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- 13:56, 12 December 2019 diff hist -2 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 13:56, 12 December 2019 diff hist +6 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 13:54, 12 December 2019 diff hist +140 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 13:42, 12 December 2019 diff hist -138 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 13:41, 12 December 2019 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 13:38, 12 December 2019 diff hist -3 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:38, 12 December 2019 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:34, 12 December 2019 diff hist +421 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:28, 12 December 2019 diff hist +279 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:24, 12 December 2019 diff hist +134 PECVD Recipes Tag: Visual edit: Switched
- 09:19, 11 October 2019 diff hist +162 Stepper 2 (AutoStep 200) Operating Procedures Tag: Visual edit
- 09:14, 11 October 2019 diff hist -101 Stepper 2 (AutoStep 200) Operating Procedures Tag: Visual edit
- 08:24, 3 October 2019 diff hist +2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:22, 3 October 2019 diff hist +128 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:12, 3 October 2019 diff hist +123 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 07:56, 3 October 2019 diff hist +100 PECVD Recipes →SiN deposition (Unaxis VLR)
- 07:39, 3 October 2019 diff hist 0 N SiN 100C Table-2019 Created blank page current Tag: Visual edit
- 07:35, 3 October 2019 diff hist -71 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 07:31, 3 October 2019 diff hist -6 PECVD Recipes →SiN deposition (Unaxis VLR)
- 07:27, 3 October 2019 diff hist +103 PECVD Recipes →SiN deposition (Unaxis VLR)
- 07:52, 18 September 2019 diff hist +7 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 07:49, 18 September 2019 diff hist -7 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences
- 07:32, 18 September 2019 diff hist +13 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 07:31, 18 September 2019 diff hist +14 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 11:30, 10 September 2019 diff hist -2 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 11:29, 10 September 2019 diff hist +142 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 10:48, 10 September 2019 diff hist -8 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:48, 10 September 2019 diff hist -10 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:47, 10 September 2019 diff hist -9 PECVD Recipes →SiN deposition (Unaxis VLR)
- 10:46, 10 September 2019 diff hist +6 PECVD Recipes →SiN deposition (Unaxis VLR)
- 10:46, 10 September 2019 diff hist 0 PECVD Recipes →SiN deposition (Unaxis VLR)
- 10:45, 10 September 2019 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:45, 10 September 2019 diff hist +42 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:45, 10 September 2019 diff hist +272 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 10:41, 10 September 2019 diff hist +147 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:49, 10 September 2019 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:49, 10 September 2019 diff hist +9 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:48, 10 September 2019 diff hist -5 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 08:47, 10 September 2019 diff hist +131 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:46, 10 September 2019 diff hist +131 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 08:40, 10 September 2019 diff hist -36 PECVD Recipes →SiN deposition (Unaxis VLR): update Tag: Visual edit
- 08:38, 10 September 2019 diff hist +2 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:37, 10 September 2019 diff hist +19 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:36, 10 September 2019 diff hist +110 PECVD Recipes →SiN deposition (Unaxis VLR)
- 08:33, 10 September 2019 diff hist +3 Unaxis SiN100C 300nm-2019 current
- 08:24, 10 September 2019 diff hist +3 N Unaxis SiN100C 300nm-2019 WIP Tag: Visual edit
- 08:22, 10 September 2019 diff hist +34 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 14:13, 21 June 2019 diff hist -82 Stepper 2 (AutoStep 200) →Detailed Specifications: about stepper Tag: Visual edit
- 15:41, 20 June 2019 diff hist +3 N Stepper 1 (GCA 6300) Available chucks wip current Tag: Visual edit
- 15:39, 20 June 2019 diff hist +72 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 15:32, 20 June 2019 diff hist +5,924 N Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness shims current Tag: Visual edit
- 15:25, 20 June 2019 diff hist +139 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 15:24, 20 June 2019 diff hist +607 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 15:13, 20 June 2019 diff hist +1,071 N Stepper 1 (GCA6300) How to select proper chuck Created page with "{| class="wikitable" | colspan="3" |GCA 6300 CHUCKS |- |Chuck Name/Wafer Size |Substrate Thickness |Chuck Thickness |- | | | |- |1/4 of 2"(and smaller) |~717um (+/-100) |5.40..." current Tag: Visual edit
- 15:10, 20 June 2019 diff hist +59 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 14:23, 20 June 2019 diff hist -27 Stepper 2 (AutoStep 200) Operating Procedures →Reticle Loading and Unloading Tag: Visual edit
- 13:46, 20 June 2019 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programming - FULL Tag: Visual edit
- 13:37, 20 June 2019 diff hist +4,137 N Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses pasted table from excel Tag: Visual edit
- 13:35, 20 June 2019 diff hist +921 N Stepper 2 (Autostep 200) - Chuck Selection pasted table from excel Tag: Visual edit
- 13:28, 20 June 2019 diff hist +182 Stepper 2 (AutoStep 200) Operating Procedures →Loading a wafer into the system: links to table pages Tag: Visual edit
- 08:22, 17 June 2019 diff hist -31 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 08:20, 17 June 2019 diff hist +2,387 GCA 6300 USer Accessible Commands commands Tag: Visual edit
- 08:09, 17 June 2019 diff hist +3 N GCA 6300 USer Accessible Commands Created page with "WIP"
- 08:09, 17 June 2019 diff hist +38 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 08:08, 17 June 2019 diff hist +36 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 08:07, 17 June 2019 diff hist +2,315 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 08:06, 17 June 2019 diff hist +3 N Autostep 200 User Accessible Commands Created page with "WIP"
- 08:06, 17 June 2019 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 08:05, 17 June 2019 diff hist -69 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 08:04, 17 June 2019 diff hist +40 Stepper 2 (AutoStep 200) Commands Tag: Visual edit
- 15:38, 13 June 2019 diff hist +38 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 15:37, 13 June 2019 diff hist +3 Autostep 200 Troubleshooting and Recovery wip Tag: Visual edit
- 15:36, 13 June 2019 diff hist +3 N Autostep 200 Troubleshooting and Recovery Troubleshooting and Recovery Tag: Visual edit
- 15:36, 13 June 2019 diff hist +42 Stepper 2 (AutoStep 200) Autostep Troubleshooting and Recovery Tag: Visual edit
- 15:34, 13 June 2019 diff hist +35 Stepper 2 (AutoStep 200) Troubleshooting and Recovery Tag: Visual edit
- 15:33, 13 June 2019 diff hist +3 N Troubleshooting and Recovery Troubleshooting and Recovery Tag: Visual edit
- 15:33, 13 June 2019 diff hist +35 Stepper 1 (GCA 6300) Troubleshooting and Recovery Tag: Visual edit
- 15:30, 13 June 2019 diff hist +5,471 GCA 6300 Mask Making Guidance mask layout Tag: Visual edit
- 15:28, 13 June 2019 diff hist +2,023 Autostep 200 Mask Making Guidance mask layout Tag: Visual edit
- 15:24, 13 June 2019 diff hist -75 User Accessible Commands commands current Tag: Visual edit
- 15:15, 13 June 2019 diff hist +3 N Autostep 200 Mask Making Guidance mask making guidance Tag: Visual edit
- 15:15, 13 June 2019 diff hist +71 Stepper 2 (AutoStep 200) new pages Tag: Visual edit
- 15:13, 13 June 2019 diff hist +1 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 15:12, 13 June 2019 diff hist +4,196 GCA 6300 Mask Making Guidance mask making guidance Tag: Visual edit
- 15:10, 13 June 2019 diff hist +2,422 User Accessible Commands commands Tag: Visual edit
- 14:44, 13 June 2019 diff hist +16 N User Accessible Commands WIP Tag: Visual edit
- 14:43, 13 June 2019 diff hist +16 N GCA 6300 Mask Making Guidance WIP Tag: Visual edit
- 14:42, 13 June 2019 diff hist +67 Stepper 1 (GCA 6300) GCA 6300 MAsk MAking Guidance Tag: Visual edit
- 14:35, 13 June 2019 diff hist +114 Stepper 2 (AutoStep 200) Operating Procedures →Running a JOB - Normal Operation Tag: Visual edit
- 14:32, 13 June 2019 diff hist +290 Stepper 2 (AutoStep 200) Operating Procedures →Running a JOB - Normal Operation Tag: Visual edit
- 14:29, 13 June 2019 diff hist +58 Stepper 2 (AutoStep 200) Operating Procedures →Running a JOB - Normal Operation Tag: Visual edit
- 14:27, 13 June 2019 diff hist +7 Stepper 1 (GCA 6300) - Standard Operating Procedure →Spin coating and cleaning the back-side of wafer Tag: Visual edit
- 14:27, 13 June 2019 diff hist +169 Stepper 2 (AutoStep 200) Operating Procedures →Cleaning the back-side of wafer Tag: Visual edit
- 14:25, 13 June 2019 diff hist +161 Stepper 1 (GCA 6300) - Standard Operating Procedure →Cleaning the back-side of wafer Tag: Visual edit
- 14:22, 13 June 2019 diff hist +339 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation Tag: Visual edit
- 12:14, 13 June 2019 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programming - FULL Tag: Visual edit
- 12:04, 13 June 2019 diff hist +5 Programming a Job →JOB Programming - FULL Tag: Visual edit
- 11:59, 13 June 2019 diff hist -856 Programming a Job →JOB Programming - FULL Tag: Visual edit
- 16:01, 11 June 2019 diff hist +1 Programming a Job →JOB Programing - FULL Tag: Visual edit
- 16:01, 11 June 2019 diff hist -63 Stepper 1 (GCA 6300) page Tag: Visual edit