 diff hist +1,483 Field Emission SEM 2 (JEOL IT800SHL) added specs from user maual, SOP section (empty) and link to Hummer ocater Tag: Visual edit
- 11:28, 21 June 2022 diff hist +595 Frequently Asked Questions →General NanoFab Questions: added "how can i access the lab" section Tag: Visual edit
- 08:29, 21 June 2022 diff hist 0 m Template:Announcements minor reorder
- 08:29, 21 June 2022 diff hist -17 Template:Announcements →PureStrip Bath Heater DOWN: itUP
- 08:12, 21 June 2022 diff hist +5 m Template:Announcements →Masks Optional as of June 13
- 07:48, 21 June 2022 diff hist +24 Template:Announcements ASML uodate
- 22:07, 20 June 2022 diff hist +35 MLA150 - Design Guidelines →Automatic Alignment: added recommended cross dimensions Tag: Visual edit
- 16:59, 18 June 2022 diff hist +4 m Brian Lingg current Tag: Visual edit
- 16:58, 18 June 2022 diff hist +62 Brian Lingg Tag: Visual edit
- 10:19, 18 June 2022 diff hist +36 Brian Lingg retirement notice Tag: Visual edit
- 10:11, 17 June 2022 diff hist +30 Template:Announcements unaxis-dep up
- 10:01, 17 June 2022 diff hist +4 Template:Announcements asml update
- 10:26, 16 June 2022 diff hist +188 Template:Announcements asml and unaxis updates
- 19:05, 15 June 2022 diff hist +405 Ashers (Technics PEII) Added recipes, updated applications with times. Tag: Visual edit
- 18:55, 15 June 2022 diff hist +134 ICP Etching Recipes →UV6-0.8 Etching: update PR strip headers to be more general, and update FL-ICP Pr strip section. Tag: Visual edit
- 08:27, 15 June 2022 diff hist +163 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic: mentioend 4-inch metal masks Tag: Visual edit
- 08:26, 15 June 2022 diff hist +404 MLA150 - Troubleshooting →Solutions for small substrates: added EBR techniques link Tag: Visual edit
- 16:59, 13 June 2022 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #1): fix SiO2 link display
- 11:20, 13 June 2022 diff hist +16 Template:Announcements masks optional
- 11:17, 13 June 2022 diff hist 0 COVID-19 User Policies reverted "full covid policy" "last updated" date to previous Tag: Visual edit
- 11:15, 13 June 2022 diff hist +21 COVID-19 User Policies masks optional update Tag: Visual edit
- 09:26, 13 June 2022 diff hist +644 Frequently Asked Questions →Processing/Fabrication Questions: added "my glassware is missing" section, linked to policy Tag: Visual edit
- 16:10, 10 June 2022 diff hist -12 Template:Announcements →Unaxis-Dep: Down: SiD4 ETA June 13th
- 16:09, 10 June 2022 diff hist 0 m Template:Announcements →PureStrip Bath Heater DOWN
- 16:09, 10 June 2022 diff hist +225 Template:Announcements PureStrip bath down
- 15:26, 10 June 2022 diff hist -89 Template:Announcements deleted plating bench downtime, added Gasonics down
- 12:54, 9 June 2022 diff hist +174 Template:Announcements ASML down update
- 16:01, 8 June 2022 diff hist +437 Dry Etching Recipes link to etching process control data, new heading levels for the huge table Tag: Visual edit
- 15:55, 8 June 2022 diff hist +412 Vacuum Deposition Recipes link to process control data Tag: Visual edit
- 15:53, 8 June 2022 diff hist +33 Process Group - Process Control Data updated heading titles to include "Process COntrol Data" for linking purposes. Tag: Visual edit
- 10:29, 6 June 2022 diff hist +5 m Deep UV Optical Microscope (Olympus) →Other Info Tag: Visual edit
- 10:28, 6 June 2022 diff hist +118 Filmetrics F40-UV Microscope-Mounted link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +118 Digital Microscope (Olympus DSX1000) link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +207 Deep UV Optical Microscope (Olympus) note that DUV camera is non-funcitonal Tag: Visual edit
- 10:26, 6 June 2022 diff hist +101 Laser Scanning Confocal M-scope (Olympus LEXT) link to all scopes Tag: Visual edit
- 07:52, 6 June 2022 diff hist +184 Template:Announcements ASML down - TCU
- 23:10, 4 June 2022 diff hist -141 Template:Announcements deleted lab open, updated Unaxis SiD4 delivery.
- 12:13, 1 June 2022 diff hist +203 Template:Announcements plating bench down 6/7th
- 11:03, 1 June 2022 diff hist +34 m Template:Announcements
- 10:13, 1 June 2022 diff hist -272 Template:Announcements CR open
- 08:58, 1 June 2022 diff hist +48 Template:Announcements HVAC closure update
- 08:11, 27 May 2022 diff hist +50 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added author credits Tag: Visual edit
- 21:24, 26 May 2022 diff hist +258 MLA Recipes →Positive Resist (MLA150) Tag: Visual edit
- 21:22, 26 May 2022 diff hist +25 MLA Recipes →Positive Resist (MLA150) Tag: Visual edit
- 15:54, 26 May 2022 diff hist +210 COVID-19 User Policies masks mandatory May 27th Tag: Visual edit: Switched
- 15:50, 26 May 2022 diff hist -1,097 Template:Announcements deleted: Old COVID policy (March), AFM UP, F50 Up
- 15:48, 26 May 2022 diff hist +419 Template:Announcements masks mandatory May 27th
- 11:57, 26 May 2022 diff hist +84 Lab Rules →Wet Benches: Added heading for "Glassware Confiscation Policy" (2.9.2.1) Tag: Visual edit
- 09:28, 25 May 2022 diff hist -1 m Template:Announcements
- 09:28, 25 May 2022 diff hist +159 Template:Announcements Unaxis Dep down SiD4
- 12:14, 24 May 2022 diff hist +333 Template:Announcements CR closure June 1, 6-9am
- 15:43, 20 May 2022 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4 set header row Tag: Visual edit
- 10:46, 20 May 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Detailed Specifications Tag: Visual edit
- 21:12, 19 May 2022 diff hist -193 Template:Announcements AFM up, deleted F10, LEXT
- 20:58, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:56, 19 May 2022 diff hist +43 Oxford ICP Etcher - Process Control Data updated SEM links to state "45°" or "XS" Tag: Visual edit
- 20:43, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:42, 19 May 2022 diff hist +125 Oxford ICP Etcher - Process Control Data uploaded SEMs Tag: Visual edit
- 20:42, 19 May 2022 diff hist 0 N File:Oxford InP 60C XS05.jpg current
- 20:41, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG05.jpg current
- 20:39, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG02.jpg current
- 09:27, 19 May 2022 diff hist +153 Oxford ICP Etcher - Process Control Data added etch cal, SEMs TBA Tag: Visual edit
- 09:15, 19 May 2022 diff hist +156 Oxford ICP Etcher - Process Control Data added "sample prep" section - still needs solution detials added Tag: Visual edit
- 08:43, 19 May 2022 diff hist +296 Oxford ICP Etcher - Process Control Data Added dummy InP and seasoning steps Tag: Visual edit
- 17:16, 18 May 2022 diff hist -111 Probe Station & Curve Tracer deleted old DMM - removed form setup (didn't work) Tag: Visual edit
- 07:30, 13 May 2022 diff hist +100 Optical Film Thickness (Nanometric) note to use FIlmtrics F40, and locaiton=Removed From Lab current Tag: Visual edit
- 07:28, 13 May 2022 diff hist -41 Tool List →Thickness + Optical Constants: Deleted Nanometrics (removed from lab) Tag: Visual edit
- 07:27, 13 May 2022 diff hist +148 Optical Film Thickness (Filmetrics) tool decomissioned notice,locaiton="removed from lab" current Tag: Visual edit
- 07:26, 13 May 2022 diff hist -81 Tool List →Thin-Film/Material Analysis: deleted FIlmetrics F20 Tag: Visual edit