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- 13:12, 11 February 2022 diff hist -37 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): consolidated FL-ICP Prcoess Control data Tag: Visual edit
- 13:11, 11 February 2022 diff hist +493 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher pasted Ning's 2nd data table, hilighted recipe changes and comment about data being "in progress"
- 12:28, 11 February 2022 diff hist +1 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: moved historical data to top Tag: Visual edit
- 12:46, 4 February 2022 diff hist +260 Template:Announcements ASML maintenance
- 15:24, 1 February 2022 diff hist +3 m Autostep 200 Mask Making Guidance →Mask Layout Tag: Visual edit
- 15:23, 1 February 2022 diff hist +119 m Autostep 200 Mask Making Guidance →Photomask Ordering Info Tag: Visual edit
- 10:00, 1 February 2022 diff hist +327 Autostep 200 Mask Making Guidance →Photomask Ordering Info: added info Tag: Visual edit
- 09:39, 1 February 2022 diff hist +428 Autostep 200 Mask Making Guidance →Alignment Marks: adde Vernier CAD file Tag: Visual edit
- 09:37, 1 February 2022 diff hist +110 N File:Vernier Template.gds Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.
- 09:03, 1 February 2022 diff hist -14 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 17:30, 31 January 2022 diff hist +185 Autostep 200 Mask Making Guidance →Mask Layout: 2nd attempt to describe Shutter positioning Tag: Visual edit
- 17:19, 31 January 2022 diff hist +352 Autostep 200 Mask Making Guidance →Mask Layout: 1st attempt at describing shutter blades Tag: Visual edit
- 17:00, 31 January 2022 diff hist +172 Autostep 200 Mask Making Guidance →Mask Layout / Alignment Marks: split into Mask layout separate section Tag: Visual edit
- 16:55, 31 January 2022 diff hist +30 Autostep 200 Troubleshooting and Recovery →What to do if you cannot undo the problem or need some help: link to each contact, update to use "Report tool issue' button on SUM current Tag: Visual edit
- 17:09, 28 January 2022 diff hist +358 m Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher) Tag: Visual edit
- 17:06, 28 January 2022 diff hist +805 Oxford ICP Etcher - Process Control Data updated tables, split into "sample size dpeendence" table Tag: Visual edit
- 21:43, 27 January 2022 diff hist +356 MLA150 - Troubleshooting →Solutions for small substrates: added THomas Messner's solution: disable Overview Camera before starting exposure Tag: Visual edit
- 11:42, 24 January 2022 diff hist -26 Packaging Recipes →Blade Exposure Calculation: image size increase Tag: Visual edit: Switched
- 11:13, 24 January 2022 diff hist +40 m Packaging Recipes →Anatomy of a Blade Tag: Visual edit
- 10:55, 21 January 2022 diff hist +346 Atomic Layer Deposition Recipes →Temperature: mentioned "thermal" and slower rate. Tag: Visual edit
- 10:53, 21 January 2022 diff hist +661 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added terms "Plasma/Thermal/Ozone". Also added Chamber 1 Al2O3 Tag: Visual edit
- 23:12, 13 January 2022 diff hist +133 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): GaN ALE section started Tag: Visual edit
- 23:11, 13 January 2022 diff hist +238 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): NOTE: Rates in these 2021-09 characterizations are lower than current due to a software timing bug, fixed in 2022-01 Tag: Visual edit
- 23:09, 13 January 2022 diff hist +174 Oxford ICP Etcher - Process Control Data described basic 'fab process Tag: Visual edit
- 23:07, 13 January 2022 diff hist +55 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher) Tag: Visual edit
- 23:05, 13 January 2022 diff hist -17 m Oxford ICP Etcher - Process Control Data removed WIP Tag: Visual edit
- 23:03, 13 January 2022 diff hist +56 Oxford ICP Etcher - Process Control Data added SEM images for Jan 11th-12th cals Tag: Visual edit
- 23:03, 13 January 2022 diff hist +36 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf Oxford ICP Etch Cals03 current
- 22:55, 13 January 2022 diff hist +33 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf Oxford ICP Cal SEMs current
- 22:51, 13 January 2022 diff hist +161 Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher): updated SEM 1 Tag: Visual edit
- 22:51, 13 January 2022 diff hist +38 N File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf Oxford ICP Etch Cal SEMs current
- 21:43, 13 January 2022 diff hist +84 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
- 21:41, 13 January 2022 diff hist +271 MLA150 - Troubleshooting →Out Of Focus Exposures: Boris’ solutionnadded Tag: Visual edit
- 14:24, 13 January 2022 diff hist -1,009 Oxford ICP Etcher - Process Control Data in progress InP Ridge Etch Tag: Visual edit
- 14:21, 13 January 2022 diff hist +1,617 N Oxford ICP Etcher - Process Control Data pasted ICP2 data table Tag: Visual edit: Switched
- 14:21, 13 January 2022 diff hist +156 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: link to Process Control Data Tag: Visual edit
- 14:20, 13 January 2022 diff hist +3 ICP Etching Recipes →Historical Data (Oxford ICP Etcher): changed to "process control data" Tag: Visual edit
- 14:18, 13 January 2022 diff hist +208 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to Historical Data Tag: Visual edit
- 15:14, 12 January 2022 diff hist +136 Frequently Asked Questions →Cell Phone Calls: mention eduroam network Tag: Visual edit
- 15:11, 12 January 2022 diff hist +189 m Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular) Tag: Visual edit
- 15:08, 12 January 2022 diff hist +441 Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular): additional troubleshooting Tag: Visual edit
- 15:22, 11 January 2022 diff hist -42 Stepper 3 (ASML DUV) →Operating Procedures: merged Troubleshooting into Operating Procedures Tag: Visual edit
- 10:43, 11 January 2022 diff hist +675 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: method for adding focus correction to exposure Tag: Visual edit: Switched
- 08:48, 7 January 2022 diff hist +113 Video Training: Uploading to GauchoCast/Panopto (Internal) →Uploading to the Web current Tag: Visual edit: Switched
- 08:45, 7 January 2022 diff hist +13 Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 08:43, 7 January 2022 diff hist +2,328 N Video Training - Introduction (Internal) general methods - Demis current Tag: Visual edit
- 08:24, 7 January 2022 diff hist +89 Nanofab Staff Internal Pages →NanoFab IT: mentoined where to find instrucitons on Google Drive Tag: Visual edit
- 22:33, 6 January 2022 diff hist +91 Nanofab Staff Internal Pages moved olf pages to bottom Tag: Visual edit
- 22:32, 6 January 2022 diff hist +183 Nanofab Staff Internal Pages added NanoFab IT, and linked to NanoFab-it OnDema filter/page Tag: Visual edit
- 23:08, 4 January 2022 diff hist +6 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): credit Demis for the data Tag: Visual edit