User contributions
Jump to navigation
Jump to search
- 13:38, 18 June 2019 diff hist +146 IR Thermal Microscope (QFI) added microscope objectives & cameras Tag: Visual edit
- 12:26, 18 June 2019 diff hist +186 IR Thermal Microscope (QFI) link to python script Tag: Visual edit
- 14:23, 13 June 2019 diff hist +587 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers added sub headings, moved recipe edit current Tag: Visual edit
- 08:42, 12 June 2019 diff hist +98 m Stepper 3 (ASML DUV) Indicated that FEM is in SOP Tag: Visual edit
- 00:05, 12 June 2019 diff hist +611 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added schematics for die ordering Tag: Visual edit
- 23:56, 11 June 2019 diff hist +32 N File:Stepper 3 - FEM Matrix Schematic.png current
- 23:55, 11 June 2019 diff hist +40 N File:Stepper 3 - FEM Energy Meander Schematic.png current
- 16:46, 11 June 2019 diff hist +612 Oven 4 (Thermo-Fisher HeraTherm) added info, needs verification Tag: Visual edit: Switched
- 16:31, 11 June 2019 diff hist 0 File:Oven4.jpg John d uploaded a new version of File:Oven4.jpg current
- 11:02, 10 June 2019 diff hist +1 m FIJI - Microscope Measurement Tools switch image example current
- 11:01, 10 June 2019 diff hist 0 File:MicroscopeMeasurementTools - FIJI draw measurement - line.png John d uploaded a new version of File:MicroscopeMeasurementTools - FIJI draw measurement - line.png current
- 11:00, 10 June 2019 diff hist +425 FIJI - Microscope Measurement Tools imge of calibrations list Tag: Visual edit
- 10:59, 10 June 2019 diff hist +71 N File:FIJI MMT UCSB-Fork Choose Microscope Calibration drop down.png current
- 10:53, 10 June 2019 diff hist -299 Calculators + Utilities →Analysis Programs: link to FIJI MMT installge/usage page Tag: Visual edit
- 10:49, 10 June 2019 diff hist 0 File:FIJI Install Directory - MacOS.png John d uploaded a new version of File:FIJI Install Directory - MacOS.png current
- 10:48, 10 June 2019 diff hist 0 m FIJI - Microscope Measurement Tools →Installation: image size Tag: Visual edit
- 10:47, 10 June 2019 diff hist +12 m FIJI - Microscope Measurement Tools image broder Tag: Visual edit
- 10:46, 10 June 2019 diff hist +5 m FIJI - Microscope Measurement Tools →Installation: spacing Tag: Visual edit
- 10:45, 10 June 2019 diff hist +3 m FIJI - Microscope Measurement Tools →Installation: tabs images Tag: Visual edit: Switched
- 10:40, 10 June 2019 diff hist +1,338 FIJI - Microscope Measurement Tools inserted images, corrections Tag: Visual edit
- 10:33, 10 June 2019 diff hist +55 N File:MicroscopeMeasurementTools - FIJI draw measurement - line.png
- 10:06, 10 June 2019 diff hist +69 N File:MicroscopeMeasurementTools - FIJI Install - Mac Show Package Contents.png current
- 10:05, 10 June 2019 diff hist +61 N File:MicroscopeMeasurementTools - FIJI Install Directory - WinXP.jpg current
- 10:03, 10 June 2019 diff hist +59 N File:FIJI Install Directory - MacOS.png
- 23:26, 6 June 2019 diff hist +2,910 N FIJI - Microscope Measurement Tools Initial instruction, no links
- 22:14, 6 June 2019 diff hist +46 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Changed tool info box name
- 21:39, 6 June 2019 diff hist +4 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Added photo
- 21:38, 6 June 2019 diff hist +48 N File:Filmetrics-F10-RT Photo.jpeg Photo of Filmetrics f10-RT-UVX Spectrophotometer current
- 13:01, 6 June 2019 diff hist 0 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers move image
- 12:59, 6 June 2019 diff hist +4 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers temp: manual box set to 300px Tag: Visual edit
- 12:40, 6 June 2019 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg current
- 13:50, 4 June 2019 diff hist +121 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: MA6 mark: contact Brian/Demis for GDS Tag: Visual edit
- 11:04, 4 June 2019 diff hist +75 Tool List →Thermal Processing: linked to new Ovens Overview page, reorganized ovens under this, removed Strip Annealer link (removed from lab) Tag: Visual edit
- 10:59, 4 June 2019 diff hist -169 Ovens - Overview of All Lab Ovens removed Tool Template - too cluttered and useless
- 10:58, 4 June 2019 diff hist +1,411 Ovens - Overview of All Lab Ovens inital page with some info filled in/guessed at Tag: Visual edit
- 10:55, 4 June 2019 diff hist +2 High Temp Oven (Blue M) tool id included for SUM link
- 10:47, 4 June 2019 diff hist +46 N Oven 4 (Fisher) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven current
- 10:47, 4 June 2019 diff hist 0 m Oven 4 (Thermo-Fisher HeraTherm) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven
- 10:44, 4 June 2019 diff hist +169 N Ovens - Overview of All Lab Ovens created page, generic Tool info
- 10:25, 4 June 2019 diff hist +74 Tool List →Thermal Processing for Photolithography: link to new Ovens Overview page Tag: Visual edit
- 11:23, 31 May 2019 diff hist -14 Filmetrics F40-UV Microscope-Mounted removed "screenshots" section --> "Examples" Tag: Visual edit
- 11:23, 31 May 2019 diff hist +1,293 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: updated examples & confirming removal of SiO2 on Pt Tag: Visual edit
- 11:13, 31 May 2019 diff hist +19 m Filmetrics F40-UV Quick Start formatting current Tag: Visual edit
- 11:11, 31 May 2019 diff hist +131 Filmetrics F40-UV Quick Start →Sample Measurement: clarified good/bad fit & contatc Ning/Demis for help Tag: Visual edit: Switched
- 23:14, 30 May 2019 diff hist 0 m Template:Tool Removed spaces from filename in example.
- 23:10, 30 May 2019 diff hist +34 m Template:Tool →Options: no spaces in Picture filename
- 23:08, 30 May 2019 diff hist +20 m Template:Tool Typo in recipes thermalmproc
- 23:06, 30 May 2019 diff hist 0 m Rapid Thermal Processor (SSI Solaris 150) Corrected typo in recipe link
- 23:04, 30 May 2019 diff hist +14 m Thermal Processing Recipes More accurate description of how partial pressure derived Tag: Visual edit
- 23:00, 30 May 2019 diff hist +93 m Thermal Processing Recipes →Simulation Parameters: clarified partial pressure is from curve fitting Tag: Visual edit
- 22:56, 30 May 2019 diff hist +63 Tube Furnace (Tystar 8300) →About: specified tube 2: unprocessed, Tube3 processed is ok Tag: Visual edit
- 14:01, 30 May 2019 diff hist 0 m Tool List →Optical/Electron Microscopy: moved SEMs to bottom Tag: Visual edit
- 11:28, 30 May 2019 diff hist +565 Probe Station & Curve Tracer link to Keithley manuals etc. Tag: Visual edit
- 14:08, 28 May 2019 diff hist +114 m Thermal Processing Recipes linked to tool pages, minor updates, added HeraTherm for wafer bonding Tag: Visual edit
- 14:05, 28 May 2019 diff hist +1 m Tool List →Thermal Processing: corrected linberg --> lindberg over Tag: Visual edit
- 13:20, 28 May 2019 diff hist +972 Frequently Asked Questions new chemicals: include substrate materiasl Tag: Visual edit
- 13:10, 28 May 2019 diff hist +41 Frequently Asked Questions reordered by importance Tag: Visual edit
- 13:06, 28 May 2019 diff hist +89 m Frequently Asked Questions →Publications acknowledging the Nanofab: minor Tag: Visual edit
- 13:04, 28 May 2019 diff hist +575 Frequently Asked Questions →Wifi Access in the Nanofab: link to iOS/Android Wifi Calling instructions Tag: Visual edit
- 12:56, 28 May 2019 diff hist -217 Template:Announcements deleted Lab Open fan exhaust maintenance
- 12:55, 28 May 2019 diff hist +335 Template:Announcements ASMl PM
- 12:30, 28 May 2019 diff hist +87 Thermal Processing Recipes anned RTP Solaris section Tag: Visual edit: Switched
- 12:28, 28 May 2019 diff hist +1,043 Frequently Asked Questions publications and Wifi access/calling Tag: Visual edit
- 12:13, 28 May 2019 diff hist +522 N Rapid Thermal Processor (SSI Solaris 150) inital page with `todo` listed
- 12:05, 28 May 2019 diff hist +48 Tool List →Thermal Processing: link to RTP Solaris 150 Tag: Visual edit
- 12:04, 28 May 2019 diff hist +1 m Template:News →New Rapid Thermal Annealer Installation: spelling
- 12:03, 28 May 2019 diff hist +320 Template:News SSI RTP installation
- 09:41, 24 May 2019 diff hist +125 MediaWiki:Sidebar added Main Page: Force Refresh, clarified Tempaltes
- 09:37, 24 May 2019 diff hist -19 Template:Announcements lab open, deleted exhaust shutdown
- 00:03, 24 May 2019 diff hist 0 m Filmetrics F40-UV Microscope-Mounted punctiation of tool type
- 21:47, 23 May 2019 diff hist -59 m Filmetrics F40-UV Microscope-Mounted tool descr. update
- 21:44, 23 May 2019 diff hist +11 m Filmetrics F40-UV Microscope-Mounted updated tool description
- 21:39, 23 May 2019 diff hist +583 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: Added example of inspecting for SiO2 dry-etch completion. Tag: Visual edit
- 21:36, 23 May 2019 diff hist +72 N File:Filmetrics F40-UV - 2018-11-08 - SiO Etch 4m+4m+1m - Fully Removed.png current
- 21:33, 23 May 2019 diff hist +51 N File:Filmetrics F40-UV - SiO Etch 4m+4m - Incomplete Etch.png current
- 23:33, 21 May 2019 diff hist +10 m Template:Tool showing spaces in photo filename
- 23:31, 21 May 2019 diff hist +78 m Template:Tool updated description
- 23:27, 21 May 2019 diff hist +312 Filmetrics F40-UV Microscope-Mounted added measurement screenshot
- 23:24, 21 May 2019 diff hist +147 N File:Filmetrics F40-UV - Measurement screenshot on metal pad 01.PNG Filmetrics F40-UV - Measurement screenshot on metal pad 01, showing icroscope view and resulting spectrum meas. + curve fitting and film thickness. current
- 23:19, 21 May 2019 diff hist +301 Filmetrics F40-UV Microscope-Mounted added Tool template instead of simple photo
- 12:35, 21 May 2019 diff hist -182 m Template:Tool →Arguments with Specific Values: cleanup options lists
- 12:11, 21 May 2019 diff hist +216 m Template:Tool →Arguments with Specific Values: clearified lists
- 12:07, 21 May 2019 diff hist +1,120 Template:Tool more info on editing supervisor info.
- 11:57, 21 May 2019 diff hist +1,995 Template:Tool info on each argument.
- 11:32, 16 May 2019 diff hist +81 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers pic of manual box
- 11:32, 16 May 2019 diff hist 0 File:Panasonic ICP1 Manual Box - annot v2.png John d uploaded a new version of File:Panasonic ICP1 Manual Box - annot v2.png current
- 11:26, 16 May 2019 diff hist +61 N File:Panasonic ICP1 Manual Box - annot v2.png Pan ICP1 Manual Box annotated to show RF Off & Ethcing Select
- 20:14, 15 May 2019 diff hist 0 m Demis D. John →Tools
- 20:12, 15 May 2019 diff hist +77 Demis D. John →Tools: added laser monitors Tag: Visual edit
- 20:11, 15 May 2019 diff hist +117 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Notice that training required. Tag: Visual edit
- 19:32, 15 May 2019 diff hist +102 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Added to press Enable buttons on Manual box. Tag: Visual edit
- 19:05, 15 May 2019 diff hist -22 m Laser Etch Monitoring Monor removed Intellemetrics text die to Horiba and custom system. Tag: Visual edit
- 18:57, 15 May 2019 diff hist +70 N File:Intellemetrics LEP500 Photo.jpg Photo of Intellemetrics LEP 500 laser etch monitor on Panasonic ICP #2 current
- 18:56, 15 May 2019 diff hist +271 Laser Etch Monitoring Added Intellemetrics tool info
- 00:51, 15 May 2019 diff hist +101 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers manual box : etch select Tag: Visual edit
- 00:47, 15 May 2019 diff hist +131 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers HR Tag: Visual edit
- 00:47, 15 May 2019 diff hist +59 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers name and date Tag: Visual edit
- 00:39, 15 May 2019 diff hist +4,472 N Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers INitial procedures for ICP1 & 2 Tag: Visual edit
- 00:00, 15 May 2019 diff hist +1,028 Laser Etch Monitoring →Procedures: general procedure Tag: Visual edit
- 23:50, 14 May 2019 diff hist +568 UCSB NanoFab Microscope Training inserted images for focus on edge, shadow iris, focus knob with gradations
- 23:43, 14 May 2019 diff hist 0 File:Nikon OptiPhot 200 - 6224 - field iris.jpg John d uploaded a new version of File:Nikon OptiPhot 200 - 6224 - field iris.jpg current
- 23:42, 14 May 2019 diff hist +47 N File:Nikon OptiPhot 200 - 6224 - field iris.jpg microscope knob for field aperture/focus shadow
- 23:39, 14 May 2019 diff hist +39 N File:Nikon OptiPhot 200 - 6219 - focus knob - .jpg Microscope - Focus Knob with Gradations current
- 23:29, 14 May 2019 diff hist +38 N File:Microscope Training - focus on edge crop - .jpg microscope - focusing on edge of wafer current
- 23:07, 14 May 2019 diff hist +63 m Fluorescence Microscope (Olympus MX51) included fluor. in description, mentioned calibations locked Tag: Visual edit
- 23:04, 14 May 2019 diff hist +307 m Microscopes update LEXT location, other minor updates
- 22:55, 14 May 2019 diff hist +186 Microscopes updated model numbers, Epi/Dia corrections Tag: Visual edit
- 20:59, 10 May 2019 diff hist +6 m UCSB NanoFab Microscope Training Moved shadow iris to focus sec.
- 20:57, 10 May 2019 diff hist +325 UCSB NanoFab Microscope Training Move TOC, shadow iris
- 10:16, 10 May 2019 diff hist +717 Microscopes updates on ProgRes/LEXT/DUV to specify user-editable vs. locked calibrations Tag: Visual edit
- 11:16, 7 May 2019 diff hist +9 m Calculators + Utilities →Analysis Programs: minor typos Tag: Visual edit
- 09:21, 7 May 2019 diff hist +27 N User:Zuzunaga lu redirect to Luis Zuzunaga staff page current
- 22:34, 6 May 2019 diff hist +73 m Stocked Chemical List su-8 = PR Tag: Visual edit
- 20:57, 6 May 2019 diff hist +1,088 Stocked Chemical List added alternate names col Tag: Visual edit
- 16:33, 6 May 2019 diff hist -2 Lithography Recipes →Photolithography Recipes: UVN2300-->UVN Tag: Visual edit
- 16:33, 6 May 2019 diff hist -4 Stepper Recipes →Negative Resist (ASML DUV): updates UVN2300 --> UVN30, from S.Cronin Traveler Tag: Visual edit
- 11:53, 3 May 2019 diff hist +26 m Stepper 1 (GCA 6300) →Process Information: updated recipe slink Tag: Visual edit
- 11:53, 3 May 2019 diff hist +26 m Stepper 1 (GCA 6300) →Process Information: minor text update Tag: Visual edit
- 08:25, 3 May 2019 diff hist +309 m UCSB NanoFab Microscope Training →General Focusing: minor updates Tag: Visual edit
- 23:29, 1 May 2019 diff hist 0 m Calculators + Utilities →Scripts + Programs: moved nk.py to python scripts section.
- 23:15, 1 May 2019 diff hist +121 N Talk:Vacuum Deposition Recipes Trying out mentioning brianT, curious if it’ll send him a notification. current
- 23:04, 1 May 2019 diff hist +486 m Frequently Asked Questions →How do I edit a page?: clarify restricted pages and course of action Tag: Visual edit
- 21:11, 1 May 2019 diff hist +191 m Frequently Asked Questions →Wiki Questions: encourage users to edit Tag: Visual edit
- 21:09, 1 May 2019 diff hist +147 m Editing Tutorials Minor intro Tag: Visual edit
- 21:08, 1 May 2019 diff hist +27 N Wiki Admin Redirect to Demis page current
- 21:03, 1 May 2019 diff hist +484 m Editing Tutorials Explain user/admin permissions, link to wiki Admin, highlight visual editor is recommended. Tag: Visual edit
- 20:50, 26 April 2019 diff hist +13 m Probe Station & Curve Tracer →About: minor grammar Tag: Visual edit
- 13:43, 26 April 2019 diff hist +9,961 N Filmetrics F50 - Operating Procedure inital copy of Ning's, formatted to numbered headings current Tag: Visual edit
- 13:37, 26 April 2019 diff hist +145 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) →Operating Procedures: link to SOP & adding a new model (placeholder) Tag: Visual edit
- 13:28, 26 April 2019 diff hist +109 m Probe Station & Curve Tracer →Installed Equipment: computer control specified Tag: Visual edit
- 13:27, 26 April 2019 diff hist +520 Probe Station & Curve Tracer images of each equipemnt Tag: Visual edit: Switched
- 13:25, 26 April 2019 diff hist +41 N File:BK Precision 1672 DC supply.png current
- 13:24, 26 April 2019 diff hist +26 N File:HP 3466A DMM.png current
- 13:24, 26 April 2019 diff hist +34 N File:HP 34401A multimeter.png current
- 13:23, 26 April 2019 diff hist +31 N File:Keithley 2400 SMU.png current
- 13:22, 26 April 2019 diff hist +26 N File:Tektronix 370A curve tracer IMG 5890 - PNG.png current
- 13:16, 26 April 2019 diff hist +3 m Probe Station & Curve Tracer mfg. update
- 13:16, 26 April 2019 diff hist +868 Probe Station & Curve Tracer →Equipment Specifications: model numbers, updated details on capbilities Tag: Visual edit
- 12:56, 26 April 2019 diff hist +107 N File:Filmetrics Profilm3D System Photo.png RENAMED FILE: Photograph of the Filmetrics Profilm3D including Computer and Microscope and sample displayed current
- 12:55, 26 April 2019 diff hist +93 N File:Profim3D System Photo.png Photograph of the Filmetrics Profilm3D including Computer and Microscope and sample displayed current
- 15:14, 25 April 2019 diff hist +1 m Optical Film Thickness & Wafer-Mapping (Filmetrics F50) →Operatin Procedures: spelling Tag: Visual edit
- 15:10, 25 April 2019 diff hist +161 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) →Equipment Specifications: added photo, minor updates Tag: Visual edit: Switched
- 15:09, 25 April 2019 diff hist +78 N File:FIlmetrics F50 Photo v1.jpg Photo of the Filmetrics F50 showing wafer map and spectrum and motorized stage current
- 00:05, 18 April 2019 diff hist +167 m Frequently Asked Questions →Specific Equipment Problem: minor update formatting Tag: Visual edit
- 23:58, 17 April 2019 diff hist +259 m UCSB NanoFab Microscope Training →Overview: minor addition/format Tag: Visual edit
- 23:54, 17 April 2019 diff hist +4,074 UCSB NanoFab Microscope Training initial: overview, focusing, microscope WD Tag: Visual edit
- 23:20, 17 April 2019 diff hist +32 m Fluorescence Microscope (Olympus MX51) added model
- 22:55, 17 April 2019 diff hist -6 m Microscopes →Fluorescence Microscope: Olympus MX51 (Bay 6) Tag: Visual edit
- 22:55, 17 April 2019 diff hist +634 Microscopes →Microscope #4: (Bay 6): info on olympus uscopes Tag: Visual edit
- 22:05, 17 April 2019 diff hist +701 Microscopes added info for microscope 2 + 3 Tag: Visual edit
- 16:53, 17 April 2019 diff hist +63 Biljana Stamenic →Current Work: remote work in description, minor fomratting update Tag: Visual edit: Switched
- 00:06, 12 April 2019 diff hist +658 Frequently Asked Questions →Can I add equipment reservations to my phone/computer/online calendar?: Added section for "programatically accessing reservation data" Tag: Visual edit
- 23:57, 11 April 2019 diff hist +93 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: clarified folder naming Tag: Visual edit
- 23:55, 11 April 2019 diff hist +311 m KLA Tencor P7 - Saving Profile Data added Nanofiles folder location Tag: Visual edit
- 23:50, 11 April 2019 diff hist +7 Template:FeaturedArticle formatted to highlight Supervisor role
- 12:01, 11 April 2019 diff hist +81 m Template:News →S-Cubed Spin/Coat/Dev Station Installation: added that all ASML users will be able to use eventually.
- 09:44, 11 April 2019 diff hist +24 m Surface Analysis (KLA/Tencor Surfscan) →Documentation: minor formating Tag: Visual edit
- 23:58, 10 April 2019 diff hist +150 Microscopes →Olympus: DUV scope more info Tag: Visual edit
- 23:56, 10 April 2019 diff hist -1 m Don Freeborn minor formatting
- 23:55, 10 April 2019 diff hist -1 m Ning Cao minor formatting
- 22:48, 10 April 2019 diff hist +101 m KLA Tencor P7 - Saving Profile Data last step to close APEX software Tag: Visual edit
- 22:38, 10 April 2019 diff hist +20 m KLA Tencor P7 - Saving Profile Data newline fix via source
- 22:35, 10 April 2019 diff hist +5 m KLA Tencor P7 - Saving Profile Data newlines fix Tag: Visual edit
- 22:34, 10 April 2019 diff hist -1 m KLA Tencor P7 - Saving Profile Data minor newline fix Tag: Visual edit
- 22:33, 10 April 2019 diff hist +745 N KLA Tencor P7 - Saving Profile Data Added screenshots and instructions for using APEX to save profile data Tag: Visual edit
- 22:32, 10 April 2019 diff hist +46 N File:5-Export Options.jpg current
- 22:30, 10 April 2019 diff hist +43 N File:KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg current
- 22:28, 10 April 2019 diff hist +63 N File:KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg current
- 22:27, 10 April 2019 diff hist +46 N File:KLA-Tencor P7 - Saving Data - 2-switch to APEX.jpg current
- 22:25, 10 April 2019 diff hist +43 N File:KLA-Tencor P7 - Saving Data - 1-APEX button.jpg current
- 22:01, 10 April 2019 diff hist +73 Step Profilometer (KLA Tencor P-7) →Instructions: "Saving+Extracting data" - link to nonexistent page Tag: Visual edit
- 13:34, 9 April 2019 diff hist +10 m Wet Benches →Detailed Specifications: TMAH: "vertical" Tag: Visual edit
- 13:34, 9 April 2019 diff hist +264 Wet Benches →About: Added that SRDs are adjacent Tag: Visual edit
- 13:31, 9 April 2019 diff hist +698 Wet Benches →Wafer Toxic Corrosive Benches: added the vertical baths. Tag: Visual edit
- 10:11, 9 April 2019 diff hist +106 m Wafer Bonder (Logitech WBS7) →About: minor formatting, added CMP mounting use Tag: Visual edit
- 10:08, 9 April 2019 diff hist +2 Wafer Bonder (Logitech WBS7) real photo of the tool
- 10:08, 9 April 2019 diff hist +35 N File:Logitech WSBU-6 Wafer Bonder - photo - 800px.png Photo of Logitech WBS7 Wafer Bonder current
- 12:50, 3 April 2019 diff hist +4 m Calculators + Utilities →Material Parameters: fixed link to WebElements Compounds Tag: Visual edit
- 15:27, 2 April 2019 diff hist 0 m Lab Rules John d moved page Lab Rules Draft to Lab Rules without leaving a redirect: Replaces old version
- 15:26, 2 April 2019 diff hist 0 m Lab Rules OLD 2018 John d moved page Lab Rules to Lab Rules OLD 2018 without leaving a redirect: replacing with WikiMarkup version current
- 20:05, 1 April 2019 diff hist +44 m Template:Tool minor instruction updates
- 19:52, 1 April 2019 diff hist +94 Template:Tool added lee sawyer
- 19:55, 30 March 2019 diff hist +398 Template:Announcements April 2 lab shutdown
- 09:49, 29 March 2019 diff hist +207 Calculators + Utilities →Analysis Programs: Microscope Measurement Tools: JEOL SEM auto-cal Tag: Visual edit
- 03:15, 27 March 2019 diff hist -40 ADT 7100 - Recovering an Old Recipe (2019) deleted link to other page current
- 03:14, 27 March 2019 diff hist +527 N ADT 7100 - Recovering an Old Recipe (2019) pasted source
- 03:13, 27 March 2019 diff hist -446 Dicing Saw (ADT) cut recipe recovery, pasting into own page Tag: Visual edit: Switched
- 03:11, 27 March 2019 diff hist +47 ADT 7100 - Initial Setup Before Cutting pasted text, formatted headings and numbered Tag: Visual edit
- 03:09, 27 March 2019 diff hist +3,881 N ADT 7100 - Initial Setup Before Cutting pasted text
- 03:09, 27 March 2019 diff hist +80 Dicing Saw (ADT) →Operating Procedures: added "initial setup before cutting" link Tag: Visual edit
- 03:08, 27 March 2019 diff hist -3,884 Dicing Saw (ADT) moved initialization instructions into own page
- 21:49, 26 March 2019 diff hist +1 m Lab Rules move PDF instrucitons to top
- 21:48, 26 March 2019 diff hist +99 Lab Rules instruction to save as PDF Tag: Visual edit
- 15:09, 25 March 2019 diff hist +173 Surface Analysis (KLA/Tencor Surfscan) →Documentation: link to SOP (blank) Tag: Visual edit
- 11:54, 22 March 2019 diff hist +61 Dry Etching Recipes link to ICP2 Ru etch Tag: Visual edit
- 11:52, 22 March 2019 diff hist +87 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): added placeholder for Ru etch Tag: Visual edit
- 01:00, 22 March 2019 diff hist +2 m Lab Rules move document description to bottom of Paragraph Tag: Visual edit
- 00:56, 22 March 2019 diff hist +2,073 Lab Rules finished inserting images from word doc Tag: Visual edit
- 00:55, 22 March 2019 diff hist +43 N File:Lab Rules - 7.8 clock + after hours contact.png current
- 00:54, 22 March 2019 diff hist +39 N File:Lab Rules - 7.2 signupmonkey.png current
- 00:53, 22 March 2019 diff hist +31 N File:Lab Rules - 6.3.1.4 glove racks.png current
- 00:52, 22 March 2019 diff hist +42 N File:Lab Rules - 6.1.3 hangar reservation sheet.png current
- 00:51, 22 March 2019 diff hist +51 N File:Lab Rules - 7.12.2.2 solvent drain and lift station.png current
- 00:50, 22 March 2019 diff hist +53 N File:Lab Rules - 7.12.2.1 developer drain and lift station.png current
- 00:49, 22 March 2019 diff hist +50 N File:Lab Rules - 7.12.1 chemical storage-disposal sheet.png current
- 00:48, 22 March 2019 diff hist +26 N File:Lab Rules - 7.9 PR spinner.png current
- 00:47, 22 March 2019 diff hist +43 N File:Lab Rules - 7.6.2 spin bowl liners on racks.png current
- 00:47, 22 March 2019 diff hist +34 N File:Lab Rules - 7.5.3 acid benches PPE.png current
- 00:46, 22 March 2019 diff hist +31 N File:Lab Rules - 7.3.6 refrigerators.png current
- 00:45, 22 March 2019 diff hist +30 N File:Lab Rules - 7.3.5.2 PR Cabinet.png current
- 00:43, 22 March 2019 diff hist +38 N File:Lab Rules - 7.3.4 Solvent + PR storage.png current
- 00:42, 22 March 2019 diff hist +30 N File:Lab Rules - 7.3.2 base cabinet.png current
- 00:41, 22 March 2019 diff hist +28 N File:Lab Rules - 7.3 acid cabinet.png current
- 00:41, 22 March 2019 diff hist +37 N File:Lab Rules - 7.2.1 container labelling.png current
- 00:40, 22 March 2019 diff hist +28 N File:Lab Rules - 7.1 MSDS binders.png current
- 00:40, 22 March 2019 diff hist +48 N File:Lab Rules - 5.1.1 HF exposure response calgonate.png current
- 00:39, 22 March 2019 diff hist +24 N File:Lab Rules - 4.7 exit map.png current
- 00:38, 22 March 2019 diff hist +40 N File:Lab Rules - 4.6 after hours contact sign.png current
- 00:38, 22 March 2019 diff hist +33 N File:Lab Rules - 4.5 fire extinguisher.png current
- 00:37, 22 March 2019 diff hist +52 N File:Lab Rules - 4.4 supplies rack chemical spill cleanup.png current
- 00:37, 22 March 2019 diff hist +19 N File:Lab Rules - 4.3 AED.png current
- 00:36, 22 March 2019 diff hist +35 N File:Lab Rules - 4.2 eye wash and shower.png current
- 00:35, 22 March 2019 diff hist +39 N File:Lab Rules - 4.1 map to cottage hospital.png current
- 00:34, 22 March 2019 diff hist +43 N File:Lab Rules - 3.3 wet bench overhead controls.png current
- 00:34, 22 March 2019 diff hist +35 N File:Lab Rules - 3.1 fire and gas alarms.png current
- 00:33, 22 March 2019 diff hist +41 N File:Lab Rules - 2.6.1 spinner bench hotplates.png current
- 00:33, 22 March 2019 diff hist +48 N File:Lab Rules - 2.3 equipment maintaner contact sign.png current
- 00:32, 22 March 2019 diff hist +36 N File:Lab Rules - 1.16 surveillance camera.png current
- 00:31, 22 March 2019 diff hist +685 Lab Rules added images up to surveillance cameras Tag: Visual edit
- 00:30, 22 March 2019 diff hist +40 N File:Lab Rules - 1.15.4 metals weighing scale.png current
- 00:29, 22 March 2019 diff hist +34 N File:Lab Rules - 1.15.2 metals lock box.png current
- 00:29, 22 March 2019 diff hist +42 N File:Lab Rules - 1.14.2 face masks.png current
- 00:28, 22 March 2019 diff hist +42 N File:Lab Rules - 1.13.1 maintenance chase doors.png current
- 00:28, 22 March 2019 diff hist +47 N File:Lab Rules - 1.10.1 supplies racks NanoFab paper.png current
- 00:27, 22 March 2019 diff hist +36 N File:Lab Rules - 1.9.3 glass sharps waste.png current
- 00:26, 22 March 2019 diff hist +39 N File:Lab Rules - 1.8.1 beneficial time sheet.png current
- 00:25, 22 March 2019 diff hist +28 N File:Lab Rules - 1.6 iris scanner.png current
- 00:25, 22 March 2019 diff hist +28 N File:Lab Rules - 1.4.3 ASML masks.png current
- 00:24, 22 March 2019 diff hist +25 N File:Lab Rules - 1.4.2 dry box.png current
- 00:23, 22 March 2019 diff hist +29 N File:Lab Rules - 1.4.1 shelf space.png current
- 22:58, 21 March 2019 diff hist +53 Lab Rules move TOC below summary
- 22:57, 21 March 2019 diff hist +10 m Lab Rules removed Heading level for sub-title Tag: Visual edit
- 22:56, 21 March 2019 diff hist -407 Lab Rules removed bolded titles except for important sections Tag: Visual edit
- 21:38, 21 March 2019 diff hist +53 Lab Rules force numbered headings
- 21:37, 21 March 2019 diff hist +2 Main Page revert to remove numbering
- 21:37, 21 March 2019 diff hist -2 m Main Page test numbered headings
- 21:36, 21 March 2019 diff hist +43 Main Page no numbered headings
- 19:00, 21 March 2019 diff hist +45 m Tool List →Inspection, Test and Characterization: QFI added "thermal" Tag: Visual edit
- 08:05, 19 March 2019 diff hist +14 m ICP Etching Recipes →Si Etching: minor typo Tag: Visual edit
- 07:58, 19 March 2019 diff hist +36 Dry Etching Recipes linked to Fluorine Si etch Tag: Visual edit