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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 500 | older 500) (20 | 50 | 100 | 250 | 500)- 11:06, 28 July 2016 Ningcao talk contribs uploaded File:Rapid Thermal Annealing on Room-temperature grown ITO.pdf
- 11:06, 28 July 2016 Ningcao talk contribs deleted page File:Rapid Thermal Annealing on Room-temperature grown ITO.docx (wrong file)
- 11:05, 28 July 2016 Ningcao talk contribs uploaded File:Rapid Thermal Annealing on Room-temperature grown ITO.docx
- 08:37, 25 July 2016 User account LaserRay talk contribs was created
- 16:17, 18 July 2016 Ningcao talk contribs uploaded File:InP Etch using Unaxis PM1 at 200 C-C.pdf
- 09:58, 18 July 2016 User account Meyers c talk contribs was created
- 14:31, 12 July 2016 Thibeault talk contribs uploaded File:Survey052016.pdf
- 10:59, 11 July 2016 Ningcao talk contribs uploaded File:InP Etch using Unaxis PM1 at 200 C-B.pdf
- 16:02, 17 June 2016 Ningcao talk contribs uploaded File:InP Etch using Unaxis PM1 at 200 C-A.pdf
- 16:52, 3 June 2016 Thibeault talk contribs uploaded File:10-Si Etch Bosch Release DRIE.pdf
- 16:17, 3 June 2016 Ningcao talk contribs uploaded File:InP Etch using Unaxis PM1 at 200 C.pdf
- 11:51, 3 June 2016 Thibeault talk contribs uploaded File:ASML Job Set-Up Guide simple v1.pdf
- 05:13, 24 May 2016 User account Welix8 talk contribs was created
- 10:07, 12 April 2016 Biljana talk contribs uploaded File:Surfscan.jpg
- 09:53, 12 April 2016 Biljana talk contribs uploaded File:Surfscan-Surfscan 6200 info.pdf
- 16:24, 17 February 2016 Ningcao talk contribs uploaded File:50-InP Etch-2-17-2016.pdf
- 16:39, 16 February 2016 Ningcao talk contribs uploaded File:49-Photolithography of SU8-2015-a.pdf
- 16:36, 16 February 2016 Ningcao talk contribs deleted page File:49-Photolithography of SU8-2015.pdf
- 16:34, 16 February 2016 Ningcao talk contribs uploaded File:49-Photolithography of SU8-2015.pdf
- 16:30, 16 February 2016 Ningcao talk contribs uploaded File:48-Photolithography of SU8-2010.pdf
- 16:22, 16 February 2016 Ningcao talk contribs uploaded File:47-Photolithography of SU8-2005.pdf
- 16:55, 16 December 2015 Reynolds t talk contribs uploaded File:LabRules2015.pdf
- 16:42, 16 December 2015 Ningcao talk contribs uploaded File:46-Mo Film using Sputter3.pdf
- 17:08, 15 December 2015 Thibeault talk contribs uploaded File:Fe and Co Films using Sputter-3.pdf
- 16:31, 15 December 2015 Thibeault talk contribs uploaded File:DUV42P-Anti-Reflective-Coating.pdf
- 16:47, 11 December 2015 User account Zuzunaga lu talk contribs was created
- 17:58, 10 December 2015 User account Sentog8 talk contribs was created
- 17:57, 10 December 2015 User account Jerge8 talk contribs was created
- 16:23, 1 December 2015 Ningcao talk contribs uploaded File:45-Etching Nickel with Al2O3 Mask using Oxford Ion Mill Tool.pdf
- 11:29, 24 November 2015 Lingg talk contribs uploaded File:Ion Beam Etch Overview rev1.pdf
- 20:15, 21 October 2015 User account Bothman talk contribs was created
- 15:49, 9 October 2015 Ningcao talk contribs uploaded File:44-Etching Gold with Al2O3 Mask using Oxford Ion Mill Tool.pdf
- 14:36, 2 September 2015 Ningcao talk contribs uploaded File:43-Issue with the etch of InP-InGaAs-and- InAlAs-b.pdf
- 14:36, 2 September 2015 Ningcao talk contribs deleted page File:43-Issue with the etch of InGaAs and InAlAs-a.pdf
- 14:29, 2 September 2015 Ningcao talk contribs uploaded File:43-Issue with the etch of InGaAs and InAlAs-a.pdf
- 14:29, 2 September 2015 Ningcao talk contribs deleted page File:43-Issue with the etch of InGaAs and InAlAs.pdf
- 14:05, 2 September 2015 Ningcao talk contribs uploaded File:43-Issue with the etch of InGaAs and InAlAs.pdf
- 09:12, 27 August 2015 Thibeault talk contribs uploaded File:PEK-162-Positive-Resist-Datasheet.pdf
- 16:01, 26 August 2015 Thibeault talk contribs uploaded File:NR9-6000PY-revA.pdf
- 16:00, 26 August 2015 Thibeault talk contribs uploaded File:NR9-3000PY-revA.pdf
- 16:00, 26 August 2015 Thibeault talk contribs uploaded File:NR9-1000PY-revA.pdf
- 11:32, 3 August 2015 Hopkins a talk contribs uploaded File:Pages from FEI - Scanning Electrong Microscope - Operating Manual PART 3.pdf
- 11:32, 3 August 2015 Hopkins a talk contribs uploaded File:Pages from FEI - Scanning Electrong Microscope - Operating Manual PART 2.pdf
- 11:32, 3 August 2015 Hopkins a talk contribs uploaded File:Pages from FEI - Scanning Electrong Microscope - Operating Manual PART 1.pdf
- 14:08, 22 July 2015 Ningcao talk contribs uploaded File:42-Etching Platinum using Oxford Ion Mill Tool-a.pdf
- 13:58, 22 July 2015 Ningcao talk contribs uploaded File:42-Etching Platinum using Oxford Ion Mill Tool.pdf
- 15:49, 13 July 2015 Lingg talk contribs deleted page File:FlexAL.jpg (Deleted old revision 20150713224417!FlexAL.jpg)
- 15:48, 13 July 2015 Lingg talk contribs deleted page File:FlexAL.jpg (Deleted old revision 20150713224302!FlexAL.jpg)
- 15:48, 13 July 2015 Lingg talk contribs deleted page File:FlexAL.jpg (Deleted old revision 20150713224448!FlexAL.jpg)
- 15:44, 13 July 2015 Lingg talk contribs uploaded a new version of File:FlexAL.jpg (Reverted to version as of 22:40, 13 July 2015)
- 15:44, 13 July 2015 Lingg talk contribs uploaded a new version of File:FlexAL.jpg (Reverted to version as of 22:40, 13 July 2015)
- 15:43, 13 July 2015 Lingg talk contribs deleted page File:FlexAL.jpg (Deleted old revision 20150713224048!FlexAL.jpg)
- 15:43, 13 July 2015 Lingg talk contribs uploaded a new version of File:FlexAL.jpg
- 15:40, 13 July 2015 Lingg talk contribs uploaded a new version of File:FlexAL.jpg
- 14:36, 9 July 2015 Lingg talk contribs uploaded File:Cluster operating instructions.pdf
- 13:54, 9 July 2015 Thibeault talk contribs uploaded File:CAIBE.jpg
- 13:42, 30 June 2015 Ningcao talk contribs uploaded File:41-High-stress SiNx at 50 C using Unaxis ICP deposition tool.pdf
- 13:41, 30 June 2015 Ningcao talk contribs uploaded File:40-Low-stress SiNx at 50 C using Unaxis ICP deposition tool.pdf
- 12:11, 30 June 2015 Ningcao talk contribs uploaded File:36-Medium-stress SiNx using Unaxis ICP deposition tool-a.pdf
- 12:07, 30 June 2015 Ningcao talk contribs uploaded File:39-Medium-stress SiNx at 100C using Unaxis ICP deposition tool.pdf
- 11:55, 30 June 2015 Ningcao talk contribs uploaded File:38-High-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf
- 11:39, 30 June 2015 Ningcao talk contribs uploaded File:37-Low-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf
- 16:15, 29 June 2015 Ningcao talk contribs uploaded File:36-Medium-stress SiNx using Unaxis ICP deposition tool.pdf
- 15:59, 29 June 2015 Ningcao talk contribs uploaded File:34-High-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf
- 15:27, 29 June 2015 Ningcao talk contribs uploaded File:35-Low-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf
- 15:12, 22 June 2015 Ningcao talk contribs uploaded File:3600 D, D2v Spin Speed Curve.pdf
- 15:10, 22 June 2015 Ningcao talk contribs uploaded File:THMR iP 3500 iP3600.pdf
- 15:06, 22 June 2015 Ningcao talk contribs uploaded File:THMR-iP3600 HP D 20140801 (B) GHS US.pdf
- 15:08, 14 June 2015 User account Eang talk contribs was created
- 15:14, 8 May 2015 Biljana talk contribs uploaded File:Autostep 200 Training Manual-4-10-15 .pdf
- 15:10, 8 May 2015 Biljana talk contribs uploaded File:GCA 6300 Training Manual-4-10-2015.pdf
- 16:04, 14 April 2015 Jcrode talk contribs changed group membership for Reynolds t from (none) to administrator, bureaucrat and staff
- 16:47, 10 April 2015 Thibeault talk contribs uploaded File:ASML Job Set-Up Guide v2.pdf
- 17:26, 2 April 2015 Thibeault talk contribs uploaded File:ASML Mask Making Guidelines.pdf
- 14:01, 19 March 2015 Bosch talk contribs deleted page File:Web Operational Procedure EB4 Rev 5.docx
- 13:58, 19 March 2015 Bosch talk contribs uploaded File:Web Operational Procedure EB4 Rev 5.pdf (EB4 Operating Procedure)
- 13:52, 19 March 2015 Bosch talk contribs uploaded File:Web Operational Procedure EB4 Rev 5.docx (EBeam 4 Operational Procedure)
- 10:21, 27 January 2015 Ningcao talk contribs uploaded File:33-Etching SiO2 with Vertical Side-wall.pdf
- 09:22, 21 January 2015 Ningcao talk contribs uploaded File:32-Reducing AlCl3 Corrosion with CHF3 plasma.pdf
- 09:22, 21 January 2015 Ningcao talk contribs deleted page File:32-Reducing Aluminum Corrosion with CHF3 plasma.pdf
- 09:11, 21 January 2015 Ningcao talk contribs uploaded File:32-Reducing Aluminum Corrosion with CHF3 plasma.pdf
- 11:57, 9 January 2015 Biljana talk contribs uploaded File:New Adv PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
- 11:56, 9 January 2015 Biljana talk contribs uploaded File:New Adv PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf
- 11:54, 9 January 2015 Biljana talk contribs uploaded File:New Adv PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf
- 16:11, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf
- 15:31, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-LS SION-recipe 2014 LS SION recipe.pdf
- 15:04, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf
- 15:03, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
- 17:48, 5 January 2015 User account Ginowell talk contribs was created
- 12:41, 23 December 2014 Thibeault talk contribs uploaded File:SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf
- 12:00, 23 December 2014 Thibeault talk contribs uploaded File:SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf
- 11:07, 23 December 2014 Thibeault talk contribs uploaded File:SiO2-AJA-1-Reactive-Sputter-Uniformity-rev-1.pdf
- 11:42, 22 December 2014 Thibeault talk contribs uploaded File:Ti-Au-Sputtering-Films-AJA2-rev1.pdf
- 11:27, 22 December 2014 Thibeault talk contribs uploaded File:Sputter-2-AlN-Endeavor-rev1.pdf
- 14:59, 11 December 2014 Biljana talk contribs uploaded File:NewPECVD1-SiO2-standard recipe 2014.pdf
- 14:58, 11 December 2014 Biljana talk contribs uploaded File:NewPECVD1-SiN-standard recipe 2014.pdf
- 14:41, 11 December 2014 Biljana talk contribs uploaded File:NewAdvPECVD-LS Nitride2 300C standard recipe.pdf
- 12:10, 11 December 2014 Biljana talk contribs uploaded File:Photos Sheet1.pdf
- 12:01, 11 December 2014 Biljana talk contribs uploaded File:NewAdvPECVD-Nitride2 300C standard recipe.pdf
- 10:52, 11 December 2014 Biljana talk contribs uploaded File:NewAdvPECVD OXIDE 300C standard recipe.pdf
- 12:18, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-LS SION-recipe2014 LS SION recipe.pdf
- 11:22, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
- 10:32, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-SiN standard recipe 2014.pdf
- 10:25, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf
- 16:37, 5 December 2014 Biljana talk contribs uploaded File:PECVD1-LS SIN recipe 2014.pdf
- 16:23, 3 December 2014 Biljana talk contribs uploaded File:PECVD1-LS SION recipe 2014.pdf
- 11:36, 28 October 2014 User account Hopkins a talk contribs was created
- 11:42, 21 October 2014 Biljana talk contribs uploaded File:PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf
- 15:02, 17 October 2014 Biljana talk contribs uploaded File:Dirty platen photos.pdf
- 15:24, 10 October 2014 Biljana talk contribs uploaded File:PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf
- 10:53, 1 October 2014 Biljana talk contribs uploaded File:PECVD1-SiON-recipe 2014 LS SION recipe.pdf
- 01:20, 8 September 2014 Jcrode talk contribs changed group membership for Cruz s from staff and administrator to (none)
- 01:19, 8 September 2014 Jcrode talk contribs changed group membership for Whaley from staff and administrator to (none)
- 01:19, 8 September 2014 Jcrode talk contribs changed group membership for Reynolds from staff and administrator to staff, administrator and bureaucrat
- 01:18, 8 September 2014 Jcrode talk contribs changed group membership for Thibeault from staff and administrator to staff, administrator and bureaucrat
- 01:18, 8 September 2014 Jcrode talk contribs changed group membership for Zwarburg2 from bureaucrat and administrator to (none)
- 01:18, 8 September 2014 Jcrode talk contribs changed group membership for Zwarburg from bureaucrat and administrator to (none)
- 07:00, 3 September 2014 Jcrode talk contribs deleted page User talk:Zwarburg
- 02:10, 3 September 2014 User account Hansi talk contribs was created
- 01:09, 3 September 2014 Jcrode talk contribs deleted page User:TeddyCraig (Mass deletion of pages added by TeddyCraig)
- 01:09, 3 September 2014 Jcrode talk contribs deleted page User:BridgetOcasio (Mass deletion of pages added by BridgetOcasio)
- 01:09, 3 September 2014 Jcrode talk contribs deleted page Helpful Ideas For Consideration Of Finding Details In Interior Design House (Mass deletion of pages added by BridgetOcasio)
- 01:08, 3 September 2014 Jcrode talk contribs deleted page User:Susie35Khidm (Mass deletion of pages added by Susie35Khidm)
- 15:33, 8 July 2014 User account Foong f talk contribs was created
- 12:42, 22 April 2014 Dfreeborn talk contribs uploaded File:Changing N2 to He.pdf
- 08:49, 22 April 2014 Dfreeborn talk contribs uploaded File:XACTI XeF2 Etch Operating Instructions.pdf
- 16:04, 21 April 2014 Dfreeborn talk contribs uploaded File:Si Deep RIE Operating Instructions.pdf
- 12:12, 21 April 2014 Dfreeborn talk contribs uploaded File:RIE -5 operating instructions.pdf
- 12:05, 21 April 2014 Dfreeborn talk contribs uploaded a new version of File:RIE.pdf
- 12:05, 21 April 2014 Dfreeborn talk contribs uploaded a new version of File:RIE.pdf
- 11:56, 21 April 2014 Dfreeborn talk contribs uploaded File:RIE.pdf
- 14:22, 18 April 2014 Ningcao talk contribs uploaded File:31-Holography Process for 1D-lines and 2D-dots-rev-3-13-2014.pdf
- 14:11, 18 April 2014 Ningcao talk contribs uploaded File:30-Redicing Nanowire Diameter by Thermal Oxidation and Vapored HF Etch.pdf
- 16:10, 17 April 2014 Ningcao talk contribs uploaded File:29-UnaxisPM3-SiO2-SiH4-O2-He.pdf
- 11:09, 17 April 2014 Dfreeborn talk contribs uploaded File:How to restart the software on Si Deep Etch.pdf
- 10:53, 17 April 2014 Dfreeborn talk contribs uploaded File:How to restart the software on RIE.pdf
- 09:18, 16 April 2014 Biljana talk contribs uploaded File:AdvPECVD-LS Nitride2 300C standard recipe.pdf
- 09:15, 16 April 2014 Biljana talk contribs uploaded File:AdvPECVD OXIDE 300C standard recipe.pdf
- 09:11, 16 April 2014 Biljana talk contribs uploaded File:AdvPECVD-Nitride2 300C standard recipe.pdf
- 15:44, 15 April 2014 Biljana talk contribs uploaded File:PECVD1 SiO2 Data-April 2014 SiO2 Data.pdf
- 15:42, 15 April 2014 Biljana talk contribs uploaded File:PECVD1-SiO2-standard recipe 2014.pdf
- 15:29, 15 April 2014 Biljana talk contribs uploaded File:PECVD1 SIN Data-April 2014 SIN data.pdf
- 14:58, 15 April 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 2014.pdf
- 14:55, 15 April 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 1000A-April 2014.pdf
- 14:41, 15 April 2014 Biljana talk contribs uploaded File:New IBD TiO2 Data April 2014.pdf
- 14:36, 15 April 2014 Biljana talk contribs uploaded File:IBD TiO2 Data March 2014 IBD TIO2 Data.pdf
- 14:26, 15 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 Data April 2014.pdf
- 14:14, 15 April 2014 Biljana talk contribs uploaded File:New IBD SiN Data April 2014 IBD SIN data 2014.pdf
- 14:12, 15 April 2014 Biljana talk contribs uploaded File:New IBD SiN Data April 2014.pdf
- 14:02, 15 April 2014 Biljana talk contribs uploaded File:IBD SiN Data April 2014.pdf
- 13:59, 15 April 2014 Biljana talk contribs uploaded File:IBD SiN Data April 2014 IBD SIN data 2014.pdf
- 13:40, 15 April 2014 Biljana talk contribs uploaded File:IBD SiO2 Data April 2014 IBD SIO2 Data.pdf
- 16:57, 8 April 2014 Biljana talk contribs uploaded File:New Advanced PECVD-Nitride2 300C standard recipe.pdf
- 16:48, 8 April 2014 Biljana talk contribs uploaded File:New Advanced PECVD LS NITRIDE2 April 2014.pdf
- 16:45, 8 April 2014 Biljana talk contribs uploaded File:Adv PECVD LS NITRIDE2 April 2014.pdf
- 16:43, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 April 2014 LS NITRIDE 2 Data 2014 .pdf
- 16:26, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
- 16:25, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf
- 16:24, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf
- 13:53, 7 April 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 April 2014.pdf
- 13:51, 7 April 2014 Biljana talk contribs uploaded File:ADV OXIDE data April 2014.pdf
- 13:49, 7 April 2014 Biljana talk contribs uploaded File:ADV PECVD NITRIDE2-Data April 2014.pdf
- 10:26, 2 April 2014 Biljana talk contribs uploaded File:New IBD TiO2 deposition.pdf
- 10:23, 2 April 2014 Biljana talk contribs uploaded a new version of File:IBD TiO2 Data March 2014.pdf
- 10:22, 2 April 2014 Biljana talk contribs uploaded a new version of File:IBD TiO2 Data March 2014.pdf
- 10:16, 2 April 2014 Biljana talk contribs uploaded File:IBD TiO2 Data March 2014.pdf
- 15:59, 1 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 Data March 2014.pdf
- 14:42, 1 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 deposition details.pdf
- 13:56, 1 April 2014 Biljana talk contribs uploaded File:IBD SiN Data March 2014.pdf
- 13:21, 1 April 2014 Biljana talk contribs uploaded File:IBD SiNdeposition.pdf
- 11:26, 1 April 2014 Abrahamsen talk contribs uploaded File:ASML Job Set-Up Guide.pdf
- 16:50, 31 March 2014 Biljana talk contribs uploaded File:IBD SiO2 Data March 2014.pdf
- 15:05, 31 March 2014 Biljana talk contribs uploaded File:New IBD SiO2 Standard Recipe.pdf
- 14:58, 31 March 2014 Biljana talk contribs uploaded File:IBD SiO2 Standard Recipe.pdf
- 13:36, 31 March 2014 Biljana talk contribs uploaded File:Thermal Evaporator2.pdf
- 11:56, 31 March 2014 Biljana talk contribs uploaded File:SFI Sputter.pdf
- 11:45, 31 March 2014 Biljana talk contribs uploaded File:AET RTA Operating Instructions.pdf
- 10:37, 31 March 2014 Biljana talk contribs uploaded File:New Advanced PECVD-LS Nitride2 300C standard recipe.pdf
- 10:35, 31 March 2014 Biljana talk contribs uploaded File:New Advanced PECVD OXIDE 300C standard recipe.pdf
- 10:25, 31 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C Standard Recipe.pdf
- 10:24, 31 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C Standard Recipe.pdf
- 10:18, 31 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-LS Nitride2 300C standard recipe.pdf
- 10:07, 31 March 2014 Biljana talk contribs uploaded File:RIE 3 Operationing instructions.pdf
- 10:03, 31 March 2014 Biljana talk contribs uploaded File:New Operating Instructions Ebeam.pdf
- 16:33, 27 March 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 March 2014.pdf
- 12:28, 27 March 2014 Bosch talk contribs uploaded File:Unaxis PM3 Web Operational Procedure 3-27-14.pdf (Updated SiO2 Rate Table)
- 16:43, 25 March 2014 Bosch talk contribs uploaded File:Unaxis PM3 Web Operational Procedure 3-25-14.pdf
- 16:52, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf
- 16:50, 24 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C standard recipe.pdf
- 16:47, 24 March 2014 Biljana talk contribs uploaded File:ADV PECVD NITRIDE2-Data March 2014.pdf
- 16:39, 24 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C standard recipe.pdf
- 16:37, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe.pdf
- 15:32, 24 March 2014 Biljana talk contribs uploaded File:NEw Advanced PECVD OXIDE 300C standard recipe.pdf
- 14:57, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD OXIDE 300C standard recipe.pdf
- 14:31, 24 March 2014 Biljana talk contribs uploaded File:ADV. PECVD OXIDE data-March 2014.pdf
- 12:00, 24 March 2014 Biljana talk contribs uploaded File:Operating Ebeam1-2.pdf
- 16:43, 21 March 2014 Bosch talk contribs uploaded File:Unaxis PM3 Web Operational Procedure 3-21-14.pdf
- 16:41, 21 March 2014 Bosch talk contribs deleted page File:Unaxis PM3 Web Operational Procedure 7-30-13.pdf (Deleted old revision 20140321233832!Unaxis_PM3_Web_Operational_Procedure_7-30-13.pdf: Newer Version Uploaded)
- 16:38, 21 March 2014 Bosch talk contribs uploaded a new version of File:Unaxis PM3 Web Operational Procedure 7-30-13.pdf
- 16:34, 21 March 2014 Biljana talk contribs uploaded File:PECVD1-SiO2-standard recipe 1000A.pdf
- 16:27, 21 March 2014 Thibeault talk contribs uploaded File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf
- 16:08, 21 March 2014 Thibeault talk contribs uploaded File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf
- 12:06, 21 March 2014 Biljana talk contribs uploaded File:PECVD1 SiO2 Data-March 2014 SiO2 Data.pdf
- 11:12, 21 March 2014 Thibeault talk contribs uploaded File:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf
- 08:51, 21 March 2014 Biljana talk contribs uploaded File:ALD operating instructions-1.pdf
- 16:59, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf
- 15:39, 20 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-1000A Standard recipe.pdf
- 15:35, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Data-March 2014 SIN data.pdf
- 14:12, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Thickness and index uniformity March 2014.pdf
- 14:05, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Thickness &index uniformity March 2014.pdf
- 14:02, 20 March 2014 Biljana talk contribs uploaded a new version of File:PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
- 13:59, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
- 13:46, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 Operating Instructions.pdf
- 12:12, 20 March 2014 Biljana talk contribs uploaded File:New PECVD1 SIN Data-March 2014 SIN data.pdf
- 12:08, 20 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 1000A.pdf
- 16:20, 19 March 2014 Biljana talk contribs uploaded File:SiO2 100% SiH4 HDR 50C.pdf
- 14:55, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Data-March 2014.pdf
- 14:43, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe.pdf
- 15:36, 18 March 2014 Thibeault talk contribs uploaded File:Al-AFM-Variation-Deposition-Rate-Rev1.pdf
- 15:28, 18 March 2014 Ningcao talk contribs uploaded File:28-Very-low-pin-hole-density SiNx film at 300 C.pdf
- 15:17, 18 March 2014 Thibeault talk contribs uploaded File:Al-thickness-variation-with-rate.jpg
- 15:09, 18 March 2014 Ningcao talk contribs uploaded File:27-SiNx Film (Bias=50W) Sidewall Coverage.pdf
- 14:54, 18 March 2014 Thibeault talk contribs uploaded File:Vapor-Pressure-Chart-2.xlsx
- 14:52, 18 March 2014 Thibeault talk contribs uploaded a new version of File:Vapor-Pressure-Chart.xlsx
- 14:49, 18 March 2014 Thibeault talk contribs uploaded File:Vapor-Pressure-Chart.xlsx (alphabetical order)
- 14:48, 18 March 2014 Thibeault talk contribs deleted page File:Vapor-Pressure-Chart.xlsx
- 14:47, 18 March 2014 Thibeault talk contribs uploaded a new version of File:Vapor-Pressure-Chart.xlsx
- 14:45, 18 March 2014 Thibeault talk contribs deleted page File:Vapor-Pressure-Chart.xlsx (Deleted old revision 20140318214515!Vapor-Pressure-Chart.xlsx: Duplicated file)
- 14:45, 18 March 2014 Thibeault talk contribs uploaded a new version of File:Vapor-Pressure-Chart.xlsx
- 14:08, 18 March 2014 Bosch talk contribs uploaded File:Tystar Operational Procedure.pdf
- 14:03, 18 March 2014 Ningcao talk contribs uploaded File:23-Tungsten Sputtering Film-Sputter-4-Ar.pdf
- 14:02, 18 March 2014 Ningcao talk contribs deleted page File:23-Tungsten Sputtering Film-Sputter-4.pdf
- 13:22, 18 March 2014 Bosch talk contribs uploaded File:Unaxis PM3 Web Operational Procedure 7-30-13.pdf
- 11:38, 18 March 2014 Dfreeborn talk contribs uploaded File:Panasonic 1 instructions.pdf
- 11:30, 18 March 2014 Dfreeborn talk contribs uploaded File:Suss MJB3 SOP1.pdf
- 11:21, 18 March 2014 Thibeault talk contribs uploaded File:Vapor-Pressure-Chart.xlsx
- 12:33, 17 March 2014 Dfreeborn talk contribs uploaded File:Suss MA6 SOP4.pdf
- 12:28, 17 March 2014 Dfreeborn talk contribs uploaded File:Suss MA6 SOP3.pdf
- 12:23, 17 March 2014 Dfreeborn talk contribs uploaded File:Suss MA6 SOP2.pdf
- 12:11, 17 March 2014 Dfreeborn talk contribs uploaded File:Suss MA6 SOP1.pdf
- 11:37, 17 March 2014 Bosch talk contribs uploaded File:PM1 Wiki Operational Procedure 3-14-14.pdf
- 11:37, 17 March 2014 Bosch talk contribs deleted page File:PM1 Wiki Operational Procedure 3-14-14.docx (new file to upload)
- 11:32, 17 March 2014 Bosch talk contribs uploaded File:PM1 Wiki Operational Procedure 3-14-14.docx (Unaxis Etch Operational Procedure)
- 15:28, 14 March 2014 Silva talk contribs uploaded File:IBDoperationguide2.pdf
- 15:27, 14 March 2014 Silva talk contribs uploaded File:IBDoperationguide1.pdf
- 17:02, 13 March 2014 Biljana talk contribs uploaded File:ADV.PECVD OXIDE-March 2014.pdf
- 16:36, 13 March 2014 Biljana talk contribs uploaded File:ADV OXIDE data.pdf
- 12:06, 13 March 2014 Biljana talk contribs uploaded File:PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf
- 11:20, 13 March 2014 Biljana talk contribs uploaded File:PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf
- 11:07, 13 March 2014 Silva talk contribs uploaded File:ThermalEvapInstruction.pdf
- 11:07, 13 March 2014 Silva talk contribs deleted page File:Thermal Evaporator 1 Operation Instruction.pdf
- 10:59, 13 March 2014 Silva talk contribs uploaded File:Thermal Evaporator 1 Operation Instruction.pdf
- 10:31, 13 March 2014 Silva talk contribs uploaded File:Manualwafertransfer.pdf
- 10:30, 13 March 2014 Dfreeborn talk contribs uploaded File:E-Beam-3 OPERATION INSTRUCTIONS-1.pdf
- 10:27, 13 March 2014 Silva talk contribs uploaded File:Gas-Change.pdf
- 10:23, 13 March 2014 Dfreeborn talk contribs uploaded File:E-BEAM-3-OPERATING- INSTRUCTIONS-1.PDF
- 10:21, 13 March 2014 Dfreeborn talk contribs uploaded File:E-BEAM-OPERATING INSTRUCTIONS.pdf
- 10:17, 13 March 2014 Dfreeborn talk contribs deleted page File:E-BEAM -3 OPERATING INSTRUCTIONS-1.pdf
- 10:17, 13 March 2014 Dfreeborn talk contribs deleted page File:E-BEAM -3 OPERATING INSTRUCTIONS-1.pdf (Deleted old revision 20140313171622!E-BEAM_-3_OPERATING_INSTRUCTIONS-1.pdf)
- 10:17, 13 March 2014 Dfreeborn talk contribs deleted page File:E-BEAM -3 OPERATING INSTRUCTIONS-1.pdf (Deleted old revision 20140313151519!E-BEAM_-3_OPERATING_INSTRUCTIONS-1.pdf)
- 10:16, 13 March 2014 Dfreeborn talk contribs uploaded a new version of File:E-BEAM -3 OPERATING INSTRUCTIONS-1.pdf
- 10:07, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf
- 10:00, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014.pdf
- 09:37, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN data.pdf
- 09:18, 13 March 2014 Silva talk contribs uploaded File:Panasonic2.pdf ({{file|ICP-Etch-2-Operating-Manual.pdf|Operating Instruction Manual}})
- 09:16, 13 March 2014 Silva talk contribs deleted page File:Panasonic ICP 2.pdf
- 08:22, 13 March 2014 Freeborn d talk contribs uploaded a new version of File:Documentations.pdf
- 08:15, 13 March 2014 Freeborn d talk contribs uploaded a new version of File:E-BEAM -3 OPERATING INSTRUCTIONS-1.pdf (E-‐BEAM #3 OPERATING INSTRUCTIONS 1. Push VENT TO LOAD/ UNLOAD button on the load lock controller. If the load lock does not vent after 1 min. press the STOP button and then the RESET button on the IC/5 deposition controller. 2. Slide sample holder...)
- 08:15, 13 March 2014 Silva m talk contribs uploaded a new version of File:Panasonic ICP 2.pdf (Training notes.)
- 08:12, 13 March 2014 Silva m talk contribs uploaded File:Panasonic ICP 2.pdf (Training notes.)
- 08:10, 13 March 2014 Freeborn d talk contribs uploaded File:E-BEAM -3 OPERATING INSTRUCTIONS-1.pdf (E-BEAM #3 OPERATING INSTRUCTIONS-1.PDF)
- 17:09, 12 March 2014 Biljana talk contribs uploaded File:PECVD1 SiN data-February 2014 AFM roughness.pdf
- 16:53, 12 March 2014 Biljana talk contribs uploaded File:PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf
- 16:13, 12 March 2014 Freeborn d talk contribs uploaded File:E-BEAM-3 OPERATION INSTRUCTIONS-1.pdf
- 16:07, 12 March 2014 Freeborn d talk contribs uploaded File:Documentations.pdf
- 15:06, 12 March 2014 Freeborn d talk contribs uploaded a new version of File:E-Beam -3 operating Instructions-1.pdf
- 14:50, 12 March 2014 Freeborn d talk contribs uploaded File:Operation Procedures.pdf
- 14:48, 12 March 2014 Freeborn d talk contribs uploaded File:E-Beam -3 operating Instructions-1.pdf
- 14:44, 12 March 2014 Freeborn d talk contribs uploaded File:E-Beam operating instruction.pdf
- 16:59, 30 January 2014 Ningcao talk contribs uploaded File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf
- 16:57, 30 January 2014 Ningcao talk contribs uploaded File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf
- 16:47, 30 January 2014 Ningcao talk contribs deleted page File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-2.pdf
- 16:47, 30 January 2014 Ningcao talk contribs deleted page File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-1.pdf
- 16:44, 30 January 2014 Ningcao talk contribs uploaded File:SPTS-Primaxx uEtch Presentation-b.pdf
- 16:41, 30 January 2014 Ningcao talk contribs uploaded File:SPTS-Primaxx uEtch Presentation-a.pdf
- 12:39, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpg
- 12:38, 30 January 2014 Ningcao talk contribs deleted page File:VHF-uEtch.jpeg
- 12:28, 30 January 2014 Ningcao talk contribs uploaded File:VHF-uEtch.jpeg
- 12:23, 30 January 2014 Ningcao talk contribs deleted page File:IMG 2416 1.jpeg
- 12:20, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpeg
- 12:17, 30 January 2014 Ningcao talk contribs deleted page File:VHF-uETCH.jpg
- 12:17, 30 January 2014 Ningcao talk contribs deleted page File:IMG 2416 1.jpeg
- 12:09, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpeg
- 11:13, 30 January 2014 Ningcao talk contribs uploaded File:VHF-uETCH.jpg
- 10:06, 30 January 2014 Ningcao talk contribs uploaded File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-2.pdf
- 10:01, 30 January 2014 Ningcao talk contribs uploaded File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-1.pdf
- 11:33, 28 January 2014 Thibeault talk contribs uploaded File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx
- 10:58, 28 January 2014 Thibeault talk contribs uploaded File:OrmoPrime-NIL-Adhesion-RevA.pdf
- 10:56, 28 January 2014 Thibeault talk contribs uploaded File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf
- 10:12, 28 January 2014 Thibeault talk contribs uploaded File:Mr-UVCur21.pdf
- 10:59, 27 January 2014 Thibeault talk contribs uploaded File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx
- 16:33, 3 December 2013 User account Gast j talk contribs was created
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- 12:23, 5 November 2013 Ningcao talk contribs uploaded File:24-Ni and Ta Films using Sputter-3.pdf
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- 13:49, 2 November 2013 Bovington j talk contribs uploaded File:Wet Etching of ALD Al2O3 Plasma 300C.xls (This is a list of wet etch experiment which people can feel free to add to.)
- 10:22, 28 October 2013 Ningcao talk contribs uploaded File:22-TiO2-Film-Sputter-2.pdf
- 16:38, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf
- 15:25, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf
- 13:40, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf
- 11:34, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf
- 10:14, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf
- 17:05, 23 October 2013 Thibeault talk contribs uploaded File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf
- 16:40, 23 October 2013 Thibeault talk contribs uploaded File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf
- 16:11, 23 October 2013 Thibeault talk contribs uploaded File:Panasonic1-TiW-W-Etch-Plasma-RIE-RevA.pdf
- 15:05, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf
- 11:40, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf
- 11:18, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf
- 10:37, 10 October 2013 Ningcao talk contribs uploaded File:21-Au-Sputter-film-recipes-Sputter-2.pdf
- 09:19, 7 October 2013 Ningcao talk contribs uploaded File:20-Al-Sputtering-Film-Sputter-2.pdf
- 09:02, 7 October 2013 Ningcao talk contribs uploaded File:19-AlN-Sputtering-Film-Sputter-2.pdf
- 10:40, 3 October 2013 Ningcao talk contribs uploaded File:18-InP-based etching-Cl2N2Ar.pdf
- 08:19, 3 October 2013 Ningcao talk contribs uploaded File:17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf
- 16:11, 2 October 2013 Ningcao talk contribs uploaded File:16-GaAs etch-ICP-2.pdf
- 13:47, 2 October 2013 Ningcao talk contribs uploaded File:14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf
- 13:41, 2 October 2013 Ningcao talk contribs uploaded File:15-GaAs etch-Unaxis ICP etcher.pdf
- 11:26, 2 October 2013 Ningcao talk contribs uploaded File:13-GaAs-AlGaAs Etching-RIE-5.pdf
- 10:58, 2 October 2013 Ningcao talk contribs uploaded File:12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf
- 15:49, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Ti-Etch-Deep-RevA.pdf
- 11:53, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Al-Etch-RevA.pdf
- 11:16, 27 September 2013 Ningcao talk contribs uploaded File:11-CZT etching-1.pdf
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- 09:59, 25 September 2013 Ningcao talk contribs uploaded File:10-Si Etch using DRIE (single-step).pdf
- 14:13, 24 September 2013 Ningcao talk contribs uploaded File:09-Plasma Etching of GaN-UnaxisPM1.pdf
- 15:40, 19 September 2013 Ningcao talk contribs uploaded File:08-Plasma Etching of GaN-RIE5.pdf
- 15:42, 18 September 2013 Ningcao talk contribs uploaded File:07-GaN Etch-Panasonic-ICP-1.pdf
- 11:36, 17 September 2013 Ningcao talk contribs uploaded File:06-XeF2-etch-recipe.pdf
- 09:07, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 09:06, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
- 09:02, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 09:01, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
- 08:58, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 08:58, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
- 16:13, 13 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 16:08, 11 September 2013 Ningcao talk contribs uploaded File:02-ICP-PECVD-a-Si Film-90C.pdf
- 16:08, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-90C.pdf
- 16:03, 11 September 2013 Ningcao talk contribs uploaded File:03-Amorphous-Si-PECVD-2.pdf
- 14:39, 11 September 2013 Ningcao talk contribs uploaded File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 13:57, 11 September 2013 Ningcao talk contribs deleted page File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 13:53, 11 September 2013 Ningcao talk contribs uploaded File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 13:52, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-250C.pdf
- 13:48, 11 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-250C.pdf
- 13:29, 11 September 2013 Ningcao talk contribs deleted page File:PECVD2-a-Si-Recipe-250C.pdf (Duplicated file)
- 13:28, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-250C.pdf (Duplicated file)
- 13:26, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-250C-a.pdf (Duplicated file)
- 13:23, 11 September 2013 Ningcao talk contribs deleted page File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf (Duplicated file)
- 09:55, 11 September 2013 Biljana talk contribs uploaded File:PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
- 09:53, 11 September 2013 Biljana talk contribs uploaded File:WIKI PECVD SIN Index,dep.rates,stress.pdf
- 15:46, 4 September 2013 Ningcao talk contribs uploaded File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 15:26, 4 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-250C-a.pdf
- 15:14, 4 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-90C.pdf
- 14:42, 4 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-250C.pdf
- 11:30, 4 September 2013 Ningcao talk contribs uploaded File:PECVD2-a-Si-Recipe-250C.pdf
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- 11:16, 30 August 2013 Thibeault talk contribs uploaded File:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf
- 16:46, 28 August 2013 Jcrode talk contribs deleted page File:Vi.png
- 16:44, 28 August 2013 Test t talk contribs uploaded File:Vi.png (test)
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- 11:00, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:52, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:45, 21 August 2013 Biljana talk contribs uploaded File:Panasonic1-SiO-Etch-SEM.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiO2-PECVD.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiN-PECVD.pdf
- 16:38, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CF4-SF6-CF4.pdf
- 16:36, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CHF3-Ar-3.pdf
- 16:08, 14 August 2013 Bosch talk contribs deleted page File:Web Operational Procedure EB4 Rev 2.pdf (Duplicated file: New Version Uploaded)
- 16:06, 14 August 2013 Bosch talk contribs uploaded File:Web Operational Procedure EB4 Rev 3.pdf (New EB4 Procedure)
- 08:55, 10 August 2013 Zwarburg talk contribs changed group membership for Zwarburg2 from (none) to administrator and bureaucrat
- 08:55, 10 August 2013 User account Zwarburg2 talk contribs was created by Zwarburg talk contribs
- 17:26, 9 August 2013 Zwarburg talk contribs deleted page Zack Warburg (content was: "{{staff|{{PAGENAME}} |position = Facility Staff Assistant<br>Wiki Admin |room = 1109F |phone = (805) 839-3918x200 |cell = |email = zwarburg@ece.ucsb.edu }} =A..." (and the only contributor was "Zwarburg"))
- 17:12, 9 August 2013 Zwarburg talk contribs unblocked Zwarburg talk contribs
- 16:06, 18 July 2013 Thibeault talk contribs uploaded File:Holography-Process-Variation-revA.pdf
- 16:05, 18 July 2013 Thibeault talk contribs uploaded File:Holography-Process-Gratings-revA.pdf
- 14:37, 18 July 2013 Thibeault talk contribs uploaded File:Thermal-Nanoimprint-Process-Tutorial-revA.pdf
- 13:24, 16 July 2013 User account Torres a talk contribs was created
- 15:17, 11 July 2013 Bosch talk contribs uploaded a new version of File:Sputter-3 Operation Procedure Wiki.pdf
- 15:12, 11 July 2013 Bosch talk contribs uploaded File:Sputter-3 Operation Procedure Wiki.pdf (Sputter 3 Operation Procedure)
- 16:58, 10 July 2013 Thibeault talk contribs uploaded File:RemoverPG-revA.pdf
- 16:55, 10 July 2013 Thibeault talk contribs uploaded File:OMNICOAT-revA.pdf
- 16:52, 10 July 2013 Thibeault talk contribs uploaded File:SU-8-2075-revA.pdf
- 16:51, 10 July 2013 Thibeault talk contribs uploaded File:SU-8-2015-revA.pdf
- 16:45, 10 July 2013 Thibeault talk contribs uploaded File:512B-Application-Data-Bake-revA.pdf
- 16:45, 10 July 2013 Thibeault talk contribs uploaded File:512B-Datasheet-revA.pdf
- 16:37, 10 July 2013 Thibeault talk contribs uploaded File:BCB-cyclotene-4000-revA.pdf
- 16:37, 10 July 2013 Thibeault talk contribs uploaded File:BCB-cyclotene-3000-revA.pdf
- 16:10, 10 July 2013 Thibeault talk contribs uploaded File:Panasonic-1-Cr-Etch-revA.pdf
- 16:09, 10 July 2013 Thibeault talk contribs deleted page File:Panasonic-1-Cr-Etch.pdf (will replace)
- 15:29, 10 July 2013 Thibeault talk contribs deleted page File:CrEtch(Panasonic1).pdf (Duplicated file)
- 15:29, 10 July 2013 Thibeault talk contribs uploaded File:Panasonic-1-Cr-Etch.pdf
- 15:27, 10 July 2013 Thibeault talk contribs uploaded a new version of File:CrEtch(Panasonic1).pdf
- 11:08, 10 July 2013 Bosch talk contribs uploaded File:Web Operational Procedure EB4 Rev 2.pdf (Operational Procedure for EB4)
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- 19:25, 18 June 2013 Jcrode talk contribs blocked Zwarburg talk contribs with an expiration time of indefinite (account creation disabled)
- 17:31, 18 June 2013 Jcrode talk contribs moved page Tube Furnace AlGaAs Oxidation (Linberg) to Tube Furnace AlGaAs Oxidation (Lindberg)
- 13:48, 18 June 2013 Thibeault talk contribs uploaded File:CrEtch(Panasonic1).pdf
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- 14:21, 22 April 2013 Thibeault talk contribs uploaded File:UV210-Positive-Resist-Datasheet.pdf
- 14:20, 22 April 2013 Thibeault talk contribs uploaded File:DS-K101-Anti-Reflective-Coating.pdf
- 14:20, 22 April 2013 Thibeault talk contribs uploaded File:AR2-Anti-Reflective-Coating.pdf
- 14:18, 22 April 2013 Thibeault talk contribs uploaded File:UVN2300-Negative-Resist-Datasheet.pdf
- 14:16, 22 April 2013 Thibeault talk contribs uploaded File:UVN30-Negative-Ressit-Datasheet.pdf (Negative resist for ASML Stepper - UVN2300 requires higher exposure)
- 13:54, 22 April 2013 Thibeault talk contribs uploaded File:UV6-Positive-Resist-Datasheet.pdf (Datasheet for UV6 positive resist for ASML stepper)
- 09:14, 9 November 2012 Zwarburg talk contribs uploaded File:NLOF5510-AS200-stepperrecipe.pdf
- 09:12, 9 November 2012 Zwarburg talk contribs uploaded File:SPR955-1.8-AS200-stepperrecipe.pdf
- 08:48, 9 November 2012 Zwarburg talk contribs uploaded File:SPR955-0.9-AS200-stepperrecipe.pdf
- 17:59, 8 November 2012 Zwarburg talk contribs uploaded File:NLOF2020stepperrecipe.pdf
- 17:56, 8 November 2012 Zwarburg talk contribs uploaded File:NLOF5510stepperrecipe.pdf
- 17:28, 8 November 2012 Zwarburg talk contribs uploaded File:SPR-220-7.0stepperrecipe.pdf
- 17:24, 8 November 2012 Zwarburg talk contribs uploaded File:SPR-220-3.0 OptimizationNew.pdf
- 17:23, 8 November 2012 Zwarburg talk contribs uploaded File:Spr955 1.8GCA6300.pdf
- 17:15, 8 November 2012 Zwarburg talk contribs uploaded File:SPR955CMstepperrecipe.pdf
- 17:10, 8 November 2012 Zwarburg talk contribs uploaded File:PRX-127-Resist-Remover.pdf
- 17:09, 8 November 2012 Zwarburg talk contribs uploaded File:1165-Resist-Remover.pdf
- 17:09, 8 November 2012 Zwarburg talk contribs uploaded File:AZ300T-Resist-Remover.pdf
- 17:08, 8 November 2012 Zwarburg talk contribs uploaded File:AZ300MIF-Developer-Datasheet.pdf
- 17:07, 8 November 2012 Zwarburg talk contribs uploaded File:AZ400K-Developer-Datasheet.pdf
- 17:06, 8 November 2012 Zwarburg talk contribs uploaded File:CEM365iS-Contrast-Enhancement-Datasheet.pdf
- 17:06, 8 November 2012 Zwarburg talk contribs uploaded File:XHRiC-Anti-Reflective-Coating.pdf
- 17:04, 8 November 2012 Zwarburg talk contribs uploaded File:MRI-7020-Nanoimprinting-Datasheet.pdf
- 17:04, 8 November 2012 Zwarburg talk contribs uploaded File:NX1020-Nanoimprinting-Datasheet.pdf
- 17:03, 8 November 2012 Zwarburg talk contribs uploaded File:MaN2403-E-Beam-Resist-Datasheet.pdf
- 17:03, 8 November 2012 Zwarburg talk contribs uploaded File:PMMA-E-Beam-Resist-Datasheet.pdf
- 17:00, 8 November 2012 Zwarburg talk contribs uploaded File:LOL2000-Underlayer-Datasheet.pdf
- 17:00, 8 November 2012 Zwarburg talk contribs uploaded File:PMGI-Underlayer-Datasheet.pdf
- 16:58, 8 November 2012 Zwarburg talk contribs uploaded File:AZnLOF2020-Negative-Resist-Datasheet.pdf
- 16:58, 8 November 2012 Zwarburg talk contribs uploaded File:AZnLOF5510-Negative-Resist-Datasheet.pdf
- 16:57, 8 November 2012 Zwarburg talk contribs uploaded File:AZ5214-Negative-Resist-Datasheet.pdf
- 16:55, 8 November 2012 Zwarburg talk contribs uploaded File:SPR955-Positive-Resist-Datasheet.pdf
- 16:55, 8 November 2012 Zwarburg talk contribs uploaded File:SPR950-Positive-Resist-Datasheet.pdf
- 16:54, 8 November 2012 Zwarburg talk contribs uploaded File:SPR220-Positive-Resist-Datasheet.pdf
- 16:54, 8 November 2012 Zwarburg talk contribs uploaded File:OCG825-Positive-Resist-Datasheet.pdf
- 16:51, 8 November 2012 Zwarburg talk contribs uploaded File:AXP4000pb-Datasheet.pdf
- 13:21, 8 November 2012 Zwarburg talk contribs uploaded File:AZnLOF2020contactrecipe.pdf
- 13:11, 8 November 2012 Zwarburg talk contribs uploaded File:SPR220-7contactrecipe.pdf
- 13:09, 8 November 2012 Zwarburg talk contribs uploaded File:SPR220-3contactrecipe.pdf
- 12:36, 8 November 2012 Zwarburg talk contribs uploaded File:Bi-LayerContactprocesswithPMGI.pdf
- 12:35, 8 November 2012 Zwarburg talk contribs uploaded File:Liftoff-Techniques.pdf
- 16:04, 10 October 2012 Biljana talk contribs uploaded File:SEM pictures SiO2 100C.pdf
- 16:00, 10 October 2012 Biljana talk contribs uploaded File:SiO2 film Unaxis ICP vs PECVD I.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-250C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-100C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-50C.pdf
- 16:53, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
- 16:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
- 16:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
- 16:14, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
- 16:11, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:08, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
- 15:56, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
- 15:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
- 15:49, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
- 15:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
- 15:38, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
- 15:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
- 13:50, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-HDR-100% SiH4.pdf
- 13:46, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
- 13:41, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-LDR-100% SiH4.pdf
- 12:17, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:12, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
- 12:06, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
- 12:00, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
- 11:59, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
- 11:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf