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14:16, 22 April 2013
UVN30-Negative-Ressit-Datasheet.pdf
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file
)
326 KB
Negative resist for ASML Stepper - UVN2300 requires higher exposure
1
11:36, 6 September 2022
UCSB-Facilities-Use-Agreement.pdf
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file
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334 KB
4
12:41, 23 December 2014
SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf
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file
)
336 KB
1
16:38, 24 October 2013
Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf
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file
)
345 KB
1
15:36, 18 March 2014
Al-AFM-Variation-Deposition-Rate-Rev1.pdf
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file
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362 KB
1
11:17, 8 September 2017
UV26-Positive-Resist-Datasheet.pdf
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file
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364 KB
2
16:40, 23 October 2013
RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf
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file
)
372 KB
1
13:54, 22 April 2013
UV6-Positive-Resist-Datasheet.pdf
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file
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384 KB
Datasheet for UV6 positive resist for ASML stepper
1
12:12, 9 November 2020
COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf
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file
)
407 KB
Occupancy change
2
15:25, 24 October 2013
Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf
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file
)
430 KB
1
14:02, 24 June 2021
User Protocols Coronavirus 2020-09-14-1.pdf
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file
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435 KB
6
11:16, 30 August 2013
Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf
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file
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487 KB
1
16:08, 21 March 2014
W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf
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file
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488 KB
1
16:27, 21 March 2014
W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf
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file
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489 KB
1
15:49, 27 September 2013
Panasonic-1-Ti-Etch-Deep-RevA.pdf
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file
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497 KB
1
12:00, 23 December 2014
SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf
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file
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518 KB
1
14:37, 18 July 2013
Thermal-Nanoimprint-Process-Tutorial-revA.pdf
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file
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531 KB
1
16:37, 10 July 2013
BCB-cyclotene-3000-revA.pdf
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file
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531 KB
1
16:52, 3 June 2016
10-Si Etch Bosch Release DRIE.pdf
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file
)
533 KB
1
16:31, 15 December 2015
DUV42P-Anti-Reflective-Coating.pdf
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file
)
541 KB
1
11:40, 22 October 2013
Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf
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file
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579 KB
1
11:18, 22 October 2013
Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf
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file
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580 KB
1
14:31, 12 July 2016
Survey052016.pdf
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file
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581 KB
1
14:21, 22 April 2013
UV210-Positive-Resist-Datasheet.pdf
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file
)
582 KB
1
16:05, 18 July 2013
Holography-Process-Gratings-revA.pdf
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file
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611 KB
1
15:02, 17 January 2018
10-Si Etch Bosch DSEIII.pdf
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file
)
616 KB
1
16:06, 18 July 2013
Holography-Process-Variation-revA.pdf
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file
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678 KB
1
10:52, 8 November 2018
DS-K101-304-Anti-Reflective-Coating.pdf
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file
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960 KB
1
14:20, 22 April 2013
DS-K101-Anti-Reflective-Coating.pdf
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file
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960 KB
1
13:54, 9 July 2015
CAIBE.jpg
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file
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1.28 MB
1
17:58, 29 January 2019
US Usage Map 2006-2018.png
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file
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1.3 MB
1
10:59, 27 January 2014
Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx
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file
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1.42 MB
1
15:06, 21 October 2019
IR Imaging and Laser Sensing.pdf
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file
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1.45 MB
1
16:19, 5 December 2022
FacilityPresentation.pdf
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file
)
1.48 MB
1
11:51, 3 June 2016
ASML Job Set-Up Guide simple v1.pdf
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file
)
1.6 MB
1
15:02, 17 January 2018
10-Si Etch Single Step Smooth Sidewall DSEIII.pdf
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file
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1.63 MB
1
09:19, 24 September 2018
Nanofab Policies Chemical Hygiene Plan 9 13 18.pdf
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file
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1.65 MB
1
14:00, 11 October 2019
Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf
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file
)
1.75 MB
1
09:36, 8 September 2018
Nanofab Policies Chemical Hygiene Plan 8 31 18.pdf
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file
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1.76 MB
1
16:47, 10 April 2015
ASML Job Set-Up Guide v2.pdf
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file
)
1.81 MB
1
14:14, 11 October 2019
On Chip Hybrid Silicon Quantum Dot Comb Laser With 14 Error Free Channels.pdf
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file
)
1.96 MB
1
15:16, 30 October 2019
N-Polar HEMTs mm-Wave.pdf
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file
)
2.08 MB
1
09:04, 24 October 2019
Bowers Group Highlights 2019.pdf
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file
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3.17 MB
1
14:37, 12 June 2017
NR9-1000PY-AS200-stepperrecipe.pdf
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file
)
3.57 MB
1
15:17, 10 October 2019
Memory-Based Neuromorphic Hardware for Advanced Neural Network Models.pdf
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file
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4.41 MB
1
21:39, 8 September 2019
High Performance Lasers on Silicon Slides.pdf
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file
)
4.48 MB
1
16:09, 16 September 2019
THz Transistors and Template Assisted Selective Epitaxy.pdf
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file
)
7.61 MB
1
10:09, 9 October 2019
High Power PICs for Free Space.pdf
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file
)
9.59 MB
1
16:42, 21 February 2020
2000 pixel mkids.pdf
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file
)
9.69 MB
1
21:37, 8 September 2019
Semiconductor Supermirrors.pdf
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file
)
10.61 MB
1
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