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- 10:13, 5 November 2020 diff hist +1,817 N MLA150 - Design Guidelines added conversion notes on each file type Tag: Visual edit
- 08:13, 5 November 2020 diff hist +344 ICP Etch 2 (Panasonic E626I) added link to online training video Tag: Visual edit
- 22:29, 4 November 2020 diff hist 0 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT
- 18:10, 4 November 2020 diff hist -28 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT Tag: Visual edit
- 18:09, 4 November 2020 diff hist +403 Maskless Aligner (Heidelberg MLA150) →Documentation: pic of spatial light modulator Tag: Visual edit
- 18:06, 4 November 2020 diff hist +66 N File:MLA150 Spatial Light Modulator Description.png current
- 17:47, 4 November 2020 diff hist +3 m Maskless Aligner (Heidelberg MLA150) →Video Training Tag: Visual edit
- 17:29, 4 November 2020 diff hist +97 Maskless Aligner (Heidelberg MLA150) →Video Trainings: link to online video Tag: Visual edit
- 09:16, 4 November 2020 diff hist +247 Maskless Aligner (Heidelberg MLA150) added tool id, HIMT URL, updated specs Tag: Visual edit: Switched
- 15:12, 30 October 2020 diff hist -3 Template:Announcements
- 15:12, 30 October 2020 diff hist -1 m Template:Announcements
- 15:11, 30 October 2020 diff hist -1 m Template:Announcements deleted spacing
- 15:10, 30 October 2020 diff hist +1 Template:Announcements moved tool installs to bottom
- 15:10, 30 October 2020 diff hist -495 Template:Announcements deleted GCA PMs
- 09:28, 30 October 2020 diff hist 0 m GoPro Hero8 Black (Internal) moved editing to after saving Tag: Visual edit
- 09:27, 30 October 2020 diff hist +334 GoPro Hero8 Black (Internal) added gopro stitching Tag: Visual edit
- 09:10, 28 October 2020 diff hist -83 Template:Announcements →New Tool Installations: updated FIB, link to DanR's page
- 09:09, 28 October 2020 diff hist -8 Dan Read deleted Work In progress
- 09:06, 28 October 2020 diff hist -243 Template:Announcements deleted Unaxis Dep, moved GCA PM to top.
- 08:57, 28 October 2020 diff hist +158 m Frequently Asked Questions →Authorship on Publications: minor update Tag: Visual edit
- 16:56, 26 October 2020 diff hist +229 Maskless Aligner (Heidelberg MLA150) →Documentation: added redlinks for documentation Tag: Visual edit
- 07:14, 26 October 2020 diff hist +18 m Stepper 2 (AutoStep 200) minor formatting Tag: Visual edit
- 22:43, 24 October 2020 diff hist +533 Nanofab Staff Internal Pages updated TOC and links to eventual Video Training pages Tag: Visual edit
- 08:46, 23 October 2020 diff hist -169 m Template:Announcements Deleted PEii repair
- 04:58, 23 October 2020 diff hist +199 Stepper 3 (ASML DUV) →Process Information: added low-TTV Tag: Visual edit
- 04:54, 23 October 2020 diff hist +104 Stepper 3 (ASML DUV) →Online Video Trainings: added Video Training part 1 Tag: Visual edit
- 12:44, 22 October 2020 diff hist +252 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Log full: updated procedures Tag: Visual edit
- 16:24, 19 October 2020 diff hist +82 MediaWiki:Common.css
- 16:08, 19 October 2020 diff hist +97 Chemical List updated wording Tag: Visual edit
- 16:05, 19 October 2020 diff hist +10 MediaWiki:Common.css
- 16:04, 19 October 2020 diff hist +10 MediaWiki:Sidebar
- 16:04, 19 October 2020 diff hist +134 MediaWiki:Common.css
- 16:01, 19 October 2020 diff hist -97 MediaWiki:Common.css
- 16:00, 19 October 2020 diff hist +4 MediaWiki:Common.css
- 15:59, 19 October 2020 diff hist +11 MediaWiki:Common.css
- 15:56, 19 October 2020 diff hist -61 MediaWiki:Common.css
- 15:55, 19 October 2020 diff hist -7 MediaWiki:Common.css
- 15:55, 19 October 2020 diff hist -7 MediaWiki:Common.css
- 15:53, 19 October 2020 diff hist -1 MediaWiki:Common.css
- 15:48, 19 October 2020 diff hist -2 MediaWiki:Common.css
- 15:46, 19 October 2020 diff hist +63 MediaWiki:Common.css
- 15:42, 19 October 2020 diff hist -12 MediaWiki:Common.css
- 15:42, 19 October 2020 diff hist +2 MediaWiki:Common.css
- 15:38, 19 October 2020 diff hist +14 MediaWiki:Common.css
- 15:37, 19 October 2020 diff hist +76 MediaWiki:Common.css
- 15:34, 19 October 2020 diff hist +10 MediaWiki:Common.css
- 15:32, 19 October 2020 diff hist +99 MediaWiki:Common.css reorg, invisible Sidebar title
- 15:25, 19 October 2020 diff hist +4 MediaWiki:Sidebar
- 15:25, 19 October 2020 diff hist +37 MediaWiki:Sidebar
- 15:23, 19 October 2020 diff hist 0 MediaWiki:Sidebar
- 15:23, 19 October 2020 diff hist -23 MediaWiki:Sidebar
- 15:20, 19 October 2020 diff hist +14 MediaWiki:Sidebar
- 15:20, 19 October 2020 diff hist -1 MediaWiki:Sidebar
- 15:19, 19 October 2020 diff hist -21 MediaWiki:Sidebar deleted search and navigation *'s
- 08:45, 14 October 2020 diff hist +732 DSEIII (PlasmaTherm/Deep Silicon Etcher) updated text, added Clamp text Tag: Visual edit
- 08:39, 14 October 2020 diff hist +52 N File:DSEIII.jpg Phoot of Plasma-Therm DSE-iii in Bay 2 current
- 07:13, 14 October 2020 diff hist +1 m Direct-Write Lithography Recipes updated THMR thickness Tag: Visual edit
- 07:12, 14 October 2020 diff hist +20 m COVID-19 User Policies →Policy Updates Tag: Visual edit
- 07:09, 14 October 2020 diff hist +73 COVID-19 User Policies →UCSB Flu Vaccination Mandate: updated vacc. logging Tag: Visual edit
- 19:47, 13 October 2020 diff hist +480 Template:Announcements added flu vaccine
- 19:43, 13 October 2020 diff hist +225 COVID-19 User Policies flu update
- 19:38, 13 October 2020 diff hist -7 m COVID-19 User Policies
- 19:38, 13 October 2020 diff hist +7 m COVID-19 User Policies
- 19:37, 13 October 2020 diff hist 0 m COVID-19 User Policies
- 19:37, 13 October 2020 diff hist +731 COVID-19 User Policies added flu vaccination mandate Tag: Visual edit
- 18:44, 10 October 2020 diff hist +143 Direct-Write Lithography Recipes →Positive Resist (MLA150): added THMR recipe Tag: Visual edit
- 21:52, 9 October 2020 diff hist +59 m Direct-Write Lithography Recipes "Exposure Time" → "Exposure Dose (mJ/cm2)" Tag: Visual edit
- 08:12, 9 October 2020 diff hist +484 Photoluminescence PL Setup (Custom) added more info Tag: Visual edit
- 08:06, 9 October 2020 diff hist +170 Holographic Lith/PL Setup (Custom) link to PL system page Tag: Visual edit
- 08:02, 9 October 2020 diff hist +81 m Holographic Lith/PL Setup (Custom) →About: added term "holography" for searching, changed PR to THMR and linked Tag: Visual edit: Switched
- 17:55, 7 October 2020 diff hist +154 Nanofab Staff Internal Pages added placeholders for other sections Tag: Visual edit
- 16:14, 6 October 2020 diff hist +104 Maskless Aligner (Heidelberg MLA150) →About: added some equip specs Tag: Visual edit
- 23:03, 2 October 2020 diff hist +9 m Direct-Write Lithography Recipes →Greyscale Lithography: added model to header title
- 22:49, 2 October 2020 diff hist +118 Maskless Aligner (Heidelberg MLA150) →About: minor updates Tag: Visual edit
- 16:29, 2 October 2020 diff hist +23 Maskless Aligner (Heidelberg MLA150) Added photo
- 16:28, 2 October 2020 diff hist +64 N File:MLA150 Heidelberg Bay 6 Photo.jpg Photo of Heidelberg MLA 150 in Bay 6 after install current
- 16:27, 2 October 2020 diff hist +876 Direct-Write Lithography Recipes Added PR's we are characterizing Tag: Visual edit: Switched
- 16:23, 2 October 2020 diff hist +4 Lithography Recipes →Photolithography Recipes: Added 4620 "A" on I-line tools Tag: Visual edit
- 16:07, 30 September 2020 diff hist +405 Goniometer (Rame-Hart A-100) - Operating Procedure added "Tile Angle" techique current Tag: Visual edit
- 16:03, 30 September 2020 diff hist 0 Film Stress (Tencor Flexus) moved to bay 1
- 14:35, 28 September 2020 diff hist +203 m Lithography Recipes →Photolithography Recipes: minor instructions/hints Tag: Visual edit
- 14:26, 28 September 2020 diff hist +720 Maskless Aligner (Heidelberg MLA150) →About: updated some specs Tag: Visual edit
- 23:14, 27 September 2020 diff hist +308 Template:Announcements links to Velion + MLA tool pages
- 23:11, 27 September 2020 diff hist -67 Lithography Recipes →Photolithography Recipes: deleted SPR 950-0.8 row Tag: Visual edit
- 23:11, 27 September 2020 diff hist +778 m Lithography Recipes "A" on MLA --> SU-8 2075 Tag: Visual edit
- 23:07, 27 September 2020 diff hist -290 Template:Announcements deleted ICP1 and IBD messages
- 15:51, 25 September 2020 diff hist +94 m Stepper 3 (ASML DUV) →Online Video Trainings: disclaimer about supervisor training Tag: Visual edit
- 15:48, 25 September 2020 diff hist +299 Stepper 3 (ASML DUV) →Operating Procedures: added Video Training: Part 2 Tag: Visual edit
- 00:54, 23 September 2020 diff hist +290 Template:Announcements added Pan2 & IBD
- 17:50, 22 September 2020 diff hist -200 Template:Announcements deleted lab shutdown notice
- 23:24, 21 September 2020 diff hist -219 Template:Announcements removed network issues
- 13:41, 21 September 2020 diff hist +44 m Template:Announcements →Lab Shutdown: Some tools still down
- 13:38, 21 September 2020 diff hist -40 Template:Announcements shutdown update
- 19:38, 18 September 2020 diff hist +233 ASML 5500 Mask Making Guidelines →Templates: details on on-wafer mark CAD Tag: Visual edit
- 18:03, 18 September 2020 diff hist +1,059 Lithography Recipes →Photolithography Recipes: linked to all PR datasheets Tag: Visual edit
- 17:52, 18 September 2020 diff hist +57 Lithography Recipes →Chemicals Stocked + Datasheets: added Az 4620 Tag: Visual edit
- 17:51, 18 September 2020 diff hist +59 N File:Az p4620 photoresist data package.pdf info on Az 4620 photoresist, spin curves etc. current
- 17:43, 18 September 2020 diff hist +45 Lithography Recipes rename to "UV Optical Lithography" Tag: Visual edit
- 17:41, 18 September 2020 diff hist +103 Lithography Recipes rearrange manual TOC Tag: Visual edit
- 17:34, 18 September 2020 diff hist -3 Lithography Recipes →Lift-Off Techniques: changed to Liftoff Recipes Tag: Visual edit