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- 07:18, 22 June 2022 diff hist +3 DUMMY TOOL
- 07:18, 22 June 2022 diff hist +4 DUMMY TOOL switch to tool2_DJ
- 07:17, 22 June 2022 diff hist +74 DUMMY TOOL →About Tag: Visual edit
- 07:15, 22 June 2022 diff hist +1,957 N DUMMY TOOL pasted nanonex source
- 07:14, 22 June 2022 diff hist +58 Template:Tool2 added "super2" to the example
- 07:12, 22 June 2022 diff hist +171 Template:Tool2 removed 3rd args and switch to all _DJ templates
- 07:05, 22 June 2022 diff hist +72 Template:StaffInfo DJ removed extra argument
- 06:48, 22 June 2022 diff hist +1 SEM Sample Coater (Hummer) trying "tool2" template
- 06:46, 22 June 2022 diff hist +64 Tool List →Vacuum Deposition: Added SEM Hummer coater, adn Thermal Evap heading Tag: Visual edit
- 06:41, 22 June 2022 diff hist +2,046 N Hummer SEM Sample Coater - Techniques to reduce charging in SEMs added BillM's technique current Tag: Visual edit
- 06:23, 22 June 2022 diff hist +775 SEM Sample Coater (Hummer) added more info and placeholder for SOP and link to techniqures to reduce chargign Tag: Visual edit
- 06:16, 22 June 2022 diff hist +39 Field Emission SEM 2 (JEOL IT800SHL) →Mechanical: added limited 4-inch wf movemnt Tag: Visual edit
- 06:15, 22 June 2022 diff hist +1,483 Field Emission SEM 2 (JEOL IT800SHL) added specs from user maual, SOP section (empty) and link to Hummer ocater Tag: Visual edit
- 11:28, 21 June 2022 diff hist +595 Frequently Asked Questions →General NanoFab Questions: added "how can i access the lab" section Tag: Visual edit
- 08:29, 21 June 2022 diff hist 0 m Template:Announcements minor reorder
- 08:29, 21 June 2022 diff hist -17 Template:Announcements →PureStrip Bath Heater DOWN: itUP
- 08:12, 21 June 2022 diff hist +5 m Template:Announcements →Masks Optional as of June 13
- 07:48, 21 June 2022 diff hist +24 Template:Announcements ASML uodate
- 22:07, 20 June 2022 diff hist +35 MLA150 - Design Guidelines →Automatic Alignment: added recommended cross dimensions Tag: Visual edit
- 16:59, 18 June 2022 diff hist +4 m Brian Lingg current Tag: Visual edit
- 16:58, 18 June 2022 diff hist +62 Brian Lingg Tag: Visual edit
- 10:19, 18 June 2022 diff hist +36 Brian Lingg retirement notice Tag: Visual edit
- 10:11, 17 June 2022 diff hist +30 Template:Announcements unaxis-dep up
- 10:01, 17 June 2022 diff hist +4 Template:Announcements asml update
- 10:26, 16 June 2022 diff hist +188 Template:Announcements asml and unaxis updates
- 19:05, 15 June 2022 diff hist +405 Ashers (Technics PEII) Added recipes, updated applications with times. Tag: Visual edit
- 18:55, 15 June 2022 diff hist +134 ICP Etching Recipes →UV6-0.8 Etching: update PR strip headers to be more general, and update FL-ICP Pr strip section. Tag: Visual edit
- 08:27, 15 June 2022 diff hist +163 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic: mentioend 4-inch metal masks Tag: Visual edit
- 08:26, 15 June 2022 diff hist +404 MLA150 - Troubleshooting →Solutions for small substrates: added EBR techniques link Tag: Visual edit
- 16:59, 13 June 2022 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #1): fix SiO2 link display
- 11:20, 13 June 2022 diff hist +16 Template:Announcements masks optional
- 11:17, 13 June 2022 diff hist 0 COVID-19 User Policies reverted "full covid policy" "last updated" date to previous Tag: Visual edit
- 11:15, 13 June 2022 diff hist +21 COVID-19 User Policies masks optional update Tag: Visual edit
- 09:26, 13 June 2022 diff hist +644 Frequently Asked Questions →Processing/Fabrication Questions: added "my glassware is missing" section, linked to policy Tag: Visual edit
- 16:10, 10 June 2022 diff hist -12 Template:Announcements →Unaxis-Dep: Down: SiD4 ETA June 13th
- 16:09, 10 June 2022 diff hist 0 m Template:Announcements →PureStrip Bath Heater DOWN
- 16:09, 10 June 2022 diff hist +225 Template:Announcements PureStrip bath down
- 15:26, 10 June 2022 diff hist -89 Template:Announcements deleted plating bench downtime, added Gasonics down
- 12:54, 9 June 2022 diff hist +174 Template:Announcements ASML down update
- 16:01, 8 June 2022 diff hist +437 Dry Etching Recipes link to etching process control data, new heading levels for the huge table Tag: Visual edit
- 15:55, 8 June 2022 diff hist +412 Vacuum Deposition Recipes link to process control data Tag: Visual edit
- 15:53, 8 June 2022 diff hist +33 Process Group - Process Control Data updated heading titles to include "Process COntrol Data" for linking purposes. Tag: Visual edit
- 10:29, 6 June 2022 diff hist +5 m Deep UV Optical Microscope (Olympus) →Other Info Tag: Visual edit
- 10:28, 6 June 2022 diff hist +118 Filmetrics F40-UV Microscope-Mounted link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +118 Digital Microscope (Olympus DSX1000) link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +207 Deep UV Optical Microscope (Olympus) note that DUV camera is non-funcitonal Tag: Visual edit
- 10:26, 6 June 2022 diff hist +101 Laser Scanning Confocal M-scope (Olympus LEXT) link to all scopes Tag: Visual edit
- 07:52, 6 June 2022 diff hist +184 Template:Announcements ASML down - TCU
- 23:10, 4 June 2022 diff hist -141 Template:Announcements deleted lab open, updated Unaxis SiD4 delivery.
- 12:13, 1 June 2022 diff hist +203 Template:Announcements plating bench down 6/7th
- 11:03, 1 June 2022 diff hist +34 m Template:Announcements
- 10:13, 1 June 2022 diff hist -272 Template:Announcements CR open
- 08:58, 1 June 2022 diff hist +48 Template:Announcements HVAC closure update
- 08:11, 27 May 2022 diff hist +50 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added author credits Tag: Visual edit
- 21:24, 26 May 2022 diff hist +258 MLA Recipes →Positive Resist (MLA150) current Tag: Visual edit
- 21:22, 26 May 2022 diff hist +25 MLA Recipes →Positive Resist (MLA150) Tag: Visual edit
- 15:54, 26 May 2022 diff hist +210 COVID-19 User Policies masks mandatory May 27th Tag: Visual edit: Switched
- 15:50, 26 May 2022 diff hist -1,097 Template:Announcements deleted: Old COVID policy (March), AFM UP, F50 Up
- 15:48, 26 May 2022 diff hist +419 Template:Announcements masks mandatory May 27th
- 11:57, 26 May 2022 diff hist +84 Lab Rules →Wet Benches: Added heading for "Glassware Confiscation Policy" (2.9.2.1) Tag: Visual edit
- 09:28, 25 May 2022 diff hist -1 m Template:Announcements
- 09:28, 25 May 2022 diff hist +159 Template:Announcements Unaxis Dep down SiD4
- 12:14, 24 May 2022 diff hist +333 Template:Announcements CR closure June 1, 6-9am
- 15:43, 20 May 2022 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4 set header row Tag: Visual edit
- 10:46, 20 May 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Detailed Specifications Tag: Visual edit
- 21:12, 19 May 2022 diff hist -193 Template:Announcements AFM up, deleted F10, LEXT
- 20:58, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:56, 19 May 2022 diff hist +43 Oxford ICP Etcher - Process Control Data updated SEM links to state "45°" or "XS" Tag: Visual edit
- 20:43, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:42, 19 May 2022 diff hist +125 Oxford ICP Etcher - Process Control Data uploaded SEMs Tag: Visual edit
- 20:42, 19 May 2022 diff hist 0 N File:Oxford InP 60C XS05.jpg current
- 20:41, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG05.jpg current
- 20:39, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG02.jpg current
- 09:27, 19 May 2022 diff hist +153 Oxford ICP Etcher - Process Control Data added etch cal, SEMs TBA Tag: Visual edit
- 09:15, 19 May 2022 diff hist +156 Oxford ICP Etcher - Process Control Data added "sample prep" section - still needs solution detials added Tag: Visual edit
- 08:43, 19 May 2022 diff hist +296 Oxford ICP Etcher - Process Control Data Added dummy InP and seasoning steps Tag: Visual edit
- 17:16, 18 May 2022 diff hist -111 Probe Station & Curve Tracer deleted old DMM - removed form setup (didn't work) Tag: Visual edit
- 07:30, 13 May 2022 diff hist +100 Optical Film Thickness (Nanometric) note to use FIlmtrics F40, and locaiton=Removed From Lab current Tag: Visual edit
- 07:28, 13 May 2022 diff hist -41 Tool List →Thickness + Optical Constants: Deleted Nanometrics (removed from lab) Tag: Visual edit
- 07:27, 13 May 2022 diff hist +148 Optical Film Thickness (Filmetrics) tool decomissioned notice,locaiton="removed from lab" current Tag: Visual edit
- 07:26, 13 May 2022 diff hist -81 Tool List →Thin-Film/Material Analysis: deleted FIlmetrics F20 Tag: Visual edit
- 11:39, 11 May 2022 diff hist +101 Services link to hourly rates Tag: Visual edit
- 11:33, 11 May 2022 diff hist -34 m Template:Announcements →AFM: DOWN: fix link
- 11:33, 11 May 2022 diff hist +86 m Template:Announcements →AFM: DOWN: link to tool
- 11:32, 11 May 2022 diff hist +124 Template:Announcements AFM down
- 17:32, 10 May 2022 diff hist +912 Process Group - Process Control Data →Etching: links to all etching process control pages Tag: Visual edit
- 17:27, 10 May 2022 diff hist -27 m ICP Etching Recipes Renaming Process Control Data Tag: Visual edit
- 17:25, 10 May 2022 diff hist -148 m ICP Etching Recipes renamed "historical data" to "process control" data Tag: Visual edit
- 17:18, 10 May 2022 diff hist -6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit
- 17:18, 10 May 2022 diff hist -2 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): changed style to Page Title Tag: Visual edit
- 17:17, 10 May 2022 diff hist +3,304 N Process Group - Process Control Data Links to all PECVD and IBD data pages Tag: Visual edit
- 17:16, 10 May 2022 diff hist +71 m Sputtering Recipes minor updates Tag: Visual edit
- 17:15, 10 May 2022 diff hist +12 Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: mentioned ITO not installed, minor formatting Tag: Visual edit
- 17:06, 10 May 2022 diff hist +30 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit
- 17:01, 10 May 2022 diff hist -23 PECVD Recipes renamed Process Control plots for clarity Tag: Visual edit
- 16:35, 10 May 2022 diff hist +135 Nanofab Staff Internal Pages →Process Group: link to Process Control Data Tag: Visual edit
- 07:24, 10 May 2022 diff hist -108 Template:Announcements F50 up
- 12:17, 5 May 2022 diff hist +24 Test Data of etching SiO2 with CHF3/CF4 updated temperature reduction comment Tag: Visual edit
- 14:32, 4 May 2022 diff hist +3 PECVD Recipes →Si3N4 [ICP-PECVD]: corrected "current process data" links, previously pointed to "HDSiO" tab Tag: Visual edit
- 08:44, 4 May 2022 diff hist +354 Template:Announcements F50 down