User contributions
Jump to navigation
Jump to search
- 12:12, 3 June 2021 diff hist +175 Vacuum Oven (YES) added info from Brian Lingg current Tag: Visual edit
- 12:09, 3 June 2021 diff hist +114 Ovens - Overview of All Lab Ovens added YES info Tag: Visual edit
- 13:32, 2 June 2021 diff hist +25 m Stepper 3 (ASML DUV) added Model field in Tool templ.
- 13:24, 2 June 2021 diff hist +35 m Vacuum Deposition Recipes BG color of "SiN- Low stress"
- 14:13, 28 May 2021 diff hist +96 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #3: Dielectrics: started historical data seciton Tag: Visual edit
- 08:34, 27 May 2021 diff hist -2 m Editing Tutorials Tag: Visual edit
- 08:34, 27 May 2021 diff hist +831 Editing Tutorials Updating a file version Tag: Visual edit
- 08:32, 27 May 2021 diff hist 0 File:UCSB-Facilities-Use-Agreement.pdf John d uploaded a new version of File:UCSB-Facilities-Use-Agreement.pdf
- 08:32, 27 May 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 08:25, 27 May 2021 diff hist +106 m Frequently Asked Questions →How do I get a login to the wiki?: link to Wiki admin contact page Tag: Visual edit
- 08:07, 27 May 2021 diff hist +19 Template:News →SiO2 etching, High-Aspect Ratio
- 08:05, 27 May 2021 diff hist +51 m Template:News added date to SiO2 etch article
- 08:01, 27 May 2021 diff hist +253 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): link to publication Tag: Visual edit
- 07:58, 27 May 2021 diff hist +36 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): link to pub Tag: Visual edit
- 07:56, 27 May 2021 diff hist +905 Template:News Added info about Bill's SiO2 etching paper
- 07:41, 27 May 2021 diff hist +536 Template:Publications link to Bill's Ru-masked SiO2 paper
- 12:35, 26 May 2021 diff hist +149 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): mention that any I-Line PR will work. Tag: Visual edit
- 13:26, 21 May 2021 diff hist +42 m Template:Announcements
- 13:25, 21 May 2021 diff hist +27 m Template:Announcements
- 13:24, 21 May 2021 diff hist -31 m Template:Announcements linked to new policies directly
- 13:22, 21 May 2021 diff hist +24 m COVID-19 User Policies summary at top of annoucnements Tag: Visual edit
- 15:57, 17 May 2021 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx
- 13:06, 17 May 2021 diff hist +155 Stepper Recipes →DUV-42P: link to FL-ICP and Technics for BARC etches Tag: Visual edit
- 13:04, 17 May 2021 diff hist +526 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added BARC and PR etches Tag: Visual edit
- 12:55, 17 May 2021 diff hist +8 m Stepper Recipes →DUV-42P-6: comments on corrected spin speed Tag: Visual edit
- 12:53, 17 May 2021 diff hist +4 Stepper Recipes →DUV-42P: aDDED "-6" to the DUV42P part number Tag: Visual edit
- 12:52, 17 May 2021 diff hist +3 Lithography Recipes →Chemicals Stocked + Datasheets: corrected part number for DUV42P (added "-6") Tag: Visual edit
- 06:17, 17 May 2021 diff hist +8 Nanofab Staff Internal Pages →Process Group: moved lab Stocking to "Old" section Tag: Visual edit
- 06:15, 17 May 2021 diff hist +218 Process Group - Remote Fabrication Jobs link to OnDema.io NanoFab Workspace Tag: Visual edit
- 12:09, 11 May 2021 diff hist +4 Template:News →Wafer Polisher available: link to Lingg's page
- 12:08, 11 May 2021 diff hist +57 m Template:News →Wafer Polisher added to tool list: link to polisher wiki page
- 11:38, 11 May 2021 diff hist +34 Tool List →Wet Processing: link to Mechanical_Polisher_(Allied) Tag: Visual edit
- 11:36, 11 May 2021 diff hist +96 N File:AlliedPolisher10-1110.jpg Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted current
- 11:33, 11 May 2021 diff hist +620 N Mechanical Polisher (Allied) initial Page
- 16:49, 10 May 2021 diff hist +203 Template:News Added allied polisher
- 06:56, 6 May 2021 diff hist +62 Process Group - Remote Fabrication Jobs link to Trello: UCSB Nanofab Tag: Visual edit
- 06:51, 6 May 2021 diff hist +30 m Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist +10 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist -43 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 21:34, 5 May 2021 diff hist +920 N Process Group - Remote Fabrication Jobs Trello -filter your own jobs Tag: Visual edit
- 21:33, 5 May 2021 diff hist +46 N File:Board - Search Cards - Select User.png current
- 21:30, 5 May 2021 diff hist +46 N File:Trello - Board - Search Cards.png current
- 21:27, 5 May 2021 diff hist +40 N File:Trello - Board - Show Menu.png current
- 21:22, 5 May 2021 diff hist +136 Nanofab Staff Internal Pages →Process Group: link to Remote Job Tracking Tag: Visual edit
- 09:59, 4 May 2021 diff hist +96 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: mention historical data Tag: Visual edit
- 09:56, 4 May 2021 diff hist +118 ICP Etch 1 (Panasonic E646V) →Recipes: mention historical data Tag: Visual edit
- 09:55, 4 May 2021 diff hist +96 ICP Etch 2 (Panasonic E626I) →Recipes: mentioned historical data Tag: Visual edit
- 06:51, 30 April 2021 diff hist -250 Template:Announcements deleted MLA
- 23:13, 28 April 2021 diff hist -1 m Main Page minor updates
- 23:10, 28 April 2021 diff hist -600 Template:FeaturedArticle current
- 23:06, 28 April 2021 diff hist +23 Editing Tutorials →Editing an Existing Page: link to how to get a login Tag: Visual edit
- 22:56, 28 April 2021 diff hist +443 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Common Warnings: updated warnings Tag: Visual edit
- 22:44, 28 April 2021 diff hist -22 Template:Announcements deleted ASML 4/26, added HIMT 4/29
- 12:54, 21 April 2021 diff hist +30 Laser Etch Monitor Simulation in Python author credits. current Tag: Visual edit
- 08:11, 20 April 2021 diff hist -765 Template:Announcements deleted Flu Season notice, shortened Weekly Testing article
- 08:07, 20 April 2021 diff hist +272 Template:Announcements asml service Apr 26th 2021
- 07:32, 20 April 2021 diff hist +390 Template:Announcements ASML May service
- 19:55, 16 April 2021 diff hist +175 Frequently Asked Questions →Authorship on Publications: note on process discusssions Tag: Visual edit
- 18:32, 16 April 2021 diff hist +364 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): Reduced Heading Levels below "Page Title" Tag: Visual edit
- 15:53, 16 April 2021 diff hist -190 Template:Announcements deleted "lab shutdown"
- 09:36, 16 April 2021 diff hist +84 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): added ER and Sel for 50W & 200W bias Tag: Visual edit
- 11:14, 12 April 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 16:13, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DSX-1000: correct model in text
- 11:35, 9 April 2021 diff hist +820 Microscopes Added Scope7: Olympus DSX1000 Tag: Visual edit
- 11:29, 9 April 2021 diff hist -2,040 Digital Microscope (Olympus DSX1000) initial updates
- 11:29, 9 April 2021 diff hist +2,040 Laser Scanning Confocal M-scope (Olympus LEXT) revert back to TonyB's April 2020 revision.
- 11:25, 9 April 2021 diff hist -2,040 Laser Scanning Confocal M-scope (Olympus LEXT) initial page
- 11:20, 9 April 2021 diff hist +2,720 N Digital Microscope (Olympus DSX1000) pasted LEXT page source
- 11:19, 9 April 2021 diff hist +82 Tool List →Inspection, Test and Characterization: Link to Olympus DSX1000 page Tag: Visual edit
- 11:14, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DX-1000: Corrected model number to DSX
- 13:49, 8 April 2021 diff hist +337 Template:News Olympus DX-1000 announcemnet
- 20:50, 6 April 2021 diff hist +109 m Lithography Recipes →Photolithography Recipes: corrected row colors, link to XHRiC
- 20:47, 6 April 2021 diff hist +37 Lithography Recipes →Photolithography Recipes: added XHRiC BARC to table, and "A" for many PR's previouly blank on MLA150 Tag: Visual edit
- 20:44, 6 April 2021 diff hist +38 m Lithography Recipes TOC formatting Tag: Visual edit
- 20:39, 6 April 2021 diff hist +780 Lithography Recipes linked to each page of litho recipes Tag: Visual edit: Switched
- 09:19, 31 March 2021 diff hist +1,520 N KLayout Design Tips copied from parent page, and added non-orthogonal arrays issue Tag: Visual edit
- 09:15, 31 March 2021 diff hist +53 N File:KLayout - Non-Orthogonal Arrays.png current
- 09:13, 31 March 2021 diff hist +148 Calculators + Utilities →KLayout: link to KLayout Design Tips page Tag: Visual edit
- 15:58, 25 March 2021 diff hist +2 Template:Announcements moved GCA items into main RSS section
- 08:19, 20 March 2021 diff hist -361 Template:Announcements Delete MLA & ASML
- 15:00, 19 March 2021 diff hist +204 MLA150 - Troubleshooting →Nanofiles folder not showing up on SFTP: link to FAQ on Nanofiles FTP Tag: Visual edit
- 14:59, 19 March 2021 diff hist +596 MLA150 - Troubleshooting →Known Bugs & Workarounds: added "Nanofiles folder not showing up" Tag: Visual edit
- 14:55, 19 March 2021 diff hist +331 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: updated Tag: Visual edit
- 08:45, 16 March 2021 diff hist +3 m Frequently Asked Questions Tag: Visual edit
- 08:44, 16 March 2021 diff hist +14 m Frequently Asked Questions Tag: Visual edit
- 08:43, 16 March 2021 diff hist +127 Frequently Asked Questions added NanoFab@ece.ucsb.edu note at the top.
- 07:17, 16 March 2021 diff hist +186 Template:Announcements MLA maint.
- 09:56, 15 March 2021 diff hist +11 Focused Ion-Beam Lithography (Raith Velion) added toolid, removed WIP, Pt dep/writing current
- 09:42, 15 March 2021 diff hist +14 Template:Announcements asml calibrated/ready for use
- 07:23, 15 March 2021 diff hist 0 m Template:Announcements
- 06:29, 15 March 2021 diff hist +32 Template:Announcements ASML temp stable/cals
- 16:12, 11 March 2021 diff hist -443 Template:Announcements deleted compressor note, ASML Open for use
- 14:19, 10 March 2021 diff hist +235 Tube Furnace (Tystar 8300) →Process Information: added Gases Available Tag: Visual edit
- 10:13, 9 March 2021 diff hist +31 m Services →Request Remote Fabrication Services: minor emphasis Tag: Visual edit
- 10:11, 9 March 2021 diff hist +25 Services point to 'fab svc on this page instgead of Wix Tag: Visual edit
- 11:41, 5 March 2021 diff hist -4 m Calculators + Utilities →KLayout: large files comments Tag: Visual edit
- 12:54, 3 March 2021 diff hist +412 Services Remote Fab Svc: added UCSB & Inter-UC paperwork Tag: Visual edit
- 19:56, 1 March 2021 diff hist -13 Template:Announcements CR open, compressors
- 12:55, 1 March 2021 diff hist +74 Stepper Recipes →DUV-42P: added 2500rpm note Tag: Visual edit
- 06:23, 1 March 2021 diff hist -143 m Template:Announcements updated post time