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- 17:40, 12 April 2022 diff hist +275 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to GaN etch recipes Tag: Visual edit
- 13:12, 12 April 2022 diff hist -632 Template:Announcements deleted MJB, EBL service
- 12:50, 12 April 2022 diff hist +3 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
- 12:49, 12 April 2022 diff hist +1 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher moved cals table to the top
- 21:08, 7 April 2022 diff hist +1,997 N ASML Stepper 3 - Job Creator initial description of usage and caveats current Tag: Visual edit
- 12:12, 7 April 2022 diff hist +105 Frequently Asked Questions →Authorship on Publications: added local technicians are put as authors Tag: Visual edit
- 10:17, 5 April 2022 diff hist +368 Template:Announcements added JEOL EBL service
- 10:48, 4 April 2022 diff hist +264 Template:Announcements added Lee's MJB service
- 12:55, 31 March 2022 diff hist +10 IBD: Calibrating Optical Thickness added approx year developed Tag: Visual edit
- 12:54, 31 March 2022 diff hist +241 IBD: Calibrating Optical Thickness minor updates Tag: Visual edit
- 12:51, 31 March 2022 diff hist 0 File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png John d uploaded a new version of File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png current
- 12:50, 31 March 2022 diff hist -42 Ion Beam Deposition (Veeco NEXUS) →Recipes: DBR Calibration-Method page created, removed the "avaialbel from process group" text Tag: Visual edit
- 12:49, 31 March 2022 diff hist +4,212 N IBD: Calibrating Optical Thickness initial version, full method described, images inserted. Tag: Visual edit
- 12:43, 31 March 2022 diff hist +97 N File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png current
- 12:36, 31 March 2022 diff hist +105 N File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 13:30, 29 March 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Recipes: format link to bold/underline Tag: Visual edit
- 05:20, 26 March 2022 diff hist +173 Microscopes note about turning turrets by hand Tag: Visual edit
- 05:19, 26 March 2022 diff hist +165 UCSB NanoFab Microscope Training added not about turning obj turrets by hand Tag: Visual edit
- 14:09, 23 March 2022 diff hist +341 Template:Announcements GCA service added
- 14:08, 23 March 2022 diff hist +228 Template:Announcements DUV Scope update
- 10:40, 23 March 2022 diff hist +4 m Calculators + Utilities →Example CAD File Tag: Visual edit
- 10:29, 23 March 2022 diff hist +36 Stepper 3 (ASML DUV) →Design & Fabrication Tools: Changed title to "Design Tools". JobCreator: mention remotely-uploadable, Tag: Visual edit
- 12:31, 22 March 2022 diff hist +164 m Maskless Aligner (Heidelberg MLA150) →Video Trainings: minor formatting Tag: Visual edit
- 12:29, 22 March 2022 diff hist +6 Dry Etching Recipes fixed link to FL-ICP recipes Tag: Visual edit
- 11:02, 22 March 2022 diff hist +30 m Optical Film Thickness (Nanometric) formatting "unavaialble" note Tag: Visual edit
- 10:59, 22 March 2022 diff hist +108 Optical Film Thickness (Nanometric) Note stating tool removed from lab. Tag: Visual edit
- 16:10, 21 March 2022 diff hist +66 COVID-19 User Policies masks optional, added "in progress" to full policies. Tag: Visual edit
- 16:08, 21 March 2022 diff hist -438 Template:Announcements New COVID letter from chancellor. deleted ASML maint. LEXT down.
- 17:06, 3 March 2022 diff hist +9 Chemical-Mechanical Polisher (Logitech) link to Logitech Bonder Tag: Visual edit
- 17:04, 3 March 2022 diff hist +126 Wafer Bonder (Logitech WBS7) →About: links to applicable tools Tag: Visual edit
- 12:45, 3 March 2022 diff hist 0 PECVD Recipes →Low-Stress SiN deposition (PECVD #2): bullet formatting Tag: Visual edit: Switched
- 12:31, 3 March 2022 diff hist +178 PECVD Recipes →PECVD 2 (Advanced Vacuum): link to LS-SiN plots Tag: Visual edit
- 12:28, 3 March 2022 diff hist 0 m OLD - PECVD2 Recipes John d moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect: this page is not linked anywhere, looks like 2014 data only current
- 15:06, 1 March 2022 diff hist +2 Tool List →Packaging: fixed FLip-scribe link Tag: Visual edit
- 15:06, 1 March 2022 diff hist 0 m Wafer Cleaver (PELCO Flip-Scribe) John d moved page Wafer Cleaver (PELCO LatticeAx) to Wafer Cleaver (PELCO Flip-Scribe) without leaving a redirect: wrong name
- 14:59, 1 March 2022 diff hist +646 KLayout Design Tips Added Editing Mode Tag: Visual edit
- 09:46, 1 March 2022 diff hist +303 Wafer Cleaver (PELCO Flip-Scribe) LatticeAx --> Flip-Scribe Tag: Visual edit
- 09:43, 1 March 2022 diff hist +115 Wafer Cleaver (PELCO Flip-Scribe) links to Mfg
- 09:35, 1 March 2022 diff hist +43 N File:LatticeAx.jpg Image of PELCO LAtticeAx tool current
- 09:27, 1 March 2022 diff hist +864 N Wafer Cleaver (PELCO Flip-Scribe) new tool page
- 09:20, 1 March 2022 diff hist +243 Tool List →Packaging: added sub-categories, Linked to new LatticeAx tool Tag: Visual edit
- 08:56, 1 March 2022 diff hist +130 m Contact Aligner (SUSS MA-6) →About: minor rearrangement Tag: Visual edit
- 08:52, 1 March 2022 diff hist +62 m Contact Aligner (SUSS MA-6) linked to SB6 Bonder page Tag: Visual edit
- 16:08, 28 February 2022 diff hist +462 Step Profilometer (KLA Tencor P-7) →Detailed Specifications: added basic info Tag: Visual edit
- 08:59, 26 February 2022 diff hist +27 m ICP Etching Recipes →Old Deleted Recipes: changed "don" to "supervisor" Tag: Visual edit
- 09:44, 21 February 2022 diff hist +108 Process Group - Remote Fabrication Jobs link to takss/priority list Tag: Visual edit
- 13:44, 17 February 2022 diff hist +327 ICP-PECVD (Unaxis VLR) →About: mention SiD4 config and expense/applicaiton Tag: Visual edit
- 13:43, 17 February 2022 diff hist +116 PECVD Recipes →ICP-PECVD (Unaxis VLR): mention cost/application to optics Tag: Visual edit
- 18:03, 16 February 2022 diff hist +340 Maskless Aligner (Heidelberg MLA150) added minimum fearture size and note on DSP transparent substrates Tag: Visual edit
- 11:48, 14 February 2022 diff hist +72 N File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current Tag: New redirect
- 11:48, 14 February 2022 diff hist 0 m File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current
- 11:47, 14 February 2022 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 13:49, 11 February 2022 diff hist +53 m ICP Etch 2 (Panasonic E626I) →Recipes Tag: Visual edit
- 13:48, 11 February 2022 diff hist +97 ICP Etch 1 (Panasonic E646V) separate process control section/link Tag: Visual edit
- 13:47, 11 February 2022 diff hist +59 ICP Etch 2 (Panasonic E626I) →Recipes: separate Process Control section/link Tag: Visual edit
- 13:24, 11 February 2022 diff hist +31 Test Data of etching SiO2 with CHF3/CF4 minor update to diamond experiemnt comment. Tag: Visual edit
- 13:23, 11 February 2022 diff hist -36 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): updated ICP1 and ICP2 with Process Control sections for SiO2 etch tests. Tag: Visual edit
- 13:22, 11 February 2022 diff hist +252 N MediaWiki:Deletereason-dropdown added common NanoFab reasons for deletion current
- 13:19, 11 February 2022 diff hist +504 Test Data of etching SiO2 with CHF3/CF4-ICP1 new section :pasted data from CHF3/CF4/O2 etch data
- 13:13, 11 February 2022 diff hist +22 ICP Etching Recipes →SiO2 Etch Historical Data: reanmed to include tool name Tag: Visual edit
- 13:12, 11 February 2022 diff hist -37 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): consolidated FL-ICP Prcoess Control data Tag: Visual edit
- 13:11, 11 February 2022 diff hist +493 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher pasted Ning's 2nd data table, hilighted recipe changes and comment about data being "in progress"
- 12:28, 11 February 2022 diff hist +1 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: moved historical data to top Tag: Visual edit
- 12:46, 4 February 2022 diff hist +260 Template:Announcements ASML maintenance
- 15:24, 1 February 2022 diff hist +3 m Autostep 200 Mask Making Guidance →Mask Layout Tag: Visual edit
- 15:23, 1 February 2022 diff hist +119 m Autostep 200 Mask Making Guidance →Photomask Ordering Info Tag: Visual edit
- 10:00, 1 February 2022 diff hist +327 Autostep 200 Mask Making Guidance →Photomask Ordering Info: added info Tag: Visual edit
- 09:39, 1 February 2022 diff hist +428 Autostep 200 Mask Making Guidance →Alignment Marks: adde Vernier CAD file Tag: Visual edit
- 09:37, 1 February 2022 diff hist +110 N File:Vernier Template.gds Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.
- 09:03, 1 February 2022 diff hist -14 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 17:30, 31 January 2022 diff hist +185 Autostep 200 Mask Making Guidance →Mask Layout: 2nd attempt to describe Shutter positioning Tag: Visual edit
- 17:19, 31 January 2022 diff hist +352 Autostep 200 Mask Making Guidance →Mask Layout: 1st attempt at describing shutter blades Tag: Visual edit
- 17:00, 31 January 2022 diff hist +172 Autostep 200 Mask Making Guidance →Mask Layout / Alignment Marks: split into Mask layout separate section Tag: Visual edit
- 16:55, 31 January 2022 diff hist +30 Autostep 200 Troubleshooting and Recovery →What to do if you cannot undo the problem or need some help: link to each contact, update to use "Report tool issue' button on SUM current Tag: Visual edit
- 17:09, 28 January 2022 diff hist +358 m Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher) Tag: Visual edit
- 17:06, 28 January 2022 diff hist +805 Oxford ICP Etcher - Process Control Data updated tables, split into "sample size dpeendence" table Tag: Visual edit
- 21:43, 27 January 2022 diff hist +356 MLA150 - Troubleshooting →Solutions for small substrates: added THomas Messner's solution: disable Overview Camera before starting exposure Tag: Visual edit
- 11:42, 24 January 2022 diff hist -26 Packaging Recipes →Blade Exposure Calculation: image size increase Tag: Visual edit: Switched
- 11:13, 24 January 2022 diff hist +40 m Packaging Recipes →Anatomy of a Blade Tag: Visual edit
- 10:55, 21 January 2022 diff hist +346 Atomic Layer Deposition Recipes →Temperature: mentioned "thermal" and slower rate. Tag: Visual edit
- 10:53, 21 January 2022 diff hist +661 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added terms "Plasma/Thermal/Ozone". Also added Chamber 1 Al2O3 Tag: Visual edit
- 23:12, 13 January 2022 diff hist +133 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): GaN ALE section started Tag: Visual edit
- 23:11, 13 January 2022 diff hist +238 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): NOTE: Rates in these 2021-09 characterizations are lower than current due to a software timing bug, fixed in 2022-01 Tag: Visual edit
- 23:09, 13 January 2022 diff hist +174 Oxford ICP Etcher - Process Control Data described basic 'fab process Tag: Visual edit
- 23:07, 13 January 2022 diff hist +55 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher) Tag: Visual edit
- 23:05, 13 January 2022 diff hist -17 m Oxford ICP Etcher - Process Control Data removed WIP Tag: Visual edit
- 23:03, 13 January 2022 diff hist +56 Oxford ICP Etcher - Process Control Data added SEM images for Jan 11th-12th cals Tag: Visual edit
- 23:03, 13 January 2022 diff hist +36 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf Oxford ICP Etch Cals03 current
- 22:55, 13 January 2022 diff hist +33 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf Oxford ICP Cal SEMs current
- 22:51, 13 January 2022 diff hist +161 Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher): updated SEM 1 Tag: Visual edit
- 22:51, 13 January 2022 diff hist +38 N File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf Oxford ICP Etch Cal SEMs current
- 21:43, 13 January 2022 diff hist +84 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
- 21:41, 13 January 2022 diff hist +271 MLA150 - Troubleshooting →Out Of Focus Exposures: Boris’ solutionnadded Tag: Visual edit
- 14:24, 13 January 2022 diff hist -1,009 Oxford ICP Etcher - Process Control Data in progress InP Ridge Etch Tag: Visual edit
- 14:21, 13 January 2022 diff hist +1,617 N Oxford ICP Etcher - Process Control Data pasted ICP2 data table Tag: Visual edit: Switched
- 14:21, 13 January 2022 diff hist +156 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: link to Process Control Data Tag: Visual edit
- 14:20, 13 January 2022 diff hist +3 ICP Etching Recipes →Historical Data (Oxford ICP Etcher): changed to "process control data" Tag: Visual edit
- 14:18, 13 January 2022 diff hist +208 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to Historical Data Tag: Visual edit
- 15:14, 12 January 2022 diff hist +136 Frequently Asked Questions →Cell Phone Calls: mention eduroam network Tag: Visual edit
- 15:11, 12 January 2022 diff hist +189 m Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular) Tag: Visual edit