User contributions
Jump to navigation
Jump to search
- 15:26, 27 November 2019 diff hist +335 ICP-Etch (Unaxis VLR) added Cluster Config / oink to each modules tool page Tag: Visual edit
- 15:24, 27 November 2019 diff hist -32 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: formatting Tag: Visual edit
- 15:23, 27 November 2019 diff hist +368 ICP-PECVD (Unaxis VLR) added cluster configuration / link to each chamber's tool page Tag: Visual edit
- 14:24, 26 November 2019 diff hist +129 m CAIBE (Oxford Ion Mill) added CAIBE acronym expansion to description, for google searchability Tag: Visual edit
- 14:14, 26 November 2019 diff hist +8 m Atomic Layer Deposition (Oxford FlexAL) added CAIBE acronym Tag: Visual edit
- 14:13, 26 November 2019 diff hist -72 m Atomic Layer Deposition (Oxford FlexAL) typo/grammar Tag: Visual edit
- 14:12, 26 November 2019 diff hist +287 CAIBE (Oxford Ion Mill) added cluster config section Tag: Visual edit
- 14:10, 26 November 2019 diff hist +198 Atomic Layer Deposition (Oxford FlexAL) added cluster config section Tag: Visual edit
- 12:32, 22 November 2019 diff hist +102 PECVD Recipes →SiN deposition (Unaxis VLR): SiN recipes under development Tag: Visual edit
- 17:34, 21 November 2019 diff hist +79 m Stepper 3 (ASML DUV) moved/updated "service provider" Tag: Visual edit
- 12:17, 19 November 2019 diff hist +234 m Stepper Recipes →Anti-Reflective Coatings: links to BARC datasheets Tag: Visual edit
- 12:15, 19 November 2019 diff hist +358 Lithography Recipes added ARC row with links to DSK & DUV42P Tag: Visual edit: Switched
- 18:47, 13 November 2019 diff hist +11 m Aidan Hopkins added whitespace in About so tools list shows up correctly. Tag: Visual edit: Switched
- 18:44, 13 November 2019 diff hist +1 m Template:Announcements moved CR shutdown to top
- 13:29, 13 November 2019 diff hist +1 Automated Coat/Develop System (S-Cubed Flexi) added ToolID (link to SUM)
- 17:34, 12 November 2019 diff hist +1 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: saved pasword to end, not usually the culprit Tag: Visual edit
- 17:33, 12 November 2019 diff hist +198 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: cyberduck setting Tag: Visual edit
- 01:43, 8 November 2019 diff hist 0 File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx John d uploaded a new version of File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx current
- 01:37, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 01:35, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 15:05, 25 October 2019 diff hist +231 Chemical List added photolith chemicals Tag: Visual edit
- 14:49, 25 October 2019 diff hist +51 m Rapid Thermal Processor (SSI Solaris 150) comment clarification Tag: Visual edit
- 14:48, 25 October 2019 diff hist +33 m Rapid Thermal Processor (AET RX6) →Detailed Specifications: "Temp" --> "maximum temp" Tag: Visual edit
- 14:30, 25 October 2019 diff hist -51 IR Thermal Microscope (QFI) deleted erroneous email + phone
- 14:30, 25 October 2019 diff hist -5 IR Thermal Microscope (QFI) →Capabilities: updated objectives: nIR --> Vis + nIR Tag: Visual edit
- 16:26, 17 October 2019 diff hist +673 Frequently Asked Questions →General NanoFab Questions: take suplies from Nanofab? Tag: Visual edit
- 17:42, 11 October 2019 diff hist +149 Editing Tutorials →It won't let me "Save" my changes!: added Edit Source mode info/image Tag: Visual edit
- 17:40, 11 October 2019 diff hist +31 N File:Visual Editor - switch to source mode - pen button.png current
- 17:33, 11 October 2019 diff hist +35 m Editing Tutorials →Linking to a PDF or other file: borders on images Tag: Visual edit
- 17:32, 11 October 2019 diff hist +7 m Editing Tutorials →Linking to a PDF or other file: border and cropped image size Tag: Visual edit
- 17:32, 11 October 2019 diff hist 0 File:Editing Tutorials 4b- file info right click URL.png John d uploaded a new version of File:Editing Tutorials 4b- file info right click URL.png current
- 17:30, 11 October 2019 diff hist +272 m Editing Tutorials →Linking to a PDF or other file: minor update Tag: Visual edit
- 17:23, 11 October 2019 diff hist +385 Editing Tutorials →Linking to a PDF or other file: inserted images Tag: Visual edit
- 17:23, 11 October 2019 diff hist +44 N File:Editing Tutorials - 5- insert link into page.png current
- 17:21, 11 October 2019 diff hist +47 N File:Editing Tutorials 4b- file info right click URL.png
- 17:20, 11 October 2019 diff hist +40 N File:Editing Tutorials 3c- modifications etc..png current
- 17:17, 11 October 2019 diff hist +767 Editing Tutorials →Linking to a PDF or other file: more upload PDF... Tag: Visual edit
- 17:10, 11 October 2019 diff hist +512 Editing Tutorials →Basic Editing: start of "insert PDF" section Tag: Visual edit
- 16:56, 11 October 2019 diff hist -245 Template:Announcements removed ASML
- 16:40, 8 October 2019 diff hist +45 N File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png current
- 16:36, 8 October 2019 diff hist +50 N File:Editing Tutorials - Upload PDF - 2- choose file.png current
- 16:35, 8 October 2019 diff hist +49 N File:Editing Tutorials - Upload PDF - 1- upload file.png current
- 16:30, 8 October 2019 diff hist +73 Template:Tool minor updates
- 16:25, 8 October 2019 diff hist -24 m Automated Coat/Develop System (S-Cubed Flexi) fixed ToolTemplate 'type' arg
- 16:18, 8 October 2019 diff hist +56 m Stepper 3 (ASML DUV) →Troubleshooting and Recovery: minor grammar Tag: Visual edit
- 16:17, 8 October 2019 diff hist +67 m Stepper 3 (ASML DUV) toolTemplate added Litho links
- 16:16, 8 October 2019 diff hist +50 m Automated Coat/Develop System (S-Cubed Flexi) ToolTemplate: model & mfg. link
- 16:09, 8 October 2019 diff hist +1 m Editing Tutorials move TOC
- 16:07, 8 October 2019 diff hist +125 m Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): link to tool page Tag: Visual edit
- 16:05, 8 October 2019 diff hist +86 Tool List added S-Cubed Flexi to Wet processing tools as well Tag: Visual edit
- 16:04, 8 October 2019 diff hist -10 m Automated Coat/Develop System (S-Cubed Flexi) edit staff use notice Tag: Visual edit
- 16:03, 8 October 2019 diff hist +233 Automated Coat/Develop System (S-Cubed Flexi) added notice abotu staff use only Tag: Visual edit
- 16:00, 8 October 2019 diff hist +395 Automated Coat/Develop System (S-Cubed Flexi) added PR's and links to recipes Tag: Visual edit
- 15:49, 8 October 2019 diff hist +154 Lithography Recipes added S-Cubed coater section Tag: Visual edit
- 15:31, 8 October 2019 diff hist +49 Automated Coat/Develop System (S-Cubed Flexi) Added ToolTemplate - tool type and recepe
- 15:09, 8 October 2019 diff hist +397 N Automated Coat/Develop System (S-Cubed Flexi) initial page
- 15:07, 8 October 2019 diff hist -49 Stepper 1 (GCA 6300) delete email/phone
- 15:06, 8 October 2019 diff hist +86 Tool List →Lithography: link to S-Cubed Coater Tag: Visual edit
- 13:15, 4 October 2019 diff hist -12 Template:Announcements ASML down - TCU, minimal info
- 12:23, 4 October 2019 diff hist +1,487 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): Ru etch PDF Tag: Visual edit
- 12:11, 4 October 2019 diff hist +45 N File:194 Ru Etch O2,Cl2.pdf BillM - Pan2 Ru etch 2019-09-19 current
- 14:02, 2 October 2019 diff hist +122 DS-K101-304 Bake Temp. versus Develop Rate →Conditions: added 185*C current Tag: Visual edit
- 21:47, 27 September 2019 diff hist +19 m Gold Plating Bench added model
- 13:51, 25 September 2019 diff hist +52 Stepper Recipes →Positive Resist (ASML DUV): added Annular illum in notes Tag: Visual edit
- 10:54, 25 September 2019 diff hist +13 m Microscopes documentation -> procedures & documentation Tag: Visual edit
- 10:53, 25 September 2019 diff hist +395 Microscopes →Microscope #1: Olympus Optiphot-2 (Bay 3): renamed, moved to Nikon, added info, highlighted Microscope training Tag: Visual edit
- 09:46, 25 September 2019 diff hist +78 YES-150C-Various-Resists link to PR datasheets Tag: Visual edit
- 09:45, 25 September 2019 diff hist +52 YES-150C-Various-Resists Tag: Visual edit
- 09:44, 25 September 2019 diff hist +211 m YES-150C-Various-Resists description Tag: Visual edit
- 09:41, 25 September 2019 diff hist +10 m YES-SPR220-Various-Temps smaller figure Tag: Visual edit
- 09:41, 25 September 2019 diff hist -30 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): correct YES EcoClean link Tag: Visual edit
- 09:40, 25 September 2019 diff hist -113 Tool List →Dry Etch: correct YES EcoClean link Tag: Visual edit
- 09:39, 25 September 2019 diff hist 0 m Plasma Clean (YES EcoClean) John d moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect: spelling
- 19:22, 21 September 2019 diff hist 0 m Demis D. John mnor gif tweak Tag: Visual edit
- 19:21, 21 September 2019 diff hist +10 m Demis D. John moved gif
- 19:20, 21 September 2019 diff hist -1 m Demis D. John moved gif
- 16:12, 19 September 2019 diff hist +25 Frequently Asked Questions →Wifi Access in the Nanofab: header for "cell phone calls " section Tag: Visual edit
- 15:59, 19 September 2019 diff hist +263 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: add'l info about winscp & filezilla blocking Tag: Visual edit
- 08:39, 18 September 2019 diff hist +256 Template:Announcements ASML PM
- 07:42, 17 September 2019 diff hist -29 DS-K101-304 Bake Temp. versus Develop Rate courtesy brian burkett (omit Google) Tag: Visual edit
- 07:37, 17 September 2019 diff hist +450 N DS-K101-304 Bake Temp. versus Develop Rate added data from email form Sean Demura Tag: Visual edit
- 07:31, 17 September 2019 diff hist -558 Stepper Recipes →DS-K101-304: link to bake temp vs. dev. rate Tag: Visual edit
- 11:59, 12 September 2019 diff hist +14 Frequently Asked Questions →Authorship Tag: Visual edit
- 09:31, 12 September 2019 diff hist +124 Lift-Off with DUV Imaging + PMGI Underlayer added PMGI dissolution rate Tag: Visual edit
- 09:17, 12 September 2019 diff hist +367 Frequently Asked Questions →Publications acknowledging the Nanofab: updated, added separate "authorship" sub-heading Tag: Visual edit
- 15:17, 11 September 2019 diff hist +146 Plasma Activation (EVG 810) link to recipes page, not yet fixed Tool info link Tag: Visual edit
- 08:52, 11 September 2019 diff hist +54 Template:Announcements →Logitech Wafer Bonder: Down: 3 week estiamte for repalcement part delivery
- 08:52, 11 September 2019 diff hist +530 Frequently Asked Questions →Processing/Fabrication Questions: user manuals section Tag: Visual edit
- 12:06, 9 September 2019 diff hist +216 m Laser Etch Monitoring →Monitoring Photoresist Etch Rate: minor caption formatting Tag: Visual edit
- 12:02, 9 September 2019 diff hist +56 Laser Etch Monitoring →Monitoring Photoresist Etch Rate: updated captions Tag: Visual edit
- 11:26, 9 September 2019 diff hist +1,138 Laser Etch Monitoring added examples of etch monitoring Tag: Visual edit
- 11:24, 9 September 2019 diff hist +40 N File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg
- 11:18, 9 September 2019 diff hist +51 N File:ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg current
- 08:35, 9 September 2019 diff hist -7 m Tech Talks Seminar Series rename subheading Tag: Visual edit
- 08:34, 9 September 2019 diff hist +45 Tech Talks Seminar Series sub-heading for slides Tag: Visual edit
- 20:22, 7 September 2019 diff hist +281 Lift-Off with DUV Imaging + PMGI Underlayer Minor updates to process Tag: Visual edit
- 22:31, 6 September 2019 diff hist +231 Lift-Off with DUV Imaging + PMGI Underlayer →Examples: insert SEM Tag: Visual edit
- 22:30, 6 September 2019 diff hist +84 N File:PMGI+UV6 lift-off SEM - 2017-06-30 DJ.png current
- 22:18, 6 September 2019 diff hist +1 m Lithography Recipes →Lift-Off Techniques: fixed link
- 22:15, 6 September 2019 diff hist +202 m Lift-Off with DUV Imaging + PMGI Underlayer Tag: Visual edit