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- 11:48, 14 February 2022 diff hist 0 m File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current
- 11:47, 14 February 2022 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 13:49, 11 February 2022 diff hist +53 m ICP Etch 2 (Panasonic E626I) →Recipes Tag: Visual edit
- 13:48, 11 February 2022 diff hist +97 ICP Etch 1 (Panasonic E646V) separate process control section/link Tag: Visual edit
- 13:47, 11 February 2022 diff hist +59 ICP Etch 2 (Panasonic E626I) →Recipes: separate Process Control section/link Tag: Visual edit
- 13:24, 11 February 2022 diff hist +31 Test Data of etching SiO2 with CHF3/CF4 minor update to diamond experiemnt comment. Tag: Visual edit
- 13:23, 11 February 2022 diff hist -36 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): updated ICP1 and ICP2 with Process Control sections for SiO2 etch tests. Tag: Visual edit
- 13:22, 11 February 2022 diff hist +252 N MediaWiki:Deletereason-dropdown added common NanoFab reasons for deletion current
- 13:19, 11 February 2022 diff hist +504 Test Data of etching SiO2 with CHF3/CF4-ICP1 new section :pasted data from CHF3/CF4/O2 etch data
- 13:13, 11 February 2022 diff hist +22 ICP Etching Recipes →SiO2 Etch Historical Data: reanmed to include tool name Tag: Visual edit
- 13:12, 11 February 2022 diff hist -37 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): consolidated FL-ICP Prcoess Control data Tag: Visual edit
- 13:11, 11 February 2022 diff hist +493 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher pasted Ning's 2nd data table, hilighted recipe changes and comment about data being "in progress"
- 12:28, 11 February 2022 diff hist +1 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: moved historical data to top Tag: Visual edit
- 12:46, 4 February 2022 diff hist +260 Template:Announcements ASML maintenance
- 15:24, 1 February 2022 diff hist +3 m Autostep 200 Mask Making Guidance →Mask Layout Tag: Visual edit
- 15:23, 1 February 2022 diff hist +119 m Autostep 200 Mask Making Guidance →Photomask Ordering Info Tag: Visual edit
- 10:00, 1 February 2022 diff hist +327 Autostep 200 Mask Making Guidance →Photomask Ordering Info: added info Tag: Visual edit
- 09:39, 1 February 2022 diff hist +428 Autostep 200 Mask Making Guidance →Alignment Marks: adde Vernier CAD file Tag: Visual edit
- 09:37, 1 February 2022 diff hist +110 N File:Vernier Template.gds Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.
- 09:03, 1 February 2022 diff hist -14 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 17:30, 31 January 2022 diff hist +185 Autostep 200 Mask Making Guidance →Mask Layout: 2nd attempt to describe Shutter positioning Tag: Visual edit
- 17:19, 31 January 2022 diff hist +352 Autostep 200 Mask Making Guidance →Mask Layout: 1st attempt at describing shutter blades Tag: Visual edit
- 17:00, 31 January 2022 diff hist +172 Autostep 200 Mask Making Guidance →Mask Layout / Alignment Marks: split into Mask layout separate section Tag: Visual edit
- 16:55, 31 January 2022 diff hist +30 Autostep 200 Troubleshooting and Recovery →What to do if you cannot undo the problem or need some help: link to each contact, update to use "Report tool issue' button on SUM current Tag: Visual edit
- 17:09, 28 January 2022 diff hist +358 m Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher) Tag: Visual edit
- 17:06, 28 January 2022 diff hist +805 Oxford ICP Etcher - Process Control Data updated tables, split into "sample size dpeendence" table Tag: Visual edit
- 21:43, 27 January 2022 diff hist +356 MLA150 - Troubleshooting →Solutions for small substrates: added THomas Messner's solution: disable Overview Camera before starting exposure Tag: Visual edit
- 11:42, 24 January 2022 diff hist -26 Packaging Recipes →Blade Exposure Calculation: image size increase Tag: Visual edit: Switched
- 11:13, 24 January 2022 diff hist +40 m Packaging Recipes →Anatomy of a Blade Tag: Visual edit
- 10:55, 21 January 2022 diff hist +346 Atomic Layer Deposition Recipes →Temperature: mentioned "thermal" and slower rate. Tag: Visual edit
- 10:53, 21 January 2022 diff hist +661 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added terms "Plasma/Thermal/Ozone". Also added Chamber 1 Al2O3 Tag: Visual edit
- 23:12, 13 January 2022 diff hist +133 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): GaN ALE section started Tag: Visual edit
- 23:11, 13 January 2022 diff hist +238 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): NOTE: Rates in these 2021-09 characterizations are lower than current due to a software timing bug, fixed in 2022-01 Tag: Visual edit
- 23:09, 13 January 2022 diff hist +174 Oxford ICP Etcher - Process Control Data described basic 'fab process Tag: Visual edit
- 23:07, 13 January 2022 diff hist +55 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher) Tag: Visual edit
- 23:05, 13 January 2022 diff hist -17 m Oxford ICP Etcher - Process Control Data removed WIP Tag: Visual edit
- 23:03, 13 January 2022 diff hist +56 Oxford ICP Etcher - Process Control Data added SEM images for Jan 11th-12th cals Tag: Visual edit
- 23:03, 13 January 2022 diff hist +36 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf Oxford ICP Etch Cals03 current
- 22:55, 13 January 2022 diff hist +33 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf Oxford ICP Cal SEMs current
- 22:51, 13 January 2022 diff hist +161 Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher): updated SEM 1 Tag: Visual edit
- 22:51, 13 January 2022 diff hist +38 N File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf Oxford ICP Etch Cal SEMs current
- 21:43, 13 January 2022 diff hist +84 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
- 21:41, 13 January 2022 diff hist +271 MLA150 - Troubleshooting →Out Of Focus Exposures: Boris’ solutionnadded Tag: Visual edit
- 14:24, 13 January 2022 diff hist -1,009 Oxford ICP Etcher - Process Control Data in progress InP Ridge Etch Tag: Visual edit
- 14:21, 13 January 2022 diff hist +1,617 N Oxford ICP Etcher - Process Control Data pasted ICP2 data table Tag: Visual edit: Switched
- 14:21, 13 January 2022 diff hist +156 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: link to Process Control Data Tag: Visual edit
- 14:20, 13 January 2022 diff hist +3 ICP Etching Recipes →Historical Data (Oxford ICP Etcher): changed to "process control data" Tag: Visual edit
- 14:18, 13 January 2022 diff hist +208 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to Historical Data Tag: Visual edit
- 15:14, 12 January 2022 diff hist +136 Frequently Asked Questions →Cell Phone Calls: mention eduroam network Tag: Visual edit
- 15:11, 12 January 2022 diff hist +189 m Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular) Tag: Visual edit
- 15:08, 12 January 2022 diff hist +441 Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular): additional troubleshooting Tag: Visual edit
- 15:22, 11 January 2022 diff hist -42 Stepper 3 (ASML DUV) →Operating Procedures: merged Troubleshooting into Operating Procedures Tag: Visual edit
- 10:43, 11 January 2022 diff hist +675 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: method for adding focus correction to exposure Tag: Visual edit: Switched
- 08:48, 7 January 2022 diff hist +113 Video Training: Uploading to GauchoCast/Panopto (Internal) →Uploading to the Web current Tag: Visual edit: Switched
- 08:45, 7 January 2022 diff hist +13 Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 08:43, 7 January 2022 diff hist +2,328 N Video Training - Introduction (Internal) general methods - Demis current Tag: Visual edit
- 08:24, 7 January 2022 diff hist +89 Nanofab Staff Internal Pages →NanoFab IT: mentoined where to find instrucitons on Google Drive Tag: Visual edit
- 22:33, 6 January 2022 diff hist +91 Nanofab Staff Internal Pages moved olf pages to bottom Tag: Visual edit
- 22:32, 6 January 2022 diff hist +183 Nanofab Staff Internal Pages added NanoFab IT, and linked to NanoFab-it OnDema filter/page Tag: Visual edit
- 23:08, 4 January 2022 diff hist +6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): credit Demis for the data Tag: Visual edit
- 14:58, 4 January 2022 diff hist +159 UCSB NanoFab Microscope Training →Depth Measurements using focus: added meas. error Tag: Visual edit
- 12:54, 4 January 2022 diff hist +100 m Packaging Recipes →Blade Exposure Calculation Tag: Visual edit
- 12:52, 4 January 2022 diff hist -30 m Packaging Recipes →Blade Exposure Calculation: enlarge img Tag: Visual edit
- 12:51, 4 January 2022 diff hist +191 Packaging Recipes →Calculated Blade Exposures: added blade exposure calc Tag: Visual edit
- 12:50, 4 January 2022 diff hist +37 N File:ADT Dicing - Blade Exposure diagram.png current
- 12:41, 4 January 2022 diff hist +1,753 Packaging Recipes →Dicing Saw Recipes (ADT 7100): added Dicing Tips Tag: Visual edit
- 11:29, 4 January 2022 diff hist +35 Tool List →Inspection, Test and Characterization: rearranged, moved "other properties" to end, renamed "Surfscan" to "particle counts" Tag: Visual edit
- 11:13, 4 January 2022 diff hist +79 Test Data of etching SiO2 with CHF3/CF4 →Alternate Data (not updated since 2019) Tag: Visual edit
- 11:12, 4 January 2022 diff hist +209 Test Data of etching SiO2 with CHF3/CF4 pasted link to alternate etch data Tag: Visual edit
- 11:11, 4 January 2022 diff hist -158 ICP Etching Recipes →Historical Data (SiO2 Etch, Panasonic 2): removed 2nd data table Tag: Visual edit
- 13:36, 3 January 2022 diff hist -693 Template:Announcements Deleted Flu vacc. mandate
- 13:34, 3 January 2022 diff hist +4 Template:Announcements →Jan 2022 UCSB COVID Protocols
- 13:33, 3 January 2022 diff hist +1,993 Template:Announcements pasted useful UCSB Jan COVID policiues
- 16:10, 21 December 2021 diff hist 0 File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png John d uploaded a new version of File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png current
- 16:09, 21 December 2021 diff hist +36 MLA150 - Troubleshooting →Out Of Focus Exposures: "features less than 100µm" Tag: Visual edit
- 11:52, 21 December 2021 diff hist -5 m MLA150 - Troubleshooting →Out Of Focus Exposures Tag: Visual edit
- 11:52, 21 December 2021 diff hist +285 MLA150 - Troubleshooting →Out Of Focus Exposures: inserted image of out-of-focus exposure Tag: Visual edit
- 11:50, 21 December 2021 diff hist +87 N File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 11:39, 21 December 2021 diff hist -3 m MLA150 - Troubleshooting fix bullets
- 11:38, 21 December 2021 diff hist -2 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
- 11:34, 21 December 2021 diff hist -38 MLA150 - Troubleshooting rearranged sections, increased heading level to 1 & 2 Tag: Visual edit
- 11:07, 21 December 2021 diff hist +62 MLA150 - Troubleshooting Tag: Visual edit
- 00:26, 16 December 2021 diff hist +182 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 00:21, 16 December 2021 diff hist +94 m Ion Beam Deposition (Veeco NEXUS) →Recipes Tag: Visual edit
- 00:19, 16 December 2021 diff hist -424 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): deleted IBD Cals spreadsheet Tag: Visual edit
- 00:18, 16 December 2021 diff hist +426 Old Deposition Data - 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): added IBD Cals spreadsheet current Tag: Visual edit
- 00:15, 16 December 2021 diff hist -2 Old Deposition Data - 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): promoted to Page Title
- 00:15, 16 December 2021 diff hist +359 Old Deposition Data - 2021-12-15 →SiO2 deposition (IBD): added old IBD data Tag: Visual edit
- 00:12, 16 December 2021 diff hist +6,481 Old Deposition Data - 2021-12-15 pasted Old (2021-12-15) IBD recipe data
- 00:11, 16 December 2021 diff hist -613 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): pasted Nastazia M's new data
- 00:09, 16 December 2021 diff hist -12,460 PECVD Recipes pasted NastaziaM's new data links
- 00:07, 16 December 2021 diff hist +167 Deposition Data - temporary 2021-12-15 →Standard Cleaning Procedure (IBD): cleaning current Tag: Visual edit
- 00:05, 16 December 2021 diff hist +575 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): pasted SiOxNy data
- 00:03, 16 December 2021 diff hist +2,234 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): updated IBD Tag: Visual edit
- 23:49, 15 December 2021 diff hist +1,751 Deposition Data - temporary 2021-12-15 New data links Tag: Visual edit
- 07:35, 15 December 2021 diff hist +24,157 N Old Deposition Data - 2021-12-15 Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d..." Tag: Visual edit: Switched
- 07:35, 15 December 2021 diff hist +107 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 07:32, 15 December 2021 diff hist -11,328 Deposition Data - temporary 2021-12-15
- 07:31, 15 December 2021 diff hist +26 Deposition Data - temporary 2021-12-15 Tag: Visual edit
- 07:31, 15 December 2021 diff hist +24,158 N Deposition Data - temporary 2021-12-15 pasted old data