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14:39, 11 September 2013
01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
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file
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495 KB
1
16:08, 11 September 2013
02-ICP-PECVD-a-Si Film-90C.pdf
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file
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131 KB
1
16:03, 11 September 2013
03-Amorphous-Si-PECVD-2.pdf
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file
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248 KB
1
09:07, 17 September 2013
05-SiO2 Nano-structure Etch.pdf
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file
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937 KB
1
11:36, 17 September 2013
06-XeF2-etch-recipe.pdf
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file
)
312 KB
1
15:42, 18 September 2013
07-GaN Etch-Panasonic-ICP-1.pdf
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file
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1.43 MB
1
15:40, 19 September 2013
08-Plasma Etching of GaN-RIE5.pdf
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file
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706 KB
1
14:13, 24 September 2013
09-Plasma Etching of GaN-UnaxisPM1.pdf
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file
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500 KB
1
09:59, 25 September 2013
10-Si Etch using DRIE (single-step).pdf
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file
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843 KB
1
11:16, 27 September 2013
11-CZT etching-1.pdf
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file
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110 KB
1
10:58, 2 October 2013
12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf
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file
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870 KB
1
11:26, 2 October 2013
13-GaAs-AlGaAs Etching-RIE-5.pdf
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file
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599 KB
1
13:47, 2 October 2013
14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf
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file
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671 KB
1
13:41, 2 October 2013
15-GaAs etch-Unaxis ICP etcher.pdf
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file
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765 KB
1
16:11, 2 October 2013
16-GaAs etch-ICP-2.pdf
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file
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229 KB
1
08:19, 3 October 2013
17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf
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file
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1,009 KB
1
10:40, 3 October 2013
18-InP-based etching-Cl2N2Ar.pdf
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file
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985 KB
1
09:02, 7 October 2013
19-AlN-Sputtering-Film-Sputter-2.pdf
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file
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157 KB
1
09:19, 7 October 2013
20-Al-Sputtering-Film-Sputter-2.pdf
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file
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599 KB
1
10:37, 10 October 2013
21-Au-Sputter-film-recipes-Sputter-2.pdf
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file
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240 KB
1
10:22, 28 October 2013
22-TiO2-Film-Sputter-2.pdf
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file
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172 KB
1
14:03, 18 March 2014
23-Tungsten Sputtering Film-Sputter-4-Ar.pdf
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file
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310 KB
1
12:23, 5 November 2013
24-Ni and Ta Films using Sputter-3.pdf
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file
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165 KB
1
16:57, 30 January 2014
25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf
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file
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1.74 MB
1
16:59, 30 January 2014
26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf
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file
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1.07 MB
1
15:09, 18 March 2014
27-SiNx Film (Bias=50W) Sidewall Coverage.pdf
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file
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150 KB
1
15:28, 18 March 2014
28-Very-low-pin-hole-density SiNx film at 300 C.pdf
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file
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410 KB
1
16:10, 17 April 2014
29-UnaxisPM3-SiO2-SiH4-O2-He.pdf
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file
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88 KB
1
14:11, 18 April 2014
30-Redicing Nanowire Diameter by Thermal Oxidation and Vapored HF Etch.pdf
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file
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1.31 MB
1
14:22, 18 April 2014
31-Holography Process for 1D-lines and 2D-dots-rev-3-13-2014.pdf
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file
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624 KB
1
09:22, 21 January 2015
32-Reducing AlCl3 Corrosion with CHF3 plasma.pdf
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file
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636 KB
1
10:21, 27 January 2015
33-Etching SiO2 with Vertical Side-wall.pdf
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file
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924 KB
1
15:59, 29 June 2015
34-High-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf
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file
)
10 KB
1
15:27, 29 June 2015
35-Low-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf
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file
)
118 KB
1
16:15, 29 June 2015
36-Medium-stress SiNx using Unaxis ICP deposition tool.pdf
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file
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16 KB
1
15:12, 22 June 2015
3600 D, D2v Spin Speed Curve.pdf
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file
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52 KB
1
11:39, 30 June 2015
37-Low-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf
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file
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169 KB
1
11:55, 30 June 2015
38-High-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf
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file
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43 KB
1
12:07, 30 June 2015
39-Medium-stress SiNx at 100C using Unaxis ICP deposition tool.pdf
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file
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48 KB
1
14:08, 22 July 2015
42-Etching Platinum using Oxford Ion Mill Tool-a.pdf
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file
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1.62 MB
1
13:58, 22 July 2015
42-Etching Platinum using Oxford Ion Mill Tool.pdf
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file
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1.62 MB
1
14:36, 2 September 2015
43-Issue with the etch of InP-InGaAs-and- InAlAs-b.pdf
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file
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838 KB
1
15:49, 9 October 2015
44-Etching Gold with Al2O3 Mask using Oxford Ion Mill Tool.pdf
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file
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2.28 MB
1
16:23, 1 December 2015
45-Etching Nickel with Al2O3 Mask using Oxford Ion Mill Tool.pdf
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file
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1.87 MB
1
16:42, 16 December 2015
46-Mo Film using Sputter3.pdf
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file
)
143 KB
1
16:22, 16 February 2016
47-Photolithography of SU8-2005.pdf
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file
)
1.55 MB
1
16:30, 16 February 2016
48-Photolithography of SU8-2010.pdf
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file
)
360 KB
1
16:39, 16 February 2016
49-Photolithography of SU8-2015-a.pdf
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file
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327 KB
1
16:24, 17 February 2016
50-InP Etch-2-17-2016.pdf
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file
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842 KB
1
15:54, 13 January 2017
51-SiNx-Etch-Recipe-using-RIE3.pdf
(
file
)
1.07 MB
1
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