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- 07:30, 15 December 2021 diff hist +83 Nanofab Staff Internal Pages →Old / Defunct: temp. link to dep data Tag: Visual edit
- 06:10, 15 December 2021 diff hist +1,908 MLA150 - Troubleshooting →Out Of Focus Exposures: Debugging section Tag: Visual edit
- 09:31, 14 December 2021 diff hist +598 Old Deposition Data - NastaziaM 2021-11-22 modified PECVD1 and PECVD 1 for same titles as old data current Tag: Visual edit
- 09:20, 14 December 2021 diff hist +24,230 Old Deposition Data - NastaziaM 2021-11-22 pasted all old data from https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes Tag: Visual edit
- 09:02, 14 December 2021 diff hist +10 m Nanofab Staff Internal Pages Tag: Visual edit
- 09:21, 11 December 2021 diff hist +115 m ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): linnks to new DSE & FL_ICP recipes Tag: Visual edit
- 09:20, 11 December 2021 diff hist +331 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): links for GaAs, GaSb Tag: Visual edit
- 12:16, 8 December 2021 diff hist +504 N MA6 Backside Alignment - Allowed Mark Locations 100-mm BSA chuck with cutouts measurements current Tag: Visual edit
- 12:15, 8 December 2021 diff hist +67 N File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg current
- 12:12, 8 December 2021 diff hist +53 Contact Aligner (SUSS MA-6) →Documentation: link to "backside alignment - allowed mark locations" Tag: Visual edit
- 12:10, 8 December 2021 diff hist +2 m Contact Aligner (SUSS MA-6) minor wording Tag: Visual edit
- 12:11, 7 December 2021 diff hist 0 m Template:Announcements →New COVID Protocols: minor formatting
- 12:10, 7 December 2021 diff hist -1,191 Template:Announcements delete old Weekly-Testing & COVID-Protocols & OxfordICP messages
- 11:01, 1 December 2021 diff hist +439 DSEIII (PlasmaTherm/Deep Silicon Etcher) added section for Edge-Bead removal of PR etc Tag: Visual edit
- 11:27, 24 November 2021 diff hist +164 m Photolithography - Improving Adhesion Photoresist Adhesion mentioned lift-off delam Tag: Visual edit
- 11:25, 24 November 2021 diff hist +26 m Lithography Recipes →General Photolithography Techniques Tag: Visual edit
- 11:24, 24 November 2021 diff hist +180 Lithography Recipes added General Photolitho section to TOC Tag: Visual edit
- 11:22, 24 November 2021 diff hist +1,309 N Photolithography - Manual Edge-Bead Removal Techniques added razor, EBR100 and lithographic methods Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Lithography Recipes →General Photolithography Techniques: changed linked page title Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Photolithography - Improving Adhesion Photoresist Adhesion John d moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect: more generalized page title
- 11:11, 24 November 2021 diff hist +1,119 N Photolithography - Improving Adhesion Photoresist Adhesion added Underlayers for PR adhesion Tag: Visual edit
- 11:05, 24 November 2021 diff hist +447 Lithography Recipes Added "General Photlith techniques" section and links to 2 pages Tag: Visual edit
- 21:43, 22 November 2021 diff hist +938 Process Group - Billing Instructions added "Billing rates" section current Tag: Visual edit
- 13:45, 22 November 2021 diff hist +7 N Old Deposition Data - NastaziaM 2021-11-22 Created page with "Testing" Tag: Visual edit
- 13:45, 22 November 2021 diff hist +31 Nanofab Staff Internal Pages →Process Group: link to old dep data Tag: Visual edit
- 15:09, 18 November 2021 diff hist +527 Surface Analysis (KLA/Tencor Surfscan) added exmaple of low particle count Tag: Visual edit
- 15:07, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G2.png current
- 15:05, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G4.png current
- 14:35, 15 November 2021 diff hist +207 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick added POLOS cleaning step Tag: Visual edit
- 14:33, 15 November 2021 diff hist +172 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick link to Logitech Wafer Bonder Tag: Visual edit
- 08:43, 12 November 2021 diff hist +379 KLayout Design Tips force TOC at top, minor updates
- 08:29, 12 November 2021 diff hist +338 Maskless Aligner (Heidelberg MLA150) "updates to training video" links below video training Tag: Visual edit
- 12:23, 11 November 2021 diff hist +1,060 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: discussion of "process window" and "tolerance" Tag: Visual edit
- 16:47, 4 November 2021 diff hist -181 Template:Announcements Removed fl-icp
- 11:17, 4 November 2021 diff hist +377 PECVD Recipes →Cleaning Recipes (PECVD #2): added cleaning times Tag: Visual edit
- 11:04, 4 November 2021 diff hist +91 m PECVD 2 (Advanced Vacuum) →About: link to LSNitride data Tag: Visual edit
- 11:03, 4 November 2021 diff hist +179 PECVD 2 (Advanced Vacuum) →About: separated specs into sub-sections Tag: Visual edit
- 10:53, 4 November 2021 diff hist -1 m Template:Announcements
- 10:53, 4 November 2021 diff hist +181 Template:Announcements FL-ICP down
- 10:45, 4 November 2021 diff hist +90 Stepper 3 (ASML DUV) →Process Information: added Max wafer thickness Tag: Visual edit
- 12:08, 1 November 2021 diff hist +63 Resistivity Mapper (CDE RESMAP) added CSV export Tag: Visual edit
- 08:58, 1 November 2021 diff hist +392 MLA150 - Troubleshooting →Unexpected Behavior: moved to top. Added Reconverting CAD file. Tag: Visual edit
- 08:51, 1 November 2021 diff hist 0 File:MLA Quarter-Wafer Alignment.jpg John d uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg current
- 11:21, 28 October 2021 diff hist +213 Lift-Off with DUV Imaging + PMGI Underlayer →Process Limits: suggest LOL, PMGI double-spin etc. Tag: Visual edit
- 21:51, 27 October 2021 diff hist -5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration corrected max. expansion to 200pm (current machine setting) Tag: Visual edit
- 21:49, 27 October 2021 diff hist +837 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added Wafer Expansion workaround Tag: Visual edit
- 12:15, 22 October 2021 diff hist +229 N Template:StaffInfoSecondary DJ Copy of NickL's "StaffInfoSecondary" template
- 12:13, 22 October 2021 diff hist +10,286 N Template:Tool2 copy of NickL's "Tool2" template
- 12:12, 22 October 2021 diff hist +659 N Template:StaffInfo DJ copy of original StaffInfo tempalte
- 11:42, 22 October 2021 diff hist +183 Template:StaffInfo added descriptive info about this template. current
- 11:20, 22 October 2021 diff hist +193 Services →Important Info on Fabrication Services: added link to publications policy Tag: Visual edit
- 17:01, 21 October 2021 diff hist -359 Template:Announcements deleted wifi maint.
- 07:22, 19 October 2021 diff hist +359 Template:Announcements wifi maint. oct 21 6a
- 16:25, 12 October 2021 diff hist +567 Digital Microscope (Olympus DSX1000) updated description Tag: Visual edit
- 11:50, 12 October 2021 diff hist +250 Wet Benches →Wafer Toxic Corrosive Benches: added photo of the various wafer holders Tag: Visual edit
- 11:49, 12 October 2021 diff hist +75 N File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg current
- 09:21, 12 October 2021 diff hist -1 m Template:Announcements
- 09:20, 12 October 2021 diff hist -235 Template:Announcements deleted Microscope service
- 17:33, 11 October 2021 diff hist +39 COVID-19 User Policies →NanoFab Policies: mentioned that masks are provided, for Thermo-Fischer vendor Tag: Visual edit
- 14:01, 8 October 2021 diff hist +293 ICP Etching Recipes →InP Ridge Etch (Oxford ICP Etcher): links to PDFs of etch characterizations Tag: Visual edit
- 13:59, 8 October 2021 diff hist +111 N File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08
- 13:55, 8 October 2021 diff hist +93 N File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao
- 13:53, 8 October 2021 diff hist +128 Dry Etching Recipes link to Oxford InP/PnGaAsP recipes Tag: Visual edit
- 16:23, 7 October 2021 diff hist +253 Template:Announcements microscopy tech service
- 09:54, 7 October 2021 diff hist 0 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: fix indent Tag: Visual edit: Switched
- 09:53, 7 October 2021 diff hist +132 Stepper 3 (ASML DUV) →Operating Procedures: added Mask Making to "Design/Fab tools" Tag: Visual edit
- 09:36, 7 October 2021 diff hist +45 Calculators + Utilities →Python Scripts: "pythonXY" --> "Spyder" Tag: Visual edit
- 10:39, 4 October 2021 diff hist -264 Template:Announcements deleted ASML PM
- 17:13, 1 October 2021 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications Tag: Visual edit
- 17:12, 1 October 2021 diff hist +318 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: mentioned 5mm exlcusion & wafers breaking Tag: Visual edit
- 17:10, 1 October 2021 diff hist +289 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added small-sample mounting notes Tag: Visual edit
- 17:07, 1 October 2021 diff hist -941 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) deleted old mounting/Bosch process info Tag: Visual edit
- 08:00, 30 September 2021 diff hist -1 m Template:Announcements
- 08:00, 30 September 2021 diff hist -122 Template:Announcements Oxford ICP
- 21:30, 29 September 2021 diff hist -7 m Template:News →Oxford PlasmaPro ICP Etcher Cobra installed
- 21:29, 29 September 2021 diff hist -10 m Template:News
- 16:09, 29 September 2021 diff hist -23 m Maskless Aligner (Heidelberg MLA150) fixed HIMT link Tag: Visual edit
- 12:13, 29 September 2021 diff hist +22 m ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): listed etch gasses used Tag: Visual edit
- 11:59, 29 September 2021 diff hist +143 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated ICP/RF powers Tag: Visual edit
- 11:27, 29 September 2021 diff hist +475 Template:News ADDED OXFROD ICP etch
- 11:19, 29 September 2021 diff hist +24 Oxford ICP Etcher (PlasmaPro 100 Cobra) updates to allowed materials Tag: Visual edit
- 10:45, 29 September 2021 diff hist +124 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: added image, notes on substrate materials "discuss with staff" Tag: Visual edit
- 10:42, 29 September 2021 diff hist 0 File:OxfordPlasmaPro.jpg John d uploaded a new version of File:OxfordPlasmaPro.jpg current
- 10:41, 29 September 2021 diff hist +36 N File:OxfordPlasmaPro.jpg Photo from User Manual
- 19:19, 28 September 2021 diff hist +15 m MLA150 - Troubleshooting →Aligning to a quarter-wafer Tag: Visual edit
- 19:18, 28 September 2021 diff hist +182 MLA150 - Troubleshooting →Aligning to a quarter-wafer: inserted schematic Tag: Visual edit
- 19:16, 28 September 2021 diff hist +68 N File:MLA Quarter-Wafer Alignment.jpg
- 19:01, 28 September 2021 diff hist +183 MLA150 - Troubleshooting →Aligning to a quarter-wafer: minor description update Tag: Visual edit
- 18:57, 28 September 2021 diff hist +2,034 MLA150 - Troubleshooting added ALigning to a Quarter Wafer Tag: Visual edit
- 21:39, 27 September 2021 diff hist +2 m MLA150 - CAD Files and Templates Tag: Visual edit
- 21:39, 27 September 2021 diff hist +23 m MLA150 - CAD Files and Templates →Resolution and Calibration Patterns Tag: Visual edit
- 21:37, 27 September 2021 diff hist -1 m Maskless Aligner (Heidelberg MLA150) →Troubleshooting & Known Bugs
- 21:36, 27 September 2021 diff hist +37 m Maskless Aligner (Heidelberg MLA150) →Detailed Specifications Tag: Visual edit
- 21:35, 27 September 2021 diff hist +105 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: renaming/reorg for clarify Tag: Visual edit: Switched
- 17:02, 27 September 2021 diff hist +60 ICP Etching Recipes →Photoresist & ARC (Fluorine ICP Etcher): subheadings for BARC and PR strip Tag: Visual edit
- 22:10, 23 September 2021 diff hist -44 Template:Publications →Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask: fixed FL-ICP link
- 15:57, 23 September 2021 diff hist +91 Template:Announcements wifi update
- 10:26, 23 September 2021 diff hist -83 Dicing Saw (ADT) →Detailed Specifications: deleted old SOP, Lee's SOP only Tag: Visual edit
- 10:14, 23 September 2021 diff hist -64 Dicing Saw (ADT) →Recipes: corrected link to recipes Tag: Visual edit
- 10:11, 23 September 2021 diff hist +17 Packaging Recipes →Dicing Saw Recipes (ADT 7100): link to Thermocarbon website Tag: Visual edit