User contributions
Jump to navigation
Jump to search
- 08:49, 11 January 2024 diff hist +289 Template:Announcements EBeam1 down/update
- 08:28, 11 January 2024 diff hist +257 Template:Announcements asml Up, gown refresh
- 21:55, 9 January 2024 diff hist +1,038 Services added links to Supplies to Bring FAQ page, and reworded heading titles for better TOC display, current Tag: Visual edit
- 18:19, 4 January 2024 diff hist -4 Template:Announcements →Job Opening: Process Engineer
- 18:19, 4 January 2024 diff hist +7 Template:Announcements →DUV Flood: UP with new procedure
- 18:18, 4 January 2024 diff hist 0 Template:Announcements →DUV Flood: UP with new procedure
- 18:17, 4 January 2024 diff hist +1 Template:Announcements
- 18:17, 4 January 2024 diff hist 0 Template:Announcements
- 18:16, 4 January 2024 diff hist +27 N User:John d Demis D. John redirect to Demis_D._John current Tags: New redirect Visual edit: Switched
- 17:51, 4 January 2024 diff hist +185 Template:Announcements asml update
- 17:41, 4 January 2024 diff hist -537 Template:Announcements updated DUV flood is UP, deleted old lab shutdown and PECVD maint messages
- 17:21, 4 January 2024 diff hist +224 Tool List Title --> Measurement & Characterization & description text Tag: Visual edit
- 17:15, 4 January 2024 diff hist -19 MediaWiki:Sidebar changed Inspection/Test/Char --> Metrology & Test current
- 14:44, 4 January 2024 diff hist +155 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): link to CAD files section, removed Vernier link (since its on CAD files section) current Tag: Visual edit
- 14:40, 4 January 2024 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds current
- 11:56, 4 January 2024 diff hist +15 Autostep 200 Mask Making Guidance →Alignment Marks (Global, Local/DFAS): placeholder for reticle handbook Tag: Visual edit
- 11:43, 4 January 2024 diff hist +457 Surface Analysis (KLA/Tencor Surfscan) →Documentation: added info, and inof on LPC wafers Tag: Visual edit
- 11:36, 4 January 2024 diff hist +133 N Surfscan Errors and Workarounds added keuyboard workaround current Tag: Visual edit
- 11:34, 4 January 2024 diff hist +95 Surface Analysis (KLA/Tencor Surfscan) reorg, remove old SOP, replaced with new PDF SOP's for each wafer size Tag: Visual edit
- 11:24, 22 December 2023 diff hist +17 Stepper 3 (ASML DUV) →Process Information: made wafer bow it's own section Tag: Visual edit
- 15:09, 6 December 2023 diff hist +694 Laser Etch Monitoring →Limitations: added laser spot wize current Tag: Visual edit
- 17:57, 5 December 2023 diff hist +64 Dry Etching Recipes FL-ICP SiN etch linked Tag: Visual edit
- 17:56, 5 December 2023 diff hist +462 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added Bill's SiN etch recipe Tag: Visual edit
- 10:28, 1 December 2023 diff hist +35 m Stepper 3 (ASML DUV) →Process Information: DO NOT RUN wafer with too high bow Tag: Visual edit
- 12:12, 30 November 2023 diff hist +669 N YES Recipe Screenshots: STD-O2 screenshots of "STD-O2-180C-3KW-30sec" and "STD-O2-100C-3KW-15min" current Tag: Visual edit
- 12:11, 30 November 2023 diff hist +40 N File:STD-O2-180C-3KW-30sec - steps.jpg current
- 12:10, 30 November 2023 diff hist +41 N File:STD-O2-180C-3KW-30sec - header.jpg current
- 12:09, 30 November 2023 diff hist +41 N File:STD-O2-100C-3KW-15min - steps.jpg current
- 12:09, 30 November 2023 diff hist +42 N File:STD-O2-100C-3KW-15min - header.jpg current
- 12:08, 30 November 2023 diff hist +725 N YES Recipe Screenshots: STD-N2-O2 screenshots of "STD-N2-O2-100C-0.7KW-15sec" and "STD-N2-O2-180C-3KW-1min" current Tag: Visual edit
- 12:07, 30 November 2023 diff hist +48 N File:STD-N2-O2-100C-0.7KW-15sec - steps.jpg current
- 12:06, 30 November 2023 diff hist +49 N File:STD-N2-O2-100C-0.7KW-15sec - header.jpg current
- 12:05, 30 November 2023 diff hist +56 N File:STD-N2-O2-180C-3KW-1min - steps.jpg current
- 12:03, 30 November 2023 diff hist +59 N File:STD-N2-O2-180C-3KW-1min - header.jpg current
- 12:02, 30 November 2023 diff hist +158 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): links to recipe screenshots for both N2-O2 & O2 Tag: Visual edit
- 17:53, 25 November 2023 diff hist 0 Usage Data and Statistics →Numbers of Annual Users: typo year current Tag: Visual edit
- 13:09, 22 November 2023 diff hist +73 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added "FL-ICP" for SEO current Tag: Visual edit
- 12:31, 22 November 2023 diff hist +237 Plasma Clean (YES EcoClean) →Etch Method: mentioned back of wafer exposure to gas current Tag: Visual edit
- 16:02, 21 November 2023 diff hist +221 MLA150 - Design Guidelines →Limitations: updated failed rotation text Tag: Visual edit
- 13:38, 21 November 2023 diff hist +704 Plasma Clean (YES EcoClean) images of carrier wafers Tag: Visual edit
- 13:36, 21 November 2023 diff hist +88 N File:YES Pocket Carrier Wafers - 50mm pocket.jpg current
- 13:35, 21 November 2023 diff hist +76 N File:YES Pocket Carrier Wafers - 90mm pocket.jpg current
- 08:59, 21 November 2023 diff hist +288 Frequently Asked Questions →What Supplies do I need to bring to the lab?: updates current Tag: Visual edit
- 22:09, 16 November 2023 diff hist +1 Template:Announcements moved PECVD2 annc up
- 22:06, 16 November 2023 diff hist 0 m Template:News current
- 22:02, 16 November 2023 diff hist 0 Template:News →NanoFab Featured in Regional Tech Videos: images fix with underscores (for RSS feed)
- 17:59, 16 November 2023 diff hist -7 m Template:Announcements →Year End Shutdown
- 17:59, 16 November 2023 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx current
- 16:46, 16 November 2023 diff hist +65 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added Ru oxidation in O2-only Tag: Visual edit
- 16:44, 16 November 2023 diff hist +125 Plasma Clean (YES EcoClean) →Recipes: preview of recipes page. Tag: Visual edit