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- 22:20, 23 September 2018 diff hist +905 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Added IBD BHF etch rates Tag: Visual edit
- 22:13, 23 September 2018 diff hist +719 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added PECVD#1+2 Si3N4 Tag: Visual edit
- 22:03, 23 September 2018 diff hist +78 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): "Buffered HF" → "HF ("Buffered HF Improved", Transene)" for sortability Tag: Visual edit
- 21:54, 23 September 2018 diff hist +52 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): pointed out sorting, changed developers to start with "Developer" for sorting ease. Tag: Visual edit
- 21:51, 23 September 2018 diff hist +240 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): updates to "selective to" fields etc. Tag: Visual edit
- 22:00, 18 September 2018 diff hist +500 Oxygen Plasma System Recipes →UV Ozone Reactor: added some basic info Tag: Visual edit
- 21:41, 18 September 2018 diff hist +46 Wafer Bonder (Logitech WBS7) added crummy scheamtic picture from manual
- 16:16, 18 September 2018 diff hist +91 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: fixed recipe links to point to correct section (Fluorine etch, not DeepRIE) Tag: Visual edit
- 16:13, 18 September 2018 diff hist -173 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) removed warning about outdated info
- 11:26, 17 September 2018 diff hist -309 Template:Announcements deleted EB2 upgrade
- 11:26, 17 September 2018 diff hist +129 Template:Announcements gasonics down
- 11:25, 17 September 2018 diff hist -378 Template:Announcements deleted fire alarm test
- 16:26, 14 September 2018 diff hist -217 Template:Announcements Fire Alarm Test, deleted DUVscope, Stepper maintenance
- 17:28, 12 September 2018 diff hist +212 Template:News KLA Tencor profilometer
- 17:13, 12 September 2018 diff hist +309 Template:Announcements EB2 maintenance
- 15:16, 11 September 2018 diff hist +361 Template:Announcements RIE5 software upgrade
- 23:01, 10 September 2018 diff hist +25 Template:Announcements added GCA AutoStep
- 12:27, 6 September 2018 diff hist -219 Template:Announcements IBD update, deleted EBeam 2
- 21:31, 5 September 2018 diff hist +6 m Demis D. John Heading level adjust
- 21:31, 5 September 2018 diff hist -5 Demis D. John Updated position
- 21:30, 5 September 2018 diff hist -1 m Demis D. John →Tools
- 21:29, 5 September 2018 diff hist +294 m Demis D. John Added professional websites Tag: Visual edit
- 11:22, 5 September 2018 diff hist +961 N Chemical List initial page, MSDS linked to google drive, Inventory List "To Be Added" Tag: Visual edit
- 11:10, 5 September 2018 diff hist 0 m Chemical List - OLD 2018-09-05 John d moved page Chemical List to Chemical List - OLD 2018-09-05 without leaving a redirect: eliminating thriple-entry of chemical MSDS etc., moving to google drive links etc.
- 10:41, 5 September 2018 diff hist +1 m Chemical List - OLD 2018-09-05 →UNSORTED: new link searchable, embedded link Tag: Visual edit
- 10:32, 5 September 2018 diff hist +166 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): Added Au lower limit Tag: Visual edit
- 10:28, 5 September 2018 diff hist +149 Sputter 2 (SFI Endeavor) disclaimer that tool is disabled current
- 10:27, 5 September 2018 diff hist +20 Sputtering Recipes →Sputter 2 (SFI Endeavor): corrected - tool disabled, not removed yet Tag: Visual edit
- 10:25, 5 September 2018 diff hist +129 Sputtering Recipes →Sputter 2 (SFI Endeavor): disclaimer that the tool has been removed Tag: Visual edit
- 10:23, 5 September 2018 diff hist +1 m Sputtering Recipes moved sputter 2 to the bottom
- 22:55, 4 September 2018 diff hist +19 Filmetrics F40-UV Quick Start moved images to in-line Tag: Visual edit
- 17:33, 4 September 2018 diff hist +107 Chemical List - OLD 2018-09-05 added link to Google drive #2 from DJ's MyDrive Tag: Visual edit
- 17:27, 4 September 2018 diff hist +113 N ProcessGroup: Shipping Samples on Dicing Tape+Frame started page current Tag: Visual edit
- 17:17, 4 September 2018 diff hist +5 Template:Announcements ibd source water issue.
- 17:08, 4 September 2018 diff hist +637 m Editing Tutorials →Basic Editing: added partial "inserting images" section Tag: Visual edit
- 17:03, 4 September 2018 diff hist +371 Editing Tutorials →Making a New Page: added screenshot to click in Search results Tag: Visual edit
- 17:00, 4 September 2018 diff hist +74 N File:Editing Tutorial - Hyperlink panel nonexisting page 02 - CLICK arrow.png.png current
- 16:56, 4 September 2018 diff hist +51 Editing Tutorials →Making a New Page: updated intro text to clarify whole procedure Tag: Visual edit
- 16:55, 4 September 2018 diff hist +306 Editing Tutorials →Making a New Page: added screenshot showing to click "Create" tab Tag: Visual edit
- 16:53, 4 September 2018 diff hist +71 N File:Click on "Create" Tab to enter VisualEditing Mode.png current
- 16:48, 4 September 2018 diff hist +346 NanoFab Process Group added Equip Cal section, and 3 Litho tools I know we have procedures for. Tag: Visual edit
- 16:46, 4 September 2018 diff hist -4 NanoFab Process Group →Dicing Procedures: changed link from "new/fresh tape" to just "on tape" - will include the variation on the target page. Tag: Visual edit
- 16:42, 4 September 2018 diff hist +1,652 N NanoFab Process Group created page, Links to various dicing procedures. Added Process Control links as well. Tag: Visual edit
- 01:02, 1 September 2018 diff hist +213 Deep UV Optical Microscope (Olympus) added calibration image Tag: Visual edit
- 01:00, 1 September 2018 diff hist +48 N File:Olympus MX61A-DUV res test 100x DUV v1.png current
- 00:38, 1 September 2018 diff hist +41 m Template:Announcements duv link
- 00:36, 1 September 2018 diff hist -1 m Template:Announcements spacing
- 00:36, 1 September 2018 diff hist -26 Template:Announcements ibd update
- 23:05, 31 August 2018 diff hist +85 Microscopes link to DUV scope Tag: Visual edit
- 23:04, 31 August 2018 diff hist +35 m Deep UV Optical Microscope (Olympus) added description field
- 23:03, 31 August 2018 diff hist +18 m Deep UV Optical Microscope (Olympus) added model field Tag: Visual edit: Switched
- 22:31, 31 August 2018 diff hist +19 m Laser Scanning Confocal M-scope (Olympus LEXT) caption update Tag: Visual edit
- 22:30, 31 August 2018 diff hist +405 Microscopes added some model numbers and links to the relevant pages/manuals Tag: Visual edit
- 08:53, 31 August 2018 diff hist +49 Editing Tutorials separated into basic editign and administration Tag: Visual edit
- 08:50, 31 August 2018 diff hist +1,157 Editing Tutorials Making a new page section, with screenshots Tag: Visual edit
- 08:45, 31 August 2018 diff hist +43 N File:RedLink Screenshot.png current
- 08:42, 31 August 2018 diff hist +72 N File:Editing Tutorial - Hyperlink panel nonexisting page 01.png current
- 08:30, 31 August 2018 diff hist +47 N File:Editing Toolbar Hyperlink Button 01.png current
- 23:49, 30 August 2018 diff hist +146 Template:Announcements DUV scope update
- 07:45, 30 August 2018 diff hist +40 m Suss MA-6 Backside Alignment QuickStart explain "BSA" Tag: Visual edit
- 15:19, 29 August 2018 diff hist +449 Template:Announcements IBD down; Stepper 6300 maint.
- 17:19, 28 August 2018 diff hist -5 m Atomic Layer Deposition Recipes →ZnO Deposition (ALD Chamber 1): itlaics Tag: Visual edit
- 17:13, 28 August 2018 diff hist -149 m Atomic Layer Deposition Recipes →ZrO deposition (ALD CHAMBER 3): removed unneeded comment about HfO (which is already in the HfO section) Tag: Visual edit
- 17:11, 28 August 2018 diff hist +235 Atomic Layer Deposition Recipes →ZnO:Al deposition (ALD CHAMBER 1): described double-loop recipes Tag: Visual edit
- 17:09, 28 August 2018 diff hist +167 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added ZnO recipe. Tag: Visual edit
- 15:25, 28 August 2018 diff hist +296 Oxygen Plasma System Recipes →Ashers (Technics PEII): added SiN etch and chamber clean Tag: Visual edit
- 15:20, 28 August 2018 diff hist -21 m Dry Etching Recipes replace bottom link from SiDeepEtch → SLR Fluorine ICP Tag: Visual edit
- 15:00, 28 August 2018 diff hist -65 Dry Etching Recipes renamed/linked SiDeepRIE → SLR Fluorine ICP Tag: Visual edit
- 14:57, 28 August 2018 diff hist +24 Tool List →ICP-RIE: link to SLR Fluorine Etcher Tag: Visual edit
- 14:56, 28 August 2018 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) bolded the top note Tag: Visual edit: Switched
- 14:55, 28 August 2018 diff hist +51 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: linked to proper/new tool page Tag: Visual edit
- 14:53, 28 August 2018 diff hist +180 ICP Etching Recipes added SLR Fluorine, moved SiDeepRIE to bottom
- 14:53, 28 August 2018 diff hist +166 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) note indicate info is from pre-conversion Tag: Visual edit
- 14:51, 28 August 2018 diff hist +64 N Si Deep RIE (PlasmaTherm/Bosch Etch) John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted current
- 14:51, 28 August 2018 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted
- 14:38, 28 August 2018 diff hist +440 ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): note that the tool does not exist in this configuration any more Tag: Visual edit: Switched
- 14:25, 28 August 2018 diff hist +26 m Stepper 3 (ASML DUV) moved Test Reticles into Process info, othe rminor changes Tag: Visual edit
- 14:14, 24 August 2018 diff hist +6 m Photoluminescence PL Setup (Custom) header formats Tag: Visual edit
- 14:13, 24 August 2018 diff hist +355 Photoluminescence PL Setup (Custom) copied image/info from holography page
- 10:32, 24 August 2018 diff hist +146 N Photoluminescence PL Setup (Custom) iniital page, in progress Tag: Visual edit
- 10:12, 24 August 2018 diff hist +42 Tool List →Inspection, Test and Characterization: PL setup page link Tag: Visual edit
- 23:11, 22 August 2018 diff hist +4 m Talk:Tool List current
- 23:10, 22 August 2018 diff hist +325 N Talk:Tool List mention BrianT, switch Si_DeepRIE --> SLR Fluorine
- 16:03, 22 August 2018 diff hist 0 Tool List →Thermal Processing: corrected Logitech bonder model # & link Tag: Visual edit
- 16:02, 22 August 2018 diff hist +42 N Wafer Bonder (Logitech WSB7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number current
- 16:02, 22 August 2018 diff hist 0 m Wafer Bonder (Logitech WBS7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number
- 15:20, 22 August 2018 diff hist -15 m Wafer Bonder (Logitech WBS7) removed wrong picture
- 15:17, 22 August 2018 diff hist +288 N Wafer Bonder (Logitech WBS7) initial page, copied source from existing page
- 15:14, 22 August 2018 diff hist 0 Tool List correct Logitech link with model: WSB7 Tag: Visual edit
- 11:54, 22 August 2018 diff hist +77 Tool List →Thermal Processing: link to Logitech wafer bonder Tag: Visual edit
- 11:28, 18 August 2018 diff hist -27 Template:Announcements EBeam #2 heater repair
- 15:04, 16 August 2018 diff hist +188 m Filmetrics F40-UV Microscope-Mounted →About: minor text updates, curve fitting mentioned Tag: Visual edit
- 06:38, 15 August 2018 diff hist +39 Template:Announcements PECVD software upgrade
- 13:57, 14 August 2018 diff hist +127 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: max # connections Tag: Visual edit
- 10:45, 14 August 2018 diff hist 0 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: correct nanofabadmin email address Tag: Visual edit
- 10:43, 14 August 2018 diff hist +362 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: links to set your FTP client to limit # of connections Tag: Visual edit
- 07:36, 14 August 2018 diff hist +1,164 Frequently Asked Questions blocked form nanofiles solution/faq Tag: Visual edit
- 09:55, 7 August 2018 diff hist -96 Template:Announcements pecvd s/w upgrade date sept.
- 23:46, 5 August 2018 diff hist +354 m ASML Stepper 3 - UCSB Test Reticles →Reticle ID: "UCSB-OPC1": updated description of plate Tag: Visual edit
- 23:40, 5 August 2018 diff hist +687 ASML Stepper 3 Dicing Guide Programming Added negative PR image Tag: Visual edit
- 09:34, 3 August 2018 diff hist +3,277 ASML Stepper 3 - UCSB Test Reticles →Coords for "UCSB_Cal" Calibration Patterns: added coords for each resolution_chart_ORIG Tag: Visual edit
- 08:07, 3 August 2018 diff hist -2 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: rename multipurpose to EBL Tag: Visual edit
- 22:35, 1 August 2018 diff hist -463 Template:Announcements Deleted old UP items
- 17:31, 1 August 2018 diff hist +44 m ASML Stepper 3 - UCSB Test Reticles White is Chrome, Striped area is Clear Tag: Visual edit
- 17:24, 1 August 2018 diff hist +81 ASML Stepper 3 - UCSB Test Reticles →Reticle ID: "UCSB-OPC1": mention reticle is always installed in Box #1 Tag: Visual edit
- 17:22, 1 August 2018 diff hist +341 m ASML Stepper 3 - UCSB Test Reticles →Calibration Chart Layout: update table and "UCSB_Cal" descriptions/coords for clarity Tag: Visual edit
- 03:29, 1 August 2018 diff hist +338 ASML Stepper 3 - UCSB Test Reticles added contact_mark Tag: Visual edit
- 03:28, 1 August 2018 diff hist +47 N File:Align Front - Screen Shot 2018-07-23 at 11.32.16 AM.png current
- 03:24, 1 August 2018 diff hist +17 m ASML Stepper 3 - UCSB Test Reticles typo
- 03:20, 1 August 2018 diff hist +3,940 ASML Stepper 3 - UCSB Test Reticles added resolution charts + coords etc. Tag: Visual edit
- 03:17, 1 August 2018 diff hist +82 N File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png current
- 03:14, 1 August 2018 diff hist +36 N File:Resolution Chart - Screen Shot 2018-07-23 at 1.36.31 PM.png current
- 03:05, 1 August 2018 diff hist +42 N File:UCSB cal - Screen Shot 2018-07-23 at 12.06.58 PM.png current
- 02:58, 1 August 2018 diff hist +1,167 N ASML Stepper 3 - UCSB Test Reticles added UCSB-OPC1 and alignment marks for that reticle Tag: Visual edit
- 02:57, 1 August 2018 diff hist +51 N File:GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png current
- 02:54, 1 August 2018 diff hist +37 N File:GlobalMulti POS - Screen Shot 2018-07-23 at 11.17.23 AM.png current
- 02:52, 1 August 2018 diff hist +29 N File:Stepper align - Screen Shot 2018-07-23 at 11.24.31 AM.png current
- 02:44, 1 August 2018 diff hist +86 Stepper 3 (ASML DUV) →Operating Procedures: Link to UCSB Test Reticles Tag: Visual edit
- 02:40, 1 August 2018 diff hist +1,722 N ASML Stepper 3 Dicing Guide Programming initial page, included screenshot and basic programming Tag: Visual edit
- 02:32, 1 August 2018 diff hist +41 N File:UCSB Dicing Guides - Die Location - 800px.png current
- 02:26, 1 August 2018 diff hist +50 N File:UCSB Dicing Guides - Image Location on Reticle - 800px.png current
- 02:24, 1 August 2018 diff hist +34 N File:UCSB Dicing Guides - IMG 1199 annotated.jpg current
- 18:28, 27 July 2018 diff hist -123 Template:Announcements Sem up
- 16:12, 27 July 2018 diff hist -129 Template:Announcements sem2 down
- 11:35, 26 July 2018 diff hist -99 Template:Announcements THERMco furnace up, deleted DSEiii
- 11:33, 26 July 2018 diff hist +146 Template:Announcements Sem2 update
- 18:19, 25 July 2018 diff hist +51 m Olympus LEXT OLS4000 Confocal uScope - Quick Start clarified log off button current Tag: Visual edit
- 18:17, 25 July 2018 diff hist +1,417 Olympus LEXT OLS4000 Confocal uScope - Quick Start Inserted screenshots and images Tag: Visual edit
- 18:16, 25 July 2018 diff hist +48 N File:Olympus LEXT - log out-close buttons highlighted.png current
- 18:14, 25 July 2018 diff hist +42 N File:Olympus LEXT - sample load position button.png current
- 18:13, 25 July 2018 diff hist +34 N File:Olympus LEXT - 5x objective button.png current
- 18:11, 25 July 2018 diff hist +29 N File:Olympus LEXT - Imaging Button.png current
- 18:10, 25 July 2018 diff hist +31 N File:Olympus LEXT - Save File button.png current
- 18:05, 25 July 2018 diff hist +37 N File:Olympus LEXT - Cursor Averaging.png current
- 18:03, 25 July 2018 diff hist 0 File:Olympus LEXT - Image Correction button.png John d uploaded a new version of File:Olympus LEXT - Image Correction button.png current
- 18:02, 25 July 2018 diff hist +57 N File:Olympus LEXT - Saturation Highlighting button highlighted.png current
- 17:57, 25 July 2018 diff hist +38 N File:Olympus LEXT - Image Correction button.png
- 17:54, 25 July 2018 diff hist +50 N File:Olympus LEXT - 3-point Leveling Screen highlighted.png current
- 17:49, 25 July 2018 diff hist +51 N File:Olympus LEXT - Profile 2-point Buttons.png current
- 17:40, 25 July 2018 diff hist +26 N File:Olympus LEXT - login guest.png current
- 17:38, 25 July 2018 diff hist +44 N File:Olympus LEXT - Imaging + Measurement Buttons.png current
- 17:35, 25 July 2018 diff hist +33 N File:Olympus LEXT - Acquisition Button.png current
- 17:31, 25 July 2018 diff hist +41 N File:Olympus LEXT - Top-Bottom Setting.png current
- 17:23, 25 July 2018 diff hist +62 N File:Olympus LEXT - acquisition settings - Fine, manual annot.png current
- 17:16, 25 July 2018 diff hist +167 Olympus LEXT OLS4000 Confocal uScope - Quick Start inserted images, partially done Tag: Visual edit
- 17:15, 25 July 2018 diff hist +35 N File:Olympus LEXT - laser imaging button.png current
- 17:12, 25 July 2018 diff hist +33 N File:Olympus LEXT - Live halo.png current
- 17:10, 25 July 2018 diff hist +35 N File:Olympus LEXT - Color imaging button.png current
- 17:07, 25 July 2018 diff hist +38 N File:Olympus LEXT - Button Flag measurement position.png current
- 16:58, 25 July 2018 diff hist +1,784 Laser Scanning Confocal M-scope (Olympus LEXT) describe technique & insert example measurement pic Tag: Visual edit
- 16:57, 25 July 2018 diff hist +37 N File:Olypmus LEXT Example Profile Measurement.png current
- 13:51, 25 July 2018 diff hist +225 Template:Announcements E-Beam 2 heater down
- 13:46, 25 July 2018 diff hist +213 Template:Announcements Sem2 down
- 10:53, 25 July 2018 diff hist +492 Microscopes added LEXT Tag: Visual edit
- 11:49, 24 July 2018 diff hist -22 Template:Announcements sputter 3 up
- 09:30, 24 July 2018 diff hist +153 Template:Announcements thermco furnace down
- 13:26, 23 July 2018 diff hist -56 Template:Announcements DSEiii up
- 18:35, 20 July 2018 diff hist +278 m Olympus LEXT OLS4000 Confocal uScope - Quick Start →Quick-Start General Procedure: Minor grammar etc. Tag: Visual edit
- 17:28, 20 July 2018 diff hist +8 m Template:Announcements →DSE-iii Down: update
- 17:28, 20 July 2018 diff hist +38 Template:Announcements Delete ASML, add sputter 3
- 22:47, 19 July 2018 diff hist +46 m Olympus LEXT OLS4000 Confocal uScope - Quick Start Tag: Visual edit
- 22:44, 19 July 2018 diff hist +4,994 N Olympus LEXT OLS4000 Confocal uScope - Quick Start copy/pasted word doc, no images yet
- 21:32, 19 July 2018 diff hist +99 Laser Scanning Confocal M-scope (Olympus LEXT) link to quickstart page Tag: Visual edit
- 21:26, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 21:25, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 21:24, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 19:31, 18 July 2018 diff hist +149 Template:Announcements DSEiii clasp broke
- 22:13, 17 July 2018 diff hist +14 N UCSB NanoFab Microscope Training coming soon Tag: Visual edit
- 22:09, 17 July 2018 diff hist +116 Microscopes →Documentation: link to microscope training Tag: Visual edit
- 22:07, 17 July 2018 diff hist +15 m Filmetrics F40-UV Quick Start →Sample Measurement Tag: Visual edit
- 22:04, 17 July 2018 diff hist -173 m Filmetrics F40-UV Quick Start delete header pic Tag: Visual edit: Switched
- 18:44, 17 July 2018 diff hist +202 Filmetrics F40-UV Quick Start image reorg Tag: Visual edit
- 18:40, 17 July 2018 diff hist +61 Filmetrics F40-UV Quick Start image reflow editing Tag: Visual edit: Switched
- 18:09, 17 July 2018 diff hist +120 Filmetrics F40-UV Microscope-Mounted added photo Tag: Visual edit
- 18:08, 17 July 2018 diff hist +3,565 N Filmetrics F40-UV Quick Start initial quick start. numbering is kinda messe dup, wrote in 10 min! Tag: Visual edit
- 18:05, 17 July 2018 diff hist +18 N File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 18:04, 17 July 2018 diff hist +78 N File:Filmetrics F40-UV - dark meas thru hole 06.jpg current
- 18:03, 17 July 2018 diff hist +28 N File:Filmetrics F40-UV - objective choice 05.jpg current
- 18:02, 17 July 2018 diff hist +33 N File:Filmetrics F40-UV - focus on bare silicon 04.jpg current
- 18:01, 17 July 2018 diff hist +15 N File:Filmetrics F40-UV - wafer placement 03.jpg current
- 17:59, 17 July 2018 diff hist +20 N File:Filmetrics F40-UV - light source setting 02.jpg current
- 17:58, 17 July 2018 diff hist +15 N File:Filmetrics F40-UV - system pic 01.jpg current
- 17:57, 17 July 2018 diff hist +457 N Filmetrics F40-UV Microscope-Mounted initial description, link to quick start Tag: Visual edit
- 17:48, 17 July 2018 diff hist +41 Tool List →Inspection, Test and Characterization: link to Filmetrics F-40-UV page Tag: Visual edit
- 17:47, 17 July 2018 diff hist +7 Template:Announcements →ASML Maintenance: timeline update
- 16:39, 17 July 2018 diff hist +355 Atomic Layer Deposition Recipes split up bullets, clarified recipe name, formatting Tag: Visual edit
- 16:34, 17 July 2018 diff hist +155 Atomic Layer Deposition Recipes split into Chamber 1 & Chamber 3 Tag: Visual edit
- 15:57, 17 July 2018 diff hist +208 UV Ozone Reactor add description and model
- 15:53, 17 July 2018 diff hist +4 m UV Ozone Reactor bullet list Tag: Visual edit: Switched
- 15:53, 17 July 2018 diff hist +111 UV Ozone Reactor link to Quick start from TBosch email, and user manual PDF Tag: Visual edit: Switched
- 15:41, 17 July 2018 diff hist +36 N File:UV Ozone Manual Jelight M-144AX.pdf current
- 15:40, 17 July 2018 diff hist +989 N UV Ozone Quick Start quick start from Tony's email current Tag: Visual edit
- 14:40, 17 July 2018 diff hist +23 m Stepper 3 (ASML DUV) →Operating Procedures: added wafer recovery
- 14:39, 17 July 2018 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Wafer Recovery / Wafer Handler Issues during Batch operation: bold Tag: Visual edit
- 14:38, 17 July 2018 diff hist -10 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error, Calibration, Error logging Procedures for Users: remove header formatting Tag: Visual edit
- 14:35, 17 July 2018 diff hist +293 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration moved wafer recovery to top Tag: Visual edit
- 14:31, 17 July 2018 diff hist +2,129 N ASML Stepper 3 Error Recovery, Troubleshooting and Calibration copy/pasted BT's procedures, fomratting Tag: Visual edit
- 14:19, 17 July 2018 diff hist +76 m Stepper 3 (ASML DUV) →Operating Procedures: moved Error recovery to "troubleshootin" section Tag: Visual edit
- 14:17, 17 July 2018 diff hist +315 ASML 5500: Choose Marks for Prealignment added global mark updating current Tag: Visual edit
- 14:14, 17 July 2018 diff hist +117 Stepper 3 (ASML DUV) →Operating Procedures: link to error & calibration procedure Tag: Visual edit
- 14:13, 17 July 2018 diff hist -2 m ASML Stepper 3 Standard Operating Procedure remove colons Tag: Visual edit
- 14:12, 17 July 2018 diff hist -397 ASML Stepper 3 Standard Operating Procedure finalized formatting Tag: Visual edit
- 11:33, 17 July 2018 diff hist -263 m ASML Stepper 3 Standard Operating Procedure partial indenting Tag: Visual edit
- 11:25, 17 July 2018 diff hist +161 ASML Stepper 3 Standard Operating Procedure update indentation Tag: Visual edit
- 11:23, 17 July 2018 diff hist +6,403 N ASML Stepper 3 Standard Operating Procedure initial version, indenting in progress Tag: Visual edit
- 11:19, 17 July 2018 diff hist +80 Stepper 3 (ASML DUV) link to SOP Tag: Visual edit
- 11:16, 17 July 2018 diff hist -1 m Template:Announcements spacing fixes
- 11:15, 17 July 2018 diff hist +37 Template:Announcements delete SLR turbo fail, AMSL maint.
- 09:26, 17 July 2018 diff hist +103 Template:News LaserMon update ICP1
- 07:06, 16 July 2018 diff hist -58 m Sputtering Recipes →Sputter 5 (AJA ATC 2200-V): correct signupmonkey link, footnote star Tag: Visual edit
- 07:04, 16 July 2018 diff hist +74 m Vacuum Deposition Recipes link to sputter 5 section Tag: Visual edit
- 22:43, 14 July 2018 diff hist -168 Template:Announcements remove asml
- 19:02, 14 July 2018 diff hist -1 m Template:Announcements spacing fixes
- 19:02, 14 July 2018 diff hist -234 Template:Announcements stepper 3 wafer stuck
- 08:17, 13 July 2018 diff hist +92 Lithography Recipes →Photolithography Recipes: fixed links to Stepp3 pos PR Tag: Visual edit
- 09:09, 9 July 2018 diff hist +74 Vacuum Deposition Recipes sputt4 link to TiN - recipes table Tag: Visual edit
- 08:17, 9 July 2018 diff hist +23 Template:Announcements holiday fire update
- 16:26, 7 July 2018 diff hist -13 m Template:Announcements delete unaries
- 10:15, 7 July 2018 diff hist +6 m Template:Announcements Bullets
- 10:14, 7 July 2018 diff hist -1 m Template:Announcements →LAB OPEN: formatting
- 10:14, 7 July 2018 diff hist +64 Template:Announcements Lab open
- 22:26, 6 July 2018 diff hist -384 Template:Announcements Lab closed, deleted non-urgent announcements
- 22:04, 6 July 2018 diff hist -17 Template:Announcements SLR down failed turbo
- 22:03, 6 July 2018 diff hist -73 Template:Announcements Ma6 up
- 13:21, 6 July 2018 diff hist +166 Template:Announcements MA-6 down
- 13:20, 6 July 2018 diff hist +103 Template:Announcements lab open update
- 10:22, 6 July 2018 diff hist -295 Template:Announcements lab open
- 08:23, 6 July 2018 diff hist +378 Template:Announcements high humidity
- 23:45, 3 July 2018 diff hist -2 Staff List updated job titles Tag: Visual edit
- 23:25, 3 July 2018 diff hist +333 IR Thermal Microscope (QFI) added link to manual Tag: Visual edit
- 23:15, 3 July 2018 diff hist +12 m Tool List →Thermal Processing: fix table
- 23:09, 3 July 2018 diff hist +76 m Tool List →Thermal Processing: tabled Tag: Visual edit: Switched
- 23:00, 3 July 2018 diff hist +196 Tool List →Dry Etch: categories Tag: Visual edit
- 22:56, 3 July 2018 diff hist +117 Tool List →Vacuum Deposition: categories Tag: Visual edit
- 22:51, 3 July 2018 diff hist +18 m Tool List →Inspection, Test and Characterization: styled table Tag: Visual edit
- 22:50, 3 July 2018 diff hist -112 m Template:Announcements deleted icp2
- 16:41, 3 July 2018 diff hist +34 m Wet Benches →General Information: how to label glassware Tag: Visual edit
- 16:39, 3 July 2018 diff hist 0 m Bill Mitchell code/typo Tag: Visual edit: Switched
- 16:38, 3 July 2018 diff hist +47 Bill Mitchell →Tools: link to ALD Tag: Visual edit
- 16:38, 3 July 2018 diff hist +4 m Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: link to bill mitchell Tag: Visual edit
- 16:37, 3 July 2018 diff hist +774 Atomic Layer Deposition (Oxford FlexAL) →About: explained dual-chamber setup, added 50nm restriction Tag: Visual edit
- 16:10, 3 July 2018 diff hist +178 m Calculators + Utilities →CAD Layout Programs: credits fo L-edit tutotiral Tag: Visual edit
- 15:58, 3 July 2018 diff hist +1,382 N Suss MA-6 Backside Alignment QuickStart Demis' backside alignmetn quick-start instructions Tag: Visual edit
- 15:48, 3 July 2018 diff hist +45 Contact Aligner (SUSS MA-6) →Documentation: Link to Backside ALignment quickstart Tag: Visual edit
- 15:47, 3 July 2018 diff hist -159 Contact Aligner (SUSS MA-6) →Documentation: combined 4 pages into one PDF Tag: Visual edit
- 15:38, 3 July 2018 diff hist +788 Calculators + Utilities →Scripts + Programs: added CAD/L-Edit/KLayout info Tag: Visual edit
- 14:59, 3 July 2018 diff hist +259 Tool List →Inspection, Test and Characterization: added categories Tag: Visual edit
- 14:27, 3 July 2018 diff hist +131 m Wet Benches →Detailed Specifications: split temps into separate benches Tag: Visual edit
- 14:25, 3 July 2018 diff hist +495 Tool List categories for lithography tools Tag: Visual edit
- 17:00, 26 June 2018 diff hist 0 m Thermal Evaporation Recipes moved In to bottom of table current
- 16:47, 26 June 2018 diff hist +106 ICP Etching Recipes →Ti Etch (Panasonic 1): link to elecrochem paper Tag: Visual edit
- 08:46, 26 June 2018 diff hist -111 Template:Announcements ICP2 up
- 16:23, 25 June 2018 diff hist 0 m Template:Announcements Update timestamp
- 16:20, 25 June 2018 diff hist +124 Template:Announcements ICP he
- 10:04, 25 June 2018 diff hist -137 Template:Announcements icp2 update
- 22:19, 23 June 2018 diff hist +236 Template:Announcements icp2 vac error
- 17:00, 22 June 2018 diff hist 0 m Frequently Asked Questions minor reorg Tag: Visual edit
- 16:56, 22 June 2018 diff hist +634 Lab Rules OLD 2018 →Wet Bench Housekeeping: added descriptions of how to dispose of soaked wipes, for solvent and corrosive. Tag: Visual edit
- 16:49, 22 June 2018 diff hist +195 Lab Rules OLD 2018 →Nanofab Wipes: Non-shedding by request only, s/Pec described particulates a bit. Tag: Visual edit
- 16:46, 22 June 2018 diff hist 0 m Frequently Asked Questions →Can I add equipment reservations to my phone/computer/online calendar?: puncutation Tag: Visual edit
- 16:44, 22 June 2018 diff hist +45 m Frequently Asked Questions →General NanoFab Questions: record issues in tool logbook Tag: Visual edit
- 15:29, 22 June 2018 diff hist 0 Thermal Evaporation Recipes fixed table syntax, which caused both tables to land Outside the expected section
- 15:23, 22 June 2018 diff hist +4 m Thermal Evaporation Recipes corrected materials table subheading --> level 2 (was level 1)
- 15:05, 20 June 2018 diff hist +417 Template:Announcements pecvd1 s/w upgrade
- 13:53, 20 June 2018 diff hist -1 m Sputtering Recipes →Al2O3 deposition (IBD): AlOx recipe name Tag: Visual edit
- 13:31, 20 June 2018 diff hist -361 m Template:Announcements delted old notes
- 18:14, 18 June 2018 diff hist +126 N TEST PAGE testing link to gDrive MSDS folder current Tag: Visual edit
- 17:24, 15 June 2018 diff hist -23 Template:Announcements AFM up
- 17:23, 15 June 2018 diff hist +135 Template:Announcements IBD Update
- 17:22, 15 June 2018 diff hist +197 Template:Announcements RIE5 SiCl4 issue 5min max
- 17:20, 15 June 2018 diff hist +13 Chemical List - OLD 2018-09-05 H2O2 "30%" added Tag: Visual edit
- 15:05, 15 June 2018 diff hist +226 Template:Announcements stepper 2 up
- 15:04, 15 June 2018 diff hist -367 m Template:Announcements PECVD2 deleted
- 16:18, 12 June 2018 diff hist +21 m Template:Announcements pecvd2 retraining required
- 16:17, 12 June 2018 diff hist -185 Template:Announcements rie5 SiCl4 UP, deleted "lab open"
- 16:14, 11 June 2018 diff hist -583 Template:Announcements lab reopened update, deleted DSE wafer removed
- 11:07, 8 June 2018 diff hist +266 Template:Announcements afm down
- 09:33, 8 June 2018 diff hist +9 Template:Announcements dse update, up
- 11:46, 7 June 2018 diff hist +12 Template:Announcements less startling title for lab closed
- 11:45, 7 June 2018 diff hist +489 Template:Announcements lab shutdown Monday june 11
- 09:30, 7 June 2018 diff hist +128 ICP Etch 1 (Panasonic E646V) →About: additional description of Ashing chamber utility Tag: Visual edit
- 09:28, 7 June 2018 diff hist +135 ICP Etch 1 (Panasonic E646V) →Detailed Specifications: added chuck temperatures Tag: Visual edit
- 09:25, 7 June 2018 diff hist +52 ICP Etch 2 (Panasonic E626I) →Detailed Specifications: default chuck temp shown Tag: Visual edit
- 17:18, 6 June 2018 diff hist +15 Template:Announcements bench 7 heated bath update
- 16:19, 5 June 2018 diff hist +18 m Editing Tutorials changed headers to "heading" style Tag: Visual edit
- 16:18, 5 June 2018 diff hist +69 m Editing Tutorials rearrange, minor edits Tag: Visual edit
- 14:37, 5 June 2018 diff hist -211 Template:Announcements deleted rie5 broken wafer
- 17:19, 4 June 2018 diff hist +185 m Calculators + Utilities →Wet Etching: minor description updates Tag: Visual edit
- 17:00, 4 June 2018 diff hist +40 Template:Announcements RIE#5 SiCl4 update
- 16:59, 4 June 2018 diff hist +212 Template:Announcements rie5 wafers in chamber
- 13:41, 4 June 2018 diff hist +4 m Stepper 3 (ASML DUV) →Process Information: italics on sub-bullet Tag: Visual edit
- 13:40, 4 June 2018 diff hist +127 Stepper 3 (ASML DUV) →About: copied info to "process info" Tag: Visual edit
- 12:23, 4 June 2018 diff hist +131 Stepper 3 (ASML DUV) approx maximum wafer bow Tag: Visual edit
- 10:49, 31 May 2018 diff hist +296 ICP Etch 1 (Panasonic E646V) updates, listed SEMI-std. flats Tag: Visual edit
- 20:58, 30 May 2018 diff hist +67 Chemical List - OLD 2018-09-05 →Lithography Chemicals: bolded some stocked chemicals Tag: Visual edit
- 17:26, 30 May 2018 diff hist +12 Template:Announcements many updates
- 15:50, 30 May 2018 diff hist 0 m Chemical List - OLD 2018-09-05 →Lithography Chemicals Tag: Visual edit
- 15:50, 30 May 2018 diff hist +200 Chemical List - OLD 2018-09-05 →Lithography Chemicals: links to NMP MSDS/Datasheets Tag: Visual edit
- 15:31, 30 May 2018 diff hist +17 N File:AZ NMP RINSE MSDS.pdf AZ_NMP_RINSE_MSDS current
- 17:53, 22 May 2018 diff hist +232 N Usage Data and Statistics added link to NanoFab usage presenation Tag: Visual edit
- 09:16, 18 May 2018 diff hist +20 Field Emission SEM 2 (JEOL IT800SHL) added 25x25mm Tag: Visual edit
- 09:09, 18 May 2018 diff hist -238 Template:Announcements fab open, maintenance complete
- 21:40, 16 May 2018 diff hist 0 Template:Announcements rie5 date correction
- 21:40, 16 May 2018 diff hist +166 Template:Announcements RIE5 SiCl ETA
- 16:19, 16 May 2018 diff hist -124 Template:Announcements stepper 2 up
- 16:43, 15 May 2018 diff hist +246 Template:Announcements PECVD2 update
- 16:41, 15 May 2018 diff hist +42 Template:Announcements stepper 2 update
- 13:25, 14 May 2018 diff hist +386 Template:Announcements exhaust shutdown
- 11:43, 14 May 2018 diff hist -19 Template:Announcements stepper 2 update
- 19:23, 12 May 2018 diff hist -316 Template:Announcements stepper 2 down, deleted >1 week old annc.
- 20:25, 10 May 2018 diff hist +157 Molecular Vapor Deposition link to nanoimprint FDTS recipe Tag: Visual edit
- 21:07, 5 May 2018 diff hist 0 Lithography Recipes reorder - recipes at top
- 09:44, 4 May 2018 diff hist -1 m Sputter 5 (AJA ATC 2200-V) moved tool info to top
- 15:02, 30 April 2018 diff hist +115 Template:Announcements jeol up
- 10:50, 30 April 2018 diff hist +406 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): old delted recipes ection Tag: Visual edit
- 10:47, 30 April 2018 diff hist 0 m Template:Announcements reorder
- 10:46, 30 April 2018 diff hist +6 m Template:Announcements jeol typo
- 10:45, 30 April 2018 diff hist -204 m Template:Announcements reduce jeol text
- 10:45, 30 April 2018 diff hist +424 Template:Announcements jeol sem service
- 10:27, 30 April 2018 diff hist +12 m Template:Tool formatting
- 10:26, 30 April 2018 diff hist +419 Template:Tool documented available options for super & ToolType
- 10:18, 30 April 2018 diff hist +133 Vapor HF Etch →Recipes: link to general Dry Etching recipes Tag: Visual edit
- 10:16, 30 April 2018 diff hist -4 m Template:Tool change all types to show general recipe link text
- 10:12, 30 April 2018 diff hist -2 Template:Tool change recipes link to state general recipes, not specific to this tool
- 10:03, 30 April 2018 diff hist -52 Vapor HF Etch link to Vapor HF recipes
- 15:01, 27 April 2018 diff hist 0 m Template:Announcements rearrange, newest on top
- 15:00, 27 April 2018 diff hist +88 Template:Announcements RIE5 sicl4 update
- 14:58, 27 April 2018 diff hist +224 m Template:Announcements moved isntructions to bottom of page
- 16:48, 26 April 2018 diff hist -15 Template:Announcements pecvd 2 title
- 16:48, 26 April 2018 diff hist +52 Template:Announcements pecvd2 update
- 16:15, 26 April 2018 diff hist +57 Template:Announcements rie5 sicl4 down
- 12:50, 25 April 2018 diff hist -80 Template:Announcements stepper 2 up
- 16:55, 24 April 2018 diff hist -377 Template:Announcements deleted ADT
- 16:54, 24 April 2018 diff hist +267 m Editing Tutorials →Basic Editing: disclaminer about antiquated code. Tag: Visual edit
- 16:45, 24 April 2018 diff hist +66 Template:Announcements stepper2 update
- 12:51, 24 April 2018 diff hist -26 Template:Announcements stepper #2 down, pecvd update, deleted EB4
- 11:11, 18 April 2018 diff hist +147 m Frequently Asked Questions →I need help using a tool, where do I get help?: when in doubt, ask for help Tag: Visual edit
- 10:48, 18 April 2018 diff hist +14 m Frequently Asked Questions →I need help using a tool, where do I get help?: link to tool list Tag: Visual edit
- 10:48, 18 April 2018 diff hist +874 Frequently Asked Questions how to find equipment manuals etc. Tag: Visual edit
- 13:01, 17 April 2018 diff hist +385 CDE ResMap Quick-Start instructions photo of measurement locations current Tag: Visual edit
- 12:59, 17 April 2018 diff hist +33 N File:CDE ResMap Quarter Wafer meas location - 800px annot quarterwf.png current
- 12:57, 17 April 2018 diff hist +30 N File:CDE ResMap Full Wafer meas location - IMG 0112 - 800px annot.png current
- 12:55, 17 April 2018 diff hist +946 N CDE ResMap Quick-Start instructions initial instrucitons Tag: Visual edit
- 12:42, 17 April 2018 diff hist +66 Resistivity Mapper (CDE RESMAP) link to quick-start instructions page Tag: Visual edit
- 13:33, 16 April 2018 diff hist +37 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Power Source column Tag: Visual edit
- 13:32, 16 April 2018 diff hist +223 Sputtering Recipes →Sputter 5 (Lesker AXXIS): link to SUM page for installed targets Tag: Visual edit
- 13:31, 16 April 2018 diff hist +128 Sputtering Recipes →Sputter 5 (Lesker AXXIS): added Al2O3 and Power SOurce column Tag: Visual edit
- 13:26, 16 April 2018 diff hist -51 Sputtering Recipes update comment indicating incorrect title Tag: Visual edit: Switched
- 10:04, 16 April 2018 diff hist +65 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): corrected "BHF 49%" --> "BHF" Tag: Visual edit
- 10:00, 16 April 2018 diff hist +461 Wet Etching Recipes →References: link to transene chemical compatibility chart Tag: Visual edit
- 17:53, 13 April 2018 diff hist +578 Template:Announcements PECVD#2 retraining, 90°C Hotplate down
- 10:11, 13 April 2018 diff hist +237 Chemical List - OLD 2018-09-05 →Lithography Chemicals: link to Recipes > Litho > Datasheets Tag: Visual edit
- 07:10, 13 April 2018 diff hist +3 m Tool List minor description update Tag: Visual edit
- 07:08, 13 April 2018 diff hist 0 MediaWiki:Sidebar reorder chemicals lower
- 07:07, 13 April 2018 diff hist +12 MediaWiki:Sidebar MSDS --> "Chemicals + MSDS"
- 07:06, 13 April 2018 diff hist +347 Chemical List - OLD 2018-09-05 updated info Tag: Visual edit
- 07:01, 13 April 2018 diff hist +108 Tool List →Wet Processing: link to Chemical List page Tag: Visual edit
- 13:48, 12 April 2018 diff hist -257 Template:Announcements deleted blueM & ICP2 up posts
- 13:48, 12 April 2018 diff hist +292 Template:Announcements rie5 down 4/19
- 13:26, 9 April 2018 diff hist +45 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): HF selective to PR Tag: Visual edit
- 13:25, 9 April 2018 diff hist -143 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): removed duplicate row Tag: Visual edit
- 13:09, 9 April 2018 diff hist +134 Calculators + Utilities →Scripts + Programs: put analysis prgs at top Tag: Visual edit
- 12:55, 9 April 2018 diff hist +204 Calculators + Utilities link to ProFilmOnline Tag: Visual edit
- 12:41, 9 April 2018 diff hist +51 Calculators + Utilities move nk.py to "Scripts" section Tag: Visual edit
- 12:40, 9 April 2018 diff hist +175 Calculators + Utilities add http://www.lelandstanfordjunior.com Tag: Visual edit
- 12:37, 9 April 2018 diff hist +21 Tube Furnace (Tystar 8300) →About: low-temp ox on tube 1 Tag: Visual edit
- 12:36, 9 April 2018 diff hist +12 m Tube Furnace (Tystar 8300) →About: minor rewording Tag: Visual edit
- 12:33, 9 April 2018 diff hist +1 Template:Tool 300x350px max
- 12:32, 9 April 2018 diff hist -1 Template:Tool image --> file syntax
- 12:29, 9 April 2018 diff hist +4 Template:Tool set height on image
- 12:28, 9 April 2018 diff hist +292 Tube Furnace (Tystar 8300) link to thermal recipes page, minor tweaks otherwsie Tag: Visual edit
- 12:20, 9 April 2018 diff hist 0 m Thermal Processing Recipes →1050°C Dry Oxidation: correction to pressures Tag: Visual edit
- 12:19, 9 April 2018 diff hist -8 m Thermal Processing Recipes →1050°C Wet Oxidation: image adjust Tag: Visual edit
- 12:17, 9 April 2018 diff hist +583 Thermal Processing Recipes →Thermal Oxidation of Silicon: added simulation/data for Wet1050 and Dry1050 Tag: Visual edit: Switched
- 12:13, 9 April 2018 diff hist +52 N File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09 zoom.png current
- 12:11, 9 April 2018 diff hist +52 N File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09.png current
- 12:09, 9 April 2018 diff hist +32 N File:TyStar Thermal Oxidations - DryOx 1050°C 2018-04-09.png current
- 10:40, 9 April 2018 diff hist +205 DSEIII (PlasmaTherm/Deep Silicon Etcher) →Recipes: linked to recipes Tag: Visual edit
- 00:07, 9 April 2018 diff hist -15 m ICP Etching Recipes →High Rate Bosch Etch (DSEIII): removed test page Tag: Visual edit
- 00:06, 9 April 2018 diff hist -17 m Frequently Asked Questions →A recipe is indicated as "A", Available, where do I find info on this recipe?: typo Tag: Visual edit
- 09:57, 6 April 2018 diff hist +352 ICP Etch 2 (Panasonic E626I) →Documentation: added recipes section Tag: Visual edit
- 09:43, 6 April 2018 diff hist -78 m Dry Etching Recipes deleted test links Tag: Visual edit
- 09:36, 6 April 2018 diff hist -50 ICP Etching Recipes →New test recipe: testing 2 Tag: Visual edit
- 09:33, 6 April 2018 diff hist +67 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): TESTING Tag: Visual edit
- 09:31, 6 April 2018 diff hist +78 Dry Etching Recipes testing Tag: Visual edit
- 09:29, 6 April 2018 diff hist +15 ICP Etching Recipes link to test page Tag: Visual edit
- 10:49, 5 April 2018 diff hist -64 Template:Announcements bluem up
- 09:26, 5 April 2018 diff hist +55 Template:Announcements ibd removed, bluem fuse blown
- 10:21, 2 April 2018 diff hist +5 Template:Announcements icp2 update
- 14:59, 1 April 2018 diff hist +44 Template:Announcements icp2 down
- 21:31, 29 March 2018 diff hist +353 m Template:Announcements edit comments
- 21:09, 28 March 2018 diff hist -158 Template:Announcements IBD up
- 12:29, 28 March 2018 diff hist +186 Template:Announcements asml leveling error
- 11:16, 28 March 2018 diff hist -4 Template:Announcements IBD update
- 09:48, 28 March 2018 diff hist +224 Stepper 3 (ASML DUV) →Troubleshooting and Recovery: link to "ASML 5500: Choose Marks for Prealignment" Tag: Visual edit
- 09:47, 28 March 2018 diff hist +849 N ASML 5500: Choose Marks for Prealignment initial, instructions on how to edit Optical Prealignment alignment choice Tag: Visual edit
- 07:48, 28 March 2018 diff hist +6 m Template:Announcements →IBD: Burning smell from failed supply: grammar
- 07:32, 28 March 2018 diff hist +270 Template:Announcements IBD burning smell.
- 21:43, 27 March 2018 diff hist +166 Template:Announcements adt update
- 12:14, 26 March 2018 diff hist +2 m Template:Announcements →EBeam #4: Re-Training needed: needed --> required
- 12:13, 26 March 2018 diff hist -146 Template:Announcements →EBeam #4: Down for Upgrades: title = UP, retraining
- 12:12, 26 March 2018 diff hist -183 Template:Announcements delete dse-iii wafer stuck
- 12:12, 26 March 2018 diff hist +20 Template:Announcements →ADT Dicing Saw: Software Problem: fixed, note on recent recipes
- 10:49, 26 March 2018 diff hist +93 m Editing Tutorials →Basic Editing: [back] to cancel changes Tag: Visual edit
- 10:30, 26 March 2018 diff hist +9 N File:Home Feed - ResearchGate.pdf current
- 19:55, 24 March 2018 diff hist 0 m Frequently Asked Questions →How do I get a login to the wiki?: cleaned up Tag: Visual edit
- 19:53, 24 March 2018 diff hist +720 Frequently Asked Questions →How do I get a login to the wiki?: Instructions to Create a Login Tag: Visual edit
- 19:48, 24 March 2018 diff hist +113 m Editing Tutorials →Basic Editing: minor updates Tag: Visual edit
- 14:18, 24 March 2018 diff hist +191 Template:Announcements adt software
- 14:10, 24 March 2018 diff hist +183 Template:Announcements dse wafer stuck.
- 09:59, 24 March 2018 diff hist +462 Frequently Asked Questions →Processing/Fabrication Questions: explain/link to photolith datasheets Tag: Visual edit
- 09:51, 24 March 2018 diff hist +238 Frequently Asked Questions →Wiki Questions: instructions to create wiki login Tag: Visual edit
- 09:46, 24 March 2018 diff hist +119 Frequently Asked Questions split into nanofab/processing/wiki question sections Tag: Visual edit
- 09:42, 24 March 2018 diff hist +30 Lithography Recipes →Chemical Datasheets: added "AZ EBR". no link yet Tag: Visual edit
- 21:15, 22 March 2018 diff hist -546 m Template:Announcements remove old items
- 12:41, 21 March 2018 diff hist +16 m Template:Announcements →NanoFab Shutdown: Thurs 3/22 for 1.5hrs: add date
- 12:41, 21 March 2018 diff hist +2 m Template:Announcements →NanoFab Shutdown: Wed 3/22 for 1.5hrs: correct day
- 12:41, 21 March 2018 diff hist -23 Template:Announcements →NanoFab Shutdown 3/21 for 1.5hrs: 3/22 update
- 23:59, 20 March 2018 diff hist -51 m ASML 5500: Recovering from a Typo in Reticle ID sig test revert current
- 23:58, 20 March 2018 diff hist +51 m ASML 5500: Recovering from a Typo in Reticle ID sig test
- 23:58, 20 March 2018 diff hist +297 ASML 5500: Recovering from an Error explained that wafers will be transferred thru stepper Tag: Visual edit
- 23:44, 20 March 2018 diff hist +1 m Template:Announcements sigfix
- 23:43, 20 March 2018 diff hist -28 m Template:Announcements signature test
- 23:43, 20 March 2018 diff hist +21 N MediaWiki:Signature removed user talk link current
- 23:37, 20 March 2018 diff hist +411 Template:Announcements nanofba shutdown, dse update
- 13:57, 20 March 2018 diff hist -54 Template:Announcements sig fix
- 13:57, 20 March 2018 diff hist +357 Template:Announcements DSE repair, EB4 update
- 13:35, 19 March 2018 diff hist +95 Stepper 3 (ASML DUV) →Operating Procedures: recovering from error Tag: Visual edit
- 13:33, 19 March 2018 diff hist +461 N ASML 5500: Recovering from an Error initial, copied from "recover from reticle ID typo"
- 13:23, 19 March 2018 diff hist -497 Template:Announcements pecvd2 update, stepper maint. removed
- 11:38, 19 March 2018 diff hist +198 Stepper 3 (ASML DUV) →Operating Procedures: link to reticle id error Tag: Visual edit
- 11:38, 19 March 2018 diff hist +576 N ASML 5500: Recovering from a Typo in Reticle ID procedure to abort batch Tag: Visual edit
- 17:26, 16 March 2018 diff hist +30 m Template:Announcements pecvd update title
- 17:24, 16 March 2018 diff hist +60 Template:Announcements pecvd2 update
- 14:06, 16 March 2018 diff hist +32 Vacuum Deposition Recipes IBD Al2O3 "R" link Tag: Visual edit
- 14:03, 16 March 2018 diff hist +40 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications Tag: Visual edit
- 13:59, 16 March 2018 diff hist +159 Tool List →Lithography: link to available PRs Tag: Visual edit
- 13:45, 16 March 2018 diff hist +99 Dry Etching Recipes ICP2 AL2O3 R link Tag: Visual edit
- 13:44, 16 March 2018 diff hist +95 Dry Etching Recipes ICP2 PR/ARC reipce link Tag: Visual edit
- 13:43, 16 March 2018 diff hist +465 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): PR & ARC recipes added Tag: Visual edit
- 11:04, 16 March 2018 diff hist +31 Template:Announcements →Stepper #1 Maintenance: maint done
- 11:03, 16 March 2018 diff hist -40 Template:Announcements →PECVD #2: High Particulates: down, update
- 08:25, 15 March 2018 diff hist +13 m Template:Announcements EB4 title Upgrades
- 08:24, 15 March 2018 diff hist -28 m Template:Announcements sigfix
- 08:22, 15 March 2018 diff hist -27 m Template:Announcements sigfix
- 08:21, 15 March 2018 diff hist -114 Template:Announcements stepper 1 maintenance update
- 20:37, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #1): made table sortable, removed header row for sorting Tag: Visual edit
- 20:36, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #2): made table sortable, removed header row for sorting Tag: Visual edit
- 20:35, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #4): made table sortable, removed header row for sorting Tag: Visual edit
- 20:33, 13 March 2018 diff hist -9 m Vacuum Deposition Recipes removed 'sortable' tag Tag: Visual edit
- 17:40, 13 March 2018 diff hist +71 Vacuum Deposition Recipes fixed IBD SiOn link Tag: Visual edit
- 17:39, 13 March 2018 diff hist -38 Vacuum Deposition Recipes IBD SiOxNy link Tag: Visual edit
- 17:32, 13 March 2018 diff hist +9 Vacuum Deposition Recipes make table sortable Tag: Visual edit
- 11:49, 13 March 2018 diff hist +22 m Sputtering Recipes →SiOxNy deposition (IBD): subscripts Tag: Visual edit
- 11:49, 13 March 2018 diff hist 0 m Sputtering Recipes →SiOxNy Deposition (IBD): match title formatting of other sections. Tag: Visual edit
- 11:48, 13 March 2018 diff hist +669 Sputtering Recipes added IBD SiOxNy from 2010 Tag: Visual edit
- 11:45, 13 March 2018 diff hist +51 N File:IBD SiON - Dep rate vs O2 flow - wiki.png current
- 11:39, 13 March 2018 diff hist +68 N File:IBD SiON Index @ 623nm vs. O2 Gas Flow - v3 - wiki.jpg current
- 11:31, 13 March 2018 diff hist +3 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): moved SiN section to under SiO2 Tag: Visual edit: Switched
- 08:08, 11 March 2018 diff hist -27 m Template:Announcements sigfix
- 08:07, 11 March 2018 diff hist +151 Template:Announcements pecvd 2 update
- 10:50, 6 March 2018 diff hist +111 Template:Announcements Eb4 update
- 21:30, 3 March 2018 diff hist -113 Template:Announcements Deleted JEOL
- 21:29, 3 March 2018 diff hist -27 m Template:Announcements →PECVD #2: High Particulates: sigfix
- 21:29, 3 March 2018 diff hist +45 Template:Announcements →PECVD #2: High Particulates: update
- 13:13, 28 February 2018 diff hist -119 Template:Announcements removed testing post - 5 tildes does NOT work!
- 18:55, 26 February 2018 diff hist -2 m Template:News spacing fixes
- 18:54, 26 February 2018 diff hist -7 m Template:News spacing fixes
- 18:53, 26 February 2018 diff hist +2 m Template:Announcements minor move
- 18:52, 26 February 2018 diff hist +1 m Template:Announcements minor grammar
- 18:39, 26 February 2018 diff hist -23 m Template:Announcements minor grammar
- 18:29, 26 February 2018 diff hist +3 m Template:Announcements // sig
- 18:29, 26 February 2018 diff hist +114 Template:Announcements testing sig with 5 tildes
- 18:27, 26 February 2018 diff hist -27 m Template:Announcements sigfix
- 18:27, 26 February 2018 diff hist +51 Template:Announcements EB4 down / power supply update
- 00:25, 24 February 2018 diff hist 0 N File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx
- 00:02, 24 February 2018 diff hist +38 N File:Toppan UCSB quotation 041116.pdf toppan quote for ASML mask plates 2016 current
- 18:01, 23 February 2018 diff hist -27 m Template:Announcements →PECVD #2: High Particulates: sigfix
- 18:01, 23 February 2018 diff hist +54 m Template:Announcements sigfix
- 18:00, 23 February 2018 diff hist +252 Template:Announcements pecvd#2 paticulates
- 16:50, 23 February 2018 diff hist -110 Template:Announcements jeol sem up
- 15:06, 21 February 2018 diff hist -7 m Stepper 3 (ASML DUV) →About: minor tweak Tag: Visual edit
- 15:05, 21 February 2018 diff hist +10 m Stepper 3 (ASML DUV) →Operating Procedures: updat elink text Tag: Visual edit
- 15:05, 21 February 2018 diff hist -146 Stepper 3 (ASML DUV) →About: removed field sizes text, pointed to mask making page Tag: Visual edit
- 15:03, 21 February 2018 diff hist -5 Stepper 3 (ASML DUV) →Operating Procedures: linked to Wiki version of Mask making Guidelines Tag: Visual edit
- 14:58, 21 February 2018 diff hist +37 N File:ASML Stepper 3 - Field Sizes - Screen Shot 2018-02-21 at 1.40.22 PM.png current
- 14:27, 21 February 2018 diff hist +510 Stepper 3 (ASML DUV) →About: updated capabilities, moved mask sizes to separate paragraph. Tag: Visual edit
- 08:41, 21 February 2018 diff hist -50 m Template:Announcements sigfix
- 08:40, 21 February 2018 diff hist +673 Template:Announcements stepper 1 + 2 maintenance scheduled
- 08:37, 21 February 2018 diff hist -98 Template:Announcements removed ICP#1
- 00:08, 21 February 2018 diff hist -31 Template:News →Metal Processes on the Atomic Layer Deposition
- 00:07, 21 February 2018 diff hist +83 m Template:News →Metal Processes on the Atomic Layer Deposition: timestamp
- 18:36, 20 February 2018 diff hist +63 Template:Announcements jeol update
- 22:44, 19 February 2018 diff hist +2 m Template:Announcements →Gasonics: Up: grammar
- 08:08, 17 February 2018 diff hist 0 m Template:Announcements →JEOL SEM #2: Up: typo
- 23:30, 16 February 2018 diff hist +49 Template:Announcements →JEOL SEM #2: Down: up temp.
- 02:34, 16 February 2018 diff hist -32 Template:Announcements →ICP#1: Down: up
- 11:19, 15 February 2018 diff hist +274 Lithography Recipes →Chemical Datasheets: explain Chemical Datasheets - lists chemicals availabel in lab Tag: Visual edit
- 14:42, 14 February 2018 diff hist +3 m Template:Announcements →ICP#1: Down: slasshes
- 14:42, 14 February 2018 diff hist -27 m Template:Announcements sig fix