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- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 HDR film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +28 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 11:33, 22 April 2020 diff hist -13 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:33, 22 April 2020 diff hist -131 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:31, 22 April 2020 diff hist -988 Wafer Scanning process Traveler wafers scanning procedure current Tag: Visual edit
- 11:29, 22 April 2020 diff hist -744 Wafer scanning process traveler →Scan before process calibration Tag: Visual edit
- 11:25, 22 April 2020 diff hist -316 Wafer Scanning process Traveler →Wafers to Use Tag: Visual edit
- 11:23, 22 April 2020 diff hist +454 Wafer scanning process traveler →Wafers to Use Tag: Visual edit
- 11:14, 22 April 2020 diff hist -917 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 11:10, 22 April 2020 diff hist +766 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C: correction on Unaxis recipes Tag: Visual edit
- 11:02, 22 April 2020 diff hist -4 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:57, 22 April 2020 diff hist +97 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:37, 22 April 2020 diff hist +151 PECVD Recipes →Historical Particulate Data
- 10:34, 22 April 2020 diff hist +1 PECVD Recipes →Historical Particulate Data
- 17:36, 21 April 2020 diff hist +254 PECVD Recipes →Thin-Film Properties: corrections in Unaxis films Tag: Visual edit
- 17:33, 21 April 2020 diff hist +237 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 13:39, 21 April 2020 diff hist +123 ICP-PECVD (Unaxis VLR) →Documentation: added link Tag: Visual edit
- 13:29, 21 April 2020 diff hist +105 PECVD Recipes →Thin-Film Properties: added one sentence Tag: Visual edit
- 13:25, 21 April 2020 diff hist +116 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 LDR film @250°C Tag: Visual edit
- 12:28, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:27, 21 April 2020 diff hist -4 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:25, 21 April 2020 diff hist +32 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:24, 21 April 2020 diff hist +34 PECVD Recipes →SiN LS 250C Deposition (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -2 PECVD Recipes →SiN 250C deposition (Unaxis VLR)
- 12:21, 21 April 2020 diff hist +37 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:18, 21 April 2020 diff hist +1 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:16, 21 April 2020 diff hist -268 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:14, 21 April 2020 diff hist +358 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:05, 21 April 2020 diff hist -699 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:03, 21 April 2020 diff hist +418 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:02, 21 April 2020 diff hist +49 PECVD Recipes →SiN deposition (PECVD #1) Tag: Visual edit
- 11:55, 21 April 2020 diff hist +120 PECVD Recipes →Standard Recipe
- 11:54, 21 April 2020 diff hist +118 PECVD Recipes →Standard Recipe
- 11:53, 21 April 2020 diff hist +112 PECVD Recipes →Standard Recipe
- 11:02, 21 April 2020 diff hist -21 PECVD Recipes →Standard Recipe Tag: Visual edit
- 11:00, 21 April 2020 diff hist +72 N STD SiO2 recipe Created page with "[https://wiki.nanotech.ucsb.edu/w/images/4/4f/Adv._PECVD2-STD_SiO2.xlsx]" current Tag: Visual edit
- 11:00, 21 April 2020 diff hist +21 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:59, 21 April 2020 diff hist 0 File:Adv. PECVD2-STD SiO2.xlsx Biljana uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx current
- 10:53, 21 April 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:43, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist +2 PECVD Recipes →Standard Recipe
- 10:42, 21 April 2020 diff hist +92 PECVD Recipes →Standard Recipe
- 10:35, 21 April 2020 diff hist -91 PECVD Recipes →Standard Recipe
- 10:29, 21 April 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 10:24, 21 April 2020 diff hist +69 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:18, 21 April 2020 diff hist +4 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:17, 21 April 2020 diff hist +17 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:16, 21 April 2020 diff hist -293 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:09, 21 April 2020 diff hist +80 PECVD Recipes →Standard Recipe: New LS Nitride 2 recipe Tag: Visual edit
- 10:08, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD LSNitride2.xlsx current
- 10:07, 21 April 2020 diff hist +24 PECVD Recipes →Standard Recipe: STD New version of the recipe Tag: Visual edit
- 10:06, 21 April 2020 diff hist +78 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:05, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD Nitride2.xlsx current
- 10:05, 21 April 2020 diff hist +21 PECVD Recipes →SiN deposition (PECVD #2): STD Nitride recipe new version Tag: Visual edit
- 10:04, 21 April 2020 diff hist -9 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:03, 21 April 2020 diff hist +73 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:02, 21 April 2020 diff hist +26 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:00, 21 April 2020 diff hist -241 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:59, 21 April 2020 diff hist -90 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:58, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist +73 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe: Updated recipe for STD SiO2 Tag: Visual edit
- 09:55, 21 April 2020 diff hist +9 PECVD Recipes →Standard Recipe: updated recipe for STD SiO2 Tag: Visual edit
- 09:54, 21 April 2020 diff hist 0 N File:Adv. PECVD2-STD SiO2.xlsx
- 14:10, 20 April 2020 diff hist -181 PECVD Recipes →SiO2 250C Data 2019: recipe cleanup Tag: Visual edit
- 13:52, 20 April 2020 diff hist +24 PECVD Recipes →SiN deposition (Unaxis VLR): change in name of recipe Tag: Visual edit
- 13:49, 20 April 2020 diff hist -855 PECVD Recipes →SiO2 deposition (Unaxis VLR): deleting some recipes Tag: Visual edit
- 13:41, 20 April 2020 diff hist +123 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Run on "real wafer" current Tag: Visual edit
- 13:32, 20 April 2020 diff hist -132 Wafer Scanning/Coating Process Traveler ( combined/less detailed) corrections on unaxis scan Tag: Visual edit
- 11:28, 20 April 2020 diff hist -6 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan After process calibration Tag: Visual edit
- 11:28, 20 April 2020 diff hist +7 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan Before Deposition Tag: Visual edit
- 11:27, 20 April 2020 diff hist +3,040 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan before process calibration Tag: Visual edit
- 10:39, 20 April 2020 diff hist +330 Wafer Scanning/Coating Process Traveler ( combined/less detailed) Tag: Visual edit
- 10:12, 20 April 2020 diff hist +7 N Wafer Scanning/Coating Process Traveler ( combined/less detailed) wip Tag: Visual edit
- 10:11, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 10:11, 20 April 2020 diff hist +113 ICP-PECVD (Unaxis VLR) →Documentation: scan/coat Tag: Visual edit
- 10:03, 20 April 2020 diff hist +44 PECVD Recipes →" Post-Dep Clean" recipe Tag: Visual edit
- 10:01, 20 April 2020 diff hist -650 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 09:36, 20 April 2020 diff hist +1,374 Wafer Scanning process Traveler scanning wafers Tag: Visual edit
- 09:20, 20 April 2020 diff hist +2,131 N Wafer Scanning process Traveler Scanning wafers Tag: Visual edit
- 08:13, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:11, 20 April 2020 diff hist +5 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:09, 20 April 2020 diff hist +28 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 14:36, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:36, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx current
- 14:35, 15 April 2020 diff hist -110 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:32, 15 April 2020 diff hist +98 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:30, 15 April 2020 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:28, 15 April 2020 diff hist -4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:23, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:22, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:17, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences Tag: Visual edit
- 14:15, 15 April 2020 diff hist 0 N File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx current
- 14:15, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx
- 14:14, 15 April 2020 diff hist 0 N File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx current
- 10:08, 15 April 2020 diff hist +82 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 10:06, 15 April 2020 diff hist +153 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 10:02, 15 April 2020 diff hist +229 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 09:41, 15 April 2020 diff hist -8,781 Wafer scanning process traveler →Calibration Tag: Visual edit
- 09:39, 15 April 2020 diff hist -216 Wafer scanning process traveler →Start the scan application Tag: Visual edit
- 09:33, 15 April 2020 diff hist +207 Wafer scanning process traveler →Wafers to Use: wafer scan basic info Tag: Visual edit
- 09:25, 15 April 2020 diff hist -7,690 Glossary glossary items current Tag: Visual edit
- 09:14, 15 April 2020 diff hist +15 Errors errors current Tag: Visual edit
- 12:08, 8 April 2020 diff hist +100 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences fixced PPTX link Tag: Visual edit
- 10:03, 8 April 2020 diff hist +60 N AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx 1st litho current Tag: Visual edit
- 10:02, 8 April 2020 diff hist +62 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer: 1st litho on pieces Tag: Visual edit
- 10:01, 8 April 2020 diff hist 0 N File:AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx current
- 10:00, 8 April 2020 diff hist +92 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 09:58, 8 April 2020 diff hist -3 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces: 1st litho Tag: Visual edit
- 20:34, 7 April 2020 diff hist +26 N AUTOSTEP 200-PIECES instruction 6-20-19.pptx exposing a piece current Tag: Visual edit
- 20:33, 7 April 2020 diff hist +4 Exposing a wafer piece wafer piece current Tag: Visual edit
- 20:33, 7 April 2020 diff hist +44 N Exposing a wafer piece Created page with "AUTOSTEP_200-PIECES_instruction_6-20-19.pptx"
- 20:32, 7 April 2020 diff hist +28 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 20:32, 7 April 2020 diff hist 0 N File:AUTOSTEP 200-PIECES instruction 6-20-19.pptx current
- 20:31, 7 April 2020 diff hist 0 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 16:13, 7 April 2020 diff hist +543 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafer pieces Tag: Visual edit
- 16:05, 7 April 2020 diff hist +1,435 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Exposing wafers substrates Tag: Visual edit
- 15:43, 7 April 2020 diff hist +66 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:38, 7 April 2020 diff hist +17 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:35, 7 April 2020 diff hist -11 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →<<PASS>> (writing the pass for first layer) Tag: Visual edit
- 15:32, 7 April 2020 diff hist +206 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Job Programming Tag: Visual edit
- 15:26, 7 April 2020 diff hist +10 N File:Mask plate-Sign convention.png current
- 15:22, 7 April 2020 diff hist +20 N File:Alignment key offset Sign Convention.png current
- 15:18, 7 April 2020 diff hist +292 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences programming Tag: Visual edit
- 15:08, 7 April 2020 diff hist +44 N Errors Created page with "On this page add list of most common errors:"
- 15:08, 7 April 2020 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 15:07, 7 April 2020 diff hist +8 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 15:01, 7 April 2020 diff hist +31 PECVD Recipes →Cleaning Recipes (Unaxis VLR Dep) Tag: Visual edit
- 14:35, 7 April 2020 diff hist -1 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:34, 7 April 2020 diff hist 0 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:33, 7 April 2020 diff hist +93 PECVD Recipes →" STD CF4/O2 Clean recipe" Tag: Visual edit
- 14:32, 7 April 2020 diff hist +8 N File:PECVD2 photo for cleaning.png current
- 14:25, 7 April 2020 diff hist +592 PECVD Recipes →Cleaning Recipes (PECVD #2) Tag: Visual edit
- 14:24, 7 April 2020 diff hist +5 N File:PECVD2 clean.png current
- 14:21, 7 April 2020 diff hist +5 N File:AdvPECVD2LSNdep2.jpg current
- 14:17, 7 April 2020 diff hist +456 PECVD Recipes →Cleaning Recipes (PECVD #1) Tag: Visual edit
- 14:14, 7 April 2020 diff hist +16 N File:PECVD1-cleaning.png
- 13:57, 7 April 2020 diff hist +210 PECVD Recipes →Cleaning Recipes (PECVD #1) Tag: Visual edit
- 13:23, 7 April 2020 diff hist -33 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 13:22, 7 April 2020 diff hist +277 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 GCA 6300 USer Accessible Commands →List of commands: Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 Autostep 200 User Accessible Commands →List of commands: current Tag: Visual edit
- 13:08, 7 April 2020 diff hist -2 Autostep 200 User Accessible Commands →List of commands Tag: Visual edit
- 13:07, 7 April 2020 diff hist -2 Stepper 2 (AutoStep 200) Tag: Visual edit
- 13:05, 7 April 2020 diff hist +57 Autostep 200 User Accessible Commands →Asccessible Commands: characters Tag: Visual edit
- 13:04, 7 April 2020 diff hist +15 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 13:02, 7 April 2020 diff hist +79 Autostep 200 User Accessible Commands commands Tag: Visual edit
- 13:00, 7 April 2020 diff hist -34 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:59, 7 April 2020 diff hist +32 Stepper 1 (GCA 6300)
- 12:59, 7 April 2020 diff hist -22 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:59, 7 April 2020 diff hist +91 Stepper 1 (GCA 6300) →Staff Procedures Tag: Visual edit
- 12:58, 7 April 2020 diff hist +22 Stepper 1 (GCA 6300) Staff procedures Tag: Visual edit
- 12:57, 7 April 2020 diff hist +23 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:56, 7 April 2020 diff hist +1 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 12:55, 7 April 2020 diff hist +60 Troubleshooting and Recovery →Errors Tag: Visual edit
- 12:47, 7 April 2020 diff hist +15 Troubleshooting and Recovery Tag: Visual edit
- 12:45, 7 April 2020 diff hist -73 Troubleshooting and Recovery →What to do in case of unplanned power outage. Tag: Visual edit
- 12:41, 7 April 2020 diff hist -68 Troubleshooting and Recovery Tag: Visual edit
- 12:40, 7 April 2020 diff hist -8 Troubleshooting and Recovery →What to do in case of unplanned power outage. Tag: Visual edit
- 11:55, 7 April 2020 diff hist -7 Troubleshooting and Recovery →What to do if the local alignment or wafer exposure mapping hangs up on the upper monitor. Tag: Visual edit
- 11:53, 7 April 2020 diff hist -8 GCA 6300 USer Accessible Commands →List of control characters: Tag: Visual edit
- 11:52, 7 April 2020 diff hist -6 GCA 6300 USer Accessible Commands →Control Characters Tag: Visual edit
- 11:52, 7 April 2020 diff hist +7 GCA 6300 USer Accessible Commands →List of control characters: list Tag: Visual edit
- 11:49, 7 April 2020 diff hist +59 GCA 6300 USer Accessible Commands →Commands: list Tag: Visual edit
- 11:46, 7 April 2020 diff hist +76 GCA 6300 USer Accessible Commands commands Tag: Visual edit
- 11:44, 7 April 2020 diff hist +32 GCA 6300 USer Accessible Commands commands Tag: Visual edit
- 11:41, 7 April 2020 diff hist +3 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 11:25, 7 April 2020 diff hist +20,462 Glossary glossary Tag: Visual edit
- 11:24, 7 April 2020 diff hist +17 N Glossary glossary Tag: Visual edit
- 11:24, 7 April 2020 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 11:23, 7 April 2020 diff hist 0 N File:Glossary.docx current
- 11:22, 7 April 2020 diff hist +10 Surface Analysis (KLA/Tencor Surfscan) →Documentation: glossary Tag: Visual edit
- 10:20, 7 April 2020 diff hist +10 Wafer scanning process traveler →Recipe parameters Tag: Visual edit
- 10:16, 7 April 2020 diff hist +1 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:14, 7 April 2020 diff hist +4 Wafer scanning process traveler →Selecting an LPD range: adding notes Tag: Visual edit
- 10:12, 7 April 2020 diff hist -1,025 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:09, 7 April 2020 diff hist 0 Wafer scanning process traveler →Selecting an LPD range: plots Tag: Visual edit
- 10:07, 7 April 2020 diff hist -15 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:04, 7 April 2020 diff hist +2 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:01, 7 April 2020 diff hist -20 Surface Analysis (KLA/Tencor Surfscan) →Documentation Tag: Visual edit
- 09:54, 7 April 2020 diff hist +57 Wafer scanning process traveler →Plotting data Tag: Visual edit
- 09:50, 7 April 2020 diff hist +18 N File:PECVD1 particulates in 2019.jpg current
- 09:32, 7 April 2020 diff hist +1 Wafer scanning process traveler →Surfscan photos Tag: Visual edit
- 09:32, 7 April 2020 diff hist -1 Wafer scanning process traveler Tag: Visual edit
- 09:28, 7 April 2020 diff hist +139 Wafer scanning process traveler Tag: Visual edit
- 09:15, 7 April 2020 diff hist -28 Wafer scanning process traveler →Scan before process calibration Tag: Visual edit
- 08:24, 7 April 2020 diff hist +153 Wafer scanning process traveler Tag: Visual edit
- 08:21, 7 April 2020 diff hist +5 N File:UCSBTEST2 .png
- 08:19, 7 April 2020 diff hist +5 N File:UCSBTEST1.png
- 16:49, 6 April 2020 diff hist +3,915 Wafer scanning process traveler →Working with the Database Tag: Visual edit
- 16:41, 6 April 2020 diff hist -286 Wafer scanning process traveler →Setting up the System Tag: Visual edit
- 16:40, 6 April 2020 diff hist +219 Wafer scanning process traveler →Browser menu Tag: Visual edit
- 16:31, 6 April 2020 diff hist +481 Wafer scanning process traveler →Setting up the System Tag: Visual edit
- 16:30, 6 April 2020 diff hist +7 Wafer scanning process traveler →Database menuss Tag: Visual edit
- 16:26, 6 April 2020 diff hist +2,050 Wafer scanning process traveler →Cassette Calibration Tag: Visual edit
- 16:19, 6 April 2020 diff hist +1,443 Wafer scanning process traveler →Cassette Calibration Tag: Visual edit
- 16:14, 6 April 2020 diff hist +666 Wafer scanning process traveler →Haze calibration Tag: Visual edit
- 16:08, 6 April 2020 diff hist +28 Wafer scanning process traveler →Calibration Tag: Visual edit
- 16:07, 6 April 2020 diff hist +2,689 Wafer scanning process traveler →Calibrating the Tencor-Standard Curve Tag: Visual edit
- 15:55, 6 April 2020 diff hist +204 Wafer scanning process traveler →Calibrating PSL spheres on a substrate Tag: Visual edit
- 15:46, 6 April 2020 diff hist -1 Wafer scanning process traveler →Calibrating PSL spheres on a substrate Tag: Visual edit
- 15:44, 6 April 2020 diff hist +1,542 Wafer scanning process traveler →Calibration Tag: Visual edit
- 15:41, 6 April 2020 diff hist +141 Wafer scanning process traveler →Using the calibration application Tag: Visual edit
- 14:46, 6 April 2020 diff hist +234 Wafer scanning process traveler →Calibration Tag: Visual edit
- 14:44, 6 April 2020 diff hist +10 Wafer scanning process traveler →Calibration Tag: Visual edit
- 14:44, 6 April 2020 diff hist +1,096 Wafer scanning process traveler →Calibration Tag: Visual edit
- 14:28, 6 April 2020 diff hist +68 Wafer scanning process traveler →Surfscan additional information Tag: Visual edit
- 14:23, 6 April 2020 diff hist +35 Wafer scanning process traveler →Surfscan photo Tag: Visual edit
- 14:22, 6 April 2020 diff hist +31 Wafer scanning process traveler →Plotting data Tag: Visual edit
- 14:20, 6 April 2020 diff hist +69 Wafer scanning process traveler →Surfscan photo Tag: Visual edit
- 14:18, 6 April 2020 diff hist +933 Wafer scanning process traveler →Selecting sort options Tag: Visual edit
- 14:13, 6 April 2020 diff hist +74 Wafer scanning process traveler →Recipes Tag: Visual edit
- 14:11, 6 April 2020 diff hist +278 Wafer scanning process traveler →Selecting Automatic Operations Tag: Visual edit
- 14:08, 6 April 2020 diff hist +42 Wafer scanning process traveler →Recipes Tag: Visual edit
- 14:07, 6 April 2020 diff hist +3,478 Wafer scanning process traveler →Selecting display options Tag: Visual edit
- 13:39, 6 April 2020 diff hist -8 Wafer scanning process traveler →Setting the data collection range Tag: Visual edit
- 13:37, 6 April 2020 diff hist +45 Wafer scanning process traveler →Recipes Tag: Visual edit
- 13:36, 6 April 2020 diff hist -940 Wafer scanning process traveler →Selecting throughput Tag: Visual edit
- 13:36, 6 April 2020 diff hist 0 Wafer scanning process traveler →Recipes Tag: Visual edit
- 13:30, 6 April 2020 diff hist +372 Wafer scanning process traveler →Setting the data collection range Tag: Visual edit
- 13:25, 6 April 2020 diff hist +1,040 Wafer scanning process traveler →Setting the data collection range Tag: Visual edit
- 11:31, 6 April 2020 diff hist +116 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 11:29, 6 April 2020 diff hist +15 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 11:24, 6 April 2020 diff hist 0 N File:Area from 1.png current
- 11:18, 6 April 2020 diff hist 0 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 11:18, 6 April 2020 diff hist -537 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 11:17, 6 April 2020 diff hist +226 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 11:15, 6 April 2020 diff hist +6 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 11:12, 6 April 2020 diff hist +138 Wafer scanning process traveler →Selecting an LPD range: area from Tag: Visual edit
- 11:09, 6 April 2020 diff hist +479 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:39, 6 April 2020 diff hist +151 Wafer scanning process traveler →Selecting an LPD range Tag: Visual edit
- 10:37, 6 April 2020 diff hist +9 N File:Area from Equals Max size.png current
- 10:30, 6 April 2020 diff hist +3 N File:LPD Ranges.png current
- 10:28, 6 April 2020 diff hist +1,753 Wafer scanning process traveler →Selecting substrate parameters Tag: Visual edit
- 08:21, 6 April 2020 diff hist +45 Wafer scanning process traveler →Recipes Tag: Visual edit
- 08:19, 6 April 2020 diff hist -2 Wafer scanning process traveler →Recipes Tag: Visual edit
- 13:55, 2 April 2020 diff hist +562 Wafer scanning process traveler →Selecting substrate parameters Tag: Visual edit
- 13:22, 2 April 2020 diff hist +95 Wafer scanning process traveler →Selecting substrate parameters Tag: Visual edit
- 13:18, 2 April 2020 diff hist +222 Wafer scanning process traveler →Recipe parameters Tag: Visual edit
- 10:29, 2 April 2020 diff hist +21 Wafer scanning process traveler →Surfscan additional information Tag: Visual edit
- 10:23, 2 April 2020 diff hist +40 Wafer scanning process traveler →Sort parameters Tag: Visual edit
- 10:23, 2 April 2020 diff hist +3,631 Wafer scanning process traveler →Data display parameters Tag: Visual edit
- 17:53, 1 April 2020 diff hist -74 Wafer scanning process traveler →Data collection parameters Tag: Visual edit
- 17:51, 1 April 2020 diff hist +89 Wafer scanning process traveler →Data collection parameters Tag: Visual edit
- 17:49, 1 April 2020 diff hist +1,526 Wafer scanning process traveler →Recipe parameters Tag: Visual edit
- 17:29, 1 April 2020 diff hist +18 Wafer scanning process traveler →Recipe parameters Tag: Visual edit
- 17:26, 1 April 2020 diff hist +13 Wafer scanning process traveler →Recipe parameters Tag: Visual edit
- 17:23, 1 April 2020 diff hist +984 Wafer scanning process traveler →Recipe parameters Tag: Visual edit
- 17:17, 1 April 2020 diff hist +8 N File:Recipe parameters.jpg current
- 15:13, 1 April 2020 diff hist +179 Wafer scanning process traveler →Recipes Tag: Visual edit
- 14:55, 1 April 2020 diff hist +1,671 Wafer scanning process traveler →Recipes Tag: Visual edit
- 14:38, 1 April 2020 diff hist +17 Wafer scanning process traveler →Surfscan additional information Tag: Visual edit
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- 11:11, 1 April 2020 diff hist +319 Wafer scanning process traveler →Getting started Tag: Visual edit
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- 11:07, 1 April 2020 diff hist -2 Wafer scanning process traveler →Introduction Tag: Visual edit
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- 09:35, 1 April 2020 diff hist +10 Surfscan photo adjusted photo size current Tag: Visual edit
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- 08:54, 1 April 2020 diff hist +28 N File:UCSBTEST1Gain4.jpg scan for gain4 current
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- 21:25, 30 March 2020 diff hist +62 Surface Analysis (KLA/Tencor Surfscan) →About Tag: Visual edit
- 21:24, 30 March 2020 diff hist -86 PECVD 1 (PlasmaTherm 790) Tag: Visual edit: Switched
- 21:23, 30 March 2020 diff hist +14 N PECVD.docx Created page with "PECVD.docx" current Tag: Visual edit
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- 21:14, 30 March 2020 diff hist -4 PECVD1 Wafer Coating Process recipes Tag: Visual edit
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- 21:12, 30 March 2020 diff hist -322 PECVD1 Wafer Coating Process →SiN @250C Tag: Visual edit
- 21:04, 30 March 2020 diff hist +290 PECVD1 Wafer Coating Process
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- 17:46, 30 March 2020 diff hist -4 PECVD1 Wafer Coating Process pecvd1 Tag: Visual edit
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- 17:40, 30 March 2020 diff hist +933 PECVD1 Wafer Coating Process
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- 16:40, 30 March 2020 diff hist +973 PECVD1 Wafer Coating Process heading Tag: Visual edit
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- 16:32, 30 March 2020 diff hist -21 PECVD1 Wafer Coating Process Traveler
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- 16:27, 30 March 2020 diff hist +5 PECVD1 Wafer Coating Process Traveler →PECVD1 deposition - 300nm SiN film @250°C: cd Tag: Visual edit
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- 16:14, 30 March 2020 diff hist +1,979 PECVD1 Wafer Coating Process Traveler pecvd1 recipes Tag: Visual edit
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- 16:10, 30 March 2020 diff hist -1 PECVD 1 (PlasmaTherm 790) →Documentation
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- 15:58, 30 March 2020 diff hist +2 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 15:58, 30 March 2020 diff hist -2,005 PECV1 Wafer Coating Process Traveler Blanked the page Tags: Blanking Visual edit
- 15:53, 30 March 2020 diff hist +4 PECV1 Wafer Coating Process Traveler subheading Tag: Visual edit
- 15:51, 30 March 2020 diff hist -4 PECV1 Wafer Coating Process Traveler Tag: Visual edit
- 15:50, 30 March 2020 diff hist +990 PECV1 Wafer Coating Process Traveler Tag: Visual edit: Switched
- 15:48, 30 March 2020 diff hist +61 PECV1 Wafer Coating Process Traveler wafer coating traveler Tag: Visual edit
- 15:44, 30 March 2020 diff hist +954 N PECV1 Wafer Coating Process Traveler Created page with "'''PECVD#1 deposition - 300nm SiN film @250°C''' The wafers are ordered from SVM. These are low particle count 4" Si wafer where particle count is very low <100. a)Log in to..."
- 15:28, 30 March 2020 diff hist +41 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 15:27, 30 March 2020 diff hist +32 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
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- 15:25, 30 March 2020 diff hist +34 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 15:20, 30 March 2020 diff hist -231 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:14, 30 March 2020 diff hist +7 PECVD Recipes →SiN LS 250C Data 2020 Tag: Visual edit
- 15:13, 30 March 2020 diff hist 0 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:11, 30 March 2020 diff hist -25 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 15:10, 30 March 2020 diff hist +1 PECVD Recipes →SiO2 250C Data 2020 Tag: Visual edit
- 15:08, 30 March 2020 diff hist +5 PECVD Recipes →2019 SiO2 250C
- 15:07, 30 March 2020 diff hist 0 PECVD Recipes →Film Uniformity Tag: Visual edit
- 15:06, 30 March 2020 diff hist -5 PECVD Recipes
- 15:03, 30 March 2020 diff hist +72 PECVD Recipes →2020 Data SiO2 250C
- 14:57, 30 March 2020 diff hist -12 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:56, 30 March 2020 diff hist +6 PECVD Recipes →Standard Recipe
- 14:55, 30 March 2020 diff hist +8 PECVD Recipes →Standard Recipe
- 14:54, 30 March 2020 diff hist -8 PECVD Recipes →Historical Data
- 14:53, 30 March 2020 diff hist -3 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:52, 30 March 2020 diff hist -4 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:51, 30 March 2020 diff hist +15 PECVD Recipes →Standard Recipe
- 14:49, 30 March 2020 diff hist -28 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:48, 30 March 2020 diff hist -6 PECVD Recipes →Standard Recipe
- 14:47, 30 March 2020 diff hist -1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:47, 30 March 2020 diff hist -4 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:46, 30 March 2020 diff hist +23 PECVD Recipes
- 14:42, 30 March 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
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- 14:35, 30 March 2020 diff hist +80 PECVD Recipes →Standard Recipe Tag: Visual edit
- 14:28, 30 March 2020 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:26, 30 March 2020 diff hist +2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:21, 30 March 2020 diff hist +2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:20, 30 March 2020 diff hist -1 PECVD Recipes →2019 Data SiO2 100C
- 14:19, 30 March 2020 diff hist -184 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:19, 30 March 2020 diff hist -1 PECVD Recipes →Standard Recipe Tag: Visual edit
- 14:17, 30 March 2020 diff hist +153 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:16, 30 March 2020 diff hist +31 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 14:15, 30 March 2020 diff hist +74 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 14:12, 30 March 2020 diff hist -5 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 14:11, 30 March 2020 diff hist -26 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 14:09, 30 March 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 14:08, 30 March 2020 diff hist -28 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 14:05, 30 March 2020 diff hist +24 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 14:04, 30 March 2020 diff hist +16 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 14:03, 30 March 2020 diff hist -190 PECVD Recipes →Particulates - historical data
- 14:02, 30 March 2020 diff hist +145 PECVD Recipes →ICP-PECVD (Unaxis VLR)
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- 14:01, 30 March 2020 diff hist +42 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 14:00, 30 March 2020 diff hist +27 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 13:59, 30 March 2020 diff hist +4 PECVD Recipes →Particulates- historical data Tag: Visual edit
- 13:59, 30 March 2020 diff hist -25 PECVD Recipes →Particulates- historical data Tag: Visual edit
- 13:58, 30 March 2020 diff hist +24 PECVD Recipes →Particulates- historical data Tag: Visual edit
- 13:57, 30 March 2020 diff hist +17 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 13:47, 30 March 2020 diff hist -68 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 13:45, 30 March 2020 diff hist +35 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 LDR film @250°C Tag: Visual edit
- 13:42, 30 March 2020 diff hist -37 Wafer Coating Process Traveler Tag: Visual edit
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- 13:40, 30 March 2020 diff hist +38 Wafer Coating Process Traveler Tag: Visual edit
- 13:39, 30 March 2020 diff hist +57 Wafer Coating Process Traveler Tag: Visual edit
- 13:37, 30 March 2020 diff hist +4,125 N Wafer Coating Process Traveler Created page with "Unaxis deposition - 300nm SiO2 LDR film @250°C a) Prepare three 4” wafers: for seasoning (regular Si wafer ~500nm thick) for deposition (your wafer for deposition) for cle..."
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- 13:35, 30 March 2020 diff hist +32 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
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- 13:32, 30 March 2020 diff hist -12 Wafer Coating Process Traveler1
- 13:30, 30 March 2020 diff hist -208 Wafer Coating Process Traveler1 →1. Unaxis deposition - 300nm SiO2 LDR film @250°C Tag: Visual edit
- 13:15, 30 March 2020 diff hist -41 Wafer Coating Process Traveler1 →1. Unaxis deposition - 300nm of SiO2 LDR film @250°C Tag: Visual edit
- 13:12, 30 March 2020 diff hist -74 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:54, 30 March 2020 diff hist +21 Wafer Coating Process Traveler1 subheadings Tag: Visual edit
- 12:53, 30 March 2020 diff hist +4,656 Wafer Coating Process Traveler1 subheading Tag: Visual edit
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- 12:50, 30 March 2020 diff hist -29 Wafer Coating Process Traveler1 Blanked the page Tags: Blanking Visual edit
- 12:49, 30 March 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:48, 30 March 2020 diff hist -5 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:46, 30 March 2020 diff hist +1 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating Tag: Visual edit
- 12:44, 30 March 2020 diff hist +4 Wafer Coating Process Traveler1 Tag: Visual edit
- 12:09, 30 March 2020 diff hist +25 N Wafer Coating Process Traveler1 Created page with "Unaxis_SOP_3-30-2020.docx" Tag: Visual edit
- 12:08, 30 March 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:04, 30 March 2020 diff hist -98 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
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- 10:47, 30 March 2020 diff hist -86 PECVD Recipes →ICP-PECVD (Unaxis VLR): move Process SOP to Tool page Tag: Visual edit
- 10:38, 30 March 2020 diff hist +8 PECVD Recipes →ICP-PECVD (Unaxis VLR): subheading Tag: Visual edit
- 10:35, 30 March 2020 diff hist +6 Troubleshooting and Recovery
- 10:27, 30 March 2020 diff hist +8 Troubleshooting and Recovery
- 10:25, 30 March 2020 diff hist +22 Troubleshooting and Recovery sub-heading level1 Tag: Visual edit
- 10:43, 27 March 2020 diff hist +68 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
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- 10:23, 27 March 2020 diff hist -112 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:22, 27 March 2020 diff hist -20 PECVD Recipes →ICP-PECVD (Unaxis VLR)
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- 10:17, 27 March 2020 diff hist -42 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
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- 10:15, 27 March 2020 diff hist -30 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:15, 27 March 2020 diff hist 0 N File:Unaxis SOP 3-27-2020.pdf current
- 10:13, 27 March 2020 diff hist -87 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:03, 27 March 2020 diff hist +29 N Unaxis SOP 3-12-2020.docx Created page with "Unaxis_SOP_3-12-2020.docx" current Tag: Visual edit
- 10:02, 27 March 2020 diff hist +30 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
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- 09:59, 27 March 2020 diff hist -17 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
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- 16:49, 26 March 2020 diff hist -42 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 16:49, 26 March 2020 diff hist +113 Autostep 200 Troubleshooting and Recovery →System restarting procedure Tag: Visual edit
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- 14:44, 25 March 2020 diff hist 0 PECVD Recipes →SiN deposition (Unaxis VLR)
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