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- 16:51, 29 September 2017 diff hist +15 MediaWiki:Sidebar
- 16:49, 29 September 2017 diff hist +70 MediaWiki:Sidebar
- 16:32, 29 September 2017 diff hist +1 Stepper 3 (ASML DUV) →About
- 10:47, 22 September 2017 diff hist -26 Template:Links
- 17:01, 21 September 2017 diff hist -25 m Vacuum Deposition Recipes Tag: Visual edit
- 17:01, 21 September 2017 diff hist -50 m Vacuum Deposition Recipes Tag: Visual edit
- 11:30, 8 September 2017 diff hist +4 Lithography Recipes →Chemical Datasheets Tag: Visual edit: Switched
- 11:26, 8 September 2017 diff hist -1 Lithography Recipes Tag: Visual edit: Switched
- 11:18, 8 September 2017 diff hist -71 Lithography Recipes →Chemical Datasheets
- 11:17, 8 September 2017 diff hist 0 File:UV26-Positive-Resist-Datasheet.pdf Thibeault uploaded a new version of File:UV26-Positive-Resist-Datasheet.pdf current
- 11:16, 8 September 2017 diff hist 0 N File:UV26-Positive-Resist-Datasheet.pdf
- 11:16, 8 September 2017 diff hist +53 Lithography Recipes →Chemical Datasheets
- 11:10, 8 September 2017 diff hist 0 m Vacuum Deposition Recipes Tag: Visual edit: Switched
- 14:48, 12 June 2017 diff hist +52 Lithography Recipes →Photolithography Recipes
- 14:37, 12 June 2017 diff hist 0 N File:NR9-1000PY-AS200-stepperrecipe.pdf current
- 14:36, 12 June 2017 diff hist +319 Stepper Recipes
- 14:31, 12 July 2016 diff hist 0 N File:Survey052016.pdf current
- 14:30, 12 July 2016 diff hist +20 Template:News
- 14:28, 12 July 2016 diff hist +51 Template:News
- 16:59, 3 June 2016 diff hist +40 ICP Etch 2 (Panasonic E626I) →Detailed Specifications
- 16:58, 3 June 2016 diff hist +92 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications
- 16:55, 3 June 2016 diff hist 0 ICP Etching Recipes
- 16:52, 3 June 2016 diff hist 0 N File:10-Si Etch Bosch Release DRIE.pdf current
- 16:51, 3 June 2016 diff hist +114 ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch)
- 14:33, 3 June 2016 diff hist -47 Stepper 3 (ASML DUV) →About
- 14:31, 3 June 2016 diff hist +359 Stepper 3 (ASML DUV) →About
- 14:25, 3 June 2016 diff hist +318 Stepper 3 (ASML DUV) →About
- 11:51, 3 June 2016 diff hist 0 N File:ASML Job Set-Up Guide simple v1.pdf current
- 11:49, 3 June 2016 diff hist +96 Stepper 3 (ASML DUV) →Operating Procedures
- 12:01, 22 February 2016 diff hist 0 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:36, 22 February 2016 diff hist +130 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:37, 16 December 2015 diff hist +60 Dry Etching Recipes
- 15:36, 16 December 2015 diff hist +76 Dry Etching Recipes
- 15:36, 16 December 2015 diff hist +60 Dry Etching Recipes
- 15:35, 16 December 2015 diff hist -2 Other Dry Etching Recipes
- 15:35, 16 December 2015 diff hist +10 Other Dry Etching Recipes
- 15:34, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:33, 16 December 2015 diff hist +92 Dry Etching Recipes
- 15:33, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:32, 16 December 2015 diff hist +66 Dry Etching Recipes
- 15:19, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:18, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:18, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:17, 16 December 2015 diff hist +52 Dry Etching Recipes
- 15:16, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:15, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:14, 16 December 2015 diff hist +48 Dry Etching Recipes
- 15:14, 16 December 2015 diff hist 0 Dry Etching Recipes
- 15:13, 16 December 2015 diff hist +2 Dry Etching Recipes
- 18:12, 15 December 2015 diff hist +32 Vacuum Deposition Recipes
- 18:10, 15 December 2015 diff hist -16 Vacuum Deposition Recipes
- 18:09, 15 December 2015 diff hist +12 Vacuum Deposition Recipes
- 18:06, 15 December 2015 diff hist -3 Vacuum Deposition Recipes
- 18:05, 15 December 2015 diff hist +6 Vacuum Deposition Recipes
- 18:03, 15 December 2015 diff hist -33 Vacuum Deposition Recipes
- 18:02, 15 December 2015 diff hist -35 Vacuum Deposition Recipes
- 18:01, 15 December 2015 diff hist 0 Vacuum Deposition Recipes
- 18:00, 15 December 2015 diff hist -36 Vacuum Deposition Recipes
- 17:59, 15 December 2015 diff hist -35 Vacuum Deposition Recipes
- 17:58, 15 December 2015 diff hist +1 Vacuum Deposition Recipes
- 17:55, 15 December 2015 diff hist +243 Vacuum Deposition Recipes
- 17:52, 15 December 2015 diff hist +23 Vacuum Deposition Recipes
- 17:51, 15 December 2015 diff hist +46 Vacuum Deposition Recipes
- 17:50, 15 December 2015 diff hist +8 Vacuum Deposition Recipes
- 17:49, 15 December 2015 diff hist +4 Vacuum Deposition Recipes
- 17:36, 15 December 2015 diff hist +117 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL)
- 17:34, 15 December 2015 diff hist +164 Vacuum Deposition Recipes
- 17:13, 15 December 2015 diff hist 0 Vacuum Deposition Recipes
- 17:12, 15 December 2015 diff hist +98 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 17:08, 15 December 2015 diff hist 0 N File:Fe and Co Films using Sputter-3.pdf current
- 17:07, 15 December 2015 diff hist +322 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:52, 15 December 2015 diff hist -29 Lithography Recipes →Low-K Dielectric
- 16:51, 15 December 2015 diff hist -43 Lithography Recipes →Chemical Datasheets
- 16:31, 15 December 2015 diff hist 0 N File:DUV42P-Anti-Reflective-Coating.pdf current
- 16:30, 15 December 2015 diff hist -2 Lithography Recipes →Chemical Datasheets
- 16:29, 15 December 2015 diff hist +100 Lithography Recipes →Chemical Datasheets
- 15:53, 11 December 2015 diff hist +22 PECVD Recipes →SiN (100% SiH4 )
- 15:53, 11 December 2015 diff hist +23 PECVD Recipes →SiN (2% SiH4 - No-Ar - Extra N2)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:52, 11 December 2015 diff hist +22 PECVD Recipes →SiN (2% SiH4)
- 15:13, 11 December 2015 diff hist +64 Lithography Recipes →Low-K Dielectric
- 15:11, 11 December 2015 diff hist -27 Lithography Recipes →Low-K Dielectric
- 15:08, 11 December 2015 diff hist +18 Lithography Recipes →Low-K Dielectric
- 15:05, 11 December 2015 diff hist +9 Lithography Recipes →Low-K Dielectric
- 15:01, 11 December 2015 diff hist +43 Lithography Recipes →Low-K Dielectric
- 14:56, 11 December 2015 diff hist +9 Lithography Recipes →Chemical Datasheets
- 14:55, 11 December 2015 diff hist +10 Lithography Recipes →Chemical Datasheets
- 14:52, 11 December 2015 diff hist +43 ICP Etch 2 (Panasonic E626I) →Detailed Specifications
- 14:51, 11 December 2015 diff hist +122 ICP Etch 2 (Panasonic E626I) →About
- 09:15, 27 August 2015 diff hist +163 Lithography Recipes →Photolithography Recipes
- 09:13, 27 August 2015 diff hist +1 Lithography Recipes →Chemical Datasheets
- 09:12, 27 August 2015 diff hist 0 N File:PEK-162-Positive-Resist-Datasheet.pdf current
- 09:11, 27 August 2015 diff hist +284 Lithography Recipes →Chemical Datasheets
- 08:45, 27 August 2015 diff hist +25 Dry Etching Recipes
- 16:23, 26 August 2015 diff hist -16 Lithography Recipes →Chemical Datasheets
- 16:20, 26 August 2015 diff hist +102 Lithography Recipes →Photolithography Recipes
- 16:02, 26 August 2015 diff hist +54 Lithography Recipes →Chemical Datasheets
- 16:01, 26 August 2015 diff hist 0 N File:NR9-6000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-3000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist 0 N File:NR9-1000PY-revA.pdf current
- 16:00, 26 August 2015 diff hist +144 Lithography Recipes →Chemical Datasheets
- 15:55, 26 August 2015 diff hist +5 Lithography Recipes →Photolithography Recipes
- 15:54, 26 August 2015 diff hist +5 Lithography Recipes →Chemical Datasheets
- 15:52, 26 August 2015 diff hist +311 Template:FeaturedArticle
- 15:40, 26 August 2015 diff hist -103 Template:News
- 12:12, 26 August 2015 diff hist +340 Vacuum Deposition Recipes
- 12:07, 26 August 2015 diff hist +520 Vacuum Deposition Recipes
- 14:43, 10 July 2015 diff hist -44 E-Beam 2 (Custom) →About
- 14:40, 10 July 2015 diff hist -33 Stepper 2 (AutoStep 200)
- 14:39, 10 July 2015 diff hist -31 Stepper 1 (GCA 6300)
- 14:38, 10 July 2015 diff hist -2 Chemical-Mechanical Polisher (Logitech)
- 14:26, 10 July 2015 diff hist +206 Deep UV Optical Microscope (Olympus) →About
- 14:25, 10 July 2015 diff hist +196 Deep UV Optical Microscope (Olympus)
- 14:23, 10 July 2015 diff hist +246 Fluorescence Microscope (Olympus MX51) →About
- 14:21, 10 July 2015 diff hist -3 Surface Analysis (KLA/Tencor Surfscan)
- 14:20, 10 July 2015 diff hist +149 Surface Analysis (KLA/Tencor Surfscan) →About
- 14:18, 10 July 2015 diff hist +110 SEM Sample Coater (Hummer)
- 10:45, 10 July 2015 diff hist -12 Vacuum Deposition Recipes
- 10:43, 10 July 2015 diff hist +20 Vacuum Deposition Recipes
- 10:41, 10 July 2015 diff hist +51 Vacuum Deposition Recipes
- 10:36, 10 July 2015 diff hist +405 Vacuum Deposition Recipes
- 17:08, 9 July 2015 diff hist +5 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:48, 9 July 2015 diff hist +656 Vacuum Deposition Recipes
- 16:39, 9 July 2015 diff hist +140 Vacuum Deposition Recipes
- 16:34, 9 July 2015 diff hist +137 Vacuum Deposition Recipes
- 16:29, 9 July 2015 diff hist +77 Vacuum Deposition Recipes
- 16:15, 9 July 2015 diff hist +39 Vacuum Deposition Recipes
- 15:52, 9 July 2015 diff hist +8 Other Dry Etching Recipes
- 15:51, 9 July 2015 diff hist +23 Other Dry Etching Recipes
- 15:49, 9 July 2015 diff hist +1 Dry Etching Recipes
- 14:58, 9 July 2015 diff hist +20 Dry Etching Recipes
- 14:57, 9 July 2015 diff hist +182 Dry Etching Recipes
- 13:58, 9 July 2015 diff hist +7 CAIBE (Oxford Ion Mill) →About
- 13:55, 9 July 2015 diff hist +9 CAIBE (Oxford Ion Mill)
- 13:54, 9 July 2015 diff hist 0 N File:CAIBE.jpg current
- 12:26, 9 July 2015 diff hist -71 CAIBE (Oxford Ion Mill)
- 12:25, 9 July 2015 diff hist 0 CAIBE (Oxford Ion Mill)
- 12:20, 9 July 2015 diff hist -604 CAIBE (Oxford Ion Mill)
- 11:52, 9 July 2015 diff hist +3,122 N CAIBE (Oxford Ion Mill) Created page with "{{tool|{{PAGENAME}} |picture=RIE3.jpg |type = Dry Etch |super= Brian Lingg |phone= 805-893-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = RIE #3 Fluorine-Ba..."
- 10:46, 9 July 2015 diff hist +30 Tool List →Dry Etch
- 16:47, 10 April 2015 diff hist +3 Stepper 3 (ASML DUV) →Operating Procedures
- 16:47, 10 April 2015 diff hist 0 N File:ASML Job Set-Up Guide v2.pdf current
- 17:27, 2 April 2015 diff hist -5 Stepper 3 (ASML DUV)
- 17:26, 2 April 2015 diff hist 0 N File:ASML Mask Making Guidelines.pdf current
- 17:25, 2 April 2015 diff hist +67 Stepper 3 (ASML DUV) →Operating Procedures
- 10:47, 25 February 2015 diff hist 0 Lithography Recipes →Photolithography Recipes
- 10:46, 25 February 2015 diff hist 0 Lithography Recipes
- 12:57, 24 December 2014 diff hist +157 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 12:41, 23 December 2014 diff hist 0 N File:SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf current
- 12:00, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf current
- 12:00, 23 December 2014 diff hist +23 Sputtering Recipes →SiO2 Deposition (Sputter 3)
- 11:44, 23 December 2014 diff hist +212 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:07, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Uniformity-rev-1.pdf current
- 11:06, 23 December 2014 diff hist +216 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:02, 23 December 2014 diff hist +317 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:45, 22 December 2014 diff hist +37 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:42, 22 December 2014 diff hist 0 N File:Ti-Au-Sputtering-Films-AJA2-rev1.pdf current
- 11:42, 22 December 2014 diff hist +95 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 11:39, 22 December 2014 diff hist +213 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:27, 22 December 2014 diff hist 0 N File:Sputter-2-AlN-Endeavor-rev1.pdf current
- 11:27, 22 December 2014 diff hist -4 Sputtering Recipes →AlNx Deposition (Sputter 2)
- 16:25, 15 April 2014 diff hist +499 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:36, 1 April 2014 diff hist +19 PECVD 1 (PlasmaTherm 790) →Documentation
- 15:19, 1 April 2014 diff hist -71 Sputter 4 (AJA ATC 2200-V) →Documentation
- 14:08, 1 April 2014 diff hist +24 Nano-Imprint (Nanonex NX2000) →About
- 14:07, 1 April 2014 diff hist +51 Nano-Imprint (Nanonex NX2000) →About
- 13:56, 1 April 2014 diff hist +102 Stepper 2 (AutoStep 200) →About
- 13:54, 1 April 2014 diff hist -9 Stepper 1 (GCA 6300) →About
- 16:34, 21 March 2014 diff hist +139 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:34, 21 March 2014 diff hist +140 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:32, 21 March 2014 diff hist +128 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:27, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf current
- 16:27, 21 March 2014 diff hist 0 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 16:14, 21 March 2014 diff hist +3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:09, 21 March 2014 diff hist +4 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:08, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf current
- 16:08, 21 March 2014 diff hist +3 Sputtering Recipes →W Deposition (Sputter 4)
- 11:12, 21 March 2014 diff hist 0 N File:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf current
- 11:12, 21 March 2014 diff hist 0 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 11:11, 21 March 2014 diff hist +108 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 10:54, 21 March 2014 diff hist -27 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 10:54, 21 March 2014 diff hist +50 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 15:36, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:36, 18 March 2014 diff hist 0 N File:Al-AFM-Variation-Deposition-Rate-Rev1.pdf current
- 15:36, 18 March 2014 diff hist +105 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:19, 18 March 2014 diff hist +111 E-Beam Evaporation Recipes
- 15:18, 18 March 2014 diff hist -112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:17, 18 March 2014 diff hist 0 N File:Al-thickness-variation-with-rate.jpg current
- 15:16, 18 March 2014 diff hist +112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:00, 18 March 2014 diff hist +140 E-Beam Evaporation Recipes
- 14:55, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 14:54, 18 March 2014 diff hist 0 N File:Vapor-Pressure-Chart-2.xlsx current
- 14:52, 18 March 2014 diff hist 0 File:Vapor-Pressure-Chart.xlsx Thibeault uploaded a new version of "File:Vapor-Pressure-Chart.xlsx" current
- 14:49, 18 March 2014 diff hist +18 N File:Vapor-Pressure-Chart.xlsx alphabetical order
- 11:46, 18 March 2014 diff hist +7 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:45, 18 March 2014 diff hist -36 E-Beam Evaporation Recipes →Materials Table (E-Beam #4)
- 11:44, 18 March 2014 diff hist +35 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:42, 18 March 2014 diff hist +3 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:40, 18 March 2014 diff hist +66 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:32, 18 March 2014 diff hist -65 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:26, 18 March 2014 diff hist -35 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:24, 18 March 2014 diff hist +13 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:19, 18 March 2014 diff hist +93 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:18, 18 March 2014 diff hist +25 E-Beam Evaporation Recipes
- 13:41, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:40, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 13:39, 17 March 2014 diff hist +309 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:38, 17 March 2014 diff hist -26 Sputtering Recipes →Sputter 3 Process Table
- 13:35, 17 March 2014 diff hist -599 Sputtering Recipes →Sputter 3 Process Table
- 13:34, 17 March 2014 diff hist -93 Sputtering Recipes →Sputter 3 Process Table
- 13:30, 17 March 2014 diff hist -1 Sputtering Recipes →Sputter 3 Process Table
- 13:29, 17 March 2014 diff hist +27 Sputtering Recipes →Sputter 3 Process Table
- 13:28, 17 March 2014 diff hist +4 Sputtering Recipes
- 11:57, 17 March 2014 diff hist +1,000 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:44, 12 March 2014 diff hist -241 DUV Flood Expose →Spectra Images
- 11:44, 12 March 2014 diff hist +242 Suss Aligners (SUSS MJB-3) →Detailed Specifications
- 14:12, 11 March 2014 diff hist 0 ICP-PECVD (Unaxis VLR) →Detailed Specifications
- 13:51, 11 March 2014 diff hist -58 E-Beam Evaporation Recipes →Materials Table (E-Beam #3)
- 13:46, 11 March 2014 diff hist 0 Stepper 3 (ASML DUV)
- 13:42, 11 March 2014 diff hist 0 Stepper 2 (AutoStep 200) →Detailed Specifications
- 13:41, 11 March 2014 diff hist +1 Stepper 2 (AutoStep 200) →About
- 10:45, 30 January 2014 diff hist +57 Vapor HF Etch (uETCH)
- 10:43, 30 January 2014 diff hist +1,547 N HF Vapor Etch Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub..."
- 11:34, 28 January 2014 diff hist +129 Lithography Recipes →Nanoimprinting
- 11:33, 28 January 2014 diff hist 0 N File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx current
- 10:59, 28 January 2014 diff hist +68 Lithography Recipes →Chemical Datasheets
- 10:58, 28 January 2014 diff hist 0 N File:OrmoPrime-NIL-Adhesion-RevA.pdf current
- 10:57, 28 January 2014 diff hist +49 Lithography Recipes →Chemical Datasheets
- 10:56, 28 January 2014 diff hist 0 N File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf current
- 10:13, 28 January 2014 diff hist +24 Lithography Recipes →Chemical Datasheets
- 10:12, 28 January 2014 diff hist 0 N File:Mr-UVCur21.pdf current
- 10:11, 28 January 2014 diff hist +36 Lithography Recipes →Chemical Datasheets
- 11:10, 27 January 2014 diff hist +7 Lithography Recipes →Low-K Dielectric
- 11:01, 27 January 2014 diff hist +63 Lithography Recipes →Low-K Dielectric
- 10:59, 27 January 2014 diff hist 0 N File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx current
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:42, 24 October 2013 diff hist -238 ICP Etching Recipes →Sapphire Etch (Panasonic 1)
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:38, 24 October 2013 diff hist 0 N File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf current
- 16:38, 24 October 2013 diff hist +130 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 16:36, 24 October 2013 diff hist +49 Dry Etching Recipes
- 15:25, 24 October 2013 diff hist 0 N File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf current
- 15:25, 24 October 2013 diff hist +168 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:23, 24 October 2013 diff hist +54 Dry Etching Recipes
- 13:40, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf current
- 13:40, 24 October 2013 diff hist +151 ICP Etching Recipes →GaAs-AlGaAs Etch (Panasonic 1)
- 11:34, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf current
- 11:34, 24 October 2013 diff hist +149 ICP Etching Recipes →AlGaAs Etch (Panasonic 1)
- 10:14, 24 October 2013 diff hist 0 N File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf current
- 10:13, 24 October 2013 diff hist +140 ICP Etching Recipes →GaN Etch (Panasonic 1)