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- 09:43, 27 May 2020 diff hist +61 N Operating Instructions Created page with "Advanced Vacuum PECVD.pdf" current Tag: Visual edit
- 09:40, 27 May 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:36, 27 May 2020 diff hist 0 N File:Advanced Vacuum PECVD.pdf current
- 09:31, 27 May 2020 diff hist +1 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 08:50, 8 May 2020 diff hist -151 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 17:16, 22 April 2020 diff hist +1 PECVD Recipes →SiN deposition (PECVD #1)
- 17:16, 22 April 2020 diff hist -29 PECVD Recipes →SiN deposition (PECVD #1)
- 17:08, 22 April 2020 diff hist -37 PECVD Recipes →SiO2 deposition (PECVD #1)
- 16:57, 22 April 2020 diff hist +57 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:54, 22 April 2020 diff hist +18 Wafer Coating Process Traveler current Tag: Visual edit
- 16:53, 22 April 2020 diff hist -18 Wafer Coating Process Traveler link to recipes Tag: Visual edit
- 16:52, 22 April 2020 diff hist +54 Wafer Coating Process Traveler Tag: Visual edit
- 16:50, 22 April 2020 diff hist +1,475 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 16:48, 22 April 2020 diff hist -8 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 16:47, 22 April 2020 diff hist +724 Wafer Coating Process Traveler →Standard oxide deposition Tag: Visual edit
- 16:43, 22 April 2020 diff hist -7 Wafer Coating Process Traveler →STD LS Nitride2 at 300C Tag: Visual edit
- 16:42, 22 April 2020 diff hist -3,906 Wafer Coating Process Traveler Replaced content with "There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition,..." Tags: Replaced Visual edit
- 16:38, 22 April 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:38, 22 April 2020 diff hist -9 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:37, 22 April 2020 diff hist +78 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:36, 22 April 2020 diff hist +93 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:35, 22 April 2020 diff hist +21 PECVD 2 (Advanced Vacuum) Tag: Visual edit
- 16:33, 22 April 2020 diff hist +11 PECVD1 Wafer Coating Process SiN and SiO2 depositions Tag: Visual edit
- 16:31, 22 April 2020 diff hist -13 PECVD1 Wafer Coating Process →PECVD#1 SiN @250C Tag: Visual edit
- 16:30, 22 April 2020 diff hist +49 PECVD1 Wafer Coating Process →PECVD#1 SiN @250C Tag: Visual edit
- 16:28, 22 April 2020 diff hist +4 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:26, 22 April 2020 diff hist +16 PECVD1 Wafer Coating Process
- 16:23, 22 April 2020 diff hist -897 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:21, 22 April 2020 diff hist +137 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 16:19, 22 April 2020 diff hist +112 PECVD1 Wafer Coating Process →SiO2 @250C Tag: Visual edit
- 16:18, 22 April 2020 diff hist +18 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:14, 22 April 2020 diff hist +783 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:09, 22 April 2020 diff hist -217 PECVD1 Wafer Coating Process →SiN @250C Tag: Visual edit
- 15:59, 22 April 2020 diff hist -6 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 13:27, 22 April 2020 diff hist +11 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 13:25, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 HDR film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +28 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 11:33, 22 April 2020 diff hist -13 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:33, 22 April 2020 diff hist -131 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:31, 22 April 2020 diff hist -988 Wafer Scanning process Traveler wafers scanning procedure current Tag: Visual edit
- 11:29, 22 April 2020 diff hist -744 Wafer scanning process traveler →Scan before process calibration Tag: Visual edit
- 11:25, 22 April 2020 diff hist -316 Wafer Scanning process Traveler →Wafers to Use Tag: Visual edit
- 11:23, 22 April 2020 diff hist +454 Wafer scanning process traveler →Wafers to Use Tag: Visual edit
- 11:14, 22 April 2020 diff hist -917 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 11:10, 22 April 2020 diff hist +766 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C: correction on Unaxis recipes Tag: Visual edit
- 11:02, 22 April 2020 diff hist -4 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:57, 22 April 2020 diff hist +97 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:37, 22 April 2020 diff hist +151 PECVD Recipes →Historical Particulate Data
- 10:34, 22 April 2020 diff hist +1 PECVD Recipes →Historical Particulate Data
- 17:36, 21 April 2020 diff hist +254 PECVD Recipes →Thin-Film Properties: corrections in Unaxis films Tag: Visual edit
- 17:33, 21 April 2020 diff hist +237 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 13:39, 21 April 2020 diff hist +123 ICP-PECVD (Unaxis VLR) →Documentation: added link Tag: Visual edit
- 13:29, 21 April 2020 diff hist +105 PECVD Recipes →Thin-Film Properties: added one sentence Tag: Visual edit
- 13:25, 21 April 2020 diff hist +116 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 LDR film @250°C Tag: Visual edit
- 12:28, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:27, 21 April 2020 diff hist -4 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:25, 21 April 2020 diff hist +32 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:24, 21 April 2020 diff hist +34 PECVD Recipes →SiN LS 250C Deposition (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -2 PECVD Recipes →SiN 250C deposition (Unaxis VLR)
- 12:21, 21 April 2020 diff hist +37 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:18, 21 April 2020 diff hist +1 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:16, 21 April 2020 diff hist -268 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:14, 21 April 2020 diff hist +358 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:05, 21 April 2020 diff hist -699 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:03, 21 April 2020 diff hist +418 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:02, 21 April 2020 diff hist +49 PECVD Recipes →SiN deposition (PECVD #1) Tag: Visual edit
- 11:55, 21 April 2020 diff hist +120 PECVD Recipes →Standard Recipe
- 11:54, 21 April 2020 diff hist +118 PECVD Recipes →Standard Recipe
- 11:53, 21 April 2020 diff hist +112 PECVD Recipes →Standard Recipe
- 11:02, 21 April 2020 diff hist -21 PECVD Recipes →Standard Recipe Tag: Visual edit
- 11:00, 21 April 2020 diff hist +72 N STD SiO2 recipe Created page with "[https://wiki.nanotech.ucsb.edu/w/images/4/4f/Adv._PECVD2-STD_SiO2.xlsx]" current Tag: Visual edit
- 11:00, 21 April 2020 diff hist +21 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:59, 21 April 2020 diff hist 0 File:Adv. PECVD2-STD SiO2.xlsx Biljana uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx current
- 10:53, 21 April 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:43, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist +2 PECVD Recipes →Standard Recipe
- 10:42, 21 April 2020 diff hist +92 PECVD Recipes →Standard Recipe
- 10:35, 21 April 2020 diff hist -91 PECVD Recipes →Standard Recipe
- 10:29, 21 April 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 10:24, 21 April 2020 diff hist +69 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:18, 21 April 2020 diff hist +4 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:17, 21 April 2020 diff hist +17 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:16, 21 April 2020 diff hist -293 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:09, 21 April 2020 diff hist +80 PECVD Recipes →Standard Recipe: New LS Nitride 2 recipe Tag: Visual edit
- 10:08, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD LSNitride2.xlsx current
- 10:07, 21 April 2020 diff hist +24 PECVD Recipes →Standard Recipe: STD New version of the recipe Tag: Visual edit
- 10:06, 21 April 2020 diff hist +78 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:05, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD Nitride2.xlsx current
- 10:05, 21 April 2020 diff hist +21 PECVD Recipes →SiN deposition (PECVD #2): STD Nitride recipe new version Tag: Visual edit
- 10:04, 21 April 2020 diff hist -9 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:03, 21 April 2020 diff hist +73 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:02, 21 April 2020 diff hist +26 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:00, 21 April 2020 diff hist -241 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:59, 21 April 2020 diff hist -90 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:58, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist +73 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe: Updated recipe for STD SiO2 Tag: Visual edit
- 09:55, 21 April 2020 diff hist +9 PECVD Recipes →Standard Recipe: updated recipe for STD SiO2 Tag: Visual edit
- 09:54, 21 April 2020 diff hist 0 N File:Adv. PECVD2-STD SiO2.xlsx
- 14:10, 20 April 2020 diff hist -181 PECVD Recipes →SiO2 250C Data 2019: recipe cleanup Tag: Visual edit
- 13:52, 20 April 2020 diff hist +24 PECVD Recipes →SiN deposition (Unaxis VLR): change in name of recipe Tag: Visual edit
- 13:49, 20 April 2020 diff hist -855 PECVD Recipes →SiO2 deposition (Unaxis VLR): deleting some recipes Tag: Visual edit
- 13:41, 20 April 2020 diff hist +123 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Run on "real wafer" current Tag: Visual edit
- 13:32, 20 April 2020 diff hist -132 Wafer Scanning/Coating Process Traveler ( combined/less detailed) corrections on unaxis scan Tag: Visual edit
- 11:28, 20 April 2020 diff hist -6 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan After process calibration Tag: Visual edit
- 11:28, 20 April 2020 diff hist +7 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan Before Deposition Tag: Visual edit
- 11:27, 20 April 2020 diff hist +3,040 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan before process calibration Tag: Visual edit
- 10:39, 20 April 2020 diff hist +330 Wafer Scanning/Coating Process Traveler ( combined/less detailed) Tag: Visual edit
- 10:12, 20 April 2020 diff hist +7 N Wafer Scanning/Coating Process Traveler ( combined/less detailed) wip Tag: Visual edit
- 10:11, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 10:11, 20 April 2020 diff hist +113 ICP-PECVD (Unaxis VLR) →Documentation: scan/coat Tag: Visual edit
- 10:03, 20 April 2020 diff hist +44 PECVD Recipes →" Post-Dep Clean" recipe Tag: Visual edit
- 10:01, 20 April 2020 diff hist -650 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 09:36, 20 April 2020 diff hist +1,374 Wafer Scanning process Traveler scanning wafers Tag: Visual edit
- 09:20, 20 April 2020 diff hist +2,131 N Wafer Scanning process Traveler Scanning wafers Tag: Visual edit
- 08:13, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:11, 20 April 2020 diff hist +5 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:09, 20 April 2020 diff hist +28 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 14:36, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:36, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx current
- 14:35, 15 April 2020 diff hist -110 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:32, 15 April 2020 diff hist +98 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:30, 15 April 2020 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:28, 15 April 2020 diff hist -4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:23, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:22, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:17, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences Tag: Visual edit
- 14:15, 15 April 2020 diff hist 0 N File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx current
- 14:15, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx
- 14:14, 15 April 2020 diff hist 0 N File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx current
- 10:08, 15 April 2020 diff hist +82 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 10:06, 15 April 2020 diff hist +153 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 10:02, 15 April 2020 diff hist +229 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 09:41, 15 April 2020 diff hist -8,781 Wafer scanning process traveler →Calibration Tag: Visual edit
- 09:39, 15 April 2020 diff hist -216 Wafer scanning process traveler →Start the scan application Tag: Visual edit
- 09:33, 15 April 2020 diff hist +207 Wafer scanning process traveler →Wafers to Use: wafer scan basic info Tag: Visual edit
- 09:25, 15 April 2020 diff hist -7,690 Glossary glossary items current Tag: Visual edit
- 09:14, 15 April 2020 diff hist +15 Errors errors current Tag: Visual edit
- 12:08, 8 April 2020 diff hist +100 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences fixced PPTX link Tag: Visual edit
- 10:03, 8 April 2020 diff hist +60 N AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx 1st litho current Tag: Visual edit
- 10:02, 8 April 2020 diff hist +62 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer: 1st litho on pieces Tag: Visual edit
- 10:01, 8 April 2020 diff hist 0 N File:AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx current
- 10:00, 8 April 2020 diff hist +92 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 09:58, 8 April 2020 diff hist -3 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces: 1st litho Tag: Visual edit
- 20:34, 7 April 2020 diff hist +26 N AUTOSTEP 200-PIECES instruction 6-20-19.pptx exposing a piece current Tag: Visual edit
- 20:33, 7 April 2020 diff hist +4 Exposing a wafer piece wafer piece current Tag: Visual edit
- 20:33, 7 April 2020 diff hist +44 N Exposing a wafer piece Created page with "AUTOSTEP_200-PIECES_instruction_6-20-19.pptx"
- 20:32, 7 April 2020 diff hist +28 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 20:32, 7 April 2020 diff hist 0 N File:AUTOSTEP 200-PIECES instruction 6-20-19.pptx current
- 20:31, 7 April 2020 diff hist 0 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 16:13, 7 April 2020 diff hist +543 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 16:05, 7 April 2020 diff hist +1,435 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafers substrates Tag: Visual edit
- 15:43, 7 April 2020 diff hist +66 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:38, 7 April 2020 diff hist +17 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:35, 7 April 2020 diff hist -11 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →<<PASS>> (writing the pass for first layer) Tag: Visual edit
- 15:32, 7 April 2020 diff hist +206 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:26, 7 April 2020 diff hist +10 N File:Mask plate-Sign convention.png current
- 15:22, 7 April 2020 diff hist +20 N File:Alignment key offset Sign Convention.png current
- 15:18, 7 April 2020 diff hist +292 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences programming Tag: Visual edit
- 15:08, 7 April 2020 diff hist +44 N Errors Created page with "On this page add list of most common errors:"
- 15:08, 7 April 2020 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 15:07, 7 April 2020 diff hist +8 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 15:01, 7 April 2020 diff hist +31 PECVD Recipes →Cleaning Recipes (Unaxis VLR Dep) Tag: Visual edit
- 14:35, 7 April 2020 diff hist -1 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:34, 7 April 2020 diff hist 0 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:33, 7 April 2020 diff hist +93 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:32, 7 April 2020 diff hist +8 N File:PECVD2 photo for cleaning.png current
- 14:25, 7 April 2020 diff hist +592 PECVD Recipes →Cleaning Recipes (PECVD #2) Tag: Visual edit
- 14:24, 7 April 2020 diff hist +5 N File:PECVD2 clean.png current
- 14:21, 7 April 2020 diff hist +5 N File:AdvPECVD2LSNdep2.jpg current
- 14:17, 7 April 2020 diff hist +456 PECVD Recipes →Cleaning Recipes (PECVD #1) Tag: Visual edit
- 14:14, 7 April 2020 diff hist +16 N File:PECVD1-cleaning.png
- 13:57, 7 April 2020 diff hist +210 PECVD Recipes →Cleaning Recipes (PECVD #1) Tag: Visual edit
- 13:23, 7 April 2020 diff hist -33 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 13:22, 7 April 2020 diff hist +277 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 GCA 6300 USer Accessible Commands →List of commands: Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 Autostep 200 User Accessible Commands →List of commands: current Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 Autostep 200 User Accessible Commands →List of commands Tag: Visual edit
- 13:07, 7 April 2020 diff hist -2 Stepper 2 (AutoStep 200) Tag: Visual edit
- 13:05, 7 April 2020 diff hist +57 Autostep 200 User Accessible Commands →Asccessible Commands: characters Tag: Visual edit
- 13:04, 7 April 2020 diff hist +15 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 13:02, 7 April 2020 diff hist +79 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 13:00, 7 April 2020 diff hist -34 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:59, 7 April 2020 diff hist +32 Stepper 1 (GCA 6300)
- 12:59, 7 April 2020 diff hist -22 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:59, 7 April 2020 diff hist +91 Stepper 1 (GCA 6300) →Staff Procedures Tag: Visual edit
- 12:58, 7 April 2020 diff hist +22 Stepper 1 (GCA 6300) Staff procedures Tag: Visual edit
- 12:57, 7 April 2020 diff hist +23 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:56, 7 April 2020 diff hist +1 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:55, 7 April 2020 diff hist +60 Troubleshooting and Recovery →Errors Tag: Visual edit
- 12:47, 7 April 2020 diff hist +15 Troubleshooting and Recovery Tag: Visual edit
- 12:45, 7 April 2020 diff hist -73 Troubleshooting and Recovery →What to do in case of unplanned power outage. Tag: Visual edit
- 12:41, 7 April 2020 diff hist -68 Troubleshooting and Recovery Tag: Visual edit
- 12:40, 7 April 2020 diff hist -8 Troubleshooting and Recovery →What to do in case of unplanned power outage. Tag: Visual edit
- 11:55, 7 April 2020 diff hist -7 Troubleshooting and Recovery →What to do if the local alignment or wafer exposure mapping hangs up on the upper monitor. Tag: Visual edit
- 11:53, 7 April 2020 diff hist -8 GCA 6300 USer Accessible Commands →List of control characters: Tag: Visual edit
- 11:52, 7 April 2020 diff hist -6 GCA 6300 USer Accessible Commands →Control Characters Tag: Visual edit
- 11:52, 7 April 2020 diff hist +7 GCA 6300 USer Accessible Commands →List of control characters: list Tag: Visual edit
- 11:49, 7 April 2020 diff hist +59 GCA 6300 USer Accessible Commands →Commands: list Tag: Visual edit
- 11:46, 7 April 2020 diff hist +76 GCA 6300 USer Accessible Commands commands Tag: Visual edit
- 11:44, 7 April 2020 diff hist +32 GCA 6300 USer Accessible Commands commands Tag: Visual edit
- 11:41, 7 April 2020 diff hist +3 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 11:25, 7 April 2020 diff hist +20,462 Glossary glossary Tag: Visual edit
- 11:24, 7 April 2020 diff hist +17 N Glossary glossary Tag: Visual edit
- 11:24, 7 April 2020 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 11:23, 7 April 2020 diff hist 0 N File:Glossary.docx current
- 11:22, 7 April 2020 diff hist +10 Surface Analysis (KLA/Tencor Surfscan) →Documentation: glossary Tag: Visual edit
- 10:20, 7 April 2020 diff hist +10 Wafer scanning process traveler →Recipe parameters Tag: Visual edit
- 10:16, 7 April 2020 diff hist +1 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:14, 7 April 2020 diff hist +4 Wafer scanning process traveler →Selecting an LPD range: adding notes Tag: Visual edit
- 10:12, 7 April 2020 diff hist -1,025 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:09, 7 April 2020 diff hist 0 Wafer scanning process traveler →Selecting an LPD range: plots Tag: Visual edit
- 10:07, 7 April 2020 diff hist -15 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:04, 7 April 2020 diff hist +2 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:01, 7 April 2020 diff hist -20 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 09:54, 7 April 2020 diff hist +57 Wafer scanning process traveler →Plotting data Tag: Visual edit
- 09:50, 7 April 2020 diff hist +18 N File:PECVD1 particulates in 2019.jpg current
- 09:32, 7 April 2020 diff hist +1 Wafer scanning process traveler →Surfscan photos Tag: Visual edit
- 09:32, 7 April 2020 diff hist -1 Wafer scanning process traveler Tag: Visual edit
- 09:28, 7 April 2020 diff hist +139 Wafer scanning process traveler Tag: Visual edit
- 09:15, 7 April 2020 diff hist -28 Wafer scanning process traveler →Scan before process calibration Tag: Visual edit
- 08:24, 7 April 2020 diff hist +153 Wafer scanning process traveler Tag: Visual edit
- 08:21, 7 April 2020 diff hist +5 N File:UCSBTEST2 .png
- 08:19, 7 April 2020 diff hist +5 N File:UCSBTEST1.png
- 16:49, 6 April 2020 diff hist +3,915 Wafer scanning process traveler →Working with the Database Tag: Visual edit
- 16:41, 6 April 2020 diff hist -286 Wafer scanning process traveler →Setting up the System Tag: Visual edit
- 16:40, 6 April 2020 diff hist +219 Wafer scanning process traveler →Browser menu Tag: Visual edit
- 16:31, 6 April 2020 diff hist +481 Wafer scanning process traveler →Setting up the System Tag: Visual edit
- 16:30, 6 April 2020 diff hist +7 Wafer scanning process traveler →Database menuss Tag: Visual edit
- 16:26, 6 April 2020 diff hist +2,050 Wafer scanning process traveler →Cassette Calibration Tag: Visual edit
- 16:19, 6 April 2020 diff hist +1,443 Wafer scanning process traveler →Cassette Calibration Tag: Visual edit
- 16:14, 6 April 2020 diff hist +666 Wafer scanning process traveler →Haze calibration Tag: Visual edit
- 16:08, 6 April 2020 diff hist +28 Wafer scanning process traveler →Calibration Tag: Visual edit
- 16:07, 6 April 2020 diff hist +2,689 Wafer scanning process traveler →Calibrating the Tencor-Standard Curve Tag: Visual edit
- 15:55, 6 April 2020 diff hist +204 Wafer scanning process traveler →Calibrating PSL spheres on a substrate Tag: Visual edit
- 15:46, 6 April 2020 diff hist -1 Wafer scanning process traveler →Calibrating PSL spheres on a substrate Tag: Visual edit
- 15:44, 6 April 2020 diff hist +1,542 Wafer scanning process traveler →Calibration Tag: Visual edit
- 15:41, 6 April 2020 diff hist +141 Wafer scanning process traveler →Using the calibration application Tag: Visual edit
- 14:46, 6 April 2020 diff hist +234 Wafer scanning process traveler →Calibration Tag: Visual edit
- 14:44, 6 April 2020 diff hist +10 Wafer scanning process traveler →Calibration Tag: Visual edit
- 14:44, 6 April 2020 diff hist +1,096 Wafer scanning process traveler →Calibration Tag: Visual edit
- 14:28, 6 April 2020 diff hist +68 Wafer scanning process traveler →Surfscan additional information Tag: Visual edit
- 14:23, 6 April 2020 diff hist +35 Wafer scanning process traveler →Surfscan photo Tag: Visual edit
- 14:22, 6 April 2020 diff hist +31 Wafer scanning process traveler →Plotting data Tag: Visual edit
- 14:20, 6 April 2020 diff hist +69 Wafer scanning process traveler →Surfscan photo Tag: Visual edit
- 14:18, 6 April 2020 diff hist +933 Wafer scanning process traveler →Selecting sort options Tag: Visual edit