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- 15:08, 12 January 2022 diff hist +441 Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular): additional troubleshooting Tag: Visual edit
- 15:22, 11 January 2022 diff hist -42 Stepper 3 (ASML DUV) →Operating Procedures: merged Troubleshooting into Operating Procedures Tag: Visual edit
- 10:43, 11 January 2022 diff hist +675 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: method for adding focus correction to exposure Tag: Visual edit: Switched
- 08:48, 7 January 2022 diff hist +113 Video Training: Uploading to GauchoCast/Panopto (Internal) →Uploading to the Web current Tag: Visual edit: Switched
- 08:45, 7 January 2022 diff hist +13 Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 08:43, 7 January 2022 diff hist +2,328 N Video Training - Introduction (Internal) general methods - Demis current Tag: Visual edit
- 08:24, 7 January 2022 diff hist +89 Nanofab Staff Internal Pages →NanoFab IT: mentoined where to find instrucitons on Google Drive Tag: Visual edit
- 22:33, 6 January 2022 diff hist +91 Nanofab Staff Internal Pages moved olf pages to bottom Tag: Visual edit
- 22:32, 6 January 2022 diff hist +183 Nanofab Staff Internal Pages added NanoFab IT, and linked to NanoFab-it OnDema filter/page Tag: Visual edit
- 23:08, 4 January 2022 diff hist +6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): credit Demis for the data Tag: Visual edit
- 14:58, 4 January 2022 diff hist +159 UCSB NanoFab Microscope Training →Depth Measurements using focus: added meas. error Tag: Visual edit
- 12:54, 4 January 2022 diff hist +100 m Packaging Recipes →Blade Exposure Calculation Tag: Visual edit
- 12:52, 4 January 2022 diff hist -30 m Packaging Recipes →Blade Exposure Calculation: enlarge img Tag: Visual edit
- 12:51, 4 January 2022 diff hist +191 Packaging Recipes →Calculated Blade Exposures: added blade exposure calc Tag: Visual edit
- 12:50, 4 January 2022 diff hist +37 N File:ADT Dicing - Blade Exposure diagram.png current
- 12:41, 4 January 2022 diff hist +1,753 Packaging Recipes →Dicing Saw Recipes (ADT 7100): added Dicing Tips Tag: Visual edit
- 11:29, 4 January 2022 diff hist +35 Tool List →Inspection, Test and Characterization: rearranged, moved "other properties" to end, renamed "Surfscan" to "particle counts" Tag: Visual edit
- 11:13, 4 January 2022 diff hist +79 Test Data of etching SiO2 with CHF3/CF4 →Alternate Data (not updated since 2019) Tag: Visual edit
- 11:12, 4 January 2022 diff hist +209 Test Data of etching SiO2 with CHF3/CF4 pasted link to alternate etch data Tag: Visual edit
- 11:11, 4 January 2022 diff hist -158 ICP Etching Recipes →Historical Data (SiO2 Etch, Panasonic 2): removed 2nd data table Tag: Visual edit
- 13:36, 3 January 2022 diff hist -693 Template:Announcements Deleted Flu vacc. mandate
- 13:34, 3 January 2022 diff hist +4 Template:Announcements →Jan 2022 UCSB COVID Protocols
- 13:33, 3 January 2022 diff hist +1,993 Template:Announcements pasted useful UCSB Jan COVID policiues
- 16:10, 21 December 2021 diff hist 0 File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png John d uploaded a new version of File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png current
- 16:09, 21 December 2021 diff hist +36 MLA150 - Troubleshooting →Out Of Focus Exposures: "features less than 100µm" Tag: Visual edit
- 11:52, 21 December 2021 diff hist -5 m MLA150 - Troubleshooting →Out Of Focus Exposures Tag: Visual edit
- 11:52, 21 December 2021 diff hist +285 MLA150 - Troubleshooting →Out Of Focus Exposures: inserted image of out-of-focus exposure Tag: Visual edit
- 11:50, 21 December 2021 diff hist +87 N File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 11:39, 21 December 2021 diff hist -3 m MLA150 - Troubleshooting fix bullets
- 11:38, 21 December 2021 diff hist -2 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
- 11:34, 21 December 2021 diff hist -38 MLA150 - Troubleshooting rearranged sections, increased heading level to 1 & 2 Tag: Visual edit
- 11:07, 21 December 2021 diff hist +62 MLA150 - Troubleshooting Tag: Visual edit
- 00:26, 16 December 2021 diff hist +182 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 00:21, 16 December 2021 diff hist +94 m Ion Beam Deposition (Veeco NEXUS) →Recipes Tag: Visual edit
- 00:19, 16 December 2021 diff hist -424 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): deleted IBD Cals spreadsheet Tag: Visual edit
- 00:18, 16 December 2021 diff hist +426 Old Deposition Data - 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): added IBD Cals spreadsheet current Tag: Visual edit
- 00:15, 16 December 2021 diff hist -2 Old Deposition Data - 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): promoted to Page Title
- 00:15, 16 December 2021 diff hist +359 Old Deposition Data - 2021-12-15 →SiO2 deposition (IBD): added old IBD data Tag: Visual edit
- 00:12, 16 December 2021 diff hist +6,481 Old Deposition Data - 2021-12-15 pasted Old (2021-12-15) IBD recipe data
- 00:11, 16 December 2021 diff hist -613 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): pasted Nastazia M's new data
- 00:09, 16 December 2021 diff hist -12,460 PECVD Recipes pasted NastaziaM's new data links
- 00:07, 16 December 2021 diff hist +167 Deposition Data - temporary 2021-12-15 →Standard Cleaning Procedure (IBD): cleaning current Tag: Visual edit
- 00:05, 16 December 2021 diff hist +575 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): pasted SiOxNy data
- 00:03, 16 December 2021 diff hist +2,234 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): updated IBD Tag: Visual edit
- 23:49, 15 December 2021 diff hist +1,751 Deposition Data - temporary 2021-12-15 New data links Tag: Visual edit
- 07:35, 15 December 2021 diff hist +24,157 N Old Deposition Data - 2021-12-15 Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d..." Tag: Visual edit: Switched
- 07:35, 15 December 2021 diff hist +107 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 07:32, 15 December 2021 diff hist -11,328 Deposition Data - temporary 2021-12-15
- 07:31, 15 December 2021 diff hist +26 Deposition Data - temporary 2021-12-15 Tag: Visual edit
- 07:31, 15 December 2021 diff hist +24,158 N Deposition Data - temporary 2021-12-15 pasted old data
- 07:30, 15 December 2021 diff hist +83 Nanofab Staff Internal Pages →Old / Defunct: temp. link to dep data Tag: Visual edit
- 06:10, 15 December 2021 diff hist +1,908 MLA150 - Troubleshooting →Out Of Focus Exposures: Debugging section Tag: Visual edit
- 09:31, 14 December 2021 diff hist +598 Old Deposition Data - NastaziaM 2021-11-22 modified PECVD1 and PECVD 1 for same titles as old data current Tag: Visual edit
- 09:20, 14 December 2021 diff hist +24,230 Old Deposition Data - NastaziaM 2021-11-22 pasted all old data from https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes Tag: Visual edit
- 09:02, 14 December 2021 diff hist +10 m Nanofab Staff Internal Pages Tag: Visual edit
- 09:21, 11 December 2021 diff hist +115 m ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): linnks to new DSE & FL_ICP recipes Tag: Visual edit
- 09:20, 11 December 2021 diff hist +331 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): links for GaAs, GaSb Tag: Visual edit
- 12:16, 8 December 2021 diff hist +504 N MA6 Backside Alignment - Allowed Mark Locations 100-mm BSA chuck with cutouts measurements current Tag: Visual edit
- 12:15, 8 December 2021 diff hist +67 N File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg current
- 12:12, 8 December 2021 diff hist +53 Contact Aligner (SUSS MA-6) →Documentation: link to "backside alignment - allowed mark locations" Tag: Visual edit
- 12:10, 8 December 2021 diff hist +2 m Contact Aligner (SUSS MA-6) minor wording Tag: Visual edit
- 12:11, 7 December 2021 diff hist 0 m Template:Announcements →New COVID Protocols: minor formatting
- 12:10, 7 December 2021 diff hist -1,191 Template:Announcements delete old Weekly-Testing & COVID-Protocols & OxfordICP messages
- 11:01, 1 December 2021 diff hist +439 DSEIII (PlasmaTherm/Deep Silicon Etcher) added section for Edge-Bead removal of PR etc Tag: Visual edit
- 11:27, 24 November 2021 diff hist +164 m Photolithography - Improving Adhesion Photoresist Adhesion mentioned lift-off delam Tag: Visual edit
- 11:25, 24 November 2021 diff hist +26 m Lithography Recipes →General Photolithography Techniques Tag: Visual edit
- 11:24, 24 November 2021 diff hist +180 Lithography Recipes added General Photolitho section to TOC Tag: Visual edit
- 11:22, 24 November 2021 diff hist +1,309 N Photolithography - Manual Edge-Bead Removal Techniques added razor, EBR100 and lithographic methods Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Lithography Recipes →General Photolithography Techniques: changed linked page title Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Photolithography - Improving Adhesion Photoresist Adhesion John d moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect: more generalized page title
- 11:11, 24 November 2021 diff hist +1,119 N Photolithography - Improving Adhesion Photoresist Adhesion added Underlayers for PR adhesion Tag: Visual edit
- 11:05, 24 November 2021 diff hist +447 Lithography Recipes Added "General Photlith techniques" section and links to 2 pages Tag: Visual edit
- 21:43, 22 November 2021 diff hist +938 Process Group - Billing Instructions added "Billing rates" section current Tag: Visual edit
- 13:45, 22 November 2021 diff hist +7 N Old Deposition Data - NastaziaM 2021-11-22 Created page with "Testing" Tag: Visual edit
- 13:45, 22 November 2021 diff hist +31 Nanofab Staff Internal Pages →Process Group: link to old dep data Tag: Visual edit
- 15:09, 18 November 2021 diff hist +527 Surface Analysis (KLA/Tencor Surfscan) added exmaple of low particle count Tag: Visual edit
- 15:07, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G2.png current
- 15:05, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G4.png current
- 14:35, 15 November 2021 diff hist +207 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick added POLOS cleaning step Tag: Visual edit
- 14:33, 15 November 2021 diff hist +172 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick link to Logitech Wafer Bonder Tag: Visual edit
- 08:43, 12 November 2021 diff hist +379 KLayout Design Tips force TOC at top, minor updates
- 08:29, 12 November 2021 diff hist +338 Maskless Aligner (Heidelberg MLA150) "updates to training video" links below video training Tag: Visual edit
- 12:23, 11 November 2021 diff hist +1,060 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: discussion of "process window" and "tolerance" Tag: Visual edit
- 16:47, 4 November 2021 diff hist -181 Template:Announcements Removed fl-icp
- 11:17, 4 November 2021 diff hist +377 PECVD Recipes →Cleaning Recipes (PECVD #2): added cleaning times Tag: Visual edit
- 11:04, 4 November 2021 diff hist +91 m PECVD 2 (Advanced Vacuum) →About: link to LSNitride data Tag: Visual edit
- 11:03, 4 November 2021 diff hist +179 PECVD 2 (Advanced Vacuum) →About: separated specs into sub-sections Tag: Visual edit
- 10:53, 4 November 2021 diff hist -1 m Template:Announcements
- 10:53, 4 November 2021 diff hist +181 Template:Announcements FL-ICP down
- 10:45, 4 November 2021 diff hist +90 Stepper 3 (ASML DUV) →Process Information: added Max wafer thickness Tag: Visual edit
- 12:08, 1 November 2021 diff hist +63 Resistivity Mapper (CDE RESMAP) added CSV export Tag: Visual edit
- 08:58, 1 November 2021 diff hist +392 MLA150 - Troubleshooting →Unexpected Behavior: moved to top. Added Reconverting CAD file. Tag: Visual edit
- 08:51, 1 November 2021 diff hist 0 File:MLA Quarter-Wafer Alignment.jpg John d uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg current
- 11:21, 28 October 2021 diff hist +213 Lift-Off with DUV Imaging + PMGI Underlayer →Process Limits: suggest LOL, PMGI double-spin etc. Tag: Visual edit
- 21:51, 27 October 2021 diff hist -5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration corrected max. expansion to 200pm (current machine setting) Tag: Visual edit
- 21:49, 27 October 2021 diff hist +837 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added Wafer Expansion workaround Tag: Visual edit
- 12:15, 22 October 2021 diff hist +229 N Template:StaffInfoSecondary DJ Copy of NickL's "StaffInfoSecondary" template
- 12:13, 22 October 2021 diff hist +10,286 N Template:Tool2 copy of NickL's "Tool2" template
- 12:12, 22 October 2021 diff hist +659 N Template:StaffInfo DJ copy of original StaffInfo tempalte
- 11:42, 22 October 2021 diff hist +183 Template:StaffInfo added descriptive info about this template. current