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- 15:41, 4 February 2024 diff hist +93 MLA150 - Design Guidelines →Limitations & Workarounds: added screenshot of "Set Zero" button current Tag: Visual edit
- 15:40, 4 February 2024 diff hist +43 N File:MLA Set Zero button IMG 2352.jpg current
- 22:06, 2 February 2024 diff hist +16 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated link Tag: Visual edit
- 22:05, 2 February 2024 diff hist +2,449 MLA150 - Design Guidelines →Limitations: X-Y and Rotational alignment updates Tag: Visual edit
- 21:41, 2 February 2024 diff hist -160 m MLA150 - Troubleshooting minor additons/grammar Tag: Visual edit
- 09:08, 31 January 2024 diff hist +246 ICP Etching Recipes →Through Silicon Via (TSV) etch (DSEiii): what to do if see black grass Tag: Visual edit
- 09:06, 31 January 2024 diff hist +135 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned Al2O3 selectivity Tag: Visual edit
- 09:03, 31 January 2024 diff hist +393 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): mentioned using hardmask for patterning to edge, SiO2 selectivity mentioned Tag: Visual edit
- 16:24, 30 January 2024 diff hist +814 Thermal Processing Recipes →Tystar 8300: added wafer cleaning current Tag: Visual edit
- 09:15, 23 January 2024 diff hist +10 Template:Announcements →Gowning Refresh: added date to title
- 09:15, 23 January 2024 diff hist -641 Template:Announcements deleted gca maint
- 13:58, 22 January 2024 diff hist -203 Stepper 3 (ASML DUV) →Design Tools: moved JobCreator into software section, highlighted Mask Making page Tag: Visual edit
- 11:08, 17 January 2024 diff hist +235 Template:Announcements Oxford cobra sfotware bugs
- 11:07, 17 January 2024 diff hist -368 Template:Announcements EB1 UP, delete ASML UP
- 18:41, 12 January 2024 diff hist +377 Stepper 3 (ASML DUV) →Online Video Trainings: updated panopto login instructions Tag: Visual edit
- 18:39, 12 January 2024 diff hist +39 N File:2024-01 ASML Running Job Thumbnail.png current
- 18:35, 12 January 2024 diff hist +28 N File:2024-01 PanOpto - UCSB Login.png current
- 18:33, 12 January 2024 diff hist +33 N File:2024-01 PanOpto - Canvas dropdown.png current
- 18:00, 11 January 2024 diff hist +224 Template:Announcements ASML PM Jan 29
- 14:47, 11 January 2024 diff hist +255 Stepper 2 (AutoStep 200) →Operating Procedures: added sub sections Tag: Visual edit
- 14:38, 11 January 2024 diff hist +80 N Stepper 2 (Autostep 200) - Job Programming John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current Tag: New redirect
- 14:38, 11 January 2024 diff hist 0 m Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences John d moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences: more descriptive title current
- 08:51, 11 January 2024 diff hist +16 Template:Announcements →DUV Flood: UP with new procedure
- 08:49, 11 January 2024 diff hist +289 Template:Announcements EBeam1 down/update
- 08:28, 11 January 2024 diff hist +257 Template:Announcements asml Up, gown refresh
- 21:55, 9 January 2024 diff hist +1,038 Services added links to Supplies to Bring FAQ page, and reworded heading titles for better TOC display, current Tag: Visual edit
- 18:19, 4 January 2024 diff hist -4 Template:Announcements →Job Opening: Process Engineer
- 18:19, 4 January 2024 diff hist +7 Template:Announcements →DUV Flood: UP with new procedure
- 18:18, 4 January 2024 diff hist 0 Template:Announcements →DUV Flood: UP with new procedure
- 18:17, 4 January 2024 diff hist +1 Template:Announcements
- 18:17, 4 January 2024 diff hist 0 Template:Announcements
- 18:16, 4 January 2024 diff hist +27 N User:John d Demis D. John redirect to Demis_D._John current Tags: New redirect Visual edit: Switched
- 17:51, 4 January 2024 diff hist +185 Template:Announcements asml update
- 17:41, 4 January 2024 diff hist -537 Template:Announcements updated DUV flood is UP, deleted old lab shutdown and PECVD maint messages
- 17:21, 4 January 2024 diff hist +224 Tool List Title --> Measurement & Characterization & description text Tag: Visual edit
- 17:15, 4 January 2024 diff hist -19 MediaWiki:Sidebar changed Inspection/Test/Char --> Metrology & Test current
- 14:44, 4 January 2024 diff hist +155 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): link to CAD files section, removed Vernier link (since its on CAD files section) current Tag: Visual edit
- 14:40, 4 January 2024 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds current
- 11:56, 4 January 2024 diff hist +15 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): placeholder for reticle handbook Tag: Visual edit
- 11:43, 4 January 2024 diff hist +457 Surface Analysis (KLA/Tencor Surfscan) →Documentation: added info, and inof on LPC wafers Tag: Visual edit
- 11:36, 4 January 2024 diff hist +133 N Surfscan Errors and Workarounds added keuyboard workaround current Tag: Visual edit
- 11:34, 4 January 2024 diff hist +95 Surface Analysis (KLA/Tencor Surfscan) reorg, remove old SOP, replaced with new PDF SOP's for each wafer size Tag: Visual edit
- 11:24, 22 December 2023 diff hist +17 Stepper 3 (ASML DUV) →Process Information: made wafer bow it's own section Tag: Visual edit
- 15:09, 6 December 2023 diff hist +694 Laser Etch Monitoring →Limitations: added laser spot wize current Tag: Visual edit
- 17:57, 5 December 2023 diff hist +64 Dry Etching Recipes FL-ICP SiN etch linked Tag: Visual edit
- 17:56, 5 December 2023 diff hist +462 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added Bill's SiN etch recipe Tag: Visual edit
- 10:28, 1 December 2023 diff hist +35 m Stepper 3 (ASML DUV) →Process Information: DO NOT RUN wafer with too high bow Tag: Visual edit
- 12:12, 30 November 2023 diff hist +669 N YES Recipe Screenshots: STD-O2 screenshots of "STD-O2-180C-3KW-30sec" and "STD-O2-100C-3KW-15min" current Tag: Visual edit
- 12:11, 30 November 2023 diff hist +40 N File:STD-O2-180C-3KW-30sec - steps.jpg current
- 12:10, 30 November 2023 diff hist +41 N File:STD-O2-180C-3KW-30sec - header.jpg current
- 12:09, 30 November 2023 diff hist +41 N File:STD-O2-100C-3KW-15min - steps.jpg current
- 12:09, 30 November 2023 diff hist +42 N File:STD-O2-100C-3KW-15min - header.jpg current
- 12:08, 30 November 2023 diff hist +725 N YES Recipe Screenshots: STD-N2-O2 screenshots of "STD-N2-O2-100C-0.7KW-15sec" and "STD-N2-O2-180C-3KW-1min" current Tag: Visual edit
- 12:07, 30 November 2023 diff hist +48 N File:STD-N2-O2-100C-0.7KW-15sec - steps.jpg current
- 12:06, 30 November 2023 diff hist +49 N File:STD-N2-O2-100C-0.7KW-15sec - header.jpg current
- 12:05, 30 November 2023 diff hist +56 N File:STD-N2-O2-180C-3KW-1min - steps.jpg current
- 12:03, 30 November 2023 diff hist +59 N File:STD-N2-O2-180C-3KW-1min - header.jpg current
- 12:02, 30 November 2023 diff hist +158 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): links to recipe screenshots for both N2-O2 & O2 Tag: Visual edit
- 17:53, 25 November 2023 diff hist 0 Usage Data and Statistics →Numbers of Annual Users: typo year current Tag: Visual edit
- 13:09, 22 November 2023 diff hist +73 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added "FL-ICP" for SEO current Tag: Visual edit
- 12:31, 22 November 2023 diff hist +237 Plasma Clean (YES EcoClean) →Etch Method: mentioned back of wafer exposure to gas current Tag: Visual edit
- 16:02, 21 November 2023 diff hist +221 MLA150 - Design Guidelines →Limitations: updated failed rotation text Tag: Visual edit
- 13:38, 21 November 2023 diff hist +704 Plasma Clean (YES EcoClean) images of carrier wafers Tag: Visual edit
- 13:36, 21 November 2023 diff hist +88 N File:YES Pocket Carrier Wafers - 50mm pocket.jpg current
- 13:35, 21 November 2023 diff hist +76 N File:YES Pocket Carrier Wafers - 90mm pocket.jpg current
- 08:59, 21 November 2023 diff hist +288 Frequently Asked Questions →What Supplies do I need to bring to the lab?: updates current Tag: Visual edit
- 22:09, 16 November 2023 diff hist +1 Template:Announcements moved PECVD2 annc up
- 22:06, 16 November 2023 diff hist 0 m Template:News current
- 22:02, 16 November 2023 diff hist 0 Template:News →NanoFab Featured in Regional Tech Videos: images fix with underscores (for RSS feed)
- 17:59, 16 November 2023 diff hist -7 m Template:Announcements →Year End Shutdown
- 17:59, 16 November 2023 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx current
- 16:46, 16 November 2023 diff hist +65 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added Ru oxidation in O2-only Tag: Visual edit
- 16:44, 16 November 2023 diff hist +125 Plasma Clean (YES EcoClean) →Recipes: preview of recipes page. Tag: Visual edit
- 10:26, 9 November 2023 diff hist +56 Template:News added videos signature for RSS feed
- 12:22, 8 November 2023 diff hist 0 File:Techtopia Vid - Thumbnail PlayButton.jpg John d uploaded a new version of File:Techtopia Vid - Thumbnail PlayButton.jpg current
- 12:21, 8 November 2023 diff hist 0 File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg John d uploaded a new version of File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg current
- 12:11, 8 November 2023 diff hist +355 Template:News →NanoFab Featured in Regional Tech Videos: table with thumbnail links to videos
- 11:33, 8 November 2023 diff hist +52 N File:NanoFab COE Engineering Vid - thumbnail 2 crop.jpg
- 11:32, 8 November 2023 diff hist +42 N File:Techtopia Vid - Thumbnail PlayButton.jpg
- 11:31, 8 November 2023 diff hist +2 m Template:News →NanoFab Featured in Regional Tech Videos
- 11:30, 8 November 2023 diff hist +442 Template:News NanoFab video promos
- 14:59, 7 November 2023 diff hist -13 Template:News →NanoFab staff awarded Goleta's Innovator of the Year 2023
- 14:58, 7 November 2023 diff hist +636 Template:News Demis innovator of the year
- 14:52, 7 November 2023 diff hist -157 Template:Announcements removed qhitespac and internal comments (since vraj's script was pushing them to the bottom, instead of top where they used to be for human-readable instructions))
- 14:49, 7 November 2023 diff hist -636 Template:Announcements lab card/iris access, Symmetry app and updates
- 14:41, 7 November 2023 diff hist +1,195 Main Page BIG update - pasted from Homepage_Draft1
- 18:25, 6 November 2023 diff hist +363 Frequently Asked Questions →How do I get my files from the NanoFab computers?: added “when will my FYP a folder show up?” Tag: Visual edit
- 20:55, 5 November 2023 diff hist -2 Wet Etching Recipes set "wet ethcing references" to H1 level, instead of being a sub-set of the Wet Etchign Table Tag: Visual edit
- 15:47, 2 November 2023 diff hist +65 m MLA150 - Troubleshooting →Stitching Tag: Visual edit
- 15:47, 2 November 2023 diff hist +321 MLA150 - Troubleshooting →Stitching: mention fix by overexposure + CD Bias Tag: Visual edit
- 15:28, 2 November 2023 diff hist +1 m MLA150 - Troubleshooting →Stitching Tag: Visual edit
- 15:28, 2 November 2023 diff hist +234 MLA150 - Troubleshooting →Stitching: added SEM of 400nm line/space with 50nm stitching bump Tag: Visual edit
- 15:26, 2 November 2023 diff hist +59 N File:MLA150 - 160D0F15 stitching notch - 01.jpg current
- 15:19, 2 November 2023 diff hist +772 MLA150 - Troubleshooting stitching secviton on y-oriented ridges Tag: Visual edit
- 15:14, 2 November 2023 diff hist +139 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: descriptions of the links Tag: Visual edit
- 13:59, 2 November 2023 diff hist +127 Homepage Draft1 moved "other links" into white-bg single-cells current
- 17:15, 1 November 2023 diff hist +58 Aidan Hopkins →Current Work: fixed broken tool links current Tag: Visual edit
- 17:09, 1 November 2023 diff hist +68 Maskless Aligner (Heidelberg MLA150) →Operating Procedures: mention user manuals Tag: Visual edit
- 17:02, 1 November 2023 diff hist -172 Microscopes →Microscope #1: Olympus BHMJL (Room 1111): deleted link to Olympus user manual (file deleted) current Tag: Visual edit
- 12:19, 1 November 2023 diff hist +222 UCSB Nanofab Wiki:About added NanoFab-it email link & website links. current