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- 11:58, 20 July 2021 diff hist +169 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: Added name of recent Resist tempalte "General-Focus" Tag: Visual edit
- 10:50, 15 July 2021 diff hist +583 MLA150 - Design Guidelines →Alignment Marks: comment on mark placement across wafer Tag: Visual edit
- 10:42, 15 July 2021 diff hist +145 MLA150 - Design Guidelines →Automatic Alignment: added Reduced Detection area Tag: Visual edit
- 10:03, 15 July 2021 diff hist +663 MLA150 - Design Guidelines added alignment marks Tag: Visual edit
- 10:53, 14 July 2021 diff hist +65 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: section header for Cleaning Recipes / TBA Tag: Visual edit
- 10:01, 14 July 2021 diff hist -47 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): deleted 2nd "Extra Notes" column, combined date into "Verified by" Tag: Visual edit
- 08:19, 14 July 2021 diff hist +69 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): KOH > linked to KOH bath Tag: Visual edit
- 10:46, 13 July 2021 diff hist +41 N File:200um square v1.gds TESTING only - please delte current
- 13:47, 12 July 2021 diff hist +48 m Stepper Recipes →DUV-42P-6: updated etching links Tag: Visual edit
- 13:43, 12 July 2021 diff hist +16 m ICP Etching Recipes →Photoresist and ARC Etching (Panasonic 1): fixed URL link Tag: Visual edit
- 14:19, 9 July 2021 diff hist +928 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): Recipe info on Plasma, Ratios Tag: Visual edit
- 11:49, 9 July 2021 diff hist -2 Services →Other U.C. Campuses: corrected broken email link
- 16:50, 8 July 2021 diff hist +40 Autostep 200 Mask Making Guidance added magnification Tag: Visual edit
- 16:48, 8 July 2021 diff hist +5 Autostep 200 Mask Making Guidance corercted dimensions to 5x5x0.090 Tag: Visual edit
- 16:44, 8 July 2021 diff hist +163 Autostep 200 Mask Making Guidance added Plate materials/dimensions Tag: Visual edit
- 11:20, 7 July 2021 diff hist +88 Nanofab Staff Internal Pages →Process Group: added link to Supplies Costs Tag: Visual edit
- 12:55, 2 July 2021 diff hist +91 Process Group - Billing Instructions →Supplies Costs: sotrage location in notes Tag: Visual edit
- 12:53, 2 July 2021 diff hist -2 m Process Group - Billing Instructions →Supplies Charges: --> Supplies Costs Tag: Visual edit
- 12:53, 2 July 2021 diff hist +51 Process Group - Billing Instructions force TOC
- 12:45, 2 July 2021 diff hist +16 Process Group - Billing Instructions →Supplies Charges: updated prices wafers Tag: Visual edit
- 12:44, 2 July 2021 diff hist +238 Process Group - Billing Instructions added wafer costs Tag: Visual edit
- 11:51, 2 July 2021 diff hist +24 m Process Group - Billing Instructions table title row Tag: Visual edit: Switched
- 11:48, 2 July 2021 diff hist +1,068 Process Group - Billing Instructions added shipping supplies table Tag: Visual edit: Switched
- 11:39, 2 July 2021 diff hist +1,637 N Process Group - Billing Instructions added overhead charges, F&A rate etc. Tag: Visual edit
- 11:36, 2 July 2021 diff hist +27 N File:RechargeApp - 02 - F+A auto v2.png current
- 11:27, 2 July 2021 diff hist +25 N File:RechargeApp - 01 - line items for other charges.png current
- 11:21, 2 July 2021 diff hist +17 m Nanofab Staff Internal Pages Tag: Visual edit
- 11:21, 2 July 2021 diff hist +106 Nanofab Staff Internal Pages →Process Group: link to Billing Instructions Tag: Visual edit
- 23:32, 29 June 2021 diff hist +17 m Chemical List BT --> Lab Director Tag: Visual edit
- 23:31, 29 June 2021 diff hist +466 m Wet Etching Recipes KOH: added mention of "low-stress" SiN Tag: Visual edit
- 23:19, 29 June 2021 diff hist +218 Wet Etching Recipes link to Chemicals List Tag: Visual edit
- 23:09, 29 June 2021 diff hist +33 m Mechanical Polisher (Allied) recipes TBD Tag: Visual edit
- 23:04, 29 June 2021 diff hist -51 Flip-Chip Bonder (Finetech) remove incorrect phone/email tags from Tool template
- 20:35, 23 June 2021 diff hist -801 Process Group - Remote Fabrication Jobs deleted Trello, updated OnDema Tag: Visual edit
- 10:22, 23 June 2021 diff hist +904 Plasma Clean (YES EcoClean) added etch method & applications Tag: Visual edit
- 10:16, 23 June 2021 diff hist +742 Ashers (Technics PEII) →About: applicaitons section Tag: Visual edit
- 09:47, 21 June 2021 diff hist +12 Stepper Recipes →DUV-42P: corrected to 2500rpm for 60nm thick, DUV42P-6 formulation Tag: Visual edit
- 11:30, 17 June 2021 diff hist 0 m Vacuum Deposition Recipes changed IBD SiON A --> R Tag: Visual edit
- 13:46, 14 June 2021 diff hist -293 Template:Announcements ISO spray updat,e deleted ASML maint.
- 10:02, 14 June 2021 diff hist -1 m RIE Etching Recipes →Photoresist and ARC (RIE 5) current Tag: Visual edit
- 10:02, 14 June 2021 diff hist +121 Dry Etching Recipes corrected links to PR & ARC etching Tag: Visual edit
- 10:01, 14 June 2021 diff hist +256 RIE Etching Recipes →Photoresist and ARC: added tool name to header title Tag: Visual edit
- 09:59, 14 June 2021 diff hist +28 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): corrected header titles to include "(Pan 1/2" Tag: Visual edit
- 10:41, 7 June 2021 diff hist +47 m MLA150 - Troubleshooting →Workaround Tag: Visual edit
- 10:40, 7 June 2021 diff hist +58 m MLA150 - Troubleshooting →Workaround: link to reboot prcedure
- 10:38, 7 June 2021 diff hist +1,997 MLA150 - Troubleshooting Out of Focus exposures - problem + solutions Tag: Visual edit
- 12:12, 3 June 2021 diff hist +175 Vacuum Oven (YES) added info from Brian Lingg current Tag: Visual edit
- 12:09, 3 June 2021 diff hist +114 Ovens - Overview of All Lab Ovens added YES info Tag: Visual edit
- 13:32, 2 June 2021 diff hist +25 m Stepper 3 (ASML DUV) added Model field in Tool templ.
- 13:24, 2 June 2021 diff hist +35 m Vacuum Deposition Recipes BG color of "SiN- Low stress"