User contributions
Jump to navigation
Jump to search
- 17:52, 15 December 2015 diff hist +23 Vacuum Deposition Recipes
- 17:51, 15 December 2015 diff hist +46 Vacuum Deposition Recipes
- 17:50, 15 December 2015 diff hist +8 Vacuum Deposition Recipes
- 17:49, 15 December 2015 diff hist +4 Vacuum Deposition Recipes
- 17:36, 15 December 2015 diff hist +117 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL)
- 17:34, 15 December 2015 diff hist +164 Vacuum Deposition Recipes
- 17:13, 15 December 2015 diff hist 0 Vacuum Deposition Recipes
- 17:12, 15 December 2015 diff hist +98 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 17:08, 15 December 2015 diff hist 0 N File:Fe and Co Films using Sputter-3.pdf current
- 17:07, 15 December 2015 diff hist +322 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:52, 15 December 2015 diff hist -29 Lithography Recipes →Low-K Dielectric
- 16:51, 15 December 2015 diff hist -43 Lithography Recipes →Chemical Datasheets
- 16:31, 15 December 2015 diff hist 0 N File:DUV42P-Anti-Reflective-Coating.pdf current
- 16:30, 15 December 2015 diff hist -2 Lithography Recipes →Chemical Datasheets
- 16:29, 15 December 2015 diff hist +100 Lithography Recipes →Chemical Datasheets
- 15:53, 11 December 2015 diff hist +22 PECVD Recipes →SiN (100% SiH4 )
- 15:53, 11 December 2015 diff hist +23 PECVD Recipes →SiN (2% SiH4 - No-Ar - Extra N2)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4)
- 15:13, 11 December 2015 diff hist +64 Lithography Recipes →Low-K Dielectric
- 15:11, 11 December 2015 diff hist -27 Lithography Recipes →Low-K Dielectric
- 15:08, 11 December 2015 diff hist +18 Lithography Recipes →Low-K Dielectric
- 15:05, 11 December 2015 diff hist +9 Lithography Recipes →Low-K Dielectric
- 15:01, 11 December 2015 diff hist +43 Lithography Recipes →Low-K Dielectric
- 14:56, 11 December 2015 diff hist +9 Lithography Recipes →Chemical Datasheets
- 14:55, 11 December 2015 diff hist +10 Lithography Recipes →Chemical Datasheets
- 14:52, 11 December 2015 diff hist +43 ICP Etch 2 (Panasonic E626I) →Detailed Specifications
- 14:51, 11 December 2015 diff hist +122 ICP Etch 2 (Panasonic E626I) →About
- 09:15, 27 August 2015 diff hist +163 Lithography Recipes →Photolithography Recipes
- 09:13, 27 August 2015 diff hist +1 Lithography Recipes →Chemical Datasheets
- 09:12, 27 August 2015 diff hist 0 N File:PEK-162-Positive-Resist-Datasheet.pdf current
- 09:11, 27 August 2015 diff hist +284 Lithography Recipes →Chemical Datasheets
- 08:45, 27 August 2015 diff hist +25 Dry Etching Recipes
- 16:23, 26 August 2015 diff hist -16 Lithography Recipes →Chemical Datasheets
- 16:20, 26 August 2015 diff hist +102 Lithography Recipes →Photolithography Recipes
- 16:02, 26 August 2015 diff hist +54 Lithography Recipes →Chemical Datasheets
- 16:01, 26 August 2015 diff hist 0 N File:NR9-6000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-3000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-1000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist +144 Lithography Recipes →Chemical Datasheets
- 15:55, 26 August 2015 diff hist +5 Lithography Recipes →Photolithography Recipes
- 15:54, 26 August 2015 diff hist +5 Lithography Recipes →Chemical Datasheets
- 15:52, 26 August 2015 diff hist +311 Template:FeaturedArticle
- 15:40, 26 August 2015 diff hist -103 Template:News
- 12:12, 26 August 2015 diff hist +340 Vacuum Deposition Recipes
- 12:07, 26 August 2015 diff hist +520 Vacuum Deposition Recipes
- 14:43, 10 July 2015 diff hist -44 E-Beam 2 (Custom) →About
- 14:40, 10 July 2015 diff hist -33 Stepper 2 (AutoStep 200)
- 14:39, 10 July 2015 diff hist -31 Stepper 1 (GCA 6300)
- 14:38, 10 July 2015 diff hist -2 Chemical-Mechanical Polisher (Logitech)
- 14:26, 10 July 2015 diff hist +206 Deep UV Optical Microscope (Olympus) →About
- 14:25, 10 July 2015 diff hist +196 Deep UV Optical Microscope (Olympus)
- 14:23, 10 July 2015 diff hist +246 Fluorescence Microscope (Olympus MX51) →About
- 14:21, 10 July 2015 diff hist -3 Surface Analysis (KLA/Tencor Surfscan)
- 14:20, 10 July 2015 diff hist +149 Surface Analysis (KLA/Tencor Surfscan) →About
- 14:18, 10 July 2015 diff hist +110 SEM Sample Coater (Hummer)
- 10:45, 10 July 2015 diff hist -12 Vacuum Deposition Recipes
- 10:43, 10 July 2015 diff hist +20 Vacuum Deposition Recipes
- 10:41, 10 July 2015 diff hist +51 Vacuum Deposition Recipes
- 10:36, 10 July 2015 diff hist +405 Vacuum Deposition Recipes
- 17:08, 9 July 2015 diff hist +5 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:48, 9 July 2015 diff hist +656 Vacuum Deposition Recipes
- 16:39, 9 July 2015 diff hist +140 Vacuum Deposition Recipes
- 16:34, 9 July 2015 diff hist +137 Vacuum Deposition Recipes
- 16:29, 9 July 2015 diff hist +77 Vacuum Deposition Recipes
- 16:15, 9 July 2015 diff hist +39 Vacuum Deposition Recipes
- 15:52, 9 July 2015 diff hist +8 Other Dry Etching Recipes
- 15:51, 9 July 2015 diff hist +23 Other Dry Etching Recipes
- 15:49, 9 July 2015 diff hist +1 Dry Etching Recipes
- 14:58, 9 July 2015 diff hist +20 Dry Etching Recipes
- 14:57, 9 July 2015 diff hist +182 Dry Etching Recipes
- 13:58, 9 July 2015 diff hist +7 CAIBE (Oxford Ion Mill) →About
- 13:55, 9 July 2015 diff hist +9 CAIBE (Oxford Ion Mill)
- 13:54, 9 July 2015 diff hist 0 N File:CAIBE.jpg current
- 12:26, 9 July 2015 diff hist -71 CAIBE (Oxford Ion Mill)
- 12:25, 9 July 2015 diff hist 0 CAIBE (Oxford Ion Mill)
- 12:20, 9 July 2015 diff hist -604 CAIBE (Oxford Ion Mill)
- 11:52, 9 July 2015 diff hist +3,122 N CAIBE (Oxford Ion Mill) Created page with "{{tool|{{PAGENAME}} |picture=RIE3.jpg |type = Dry Etch |super= Brian Lingg |phone= 805-893-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = RIE #3 Fluorine-Ba..."
- 10:46, 9 July 2015 diff hist +30 Tool List →Dry Etch
- 16:47, 10 April 2015 diff hist +3 Stepper 3 (ASML DUV) →Operating Procedures
- 16:47, 10 April 2015 diff hist 0 N File:ASML Job Set-Up Guide v2.pdf current
- 17:27, 2 April 2015 diff hist -5 Stepper 3 (ASML DUV)
- 17:26, 2 April 2015 diff hist 0 N File:ASML Mask Making Guidelines.pdf current
- 17:25, 2 April 2015 diff hist +67 Stepper 3 (ASML DUV) →Operating Procedures
- 10:47, 25 February 2015 diff hist 0 Lithography Recipes →Photolithography Recipes
- 10:46, 25 February 2015 diff hist 0 Lithography Recipes
- 12:57, 24 December 2014 diff hist +157 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 12:41, 23 December 2014 diff hist 0 N File:SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf current
- 12:00, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf current
- 12:00, 23 December 2014 diff hist +23 Sputtering Recipes →SiO2 Deposition (Sputter 3)
- 11:44, 23 December 2014 diff hist +212 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:07, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Uniformity-rev-1.pdf current
- 11:06, 23 December 2014 diff hist +216 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:02, 23 December 2014 diff hist +317 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:45, 22 December 2014 diff hist +37 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:42, 22 December 2014 diff hist 0 N File:Ti-Au-Sputtering-Films-AJA2-rev1.pdf current
- 11:42, 22 December 2014 diff hist +95 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 11:39, 22 December 2014 diff hist +213 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:27, 22 December 2014 diff hist 0 N File:Sputter-2-AlN-Endeavor-rev1.pdf current
- 11:27, 22 December 2014 diff hist -4 Sputtering Recipes →AlNx Deposition (Sputter 2)