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- 15:55, 8 June 2022 diff hist +412 Vacuum Deposition Recipes link to process control data Tag: Visual edit
- 15:53, 8 June 2022 diff hist +33 Process Group - Process Control Data updated heading titles to include "Process COntrol Data" for linking purposes. Tag: Visual edit
- 10:29, 6 June 2022 diff hist +5 m Deep UV Optical Microscope (Olympus) →Other Info Tag: Visual edit
- 10:28, 6 June 2022 diff hist +118 Filmetrics F40-UV Microscope-Mounted link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +118 Digital Microscope (Olympus DSX1000) link to all scopes Tag: Visual edit
- 10:27, 6 June 2022 diff hist +207 Deep UV Optical Microscope (Olympus) note that DUV camera is non-funcitonal Tag: Visual edit
- 10:26, 6 June 2022 diff hist +101 Laser Scanning Confocal M-scope (Olympus LEXT) link to all scopes Tag: Visual edit
- 07:52, 6 June 2022 diff hist +184 Template:Announcements ASML down - TCU
- 23:10, 4 June 2022 diff hist -141 Template:Announcements deleted lab open, updated Unaxis SiD4 delivery.
- 12:13, 1 June 2022 diff hist +203 Template:Announcements plating bench down 6/7th
- 11:03, 1 June 2022 diff hist +34 m Template:Announcements
- 10:13, 1 June 2022 diff hist -272 Template:Announcements CR open
- 08:58, 1 June 2022 diff hist +48 Template:Announcements HVAC closure update
- 08:11, 27 May 2022 diff hist +50 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added author credits Tag: Visual edit
- 21:24, 26 May 2022 diff hist +258 MLA Recipes →Positive Resist (MLA150) current Tag: Visual edit
- 21:22, 26 May 2022 diff hist +25 MLA Recipes →Positive Resist (MLA150) Tag: Visual edit
- 15:54, 26 May 2022 diff hist +210 COVID-19 User Policies masks mandatory May 27th Tag: Visual edit: Switched
- 15:50, 26 May 2022 diff hist -1,097 Template:Announcements deleted: Old COVID policy (March), AFM UP, F50 Up
- 15:48, 26 May 2022 diff hist +419 Template:Announcements masks mandatory May 27th
- 11:57, 26 May 2022 diff hist +84 Lab Rules →Wet Benches: Added heading for "Glassware Confiscation Policy" (2.9.2.1) Tag: Visual edit
- 09:28, 25 May 2022 diff hist -1 m Template:Announcements
- 09:28, 25 May 2022 diff hist +159 Template:Announcements Unaxis Dep down SiD4
- 12:14, 24 May 2022 diff hist +333 Template:Announcements CR closure June 1, 6-9am
- 15:43, 20 May 2022 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4 set header row Tag: Visual edit
- 10:46, 20 May 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Detailed Specifications Tag: Visual edit
- 21:12, 19 May 2022 diff hist -193 Template:Announcements AFM up, deleted F10, LEXT
- 20:58, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:56, 19 May 2022 diff hist +43 Oxford ICP Etcher - Process Control Data updated SEM links to state "45°" or "XS" Tag: Visual edit
- 20:43, 19 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data Tag: Visual edit
- 20:42, 19 May 2022 diff hist +125 Oxford ICP Etcher - Process Control Data uploaded SEMs Tag: Visual edit
- 20:42, 19 May 2022 diff hist 0 N File:Oxford InP 60C XS05.jpg current
- 20:41, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG05.jpg current
- 20:39, 19 May 2022 diff hist 0 N File:Oxford InP 60C 45DEG02.jpg current
- 09:27, 19 May 2022 diff hist +153 Oxford ICP Etcher - Process Control Data added etch cal, SEMs TBA Tag: Visual edit
- 09:15, 19 May 2022 diff hist +156 Oxford ICP Etcher - Process Control Data added "sample prep" section - still needs solution detials added Tag: Visual edit
- 08:43, 19 May 2022 diff hist +296 Oxford ICP Etcher - Process Control Data Added dummy InP and seasoning steps Tag: Visual edit
- 17:16, 18 May 2022 diff hist -111 Probe Station & Curve Tracer deleted old DMM - removed form setup (didn't work) Tag: Visual edit
- 07:30, 13 May 2022 diff hist +100 Optical Film Thickness (Nanometric) note to use FIlmtrics F40, and locaiton=Removed From Lab current Tag: Visual edit
- 07:28, 13 May 2022 diff hist -41 Tool List →Thickness + Optical Constants: Deleted Nanometrics (removed from lab) Tag: Visual edit
- 07:27, 13 May 2022 diff hist +148 Optical Film Thickness (Filmetrics) tool decomissioned notice,locaiton="removed from lab" current Tag: Visual edit
- 07:26, 13 May 2022 diff hist -81 Tool List →Thin-Film/Material Analysis: deleted FIlmetrics F20 Tag: Visual edit
- 11:39, 11 May 2022 diff hist +101 Services link to hourly rates Tag: Visual edit
- 11:33, 11 May 2022 diff hist -34 m Template:Announcements →AFM: DOWN: fix link
- 11:33, 11 May 2022 diff hist +86 m Template:Announcements →AFM: DOWN: link to tool
- 11:32, 11 May 2022 diff hist +124 Template:Announcements AFM down
- 17:32, 10 May 2022 diff hist +912 Process Group - Process Control Data →Etching: links to all etching process control pages Tag: Visual edit
- 17:27, 10 May 2022 diff hist -27 m ICP Etching Recipes Renaming Process Control Data Tag: Visual edit
- 17:25, 10 May 2022 diff hist -148 m ICP Etching Recipes renamed "historical data" to "process control" data Tag: Visual edit
- 17:18, 10 May 2022 diff hist -6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit
- 17:18, 10 May 2022 diff hist -2 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): changed style to Page Title Tag: Visual edit
- 17:17, 10 May 2022 diff hist +3,304 N Process Group - Process Control Data Links to all PECVD and IBD data pages Tag: Visual edit
- 17:16, 10 May 2022 diff hist +71 m Sputtering Recipes minor updates Tag: Visual edit
- 17:15, 10 May 2022 diff hist +12 Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: mentioned ITO not installed, minor formatting Tag: Visual edit
- 17:06, 10 May 2022 diff hist +30 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit
- 17:01, 10 May 2022 diff hist -23 PECVD Recipes renamed Process Control plots for clarity Tag: Visual edit
- 16:35, 10 May 2022 diff hist +135 Nanofab Staff Internal Pages →Process Group: link to Process Control Data Tag: Visual edit
- 07:24, 10 May 2022 diff hist -108 Template:Announcements F50 up
- 12:17, 5 May 2022 diff hist +24 Test Data of etching SiO2 with CHF3/CF4 updated temperature reduction comment Tag: Visual edit
- 14:32, 4 May 2022 diff hist +3 PECVD Recipes →Si3N4 [ICP-PECVD]: corrected "current process data" links, previously pointed to "HDSiO" tab Tag: Visual edit
- 08:44, 4 May 2022 diff hist +354 Template:Announcements F50 down
- 08:41, 4 May 2022 diff hist -96 Template:Announcements →F10-RT Down: fixed links
- 08:40, 4 May 2022 diff hist +724 Template:Announcements F10-RT down
- 08:17, 4 May 2022 diff hist +2 Oxford ICP Etcher - Process Control Data modified comment on "brown gunk" observation. Tag: Visual edit
- 08:16, 4 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data →Dependence on Sample Size: set table row to header style Tag: Visual edit
- 08:13, 4 May 2022 diff hist -113 Oxford ICP Etcher - Process Control Data Add row explaining change in mask pattern Tag: Visual edit
- 16:21, 3 May 2022 diff hist -419 Template:Announcements deleted lasb closure
- 16:13, 2 May 2022 diff hist +291 S-Cubed Flexi - Operating Procedure link to DSK bake vs dev rate, recipe minor updates Tag: Visual edit
- 16:05, 2 May 2022 diff hist +2,188 S-Cubed Flexi - Operating Procedure inital procedure, and initial recipes Tag: Visual edit
- 11:14, 29 April 2022 diff hist +161 Oxford ICP Etcher - Process Control Data bolded the title row Tag: Visual edit
- 14:27, 28 April 2022 diff hist +45 Unaxis VLR Etch - Process Control Data comments on undercut profile from 3/29/22 Tag: Visual edit
- 17:48, 27 April 2022 diff hist +355 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer mentioned switching Imaging PR Tag: Visual edit
- 17:45, 27 April 2022 diff hist +23 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:39, 27 April 2022 diff hist +10 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:35, 27 April 2022 diff hist +4,054 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer wrote initial process Tag: Visual edit
- 16:34, 27 April 2022 diff hist +891 N Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added Tips, copied from DUV Liftoff page Tag: Visual edit
- 16:32, 27 April 2022 diff hist +142 Lift-Off with DUV Imaging + PMGI Underlayer corrected typo current Tag: Visual edit
- 16:29, 27 April 2022 diff hist -23 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: fixed link to liftoff tutorial Tag: Visual edit
- 16:25, 27 April 2022 diff hist +633 Lithography Recipes →Lift-Off Recipes: link to I-Line Liftoff w/ LOL underlayer Tag: Visual edit
- 18:49, 26 April 2022 diff hist +72 Template:Announcements updated lab closure msg
- 15:51, 26 April 2022 diff hist +200 Unaxis VLR Etch - Process Control Data →Data - InP Ridge Etch (Unaxis VLR): updated chamber conditioning Tag: Visual edit
- 12:03, 25 April 2022 diff hist +339 Microscopes added AmScope camera model #, minor changes to liknj to Amscope section Tag: Visual edit
- 19:02, 20 April 2022 diff hist +49 Tool List →Dry Etch: added Raith Velion to Dry Etch > Ion Milling section Tag: Visual edit
- 23:31, 19 April 2022 diff hist +200 Dry Etching Recipes added Nb, Os rows, "A" for Pan1/2 Tag: Visual edit
- 23:14, 19 April 2022 diff hist +174 Thermal Processing Recipes →Bonding with Intermediate layer: link to Logitech recipes page Tag: Visual edit
- 11:54, 19 April 2022 diff hist -36 m Template:Announcements →LEXT Confocal: DOWN: fix link
- 11:53, 19 April 2022 diff hist +154 Template:Announcements →LEXT Confocal: DOWN: linked to DX-1000
- 11:51, 19 April 2022 diff hist +117 Template:Announcements updated floor cleaning closure
- 13:09, 15 April 2022 diff hist -799 Unaxis VLR Etch - Process Control Data added WorkInProgress, example table rows Tag: Visual edit
- 13:08, 15 April 2022 diff hist +1,403 N Unaxis VLR Etch - Process Control Data pasted table from Oxford ICP Tag: Visual edit: Switched
- 13:06, 15 April 2022 diff hist +9 ICP Etching Recipes →ICP-Etch (Unaxis VLR): link to Process Control Data Tag: Visual edit
- 13:02, 15 April 2022 diff hist +233 ICP Etching Recipes added Process Control Data sections for each tool Tag: Visual edit
- 11:56, 15 April 2022 diff hist +72 Process Group - Remote Fabrication Jobs fixed links to Equipment work Tag: Visual edit
- 20:51, 13 April 2022 diff hist -228 Template:Announcements Deleted DUVscope
- 20:49, 13 April 2022 diff hist +229 Template:Announcements Friday lab closure
- 17:45, 12 April 2022 diff hist +225 Dry Etching Recipes Oxford links to GaN+GaAs recipes Tag: Visual edit
- 17:43, 12 April 2022 diff hist +5 Dry Etching Recipes Oxford GaN link Tag: Visual edit
- 17:43, 12 April 2022 diff hist +1 m ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra) Tag: Visual edit
- 17:40, 12 April 2022 diff hist +275 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to GaN etch recipes Tag: Visual edit
- 13:12, 12 April 2022 diff hist -632 Template:Announcements deleted MJB, EBL service
- 12:50, 12 April 2022 diff hist +3 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher