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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 500 | older 500) (20 | 50 | 100 | 250 | 500)- 16:41, 30 January 2014 Ningcao talk contribs uploaded File:SPTS-Primaxx uEtch Presentation-a.pdf
- 12:39, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpg
- 12:38, 30 January 2014 Ningcao talk contribs deleted page File:VHF-uEtch.jpeg
- 12:28, 30 January 2014 Ningcao talk contribs uploaded File:VHF-uEtch.jpeg
- 12:23, 30 January 2014 Ningcao talk contribs deleted page File:IMG 2416 1.jpeg
- 12:20, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpeg
- 12:17, 30 January 2014 Ningcao talk contribs deleted page File:VHF-uETCH.jpg
- 12:17, 30 January 2014 Ningcao talk contribs deleted page File:IMG 2416 1.jpeg
- 12:09, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpeg
- 11:13, 30 January 2014 Ningcao talk contribs uploaded File:VHF-uETCH.jpg
- 10:06, 30 January 2014 Ningcao talk contribs uploaded File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-2.pdf
- 10:01, 30 January 2014 Ningcao talk contribs uploaded File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-1.pdf
- 11:33, 28 January 2014 Thibeault talk contribs uploaded File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx
- 10:58, 28 January 2014 Thibeault talk contribs uploaded File:OrmoPrime-NIL-Adhesion-RevA.pdf
- 10:56, 28 January 2014 Thibeault talk contribs uploaded File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf
- 10:12, 28 January 2014 Thibeault talk contribs uploaded File:Mr-UVCur21.pdf
- 10:59, 27 January 2014 Thibeault talk contribs uploaded File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx
- 16:33, 3 December 2013 User account Gast j talk contribs was created
- 14:40, 14 November 2013 User account Park ju talk contribs was created
- 12:23, 5 November 2013 Ningcao talk contribs uploaded File:24-Ni and Ta Films using Sputter-3.pdf
- 16:09, 4 November 2013 Ningcao talk contribs uploaded File:23-Tungsten Sputtering Film-Sputter-4.pdf
- 13:49, 2 November 2013 Bovington j talk contribs uploaded File:Wet Etching of ALD Al2O3 Plasma 300C.xls (This is a list of wet etch experiment which people can feel free to add to.)
- 10:22, 28 October 2013 Ningcao talk contribs uploaded File:22-TiO2-Film-Sputter-2.pdf
- 16:38, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf
- 15:25, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf
- 13:40, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf
- 11:34, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf
- 10:14, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf
- 17:05, 23 October 2013 Thibeault talk contribs uploaded File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf
- 16:40, 23 October 2013 Thibeault talk contribs uploaded File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf
- 16:11, 23 October 2013 Thibeault talk contribs uploaded File:Panasonic1-TiW-W-Etch-Plasma-RIE-RevA.pdf
- 15:05, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf
- 11:40, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf
- 11:18, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf
- 10:37, 10 October 2013 Ningcao talk contribs uploaded File:21-Au-Sputter-film-recipes-Sputter-2.pdf
- 09:19, 7 October 2013 Ningcao talk contribs uploaded File:20-Al-Sputtering-Film-Sputter-2.pdf
- 09:02, 7 October 2013 Ningcao talk contribs uploaded File:19-AlN-Sputtering-Film-Sputter-2.pdf
- 10:40, 3 October 2013 Ningcao talk contribs uploaded File:18-InP-based etching-Cl2N2Ar.pdf
- 08:19, 3 October 2013 Ningcao talk contribs uploaded File:17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf
- 16:11, 2 October 2013 Ningcao talk contribs uploaded File:16-GaAs etch-ICP-2.pdf
- 13:47, 2 October 2013 Ningcao talk contribs uploaded File:14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf
- 13:41, 2 October 2013 Ningcao talk contribs uploaded File:15-GaAs etch-Unaxis ICP etcher.pdf
- 11:26, 2 October 2013 Ningcao talk contribs uploaded File:13-GaAs-AlGaAs Etching-RIE-5.pdf
- 10:58, 2 October 2013 Ningcao talk contribs uploaded File:12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf
- 15:49, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Ti-Etch-Deep-RevA.pdf
- 11:53, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Al-Etch-RevA.pdf
- 11:16, 27 September 2013 Ningcao talk contribs uploaded File:11-CZT etching-1.pdf
- 11:13, 27 September 2013 User account Bovington j talk contribs was created
- 17:02, 25 September 2013 Ray t talk contribs uploaded File:TystarMechDrawWaferBoat.pdf (Mechanical Drawing for 4" Wafer Boat for Tystar Furnace (From Tystar))
- 17:00, 25 September 2013 User account Ray t talk contribs was created
- 09:59, 25 September 2013 Ningcao talk contribs uploaded File:10-Si Etch using DRIE (single-step).pdf
- 14:13, 24 September 2013 Ningcao talk contribs uploaded File:09-Plasma Etching of GaN-UnaxisPM1.pdf
- 15:40, 19 September 2013 Ningcao talk contribs uploaded File:08-Plasma Etching of GaN-RIE5.pdf
- 15:42, 18 September 2013 Ningcao talk contribs uploaded File:07-GaN Etch-Panasonic-ICP-1.pdf
- 11:36, 17 September 2013 Ningcao talk contribs uploaded File:06-XeF2-etch-recipe.pdf
- 09:07, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 09:06, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
- 09:02, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 09:01, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
- 08:58, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 08:58, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
- 16:13, 13 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
- 16:08, 11 September 2013 Ningcao talk contribs uploaded File:02-ICP-PECVD-a-Si Film-90C.pdf
- 16:08, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-90C.pdf
- 16:03, 11 September 2013 Ningcao talk contribs uploaded File:03-Amorphous-Si-PECVD-2.pdf
- 14:39, 11 September 2013 Ningcao talk contribs uploaded File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 13:57, 11 September 2013 Ningcao talk contribs deleted page File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 13:53, 11 September 2013 Ningcao talk contribs uploaded File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 13:52, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-250C.pdf
- 13:48, 11 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-250C.pdf
- 13:29, 11 September 2013 Ningcao talk contribs deleted page File:PECVD2-a-Si-Recipe-250C.pdf (Duplicated file)
- 13:28, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-250C.pdf (Duplicated file)
- 13:26, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-250C-a.pdf (Duplicated file)
- 13:23, 11 September 2013 Ningcao talk contribs deleted page File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf (Duplicated file)
- 09:55, 11 September 2013 Biljana talk contribs uploaded File:PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
- 09:53, 11 September 2013 Biljana talk contribs uploaded File:WIKI PECVD SIN Index,dep.rates,stress.pdf
- 15:46, 4 September 2013 Ningcao talk contribs uploaded File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
- 15:26, 4 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-250C-a.pdf
- 15:14, 4 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-90C.pdf
- 14:42, 4 September 2013 Ningcao talk contribs uploaded File:ICP-PECVD-a-Si-Recipe-250C.pdf
- 11:30, 4 September 2013 Ningcao talk contribs uploaded File:PECVD2-a-Si-Recipe-250C.pdf
- 11:07, 2 September 2013 User account Mclellan c talk contribs was created
- 11:16, 30 August 2013 Thibeault talk contribs uploaded File:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf
- 16:46, 28 August 2013 Jcrode talk contribs deleted page File:Vi.png
- 16:44, 28 August 2013 Test t talk contribs uploaded File:Vi.png (test)
- 16:40, 28 August 2013 User account Test t talk contribs was created
- 15:57, 22 August 2013 User account Son cw talk contribs was created
- 15:45, 21 August 2013 User account Freeborn d talk contribs was created
- 11:01, 21 August 2013 Biljana talk contribs deleted page File:Panasonic1-SiO-Etch-SEM.pdf (Deleted old revision 20130821175255!Panasonic1-SiO-Etch-SEM.pdf)
- 11:00, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:52, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:45, 21 August 2013 Biljana talk contribs uploaded File:Panasonic1-SiO-Etch-SEM.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiO2-PECVD.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiN-PECVD.pdf
- 16:38, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CF4-SF6-CF4.pdf
- 16:36, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CHF3-Ar-3.pdf
- 16:08, 14 August 2013 Bosch talk contribs deleted page File:Web Operational Procedure EB4 Rev 2.pdf (Duplicated file: New Version Uploaded)
- 16:06, 14 August 2013 Bosch talk contribs uploaded File:Web Operational Procedure EB4 Rev 3.pdf (New EB4 Procedure)
- 08:55, 10 August 2013 Zwarburg talk contribs changed group membership for Zwarburg2 from (none) to administrator and bureaucrat
- 08:55, 10 August 2013 User account Zwarburg2 talk contribs was created by Zwarburg talk contribs
- 17:26, 9 August 2013 Zwarburg talk contribs deleted page Zack Warburg (content was: "{{staff|{{PAGENAME}} |position = Facility Staff Assistant<br>Wiki Admin |room = 1109F |phone = (805) 839-3918x200 |cell = |email = zwarburg@ece.ucsb.edu }} =A..." (and the only contributor was "Zwarburg"))
- 17:12, 9 August 2013 Zwarburg talk contribs unblocked Zwarburg talk contribs
- 16:06, 18 July 2013 Thibeault talk contribs uploaded File:Holography-Process-Variation-revA.pdf
- 16:05, 18 July 2013 Thibeault talk contribs uploaded File:Holography-Process-Gratings-revA.pdf
- 14:37, 18 July 2013 Thibeault talk contribs uploaded File:Thermal-Nanoimprint-Process-Tutorial-revA.pdf
- 13:24, 16 July 2013 User account Torres a talk contribs was created
- 15:17, 11 July 2013 Bosch talk contribs uploaded a new version of File:Sputter-3 Operation Procedure Wiki.pdf
- 15:12, 11 July 2013 Bosch talk contribs uploaded File:Sputter-3 Operation Procedure Wiki.pdf (Sputter 3 Operation Procedure)
- 16:58, 10 July 2013 Thibeault talk contribs uploaded File:RemoverPG-revA.pdf
- 16:55, 10 July 2013 Thibeault talk contribs uploaded File:OMNICOAT-revA.pdf
- 16:52, 10 July 2013 Thibeault talk contribs uploaded File:SU-8-2075-revA.pdf
- 16:51, 10 July 2013 Thibeault talk contribs uploaded File:SU-8-2015-revA.pdf
- 16:45, 10 July 2013 Thibeault talk contribs uploaded File:512B-Application-Data-Bake-revA.pdf
- 16:45, 10 July 2013 Thibeault talk contribs uploaded File:512B-Datasheet-revA.pdf
- 16:37, 10 July 2013 Thibeault talk contribs uploaded File:BCB-cyclotene-4000-revA.pdf
- 16:37, 10 July 2013 Thibeault talk contribs uploaded File:BCB-cyclotene-3000-revA.pdf
- 16:10, 10 July 2013 Thibeault talk contribs uploaded File:Panasonic-1-Cr-Etch-revA.pdf
- 16:09, 10 July 2013 Thibeault talk contribs deleted page File:Panasonic-1-Cr-Etch.pdf (will replace)
- 15:29, 10 July 2013 Thibeault talk contribs deleted page File:CrEtch(Panasonic1).pdf (Duplicated file)
- 15:29, 10 July 2013 Thibeault talk contribs uploaded File:Panasonic-1-Cr-Etch.pdf
- 15:27, 10 July 2013 Thibeault talk contribs uploaded a new version of File:CrEtch(Panasonic1).pdf
- 11:08, 10 July 2013 Bosch talk contribs uploaded File:Web Operational Procedure EB4 Rev 2.pdf (Operational Procedure for EB4)
- 17:17, 4 July 2013 User account Prezioso m talk contribs was created
- 15:54, 3 July 2013 User account Reynolds t talk contribs was created
- 19:25, 18 June 2013 Jcrode talk contribs blocked Zwarburg talk contribs with an expiration time of indefinite (account creation disabled)
- 17:31, 18 June 2013 Jcrode talk contribs moved page Tube Furnace AlGaAs Oxidation (Linberg) to Tube Furnace AlGaAs Oxidation (Lindberg)
- 13:48, 18 June 2013 Thibeault talk contribs uploaded File:CrEtch(Panasonic1).pdf
- 18:21, 13 June 2013 User account Sank d talk contribs was created
- 14:54, 13 June 2013 User account Silva m talk contribs was created
- 12:40, 13 June 2013 User account Vainsencher a talk contribs was created
- 11:51, 21 May 2013 Zwarburg talk contribs changed group membership for Cruz s from (none) to administrator and staff
- 11:50, 21 May 2013 User account Cruz s talk contribs was created by Zwarburg talk contribs
- 20:59, 17 May 2013 Zwarburg talk contribs changed group membership for Whaley from staff to staff and administrator
- 20:59, 17 May 2013 Zwarburg talk contribs changed group membership for Silva from staff to staff and administrator
- 20:59, 17 May 2013 Zwarburg talk contribs changed group membership for Ningcao from staff to staff and administrator
- 20:59, 17 May 2013 Zwarburg talk contribs changed group membership for Mitchell from staff to staff and administrator
- 20:58, 17 May 2013 Zwarburg talk contribs changed group membership for Luis from staff to staff and administrator
- 20:58, 17 May 2013 Zwarburg talk contribs changed group membership for Hopkins from staff to staff and administrator
- 20:58, 17 May 2013 Zwarburg talk contribs changed group membership for Dfreeborn from staff to staff and administrator
- 20:58, 17 May 2013 Zwarburg talk contribs changed group membership for Bosch from staff to staff and administrator
- 20:57, 17 May 2013 Zwarburg talk contribs changed group membership for Biljana from staff to staff and administrator
- 20:57, 17 May 2013 Zwarburg talk contribs changed group membership for Abrahamsen from staff to staff and administrator
- 11:26, 17 May 2013 Zwarburg talk contribs changed group membership for Reynolds from staff to staff and administrator
- 11:26, 17 May 2013 Zwarburg talk contribs changed group membership for Lingg from staff to staff and administrator
- 11:22, 17 May 2013 Zwarburg talk contribs changed group membership for Thibeault from staff to staff and administrator
- 14:21, 22 April 2013 Thibeault talk contribs uploaded File:UV210-Positive-Resist-Datasheet.pdf
- 14:20, 22 April 2013 Thibeault talk contribs uploaded File:DS-K101-Anti-Reflective-Coating.pdf
- 14:20, 22 April 2013 Thibeault talk contribs uploaded File:AR2-Anti-Reflective-Coating.pdf
- 14:18, 22 April 2013 Thibeault talk contribs uploaded File:UVN2300-Negative-Resist-Datasheet.pdf
- 14:16, 22 April 2013 Thibeault talk contribs uploaded File:UVN30-Negative-Ressit-Datasheet.pdf (Negative resist for ASML Stepper - UVN2300 requires higher exposure)
- 13:54, 22 April 2013 Thibeault talk contribs uploaded File:UV6-Positive-Resist-Datasheet.pdf (Datasheet for UV6 positive resist for ASML stepper)
- 09:14, 9 November 2012 Zwarburg talk contribs uploaded File:NLOF5510-AS200-stepperrecipe.pdf
- 09:12, 9 November 2012 Zwarburg talk contribs uploaded File:SPR955-1.8-AS200-stepperrecipe.pdf
- 08:48, 9 November 2012 Zwarburg talk contribs uploaded File:SPR955-0.9-AS200-stepperrecipe.pdf
- 17:59, 8 November 2012 Zwarburg talk contribs uploaded File:NLOF2020stepperrecipe.pdf
- 17:56, 8 November 2012 Zwarburg talk contribs uploaded File:NLOF5510stepperrecipe.pdf
- 17:28, 8 November 2012 Zwarburg talk contribs uploaded File:SPR-220-7.0stepperrecipe.pdf
- 17:24, 8 November 2012 Zwarburg talk contribs uploaded File:SPR-220-3.0 OptimizationNew.pdf
- 17:23, 8 November 2012 Zwarburg talk contribs uploaded File:Spr955 1.8GCA6300.pdf
- 17:15, 8 November 2012 Zwarburg talk contribs uploaded File:SPR955CMstepperrecipe.pdf
- 17:10, 8 November 2012 Zwarburg talk contribs uploaded File:PRX-127-Resist-Remover.pdf
- 17:09, 8 November 2012 Zwarburg talk contribs uploaded File:1165-Resist-Remover.pdf
- 17:09, 8 November 2012 Zwarburg talk contribs uploaded File:AZ300T-Resist-Remover.pdf
- 17:08, 8 November 2012 Zwarburg talk contribs uploaded File:AZ300MIF-Developer-Datasheet.pdf
- 17:07, 8 November 2012 Zwarburg talk contribs uploaded File:AZ400K-Developer-Datasheet.pdf
- 17:06, 8 November 2012 Zwarburg talk contribs uploaded File:CEM365iS-Contrast-Enhancement-Datasheet.pdf
- 17:06, 8 November 2012 Zwarburg talk contribs uploaded File:XHRiC-Anti-Reflective-Coating.pdf
- 17:04, 8 November 2012 Zwarburg talk contribs uploaded File:MRI-7020-Nanoimprinting-Datasheet.pdf
- 17:04, 8 November 2012 Zwarburg talk contribs uploaded File:NX1020-Nanoimprinting-Datasheet.pdf
- 17:03, 8 November 2012 Zwarburg talk contribs uploaded File:MaN2403-E-Beam-Resist-Datasheet.pdf
- 17:03, 8 November 2012 Zwarburg talk contribs uploaded File:PMMA-E-Beam-Resist-Datasheet.pdf
- 17:00, 8 November 2012 Zwarburg talk contribs uploaded File:LOL2000-Underlayer-Datasheet.pdf
- 17:00, 8 November 2012 Zwarburg talk contribs uploaded File:PMGI-Underlayer-Datasheet.pdf
- 16:58, 8 November 2012 Zwarburg talk contribs uploaded File:AZnLOF2020-Negative-Resist-Datasheet.pdf
- 16:58, 8 November 2012 Zwarburg talk contribs uploaded File:AZnLOF5510-Negative-Resist-Datasheet.pdf
- 16:57, 8 November 2012 Zwarburg talk contribs uploaded File:AZ5214-Negative-Resist-Datasheet.pdf
- 16:55, 8 November 2012 Zwarburg talk contribs uploaded File:SPR955-Positive-Resist-Datasheet.pdf
- 16:55, 8 November 2012 Zwarburg talk contribs uploaded File:SPR950-Positive-Resist-Datasheet.pdf
- 16:54, 8 November 2012 Zwarburg talk contribs uploaded File:SPR220-Positive-Resist-Datasheet.pdf
- 16:54, 8 November 2012 Zwarburg talk contribs uploaded File:OCG825-Positive-Resist-Datasheet.pdf
- 16:51, 8 November 2012 Zwarburg talk contribs uploaded File:AXP4000pb-Datasheet.pdf
- 13:21, 8 November 2012 Zwarburg talk contribs uploaded File:AZnLOF2020contactrecipe.pdf
- 13:11, 8 November 2012 Zwarburg talk contribs uploaded File:SPR220-7contactrecipe.pdf
- 13:09, 8 November 2012 Zwarburg talk contribs uploaded File:SPR220-3contactrecipe.pdf
- 12:36, 8 November 2012 Zwarburg talk contribs uploaded File:Bi-LayerContactprocesswithPMGI.pdf
- 12:35, 8 November 2012 Zwarburg talk contribs uploaded File:Liftoff-Techniques.pdf
- 16:04, 10 October 2012 Biljana talk contribs uploaded File:SEM pictures SiO2 100C.pdf
- 16:00, 10 October 2012 Biljana talk contribs uploaded File:SiO2 film Unaxis ICP vs PECVD I.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-250C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-100C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-50C.pdf
- 16:53, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
- 16:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
- 16:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
- 16:14, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
- 16:11, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:08, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
- 15:56, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
- 15:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
- 15:49, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
- 15:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
- 15:38, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
- 15:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
- 13:50, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-HDR-100% SiH4.pdf
- 13:46, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
- 13:41, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-LDR-100% SiH4.pdf
- 12:17, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:12, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
- 12:06, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
- 12:00, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
- 11:59, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
- 11:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
- 09:03, 1 October 2012 Zwarburg talk contribs uploaded File:IBD-TiO2-Recipe.pdf
- 08:57, 1 October 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-100SiH4-100C-Medium-Stress.pdf
- 08:57, 1 October 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-100SiH4-100C-Low-Stress.pdf
- 09:37, 18 September 2012 Zwarburg talk contribs deleted page Template:Recipe Table Explination (content was: "#REDIRECT Template:Recipe Table Explanation" (and the only contributor was "Zwarburg"))
- 09:36, 18 September 2012 Zwarburg talk contribs deleted page Ion-Beam Deposition Recipes (content was: "#REDIRECT Ion Beam Deposition Recipes" (and the only contributor was "Zwarburg"))
- 09:36, 18 September 2012 Zwarburg talk contribs approve
- 09:36, 18 September 2012 Zwarburg talk contribs approve
- 09:36, 18 September 2012 Zwarburg talk contribs approve
- 09:36, 18 September 2012 Zwarburg talk contribs approve
- 09:35, 18 September 2012 Zwarburg talk contribs approve
- 09:35, 18 September 2012 Zwarburg talk contribs moved page Template:Recipe Table Explination/doc to Template:Recipe Table Explanation/doc
- 09:35, 18 September 2012 Zwarburg talk contribs approve
- 09:35, 18 September 2012 Zwarburg talk contribs approve
- 09:35, 18 September 2012 Zwarburg talk contribs moved page Template:Recipe Table Explination to Template:Recipe Table Explanation
- 08:58, 18 September 2012 Zwarburg talk contribs uploaded File:XeF2-Results.pdf
- 07:57, 10 September 2012 Zwarburg talk contribs uploaded File:ICP1-Gas-Change-CHF3-AR.pdf
- 11:27, 7 September 2012 Zwarburg talk contribs approve
- 11:24, 7 September 2012 Zwarburg talk contribs approve
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- 10:17, 7 September 2012 Zwarburg talk contribs uploaded File:IBD-SiN-recipe.pdf
- 10:14, 7 September 2012 Zwarburg talk contribs deleted page File:SiNrecipedetails.pdf
- 10:13, 7 September 2012 Zwarburg talk contribs deleted page File:SiNfilm.pdf
- 08:36, 7 September 2012 Zwarburg talk contribs deleted page Ion Beam Deposition Recipes (content was: "{{recipes|Vacuum Deposition}} =Ion Beam Deposition (Veeco NEXUS)= ==SiO{{sub|2}} deposition (IBD)== *{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}} ==SiN deposition (IBD)== *{{fl|SiNfilm.pdf|SiN Film Data (IBD)}} *{{fl|SiNrecipedetail…")
- 07:16, 7 September 2012 Zwarburg talk contribs deleted page File:IBD template.pdf
- 06:52, 7 September 2012 Zwarburg talk contribs uploaded File:IBD-Ta2O5-Recipe.pdf
- 06:50, 7 September 2012 Zwarburg talk contribs uploaded File:IBD-SiO2-Recipe.pdf
- 11:33, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-ZrO2-300-recipe.pdf
- 11:33, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-SiO2-300-recipe.pdf
- 11:33, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-SiO2-100-recipe.pdf
- 11:30, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-HfO2-300-recipe.pdf
- 11:30, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-HfO2-100-recipe.pdf
- 11:30, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-AlN-300-recipe.pdf
- 11:26, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-Al2O3-300-Recipe.pdf
- 11:26, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-Al2O3-100-Recipe.pdf
- 11:26, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-Al2O3-Plasma-300C-Recipe.pdf
- 11:25, 6 September 2012 Zwarburg talk contribs uploaded File:ALD-Al2O3-300-Saturated-Recipe.pdf
- 11:01, 6 September 2012 Zwarburg talk contribs deleted page File:IBD film data.pdf
- 11:01, 6 September 2012 Zwarburg talk contribs deleted page IBD film data (content was: "*SiN film table last update *IBD material calibration data *IBD template for deposition step *media: SPC data.pdf|SiN film Statistical proces…")
- 11:01, 6 September 2012 Zwarburg talk contribs deleted page File:IBD materials table.pdf
- 11:00, 6 September 2012 Zwarburg talk contribs deleted page File:IBD SiN recipe details.pdf
- 11:00, 6 September 2012 Zwarburg talk contribs deleted page IBD Recipes (content was: "== SiN deposition (Ion Beam Deposition (Veeco NEXUS)) == *SIN film data *SiN recipe details" (and the only contributor was "Biljana"))
- 11:00, 6 September 2012 Zwarburg talk contribs deleted page File:SiN Recipe details.pdf
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- 11:00, 6 September 2012 Zwarburg talk contribs deleted page Filmdata/pdf (content was: "*SiN *SiO<sub>2 *Ta<sub>2</sub>O<sub>5</sub> *media: TiO2filmdata.pdf|TiO<sub>2…" (and the only contributor was "Biljana"))
- 10:59, 6 September 2012 Zwarburg talk contribs deleted page File:Recipes.pdf
- 10:48, 6 September 2012 Zwarburg talk contribs deleted page IBD film data.pdf (content was: "#REDIRECT IBD film data" (and the only contributor was "Zwarburg"))
- 10:48, 6 September 2012 Zwarburg talk contribs approve
- 10:43, 6 September 2012 Zwarburg talk contribs approve
- 21:44, 5 September 2012 Zwarburg talk contribs approve
- 21:44, 5 September 2012 Zwarburg talk contribs moved page IBD film data.pdf to IBD film data
- 16:51, 5 September 2012 Biljana talk contribs uploaded File:IBD template.pdf
- 16:38, 5 September 2012 Biljana talk contribs uploaded File:IBD film data.pdf
- 16:33, 5 September 2012 Biljana talk contribs uploaded File:IBD SiN recipe details.pdf
- 16:33, 5 September 2012 Biljana talk contribs uploaded File:IBD materials table.pdf
- 16:28, 5 September 2012 Biljana talk contribs uploaded File:SiNrecipedetails.pdf
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- 15:57, 5 September 2012 Biljana talk contribs uploaded File:SiN Recipe details.pdf
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- 14:54, 5 September 2012 Biljana talk contribs uploaded File:Recipes.pdf
- 12:12, 5 September 2012 Zwarburg talk contribs changed group membership for John d from staff to (none)
- 12:10, 5 September 2012 Zwarburg talk contribs changed group membership for John d from (none) to staff (Helping Bilijana with pages)
- 12:08, 5 September 2012 User account John d talk contribs was created by Zwarburg talk contribs
- 08:22, 28 August 2012 Zwarburg talk contribs approve
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- 08:06, 28 August 2012 Zwarburg talk contribs uploaded File:Template-info.png
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- 10:57, 22 August 2012 Zwarburg talk contribs uploaded File:Sputter4-Tungston-Films.pdf
- 10:57, 22 August 2012 Zwarburg talk contribs uploaded File:Sputter4-TiAu-Films.pdf
- 10:54, 22 August 2012 Zwarburg talk contribs uploaded File:Surfscan-Operation-Manual.pdf
- 10:50, 22 August 2012 Zwarburg talk contribs uploaded File:ALD-Operating-Instrucitons.pdf
- 07:54, 21 August 2012 Zwarburg talk contribs approve
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- 07:34, 21 August 2012 Zwarburg talk contribs uploaded File:E-Beam-4-Operating-Procedures.pdf
- 13:12, 20 August 2012 Zwarburg talk contribs uploaded File:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf
- 13:10, 20 August 2012 Zwarburg talk contribs uploaded File:UNAXIS-VLR-InP-Etch-200C-Recipe.pdf
- 11:21, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-100%SiH4-LDR-250C.pdf
- 11:21, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-100%SiH4-LDR-100C.pdf
- 11:21, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-100%SiH4-LDR-50C.pdf
- 11:20, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-100%SiH4-HDR-250C.pdf
- 11:20, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-100%SiH4-HDR-100C.pdf
- 11:20, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-100%SiH4-HDR-50C.pdf
- 11:17, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-NoAr-50C.pdf
- 11:17, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-NoAr-100C.pdf
- 11:17, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-NoAr-250C.pdf
- 11:12, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-5W-250C.pdf
- 11:12, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-5W-100C.pdf
- 11:12, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe-5W-50C.pdf
- 11:11, 20 August 2012 Zwarburg talk contribs uploaded File:Holograph.jpg
- 09:37, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-250C-Low-Stress.pdf
- 09:37, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf
- 09:37, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-50C-Low-Stress.pdf
- 09:33, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-120W-250C-Low-Stress.pdf
- 09:33, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-50W-250C-Medium-Stress.pdf
- 09:32, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-5W-250C-High-Stress.pdf
- 09:32, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-120W-100C-Low-Stress.pdf
- 09:32, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-50W-100C-Medium-Stress.pdf
- 09:32, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-5W-100C-High-Stress.pdf
- 09:32, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-120W-50C-Low-Stress.pdf
- 09:32, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-50W-50C-Medium-Stress.pdf
- 09:31, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-NoAr-5W-50C-High-Stress.pdf
- 09:20, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-120W-250C-Low-Stress.pdf
- 09:19, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-50W-250C-Medium-Stress.pdf
- 09:18, 20 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-5W-250C-High-Stress.pdf
- 09:11, 20 August 2012 Zwarburg talk contribs approve
- 08:58, 20 August 2012 Zwarburg talk contribs uploaded File:Panasonic2-SiOx-Recipe.pdf
- 08:57, 20 August 2012 Zwarburg talk contribs uploaded File:Panasonic1-SiO-Etch.pdf
- 10:37, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-120W-50C-Low-Stress.pdf
- 10:37, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-50W-50C-Medium-Stress.pdf
- 10:36, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-5W-50C-High-Stress.pdf
- 10:18, 17 August 2012 Zwarburg talk contribs deleted page File:PECVD2-SiN-Recipe-120W-Low-Stress.pdf
- 10:18, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-120W-100C-Low-Stress.pdf
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- 10:17, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-50W-100C-Medium-Stress.pdf
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- 10:17, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-5W-100C-High-Stress.pdf
- 08:09, 17 August 2012 Zwarburg talk contribs deleted page File:Recipe121-O2clean.pdf
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- 08:09, 17 August 2012 Zwarburg talk contribs deleted page InP Etch-200C-ning.pdf (content before blanking was: "*InP Standard recipes")
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- 08:08, 17 August 2012 Zwarburg talk contribs deleted page Talk:ICP I Standard Recipes (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |ICP I Standard Recipes |Comments |- |1 | Recipe 105.pdf|Recipe 10…" (and the only contributor was "Biljana"))
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- 08:04, 17 August 2012 Zwarburg talk contribs deleted page File:Vik's recipe.pdf
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- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 InP Etch 200C H2 Ar Std.pdf
- 08:03, 17 August 2012 Zwarburg talk contribs deleted page File:PM1 O2 Etch 15min 200C.pdf
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- 08:03, 17 August 2012 Zwarburg talk contribs deleted page Unaxis VLR Recipes (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |Standard Recipes |Comments |- |1 | SiN process 2%SiH4.pdf|SiN pro…" (and the only contributor was "Biljana"))
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:PECVD 1 Standard recipes.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Standard recipe for SiN deposition in PECVD 1.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Standard recipe for SiO2 deposition in PECVD 1.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 Standard plasma clean.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 SiO2 deposition.pdf
- 08:02, 17 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 LS SiN deposition.pdf
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- 08:01, 17 August 2012 Zwarburg talk contribs deleted page File:SiN deposition 2%SiH4 100C-120W-low stress.pdf
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- 08:01, 17 August 2012 Zwarburg talk contribs deleted page GCA-6300-Resist Table.pdf (content was: "{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" |- bgcolor="#D0E7FF" ! width="725" …" (and the only contributor was "Biljana"))
- 06:25, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-120W-Low-Stress.pdf
- 06:25, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-50W-Medium-Stress.pdf
- 06:25, 17 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe-5W-High-Stress.pdf
- 12:08, 16 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 SiO2 Data-particles, thickness, index.pdf
- 12:08, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Data.pdf
- 12:08, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiO2-Recipe.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD 2 SiN Data-particles, thickness, index.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Data.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs deleted page File:Advanced PECVD2 Nitride 2 deposition.pdf
- 12:07, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD2-SiN-Recipe.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs deleted page File:PECVD 1 SiO2 data-particles, thickness, index.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiO2-Data.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs deleted page File:PECVD 1 SiN data-particles, thickness, index.pdf
- 12:05, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiN-Data.pdf
- 12:03, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiO2-Recipe.pdf
- 12:03, 16 August 2012 Zwarburg talk contribs deleted page File:Standard SiO2 deposition PECVD 1.pdf
- 12:03, 16 August 2012 Zwarburg talk contribs deleted page File:Standard SiO2 deposition-PECVD 1.pdf
- 12:01, 16 August 2012 Zwarburg talk contribs uploaded File:PECVD1-SiN-Recipe.pdf
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Standard recipes for deposition (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |Standard Recipes |Comments |- |1 | SiN process 2%SiH4.pdf|SiN pro…" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page SiN process 2%SiH4.pdf (content was: "*SiN deposition 2%SiH4 250C-120W-low stress * media: SiN deposition 2%SiH4 100C-120W-low stress.pdf|S…" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page SiN Low stress 2%SiH4.pdf (content was: "*SiN deposition 2% SiH4 No Ar 100C-120W low stress *media:SiN deposition 250C-120W low stress.pdf|SiN depositi…" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Recipe 155.pdf (content was: "* recipe 155" (and the only contributor was "Biljana"))
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- 10:21, 16 August 2012 Zwarburg talk contribs deleted page Recipe 116.pdf (content was: "* recipe 116" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page PM1 O2 etches.pdf (content was: "* PM1 O2 Etch 2min 30C * PM1 O2 Etch 15min 30C *media:PM1 O2 Etch 15min 200C.pdf| PM1 O2 Etch …" (and the only contributor was "Biljana"))
- 10:21, 16 August 2012 Zwarburg talk contribs deleted page PECVD 1 Standard recipes.pdf (content was: "*Standard SiN deposition-PECVD 1 *Standard SiO2 deposition-PECVD 1" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page Media.operatons Man.pdf (content was: "File:Operations Man.pdf" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page InP Etch-200C-ning (content was: "InP Etch-200C-ning.pdf" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page ICP I Standard recipes.pdf (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="10" class="wikitable" |Recipe No |Standard Recipes |Comments |- |105 |media:CF4-O2 clean.pdf|CF4…" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page Advanced PECVD 2 Standard recipes.pdf (content was: "*Advanced PECVD 2 standard plasma clean *media:Advanced PECVD 2 SiO2 deposition.pdf|Advanced PECVD 2 Oxide …" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page Advanced PECVD 2 Data-particles, thickness, index.pdf (content was: "*Advanced PECVD 2 Oxide Data-particles, thickness, index *media:Advanced PECVD 2 SiN Data-p…" (and the only contributor was "Biljana"))
- 10:20, 16 August 2012 Zwarburg talk contribs deleted page GCA-6300 Stepper Lithography Recipes.pdf (content was: "{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |- bgcolor="#D0E7FF" ! width="1675" height="45" co…" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page PECVD 1 Data- particles, thickness, index.pdf (content was: "*PECVD1 SiO2 data-particles, thickness, index *media:PECVD 1 SiN data-particles, thickness, index.pd…" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 105.pdf (content was: "* recipe 105" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 118.pdf (content was: "* recipe 118" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 151.pdf (content was: "* recipe 151" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 122.pdf (content was: "* recipe 122" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Recipe 309.pdf (content was: "* recipe 309" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page SiN Deposition 100C Low stress.pdf (content was: "*SiN Deposition 100C-120W Low stress *media:SiN Deposition 250C-120W Low stress.pdf|SiN Deposition 2500C-120W …" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page SiN low stress2% SiH4 No Ar.pdf (content was: "*SiN deposition 2% SiH4 No Ar 100C-120W low stress *media:SiN deposition 250C-120W low stress.pdf|SiN depositi…" (and the only contributor was "Biljana"))
- 10:19, 16 August 2012 Zwarburg talk contribs deleted page Standard Recipes (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |Standard Recipes |Comments |- |1 |media: InP 200C Standard.pdf|In…" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page SiN process 2% SiH4 No Ar.pdf (content was: "*SiN deposition 2%SiH4 No Ar 250C-120W-low stress * media: SiN deposition 2%SiH4 No Ar 100C-120…" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page SiN Process Low stress.pdf (content was: "* SiN deposition 100C-120W-low stress * media:SiN deposition 250C-120W-low stress.pdf|SiN deposition 250C-120W…" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 183.pdf (content was: "* recipe 183" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 144.pdf (content was: "* recipe 144" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 121.pdf (content was: "* recipe 121" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 117.pdf (content was: "* recipe 117" (and the only contributor was "Biljana"))
- 10:18, 16 August 2012 Zwarburg talk contribs deleted page ICP II Standard recipes.pdf (content was: "{|style="color:black; background-color:#ffffcc;" cellpadding="10" class="wikitable" |Recipe No |Standard Recipes |Comments |- |100 | media:recipe 100.pdf|O2cle…" (and the only contributor was "Biljana"))
- 10:17, 16 August 2012 Zwarburg talk contribs deleted page Lithography materials.pdf (content was: "{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |- bgcolor="#D0E7FF" ! width="1675" height="45" co…" (and the only contributor was "Biljana"))
- 09:21, 16 August 2012 Biljana talk contribs uploaded File:Advanced PECVD2 Nitride 2 deposition.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-5W-high stress.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-50W-medium stress.pdf
- 17:35, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-120W-low stress.pdf
- 15:43, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition-PECVD 1.pdf
- 15:42, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition-PECVD 1.pdf
- 15:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition PECVD 1.pdf
- 15:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition PECVD 1.pdf
- 14:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiO2 deposition PECVD 1.pdf
- 14:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiN deposition PECVD 1.pdf
- 14:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN Data-particles, thickness, index.pdf
- 14:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 Data-particles, thickness, index.pdf
- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN deposition.pdf
- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 LS SiN deposition.pdf
- 14:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 deposition.pdf
- 14:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 Standard plasma clean.pdf
- 11:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiO2 deposition in PECVD 1.pdf
- 11:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiN deposition in PECVD 1.pdf
- 11:20, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 Standard recipes.pdf
- 10:54, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiN data-particles, thickness, index.pdf
- 10:52, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiO2 data-particles, thickness, index.pdf
- 17:33, 13 August 2012 Biljana talk contribs uploaded File:PM1O2 Etch 60min 200C.pdf
- 17:28, 13 August 2012 Biljana talk contribs uploaded File:O2etch 15min 30C.pdf