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Date Name Thumbnail Size Description Versions
14:18, 22 April 2013 UVN2300-Negative-Resist-Datasheet.pdf (file) 326 KB   1
14:16, 22 April 2013 UVN30-Negative-Ressit-Datasheet.pdf (file) 326 KB Negative resist for ASML Stepper - UVN2300 requires higher exposure 1
11:36, 6 September 2022 UCSB-Facilities-Use-Agreement.pdf (file) 334 KB   4
12:41, 23 December 2014 SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf (file) 336 KB   1
16:38, 24 October 2013 Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf (file) 345 KB   1
15:36, 18 March 2014 Al-AFM-Variation-Deposition-Rate-Rev1.pdf (file) 362 KB   1
11:17, 8 September 2017 UV26-Positive-Resist-Datasheet.pdf (file) 364 KB   2
16:40, 23 October 2013 RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf (file) 372 KB   1
13:54, 22 April 2013 UV6-Positive-Resist-Datasheet.pdf (file) 384 KB Datasheet for UV6 positive resist for ASML stepper 1
12:12, 9 November 2020 COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf (file) 407 KB Occupancy change 2
15:25, 24 October 2013 Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf (file) 430 KB   1
14:02, 24 June 2021 User Protocols Coronavirus 2020-09-14-1.pdf (file) 435 KB   6
11:16, 30 August 2013 Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf (file) 487 KB   1
16:08, 21 March 2014 W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf (file) 488 KB   1
16:27, 21 March 2014 W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf (file) 489 KB   1
15:49, 27 September 2013 Panasonic-1-Ti-Etch-Deep-RevA.pdf (file) 497 KB   1
12:00, 23 December 2014 SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf (file) 518 KB   1
14:37, 18 July 2013 Thermal-Nanoimprint-Process-Tutorial-revA.pdf (file) 531 KB   1
16:37, 10 July 2013 BCB-cyclotene-3000-revA.pdf (file) 531 KB   1
16:52, 3 June 2016 10-Si Etch Bosch Release DRIE.pdf (file) 533 KB   1
16:31, 15 December 2015 DUV42P-Anti-Reflective-Coating.pdf (file) 541 KB   1
11:40, 22 October 2013 Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf (file) 579 KB   1
11:18, 22 October 2013 Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf (file) 580 KB   1
14:31, 12 July 2016 Survey052016.pdf (file) 581 KB   1
14:21, 22 April 2013 UV210-Positive-Resist-Datasheet.pdf (file) 582 KB   1
16:05, 18 July 2013 Holography-Process-Gratings-revA.pdf (file) 611 KB   1
15:02, 17 January 2018 10-Si Etch Bosch DSEIII.pdf (file) 616 KB   1
16:06, 18 July 2013 Holography-Process-Variation-revA.pdf (file) 678 KB   1
10:52, 8 November 2018 DS-K101-304-Anti-Reflective-Coating.pdf (file) 960 KB   1
14:20, 22 April 2013 DS-K101-Anti-Reflective-Coating.pdf (file) 960 KB   1
13:54, 9 July 2015 CAIBE.jpg (file) 1.28 MB   1
17:58, 29 January 2019 US Usage Map 2006-2018.png (file) 1.3 MB   1
10:59, 27 January 2014 Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx (file) 1.42 MB   1
15:06, 21 October 2019 IR Imaging and Laser Sensing.pdf (file) 1.45 MB   1
16:19, 5 December 2022 FacilityPresentation.pdf (file) 1.48 MB   1
11:51, 3 June 2016 ASML Job Set-Up Guide simple v1.pdf (file) 1.6 MB   1
15:02, 17 January 2018 10-Si Etch Single Step Smooth Sidewall DSEIII.pdf (file) 1.63 MB   1
09:19, 24 September 2018 Nanofab Policies Chemical Hygiene Plan 9 13 18.pdf (file) 1.65 MB   1
14:00, 11 October 2019 Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf (file) 1.75 MB   1
09:36, 8 September 2018 Nanofab Policies Chemical Hygiene Plan 8 31 18.pdf (file) 1.76 MB   1
16:47, 10 April 2015 ASML Job Set-Up Guide v2.pdf (file) 1.81 MB   1
14:14, 11 October 2019 On Chip Hybrid Silicon Quantum Dot Comb Laser With 14 Error Free Channels.pdf (file) 1.96 MB   1
15:16, 30 October 2019 N-Polar HEMTs mm-Wave.pdf (file) 2.08 MB   1
09:04, 24 October 2019 Bowers Group Highlights 2019.pdf (file) 3.17 MB   1
14:37, 12 June 2017 NR9-1000PY-AS200-stepperrecipe.pdf (file) 3.57 MB   1
15:17, 10 October 2019 Memory-Based Neuromorphic Hardware for Advanced Neural Network Models.pdf (file) 4.41 MB   1
21:39, 8 September 2019 High Performance Lasers on Silicon Slides.pdf (file) 4.48 MB   1
16:09, 16 September 2019 THz Transistors and Template Assisted Selective Epitaxy.pdf (file) 7.61 MB   1
10:09, 9 October 2019 High Power PICs for Free Space.pdf (file) 9.59 MB   1
16:42, 21 February 2020 2000 pixel mkids.pdf (file) 9.69 MB   1
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