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- 14:56, 4 July 2020 diff hist +680 GoPro Hero8 Black (Internal) →Trainings via Webmeeting (Zoom): updates Tag: Visual edit
- 14:49, 4 July 2020 diff hist +270 m GoPro Hero8 Black (Internal) view videos - mentioned "My Media" section Tag: Visual edit
- 14:44, 4 July 2020 diff hist +75 m GoPro Hero8 Black (Internal) caption on GoPro app store img Tag: Visual edit
- 14:33, 4 July 2020 diff hist +253 GoPro Hero8 Black (Internal) minor formatting
- 14:19, 4 July 2020 diff hist +3,896 GoPro Hero8 Black (Internal) all sections added, TBA's inserted Tag: Visual edit
- 13:52, 4 July 2020 diff hist +64 N File:GoPro Hero8 Black - Video record button - IMG 2764.png current
- 13:49, 4 July 2020 diff hist +635 GoPro Hero8 Black (Internal) video and settings menu Tag: Visual edit
- 13:46, 4 July 2020 diff hist +63 N File:GoPro Hero8 Black - Presets 3 - settings IMG 2768.png current
- 13:45, 4 July 2020 diff hist +62 N File:GoPro Hero8 Black - Presets 2 - various IMG 2767.jpg current
- 13:44, 4 July 2020 diff hist +54 N File:GoPro Hero8 Black - Presets 1 - IMG 2765.jpg current
- 13:44, 4 July 2020 diff hist +58 N File:GoPro Hero8 Black - Choose video - IMG 2771.jpg current
- 13:41, 4 July 2020 diff hist +1,582 GoPro Hero8 Black (Internal) →In the lab: enable live perview screenshots Tag: Visual edit
- 13:40, 4 July 2020 diff hist 0 m File:GoPro Hero8 Black - Enable preview 4 - live view IMG 2763.png John d moved page File:Enable preview 4 - live view IMG 2763.png to File:GoPro Hero8 Black - Enable preview 4 - live view IMG 2763.png without leaving a redirect: added gopro name for searching current
- 13:39, 4 July 2020 diff hist +51 N File:GoPro Hero8 Black - Enable preview 4 - live view IMG 2763.png
- 13:37, 4 July 2020 diff hist +79 N File:GoPro Hero8 Black - Enable preview 3 - join wifi network IMG 2770.jpg current
- 13:37, 4 July 2020 diff hist +72 N File:Gopro Hero8 Black - Enable preview 2 - use wifi IMG 2769.jpg current
- 13:35, 4 July 2020 diff hist +61 N File:GoPro Hero8 Black - Enable preview 1 - IMG 2766.jpg current
- 21:43, 2 July 2020 diff hist +146 GoPro Hero8 Black (Internal) draft update Tag: Visual edit
- 20:20, 2 July 2020 diff hist +1,849 N GoPro Hero8 Black (Internal) initial draft of instructions Tag: Visual edit
- 20:02, 2 July 2020 diff hist +32 N File:GoPro H8b training - Smartphone App.jpg current
- 19:52, 2 July 2020 diff hist +148 N Nanofab Staff Internal Pages created page, added GoPro Hero 8 redlink Tag: Visual edit
- 07:22, 2 July 2020 diff hist +198 Template:Announcements July 4th holiday
- 18:07, 1 July 2020 diff hist +676 PECVD Recipes →SiN LS 250C Deposition (Unaxis VLR): notes about SiD4, new procedures Tag: Visual edit
- 18:00, 1 July 2020 diff hist +177 Vacuum Deposition Recipes Corrected Unaxis Dep links. New row: low-stress Nitride. Tag: Visual edit
- 07:58, 1 July 2020 diff hist 0 CAIBE (Oxford Ion Mill) corrected cluster chamber--> metal/dielectric designation Tag: Visual edit
- 07:57, 1 July 2020 diff hist +2 Atomic Layer Deposition (Oxford FlexAL) corrected chamber --> metal/dielectric designation Tag: Visual edit
- 18:03, 24 June 2020 diff hist 0 m Lift-Off with DUV Imaging + PMGI Underlayer →Suggested Process for Liftoff Tag: Visual edit
- 18:03, 24 June 2020 diff hist +73 Lift-Off with DUV Imaging + PMGI Underlayer annotated image caption Tag: Visual edit
- 17:59, 24 June 2020 diff hist +124 Lift-Off with DUV Imaging + PMGI Underlayer separated Process Limits into separate section Tag: Visual edit
- 11:51, 22 June 2020 diff hist +307 Services added Fab Services note at bottom Tag: Visual edit
- 11:01, 22 June 2020 diff hist +95 Atomic Layer Deposition Recipes →Pt deposition (ALD CHAMBER 1): added Pt recipe name for O* plasma Tag: Visual edit
- 10:57, 22 June 2020 diff hist +8 m Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: bolded recipes page Tag: Visual edit
- 10:22, 18 June 2020 diff hist -61 m Demis D. John fixed URL current Tag: Visual edit
- 10:21, 18 June 2020 diff hist +139 Demis D. John moved 'Contact If...' to the top
- 14:56, 17 June 2020 diff hist +9 Main Page mod remove top spacing current
- 14:45, 17 June 2020 diff hist +1,830 N Main Page mod pasted Main_Page code
- 14:06, 17 June 2020 diff hist -9 m Lithography Recipes →Chemicals Stocked + Datasheets: delete whitespace
- 14:05, 17 June 2020 diff hist -43 m Lithography Recipes →Lift-Off Techniques: deleted redlink Tag: Visual edit
- 14:04, 17 June 2020 diff hist -9 m Lithography Recipes →Chemicals Stocked + Datasheets Tag: Visual edit
- 14:01, 17 June 2020 diff hist +461 Lithography Recipes Converted wall-of-text list into indented table of contents Tag: Visual edit
- 13:38, 17 June 2020 diff hist +14 m Stepper 3 (ASML DUV) →Recipes: corrected link text Tag: Visual edit
- 13:37, 17 June 2020 diff hist +252 Stepper 3 (ASML DUV) →Design & Fabrication Tools: updated Job-creator options Tag: Visual edit
- 11:11, 16 June 2020 diff hist +26 m Demis D. John →Contact If...: updated Tag: Visual edit
- 11:10, 16 June 2020 diff hist +35 m Demis D. John →External Professional Websites: url update Tag: Visual edit
- 14:37, 12 June 2020 diff hist +36 Autostep 200 Mask Making Guidance fixed title, added WIP and mask ordering section Tag: Visual edit
- 12:01, 9 June 2020 diff hist 0 File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf John d uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf current
- 11:56, 9 June 2020 diff hist 0 File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf John d uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf
- 11:42, 9 June 2020 diff hist +494 ICP Etching Recipes →SiO2 Etching: added Ning's Ru-masked SiO2 etch Tag: Visual edit
- 11:29, 9 June 2020 diff hist +117 N File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf Procedure for SiO2 deep etching on Plasma-Therm SLR Fluorine Etcher, using Sputtered Ruthenium hardmask
- 19:18, 8 June 2020 diff hist -1 m Template:Announcements
- 19:18, 8 June 2020 diff hist +3 m Template:Announcements
- 19:17, 8 June 2020 diff hist +23 m Template:Announcements
- 19:17, 8 June 2020 diff hist -120 Template:Announcements updated COVID response
- 18:12, 8 June 2020 diff hist -142 Template:Announcements →NanoFab Closure: update to "COVID Response"
- 18:08, 8 June 2020 diff hist 0 m Template:News →Raith Velion: FIB/SEM Installation: minor update
- 18:08, 8 June 2020 diff hist +9 m Template:News RAITH minor spelling
- 11:18, 8 June 2020 diff hist +321 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) link to lase rmonitor pages Tag: Visual edit
- 11:17, 8 June 2020 diff hist +93 ICP Etch 2 (Panasonic E626I) link to laser monitor pages Tag: Visual edit
- 11:16, 8 June 2020 diff hist +368 ICP Etch 1 (Panasonic E646V) link to laser etch monitor pages Tag: Visual edit
- 11:14, 8 June 2020 diff hist +306 DSEIII (PlasmaTherm/Deep Silicon Etcher) links to laser monitor pages Tag: Visual edit
- 11:11, 8 June 2020 diff hist +422 N Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers basic description, point to General Procedure page. current Tag: Visual edit
- 08:04, 5 June 2020 diff hist +95 XeF2 Etch (Xetch) →About: added wafer size Tag: Visual edit
- 23:29, 2 June 2020 diff hist 0 m Template:Announcements grammar
- 17:56, 2 June 2020 diff hist +63 m Template:WIP current
- 17:55, 2 June 2020 diff hist +89 Template:WIP link to WIP category
- 17:54, 2 June 2020 diff hist +133 N Category:WIP Created page with "The following pages have a "Work In Progress" label and Image inserted in them. See the WIP template for more info." current
- 17:52, 2 June 2020 diff hist +7 m Dan Read added work in progress sign Tag: Visual edit
- 17:51, 2 June 2020 diff hist +189 N Dan Read initial page
- 17:50, 2 June 2020 diff hist +43 Staff List →Process Group: added link to Dan Read Tag: Visual edit
- 17:48, 2 June 2020 diff hist 0 m Template:Announcements modify post date so closure is at top
- 17:48, 2 June 2020 diff hist +281 Template:Announcements New tool installs - points to NEWS articles
- 17:43, 2 June 2020 diff hist +1,382 Template:News article for Raith Velion & Heidleberg MLA150
- 13:00, 30 May 2020 diff hist +215 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added screenshot of IQC results screen Tag: Visual edit
- 12:58, 30 May 2020 diff hist +114 N File:ASML IQC Focus Mean Correction screenshot.jpg
- 16:50, 28 May 2020 diff hist +562 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Log full: added Laser refill warning Tag: Visual edit
- 16:45, 28 May 2020 diff hist +259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added brief description of utility Tag: Visual edit
- 16:14, 28 May 2020 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: bolded button Tag: Visual edit
- 16:14, 28 May 2020 diff hist +172 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added to record in logbook Tag: Visual edit
- 10:52, 22 May 2020 diff hist +357 CAIBE (Oxford Ion Mill) linked to Cluster operating instructions Tag: Visual edit
- 10:48, 22 May 2020 diff hist +9 m Tool List →Inspection, Test and Characterization: renaming of sections Tag: Visual edit
- 09:27, 19 May 2020 diff hist +83 m Thermal Evap 2 (Solder) →About Tag: Visual edit
- 09:26, 19 May 2020 diff hist +35 Thermal Evap 2 (Solder) fixed link to recipes, removed duplicate link Tag: Visual edit
- 08:56, 18 May 2020 diff hist +189 m Lift-Off with DUV Imaging + PMGI Underlayer convert process to table, more like a "traveler" Tag: Visual edit
- 10:12, 15 May 2020 diff hist +1,701 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added all Chamber 3 recipes I could find Tag: Visual edit
- 13:52, 13 May 2020 diff hist 0 m MediaWiki:Common.css retry
- 13:51, 13 May 2020 diff hist -1 MediaWiki:Common.css retry
- 13:50, 13 May 2020 diff hist +3 MediaWiki:Common.css retry
- 13:49, 13 May 2020 diff hist +1 m MediaWiki:Common.css retry
- 13:46, 13 May 2020 diff hist +84 MediaWiki:Common.css disable discussion link
- 07:22, 13 May 2020 diff hist +66 m Frequently Asked Questions →Can I take supplies from the Nanofab?: tone down the wording Tag: Visual edit
- 15:52, 12 May 2020 diff hist +42 m MediaWiki:Common.css added comment line
- 15:50, 12 May 2020 diff hist +9 m MediaWiki:Common.css retry h6
- 15:25, 12 May 2020 diff hist +50 MediaWiki:Common.css italicized Heading 4 (h6)
- 15:21, 12 May 2020 diff hist +152 Tool List →Inspection, Test and Characterization: reorganized optical tools Tag: Visual edit
- 20:40, 6 May 2020 diff hist +8 m Stepper 3 (ASML DUV) reduce Heading levels to "heading" not "Page title" Tag: Visual edit
- 17:55, 6 May 2020 diff hist +341 Stepper 3 (ASML DUV) added link to stepper recipes Tag: Visual edit
- 08:50, 29 April 2020 diff hist +51 Template:Announcements bumped COVID closure post, link to BThibeault page
- 10:14, 23 April 2020 diff hist +14 Atomic Layer Deposition (Oxford FlexAL) →Procedures & Documentation: changed to "ask tool supervisor" instead of BillM Tag: Visual edit
- 10:13, 23 April 2020 diff hist +28 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): changed to "ask Tool Supervisor" instead of BillM Tag: Visual edit
- 09:58, 23 April 2020 diff hist -3 Sputtering Recipes →Al Deposition (Sputter 2): changed Heading level for Sputter 2 to "page title" to match others Tag: Visual edit
- 09:14, 23 April 2020 diff hist -19 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor format Tag: Visual edit
- 09:12, 23 April 2020 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 09:11, 23 April 2020 diff hist +43 m Test Data of etching SiO2 with CHF3/CF4-ICP1 formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +84 Test Data of etching SiO2 with CHF3/CF4-ICP1 comments on sidewall angle Tag: Visual edit
- 16:18, 22 April 2020 diff hist +495 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide updated to indicate the 2 methods of choosing cals Tag: Visual edit
- 15:44, 22 April 2020 diff hist +1,432 N Measurements and Imaging with Amscope Camera - Quickstart Usage Guide copy/pasted BrianT's email from Jul 26, 2019 Tag: Visual edit
- 15:36, 22 April 2020 diff hist +37 Microscopes →Image Analysis Software: link to Amscope Quickstart Tag: Visual edit
- 12:26, 22 April 2020 diff hist +98 N File:UCSB Service Agreement.pdf UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.
- 14:45, 21 April 2020 diff hist +291 PECVD Recipes →Cleaning Recipes (PECVD #2): changed Clean recipe to link to the screenshot instead of embedding in recipes page. added description of the clean Tag: Visual edit
- 14:42, 21 April 2020 diff hist +228 PECVD Recipes →Cleaning Recipes (PECVD #1): changed cleaning recipe image to Link to image, instead of embedded in page. Small description of the recipe. Tag: Visual edit
- 14:37, 21 April 2020 diff hist +20 m File:PECVD1-cleaning.png description update current
- 18:06, 13 April 2020 diff hist +204 Services formatting/clarify Tag: Visual edit
- 18:02, 13 April 2020 diff hist +62 Template:Links updated remote work/lab access links
- 11:54, 8 April 2020 diff hist +46 m Wafer scanning process traveler added author and spelling Tag: Visual edit
- 11:49, 8 April 2020 diff hist +128 Wafer scanning process traveler added wafers to use section and summary at top
- 09:06, 8 April 2020 diff hist +5 Stocked Chemical List added "IPA" to propanol names/notes Tag: Visual edit
- 08:59, 8 April 2020 diff hist +31 Stocked Chemical List added BHF % concentration Tag: Visual edit
- 12:45, 4 April 2020 diff hist +148 Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to template + CAD files Tag: Visual edit
- 15:49, 30 March 2020 diff hist +12 ICP Etching Recipes →Al Etch (Panasonic 1) Tag: Visual edit
- 15:48, 30 March 2020 diff hist +6 ICP Etching Recipes →Al Etch (Panasonic 2)
- 10:42, 30 March 2020 diff hist +6 ICP-PECVD (Unaxis VLR) →Documentation: fixed link
- 10:21, 30 March 2020 diff hist +4 m Stepper 2 (AutoStep 200) →Staff Procedures Tag: Visual edit
- 10:13, 30 March 2020 diff hist -4,103 Autostep 200 Troubleshooting and Recovery moved system restarting procedure to own page
- 10:11, 30 March 2020 diff hist +193 Stepper 2 (AutoStep 200) added shutartup-shutdown link Tag: Visual edit
- 15:05, 26 March 2020 diff hist +92 Mike Day added Tools > PEii ashers current Tag: Visual edit
- 15:04, 26 March 2020 diff hist -80 Staff List →Equipment Group: Deleted TomR from Equip. group (also in Facilities) Tag: Visual edit
- 15:03, 26 March 2020 diff hist +16 Biljana Stamenic Added "Tools" heading Tag: Visual edit
- 15:01, 26 March 2020 diff hist -1 m Tom Reynolds changed to May 2018 Tag: Visual edit
- 14:53, 26 March 2020 diff hist +77 N File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx CAD Tutorial - example programming spreadsheet for ASML Stepper current
- 14:48, 26 March 2020 diff hist +83 N File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03 current
- 14:35, 26 March 2020 diff hist -24 m Calculators + Utilities →Example CAD File: fixed link Tag: Visual edit: Switched
- 14:29, 26 March 2020 diff hist +471 Calculators + Utilities →Example CAD File: link to ASML Example CAD file and Programming page Tag: Visual edit: Switched
- 14:27, 26 March 2020 diff hist +88 N File:DEMISJAN2020 - Reticle Layout v1.GDS CAD Tutorial - final GDS CAD file for submission to phootmask manufacturer current
- 12:31, 26 March 2020 diff hist +1,201 Calculators + Utilities →CAD Design Tips: added CAD tutorial - partial Tag: Visual edit
- 12:25, 26 March 2020 diff hist +78 N File:CAD Tutorial for ASML Reticle v1 - screenshot Device Layout cell.png current
- 11:50, 26 March 2020 diff hist +63 N File:CAD Tutorial for ASML Reticle v1.OAS Mask layout CAD tutorial for ASML Stepper reticle current
- 12:22, 24 March 2020 diff hist -37 Claudia Gutierrez initial stab at info. Tag: Visual edit
- 12:18, 24 March 2020 diff hist -9 m Ning Cao removed periods/spaces current Tag: Visual edit
- 14:33, 23 March 2020 diff hist -2 m E-Beam 1 (Sharon) removed link on "Documentation" heading
- 14:32, 23 March 2020 diff hist +769 Editing Tutorials →Linking to a PDF or other file: added "linking to an existing file", also corrected image indenting in Source Tag: Visual edit: Switched
- 14:27, 23 March 2020 diff hist +103 N File:Editing Tutorials - List of Uploaded Files - click the file title to get file page.png current
- 11:57, 23 March 2020 diff hist +548 Demis D. John added "COntact If..." section Tag: Visual edit
- 11:32, 23 March 2020 diff hist -1,215 Bill Mitchell deleted Lorem Ipsum current Tag: Visual edit
- 11:32, 23 March 2020 diff hist -1,215 Ning Cao deleted Lorem ipsum Tag: Visual edit
- 11:31, 23 March 2020 diff hist +1 Tom Reynolds moved Lab Manager text Tag: Visual edit: Switched
- 11:28, 23 March 2020 diff hist -1,216 Brian Lingg removed lorem ipsum Tag: Visual edit
- 11:27, 23 March 2020 diff hist -15 Don Freeborn removed text Tag: Visual edit
- 11:27, 23 March 2020 diff hist -1,215 Luis Zuzunaga removed lorem ipsum Tag: Visual edit
- 11:26, 23 March 2020 diff hist -1,216 Tino Sy removed lorem ipsum current Tag: Visual edit
- 11:13, 23 March 2020 diff hist +428 N Claudia Gutierrez added Claudia Staff info
- 11:10, 23 March 2020 diff hist +4 Staff List added Claudia Gutierrez link Tag: Visual edit
- 22:02, 21 March 2020 diff hist +115 Microscopes →Microscope Training Guide: reccomend in-person training Tag: Visual edit
- 22:00, 21 March 2020 diff hist +10 Demis D. John added link to process gorup and Optical Microscopes Tag: Visual edit
- 14:46, 17 March 2020 diff hist +79 ASML 5500: Recovering from an Error Remove reticle Tag: Visual edit
- 13:24, 17 March 2020 diff hist +712 Services →Industry and non-U.C. Academic Institutions: added missing URLs to forms, list formatting Tag: Visual edit: Switched
- 13:13, 17 March 2020 diff hist +104 N File:Facility-Use-MOU---Intercampus-UC-User.pdf Intercampus U.C. User - Facility Use Memorandum of Understanding, for "Getting Lab Access"
- 13:04, 17 March 2020 diff hist +70 N File:UCSB-Facilities-Use-Blanket-Waiver.pdf Facilities Use - Blanket Waiver for "Getting Lab Access" current
- 13:03, 17 March 2020 diff hist +64 N File:UCSB-Facilities-Use-Agreement.pdf Facilities Use Agreement, for "Getting Lab Access"
- 12:59, 17 March 2020 diff hist +74 N File:SampleCOI.pdf Sample Certificate of Insurance, for "Getting Access to Lab" current
- 12:51, 17 March 2020 diff hist +143 N File:Nanofabrication Facility Project Description.xlsx NanoFab Remote Work "Project Description Form". Remote work users must fill this out and email to the appropriate NanoFab staff.
- 11:42, 17 March 2020 diff hist +515 Template:Announcements added NanoFab closure
- 15:53, 13 March 2020 diff hist +1,211 Staff List split off Facilities group. Tag: Visual edit
- 15:42, 13 March 2020 diff hist +6 m Frequently Asked Questions →Specific Equipment Problem: minor bolding of "report tool issue" Tag: Visual edit
- 10:07, 13 March 2020 diff hist +239 PECVD Recipes →Cleaning Recipes (Unaxis VLR Dep): added clean times from SOP, and link to SOP Tag: Visual edit
- 08:18, 13 March 2020 diff hist +82 PECVD Recipes →PECVD 1 (PlasmaTherm 790): added placeholder for Cleaning recipes Tag: Visual edit
- 17:06, 9 March 2020 diff hist +15 Tom Reynolds changed to say "Previous lab manager" Tag: Visual edit
- 16:20, 5 March 2020 diff hist -13 Frequently Asked Questions →Publications acknowledging the Nanofab: less strong wording Tag: Visual edit
- 16:34, 4 March 2020 diff hist +102,378 N Publications - 2013-2014 pasted infor from Joomla current Tag: Visual edit
- 16:30, 4 March 2020 diff hist +481 N Older Publications added links for old pubs lists, 2014 and earlier (from Joomla nanotech website) current Tag: Visual edit
- 16:27, 4 March 2020 diff hist +50 Research →Publication Lists: link to "Earlier pubs" Tag: Visual edit
- 10:44, 3 March 2020 diff hist +160 Research added Select Publications Tag: Visual edit
- 16:12, 28 February 2020 diff hist +130 Test Data of etching SiO2 with CHF3/CF4-ICP1 added note about incorrect sidewall profile Tag: Visual edit: Switched
- 14:12, 28 February 2020 diff hist -1 m Lab Rules moved sub-title to top
- 14:10, 28 February 2020 diff hist +204 m Lab Rules additional note at top regarding searching/FAQ/TOC Tag: Visual edit: Switched
- 13:59, 28 February 2020 diff hist +517 Services updated titles and slight formatting Tag: Visual edit
- 12:30, 28 February 2020 diff hist +88 m Services instruciton before, TOC
- 12:23, 28 February 2020 diff hist +32 m Services
- 12:10, 28 February 2020 diff hist +89 Services added TOC manually, forced
- 12:08, 28 February 2020 diff hist +3,156 N Services initial page with copy/pasted precodures and 3 headings Tag: Visual edit
- 15:18, 26 February 2020 diff hist +259 Template:Publications added title URLs
- 19:06, 25 February 2020 diff hist +3 m Template:News →TechTalk: Dr. Renan Moreira & Grégoire Coiffard: minor slash
- 19:06, 25 February 2020 diff hist +52 m Template:News →TechTalk: Dr. Renan Moreira & Grégoire Coiffard: added date for RSS
- 19:04, 25 February 2020 diff hist +50 m Template:News →KLA Tencor Profilometer Installed: link to Brian Lingg's page
- 19:03, 25 February 2020 diff hist +13 m Template:News →Filmetrics Optical Measurement Systems: add link to Ning's page
- 19:02, 25 February 2020 diff hist -669 Template:News deleted Profilm3D article
- 19:01, 25 February 2020 diff hist -89 Tool List →Inspection, Test and Characterization: deleted Filmetrics Profilm3D link Tag: Visual edit
- 10:07, 25 February 2020 diff hist +301 m Calculators + Utilities →CAD Design Tips: added OASIS and "save session" note Tag: Visual edit
- 15:32, 21 February 2020 diff hist +194 Frequently Asked Questions →Publications acknowledging the Nanofab: added code citing info Tag: Visual edit
- 12:40, 19 February 2020 diff hist +170 m Frequently Asked Questions →Where do I get these supplies for my lab?: link to UCBS sotrerooms Tag: Visual edit
- 12:35, 19 February 2020 diff hist +164 m Wet Benches →Detailed Specifications: added temp. check, minor rearrange Tag: Visual edit
- 12:21, 19 February 2020 diff hist +79 Ovens - Overview of All Lab Ovens added heramtherm max temp Tag: Visual edit
- 12:16, 19 February 2020 diff hist +81 Ovens - Overview of All Lab Ovens added SUM link for HeraTherm Tag: Visual edit
- 15:00, 18 February 2020 diff hist -276 m Template:Announcements deleted SUM testing
- 11:49, 16 February 2020 diff hist +13 Brian Thibeault updated position title
- 11:58, 12 February 2020 diff hist +16 Template:Announcements moved N2 DryBox to top, since it's imminent
- 11:54, 12 February 2020 diff hist +11 m Template:Announcements →ASML Maintenance: March 30th: minor text
- 11:53, 12 February 2020 diff hist +82 Template:Announcements updated GCA posts to 5-equals instead of 4
- 11:52, 12 February 2020 diff hist +28 Template:Announcements →SignupMonkey Testing: Fri Feb 7th, 7am: updated to 17th
- 20:03, 10 February 2020 diff hist -18 Ashers (Technics PEII) added model to Tool panel
- 19:40, 10 February 2020 diff hist -40 RIE 5 (PlasmaTherm) added model to Tool panel
- 19:33, 10 February 2020 diff hist -26 CAIBE (Oxford Ion Mill) added model to Tool panel
- 13:05, 31 January 2020 diff hist +48 Frequently Asked Questions →Publications acknowledging the Nanofab: added "local UCSB researchers" Tag: Visual edit
- 00:04, 30 January 2020 diff hist +248 Template:Announcements SUM testing feb 7
- 18:14, 28 January 2020 diff hist +9 m UCSB NanoFab Microscope Training →General Focusing: reorg danger of crashing at top Tag: Visual edit
- 18:12, 28 January 2020 diff hist +79 m UCSB NanoFab Microscope Training →Focusing on a sample with no features (Focus Stop): caption update Tag: Visual edit
- 18:10, 28 January 2020 diff hist +229 UCSB NanoFab Microscope Training added F-stop image to table in the F-stop section Tag: Visual edit: Switched
- 18:06, 28 January 2020 diff hist +85 N File:Microscope Training - UScope F-stop example annotated 1000px.png current
- 11:38, 28 January 2020 diff hist +2 m ICP Etching Recipes →ARC Etching: DUV-42P or AR6: formatting Tag: Visual edit
- 11:36, 28 January 2020 diff hist +96 m ICP Etching Recipes →Photoresist and ARC etching: added names for contact for etch rates Tag: Visual edit
- 17:09, 27 January 2020 diff hist +125 Frequently Asked Questions →Bring a new chemical/material into the lab: clarified requiremnt to ask brianT Tag: Visual edit
- 08:30, 27 January 2020 diff hist -154 Template:Announcements shortened ASML
- 18:00, 23 January 2020 diff hist +139 Test Data of etching SiO2 with CHF3/CF4-ICP1 added row explaining chamber clean. Tag: Visual edit
- 20:51, 22 January 2020 diff hist +117 UCSB NanoFab Microscope Training →Shadow Iris/Aperture for Focusing: added technical term “focus stop” Tag: Visual edit
- 12:11, 22 January 2020 diff hist +1,235 Microscopes links to Amscope & FIJI Tag: Visual edit: Switched
- 10:48, 22 January 2020 diff hist +64 Filmetrics F40-UV Microscope-Mounted →About: add BHJML model Tag: Visual edit
- 01:48, 19 January 2020 diff hist +433 Calculators + Utilities →Analysis Programs: added AmScope calibration file Tag: Visual edit
- 13:55, 18 January 2020 diff hist +4 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to github repo Tag: Visual edit
- 13:55, 18 January 2020 diff hist +10 Stepper 3 (ASML DUV) moved UCSB Test reticles to "Design & Fabrication Tools" section Tag: Visual edit: Switched
- 13:53, 18 January 2020 diff hist +198 Stepper 3 (ASML DUV) moved Mask Making Guidelines to "Design Tools" section Tag: Visual edit
- 09:03, 17 January 2020 diff hist +112 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added section headings Tag: Visual edit
- 09:02, 17 January 2020 diff hist +166 ICP Etching Recipes →SiO2 Etching (Panasonic 2): added section headings Tag: Visual edit
- 08:59, 17 January 2020 diff hist +46 ICP Etching Recipes →SiO2 Etching (Panasonic 1): added historical data section Tag: Visual edit
- 17:25, 16 January 2020 diff hist -36 Template:Announcements asml PM moved
- 17:03, 14 January 2020 diff hist +247 Template:Announcements ASML PM Feb
- 10:27, 13 January 2020 diff hist +18 Template:Announcements ASML up
- 09:13, 13 January 2020 diff hist -3 Template:Announcements ASML down
- 23:36, 9 January 2020 diff hist +57 m Calculators + Utilities →Refractive Indices Tag: Visual edit
- 11:00, 9 January 2020 diff hist -102 Template:Announcements →ASML is DOWN: Repair Expected Monday: system up
- 15:14, 2 January 2020 diff hist -13 Template:Announcements asml update
- 13:33, 2 January 2020 diff hist +24 m Template:Announcements update ASML title
- 13:33, 2 January 2020 diff hist -118 Template:Announcements removed CR=OPEN, ASML update
- 18:57, 1 January 2020 diff hist +587 PECVD Recipes Added section sub-headings Tag: Visual edit
- 18:42, 1 January 2020 diff hist +405 PECVD 2 (Advanced Vacuum) link to recipes page Tag: Visual edit
- 18:33, 1 January 2020 diff hist +2 m Test Data of etching SiO2 with CHF3/CF4 shortened link text Tag: Visual edit: Switched
- 14:00, 30 December 2019 diff hist -5 m Template:Announcements Undo revision 157023 by John d (talk) Tag: Undo
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