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- 16:54, 24 April 2018 diff hist +267 m Editing Tutorials →Basic Editing: disclaminer about antiquated code. Tag: Visual edit
- 16:45, 24 April 2018 diff hist +66 Template:Announcements stepper2 update
- 12:51, 24 April 2018 diff hist -26 Template:Announcements stepper #2 down, pecvd update, deleted EB4
- 11:11, 18 April 2018 diff hist +147 m Frequently Asked Questions →I need help using a tool, where do I get help?: when in doubt, ask for help Tag: Visual edit
- 10:48, 18 April 2018 diff hist +14 m Frequently Asked Questions →I need help using a tool, where do I get help?: link to tool list Tag: Visual edit
- 10:48, 18 April 2018 diff hist +874 Frequently Asked Questions how to find equipment manuals etc. Tag: Visual edit
- 13:01, 17 April 2018 diff hist +385 CDE ResMap Quick-Start instructions photo of measurement locations current Tag: Visual edit
- 12:59, 17 April 2018 diff hist +33 N File:CDE ResMap Quarter Wafer meas location - 800px annot quarterwf.png current
- 12:57, 17 April 2018 diff hist +30 N File:CDE ResMap Full Wafer meas location - IMG 0112 - 800px annot.png current
- 12:55, 17 April 2018 diff hist +946 N CDE ResMap Quick-Start instructions initial instrucitons Tag: Visual edit
- 12:42, 17 April 2018 diff hist +66 Resistivity Mapper (CDE RESMAP) link to quick-start instructions page Tag: Visual edit
- 13:33, 16 April 2018 diff hist +37 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Power Source column Tag: Visual edit
- 13:32, 16 April 2018 diff hist +223 Sputtering Recipes →Sputter 5 (Lesker AXXIS): link to SUM page for installed targets Tag: Visual edit
- 13:31, 16 April 2018 diff hist +128 Sputtering Recipes →Sputter 5 (Lesker AXXIS): added Al2O3 and Power SOurce column Tag: Visual edit
- 13:26, 16 April 2018 diff hist -51 Sputtering Recipes update comment indicating incorrect title Tag: Visual edit: Switched
- 10:04, 16 April 2018 diff hist +65 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): corrected "BHF 49%" --> "BHF" Tag: Visual edit
- 10:00, 16 April 2018 diff hist +461 Wet Etching Recipes →References: link to transene chemical compatibility chart Tag: Visual edit
- 17:53, 13 April 2018 diff hist +578 Template:Announcements PECVD#2 retraining, 90°C Hotplate down
- 10:11, 13 April 2018 diff hist +237 Chemical List - OLD 2018-09-05 →Lithography Chemicals: link to Recipes > Litho > Datasheets Tag: Visual edit
- 07:10, 13 April 2018 diff hist +3 m Tool List minor description update Tag: Visual edit
- 07:08, 13 April 2018 diff hist 0 MediaWiki:Sidebar reorder chemicals lower
- 07:07, 13 April 2018 diff hist +12 MediaWiki:Sidebar MSDS --> "Chemicals + MSDS"
- 07:06, 13 April 2018 diff hist +347 Chemical List - OLD 2018-09-05 updated info Tag: Visual edit
- 07:01, 13 April 2018 diff hist +108 Tool List →Wet Processing: link to Chemical List page Tag: Visual edit
- 13:48, 12 April 2018 diff hist -257 Template:Announcements deleted blueM & ICP2 up posts
- 13:48, 12 April 2018 diff hist +292 Template:Announcements rie5 down 4/19
- 13:26, 9 April 2018 diff hist +45 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): HF selective to PR Tag: Visual edit
- 13:25, 9 April 2018 diff hist -143 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): removed duplicate row Tag: Visual edit
- 13:09, 9 April 2018 diff hist +134 Calculators + Utilities →Scripts + Programs: put analysis prgs at top Tag: Visual edit
- 12:55, 9 April 2018 diff hist +204 Calculators + Utilities link to ProFilmOnline Tag: Visual edit
- 12:41, 9 April 2018 diff hist +51 Calculators + Utilities move nk.py to "Scripts" section Tag: Visual edit
- 12:40, 9 April 2018 diff hist +175 Calculators + Utilities add http://www.lelandstanfordjunior.com Tag: Visual edit
- 12:37, 9 April 2018 diff hist +21 Tube Furnace (Tystar 8300) →About: low-temp ox on tube 1 Tag: Visual edit
- 12:36, 9 April 2018 diff hist +12 m Tube Furnace (Tystar 8300) →About: minor rewording Tag: Visual edit
- 12:33, 9 April 2018 diff hist +1 Template:Tool 300x350px max
- 12:32, 9 April 2018 diff hist -1 Template:Tool image --> file syntax
- 12:29, 9 April 2018 diff hist +4 Template:Tool set height on image
- 12:28, 9 April 2018 diff hist +292 Tube Furnace (Tystar 8300) link to thermal recipes page, minor tweaks otherwsie Tag: Visual edit
- 12:20, 9 April 2018 diff hist 0 m Thermal Processing Recipes →1050°C Dry Oxidation: correction to pressures Tag: Visual edit
- 12:19, 9 April 2018 diff hist -8 m Thermal Processing Recipes →1050°C Wet Oxidation: image adjust Tag: Visual edit
- 12:17, 9 April 2018 diff hist +583 Thermal Processing Recipes →Thermal Oxidation of Silicon: added simulation/data for Wet1050 and Dry1050 Tag: Visual edit: Switched
- 12:13, 9 April 2018 diff hist +52 N File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09 zoom.png current
- 12:11, 9 April 2018 diff hist +52 N File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09.png current
- 12:09, 9 April 2018 diff hist +32 N File:TyStar Thermal Oxidations - DryOx 1050°C 2018-04-09.png current
- 10:40, 9 April 2018 diff hist +205 DSEIII (PlasmaTherm/Deep Silicon Etcher) →Recipes: linked to recipes Tag: Visual edit
- 00:07, 9 April 2018 diff hist -15 m ICP Etching Recipes →High Rate Bosch Etch (DSEIII): removed test page Tag: Visual edit
- 00:06, 9 April 2018 diff hist -17 m Frequently Asked Questions →A recipe is indicated as "A", Available, where do I find info on this recipe?: typo Tag: Visual edit
- 09:57, 6 April 2018 diff hist +352 ICP Etch 2 (Panasonic E626I) →Documentation: added recipes section Tag: Visual edit
- 09:43, 6 April 2018 diff hist -78 m Dry Etching Recipes deleted test links Tag: Visual edit
- 09:36, 6 April 2018 diff hist -50 ICP Etching Recipes →New test recipe: testing 2 Tag: Visual edit
- 09:33, 6 April 2018 diff hist +67 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): TESTING Tag: Visual edit
- 09:31, 6 April 2018 diff hist +78 Dry Etching Recipes testing Tag: Visual edit
- 09:29, 6 April 2018 diff hist +15 ICP Etching Recipes link to test page Tag: Visual edit
- 10:49, 5 April 2018 diff hist -64 Template:Announcements bluem up
- 09:26, 5 April 2018 diff hist +55 Template:Announcements ibd removed, bluem fuse blown
- 10:21, 2 April 2018 diff hist +5 Template:Announcements icp2 update
- 14:59, 1 April 2018 diff hist +44 Template:Announcements icp2 down
- 21:31, 29 March 2018 diff hist +353 m Template:Announcements edit comments
- 21:09, 28 March 2018 diff hist -158 Template:Announcements IBD up
- 12:29, 28 March 2018 diff hist +186 Template:Announcements asml leveling error
- 11:16, 28 March 2018 diff hist -4 Template:Announcements IBD update
- 09:48, 28 March 2018 diff hist +224 Stepper 3 (ASML DUV) →Troubleshooting and Recovery: link to "ASML 5500: Choose Marks for Prealignment" Tag: Visual edit
- 09:47, 28 March 2018 diff hist +849 N ASML 5500: Choose Marks for Prealignment initial, instructions on how to edit Optical Prealignment alignment choice Tag: Visual edit
- 07:48, 28 March 2018 diff hist +6 m Template:Announcements →IBD: Burning smell from failed supply: grammar
- 07:32, 28 March 2018 diff hist +270 Template:Announcements IBD burning smell.
- 21:43, 27 March 2018 diff hist +166 Template:Announcements adt update
- 12:14, 26 March 2018 diff hist +2 m Template:Announcements →EBeam #4: Re-Training needed: needed --> required
- 12:13, 26 March 2018 diff hist -146 Template:Announcements →EBeam #4: Down for Upgrades: title = UP, retraining
- 12:12, 26 March 2018 diff hist -183 Template:Announcements delete dse-iii wafer stuck
- 12:12, 26 March 2018 diff hist +20 Template:Announcements →ADT Dicing Saw: Software Problem: fixed, note on recent recipes
- 10:49, 26 March 2018 diff hist +93 m Editing Tutorials →Basic Editing: [back] to cancel changes Tag: Visual edit
- 10:30, 26 March 2018 diff hist +9 N File:Home Feed - ResearchGate.pdf current
- 19:55, 24 March 2018 diff hist 0 m Frequently Asked Questions →How do I get a login to the wiki?: cleaned up Tag: Visual edit
- 19:53, 24 March 2018 diff hist +720 Frequently Asked Questions →How do I get a login to the wiki?: Instructions to Create a Login Tag: Visual edit
- 19:48, 24 March 2018 diff hist +113 m Editing Tutorials →Basic Editing: minor updates Tag: Visual edit
- 14:18, 24 March 2018 diff hist +191 Template:Announcements adt software
- 14:10, 24 March 2018 diff hist +183 Template:Announcements dse wafer stuck.
- 09:59, 24 March 2018 diff hist +462 Frequently Asked Questions →Processing/Fabrication Questions: explain/link to photolith datasheets Tag: Visual edit
- 09:51, 24 March 2018 diff hist +238 Frequently Asked Questions →Wiki Questions: instructions to create wiki login Tag: Visual edit
- 09:46, 24 March 2018 diff hist +119 Frequently Asked Questions split into nanofab/processing/wiki question sections Tag: Visual edit
- 09:42, 24 March 2018 diff hist +30 Lithography Recipes →Chemical Datasheets: added "AZ EBR". no link yet Tag: Visual edit
- 21:15, 22 March 2018 diff hist -546 m Template:Announcements remove old items
- 12:41, 21 March 2018 diff hist +16 m Template:Announcements →NanoFab Shutdown: Thurs 3/22 for 1.5hrs: add date
- 12:41, 21 March 2018 diff hist +2 m Template:Announcements →NanoFab Shutdown: Wed 3/22 for 1.5hrs: correct day
- 12:41, 21 March 2018 diff hist -23 Template:Announcements →NanoFab Shutdown 3/21 for 1.5hrs: 3/22 update
- 23:59, 20 March 2018 diff hist -51 m ASML 5500: Recovering from a Typo in Reticle ID sig test revert current
- 23:58, 20 March 2018 diff hist +51 m ASML 5500: Recovering from a Typo in Reticle ID sig test
- 23:58, 20 March 2018 diff hist +297 ASML 5500: Recovering from an Error explained that wafers will be transferred thru stepper Tag: Visual edit
- 23:44, 20 March 2018 diff hist +1 m Template:Announcements sigfix
- 23:43, 20 March 2018 diff hist -28 m Template:Announcements signature test
- 23:43, 20 March 2018 diff hist +21 N MediaWiki:Signature removed user talk link current
- 23:37, 20 March 2018 diff hist +411 Template:Announcements nanofba shutdown, dse update
- 13:57, 20 March 2018 diff hist -54 Template:Announcements sig fix
- 13:57, 20 March 2018 diff hist +357 Template:Announcements DSE repair, EB4 update
- 13:35, 19 March 2018 diff hist +95 Stepper 3 (ASML DUV) →Operating Procedures: recovering from error Tag: Visual edit
- 13:33, 19 March 2018 diff hist +461 N ASML 5500: Recovering from an Error initial, copied from "recover from reticle ID typo"
- 13:23, 19 March 2018 diff hist -497 Template:Announcements pecvd2 update, stepper maint. removed
- 11:38, 19 March 2018 diff hist +198 Stepper 3 (ASML DUV) →Operating Procedures: link to reticle id error Tag: Visual edit
- 11:38, 19 March 2018 diff hist +576 N ASML 5500: Recovering from a Typo in Reticle ID procedure to abort batch Tag: Visual edit
- 17:26, 16 March 2018 diff hist +30 m Template:Announcements pecvd update title
- 17:24, 16 March 2018 diff hist +60 Template:Announcements pecvd2 update
- 14:06, 16 March 2018 diff hist +32 Vacuum Deposition Recipes IBD Al2O3 "R" link Tag: Visual edit
- 14:03, 16 March 2018 diff hist +40 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications Tag: Visual edit
- 13:59, 16 March 2018 diff hist +159 Tool List →Lithography: link to available PRs Tag: Visual edit
- 13:45, 16 March 2018 diff hist +99 Dry Etching Recipes ICP2 AL2O3 R link Tag: Visual edit
- 13:44, 16 March 2018 diff hist +95 Dry Etching Recipes ICP2 PR/ARC reipce link Tag: Visual edit
- 13:43, 16 March 2018 diff hist +465 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): PR & ARC recipes added Tag: Visual edit
- 11:04, 16 March 2018 diff hist +31 Template:Announcements →Stepper #1 Maintenance: maint done
- 11:03, 16 March 2018 diff hist -40 Template:Announcements →PECVD #2: High Particulates: down, update
- 08:25, 15 March 2018 diff hist +13 m Template:Announcements EB4 title Upgrades
- 08:24, 15 March 2018 diff hist -28 m Template:Announcements sigfix
- 08:22, 15 March 2018 diff hist -27 m Template:Announcements sigfix
- 08:21, 15 March 2018 diff hist -114 Template:Announcements stepper 1 maintenance update
- 20:37, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #1): made table sortable, removed header row for sorting Tag: Visual edit
- 20:36, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #2): made table sortable, removed header row for sorting Tag: Visual edit
- 20:35, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #4): made table sortable, removed header row for sorting Tag: Visual edit
- 20:33, 13 March 2018 diff hist -9 m Vacuum Deposition Recipes removed 'sortable' tag Tag: Visual edit
- 17:40, 13 March 2018 diff hist +71 Vacuum Deposition Recipes fixed IBD SiOn link Tag: Visual edit
- 17:39, 13 March 2018 diff hist -38 Vacuum Deposition Recipes IBD SiOxNy link Tag: Visual edit
- 17:32, 13 March 2018 diff hist +9 Vacuum Deposition Recipes make table sortable Tag: Visual edit
- 11:49, 13 March 2018 diff hist +22 m Sputtering Recipes →SiOxNy deposition (IBD): subscripts Tag: Visual edit
- 11:49, 13 March 2018 diff hist 0 m Sputtering Recipes →SiOxNy Deposition (IBD): match title formatting of other sections. Tag: Visual edit
- 11:48, 13 March 2018 diff hist +669 Sputtering Recipes added IBD SiOxNy from 2010 Tag: Visual edit
- 11:45, 13 March 2018 diff hist +51 N File:IBD SiON - Dep rate vs O2 flow - wiki.png current
- 11:39, 13 March 2018 diff hist +68 N File:IBD SiON Index @ 623nm vs. O2 Gas Flow - v3 - wiki.jpg current
- 11:31, 13 March 2018 diff hist +3 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): moved SiN section to under SiO2 Tag: Visual edit: Switched
- 08:08, 11 March 2018 diff hist -27 m Template:Announcements sigfix
- 08:07, 11 March 2018 diff hist +151 Template:Announcements pecvd 2 update
- 10:50, 6 March 2018 diff hist +111 Template:Announcements Eb4 update
- 21:30, 3 March 2018 diff hist -113 Template:Announcements Deleted JEOL
- 21:29, 3 March 2018 diff hist -27 m Template:Announcements →PECVD #2: High Particulates: sigfix
- 21:29, 3 March 2018 diff hist +45 Template:Announcements →PECVD #2: High Particulates: update
- 13:13, 28 February 2018 diff hist -119 Template:Announcements removed testing post - 5 tildes does NOT work!
- 07:31, 27 February 2018 diff hist +111 ASML 5500 Mask Making Guidelines links to reticle vendors Tag: Visual edit
- 19:03, 26 February 2018 diff hist +119 ASML 5500 Mask Making Guidelines removed toppan academic quote Tag: Visual edit
- 18:55, 26 February 2018 diff hist -2 m Template:News spacing fixes
- 18:54, 26 February 2018 diff hist -7 m Template:News spacing fixes
- 18:53, 26 February 2018 diff hist +2 m Template:Announcements minor move
- 18:52, 26 February 2018 diff hist +1 m Template:Announcements minor grammar
- 18:39, 26 February 2018 diff hist -23 m Template:Announcements minor grammar
- 18:29, 26 February 2018 diff hist +3 m Template:Announcements // sig
- 18:29, 26 February 2018 diff hist +114 Template:Announcements testing sig with 5 tildes
- 18:27, 26 February 2018 diff hist -27 m Template:Announcements sigfix
- 18:27, 26 February 2018 diff hist +51 Template:Announcements EB4 down / power supply update
- 00:27, 24 February 2018 diff hist +248 ASML 5500 Mask Making Guidelines linked to Digidat/Toppan order form & quote Tag: Visual edit: Switched
- 00:25, 24 February 2018 diff hist 0 N File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx
- 00:02, 24 February 2018 diff hist +38 N File:Toppan UCSB quotation 041116.pdf toppan quote for ASML mask plates 2016 current
- 18:01, 23 February 2018 diff hist -27 m Template:Announcements →PECVD #2: High Particulates: sigfix
- 18:01, 23 February 2018 diff hist +54 m Template:Announcements sigfix
- 18:00, 23 February 2018 diff hist +252 Template:Announcements pecvd#2 paticulates
- 16:50, 23 February 2018 diff hist -110 Template:Announcements jeol sem up
- 21:09, 22 February 2018 diff hist +45 m ASML 5500 Mask Making Guidelines added that users have shot 150nm feature Tag: Visual edit
- 21:07, 22 February 2018 diff hist +14 m ASML 5500 Mask Making Guidelines minor grammar Tag: Visual edit
- 15:10, 21 February 2018 diff hist +2 m ASML 5500 Mask Making Guidelines image caption displayed Tag: Visual edit
- 15:09, 21 February 2018 diff hist -4 m ASML 5500 Mask Making Guidelines moved image on page
- 15:07, 21 February 2018 diff hist +3 m ASML 5500 Mask Making Guidelines moved image on page Tag: Visual edit
- 15:06, 21 February 2018 diff hist -7 m Stepper 3 (ASML DUV) →About: minor tweak Tag: Visual edit
- 15:05, 21 February 2018 diff hist +10 m Stepper 3 (ASML DUV) →Operating Procedures: updat elink text Tag: Visual edit
- 15:05, 21 February 2018 diff hist -146 Stepper 3 (ASML DUV) →About: removed field sizes text, pointed to mask making page Tag: Visual edit
- 15:03, 21 February 2018 diff hist -5 Stepper 3 (ASML DUV) →Operating Procedures: linked to Wiki version of Mask making Guidelines Tag: Visual edit
- 15:02, 21 February 2018 diff hist +1,799 N ASML 5500 Mask Making Guidelines copied Mask Making Guidelines PDF & inserted illumination field schematic Tag: Visual edit
- 14:58, 21 February 2018 diff hist +37 N File:ASML Stepper 3 - Field Sizes - Screen Shot 2018-02-21 at 1.40.22 PM.png current
- 14:27, 21 February 2018 diff hist +510 Stepper 3 (ASML DUV) →About: updated capabilities, moved mask sizes to separate paragraph. Tag: Visual edit
- 08:41, 21 February 2018 diff hist -50 m Template:Announcements sigfix
- 08:40, 21 February 2018 diff hist +673 Template:Announcements stepper 1 + 2 maintenance scheduled
- 08:37, 21 February 2018 diff hist -98 Template:Announcements removed ICP#1
- 00:08, 21 February 2018 diff hist -31 Template:News →Metal Processes on the Atomic Layer Deposition
- 00:07, 21 February 2018 diff hist +83 m Template:News →Metal Processes on the Atomic Layer Deposition: timestamp
- 18:36, 20 February 2018 diff hist +63 Template:Announcements jeol update
- 22:44, 19 February 2018 diff hist +2 m Template:Announcements →Gasonics: Up: grammar
- 08:08, 17 February 2018 diff hist 0 m Template:Announcements →JEOL SEM #2: Up: typo
- 23:30, 16 February 2018 diff hist +49 Template:Announcements →JEOL SEM #2: Down: up temp.
- 02:34, 16 February 2018 diff hist -32 Template:Announcements →ICP#1: Down: up
- 11:19, 15 February 2018 diff hist +274 Lithography Recipes →Chemical Datasheets: explain Chemical Datasheets - lists chemicals availabel in lab Tag: Visual edit
- 14:42, 14 February 2018 diff hist +3 m Template:Announcements →ICP#1: Down: slasshes
- 14:42, 14 February 2018 diff hist -27 m Template:Announcements sig fix
- 14:41, 14 February 2018 diff hist 0 Template:Announcements icp1 dpwn, delete ASML
- 14:40, 14 February 2018 diff hist -27 m Template:Announcements →JEOL SEM #2: Down: sigfix
- 14:40, 14 February 2018 diff hist +16 Template:Announcements →JEOL SEM #2: Up: down
- 17:01, 13 February 2018 diff hist -25 m Template:Announcements sig fix
- 17:01, 13 February 2018 diff hist -228 Template:Announcements jeol sem up
- 17:52, 12 February 2018 diff hist +5 m Template:Announcements cary down title
- 17:52, 12 February 2018 diff hist -27 m Template:Announcements sig fix
- 17:51, 12 February 2018 diff hist +266 Template:Announcements sem2 update
- 14:48, 12 February 2018 diff hist -27 m Template:Announcements sig fixes
- 14:47, 12 February 2018 diff hist +27 Template:Announcements cary update
- 14:46, 12 February 2018 diff hist +155 Template:Announcements gasonics up, mech. pump notice
- 11:16, 12 February 2018 diff hist -5 m Template:Announcements remove spaces
- 11:15, 12 February 2018 diff hist -13 m Template:Announcements sig
- 11:14, 12 February 2018 diff hist +133 Template:Announcements gasnoics down
- 19:53, 10 February 2018 diff hist -24 m Template:Announcements sig
- 19:52, 10 February 2018 diff hist +185 Template:Announcements asml pm done
- 14:34, 9 February 2018 diff hist +110 m Template:News laser mon: links to tools
- 12:56, 9 February 2018 diff hist +8 Template:News sig fixes to "posted"
- 12:54, 9 February 2018 diff hist -2 m Template:News typo
- 12:53, 9 February 2018 diff hist -3 Template:News sig fix
- 12:53, 9 February 2018 diff hist +405 Template:News laser monitors
- 16:52, 8 February 2018 diff hist +6 m Template:Announcements minor format
- 16:40, 8 February 2018 diff hist -27 Template:Announcements sig fix
- 16:40, 8 February 2018 diff hist +154 Template:Announcements jeol gate issue
- 22:16, 6 February 2018 diff hist +369 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): added height conversion for Sputt3 Tag: Visual edit
- 22:11, 6 February 2018 diff hist 0 N File:Sputter 3 - height conversion v1.PNG current
- 22:09, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize sputt4 table Tag: Visual edit
- 22:07, 6 February 2018 diff hist +95 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): added Al2O3 sputt3 Tag: Visual edit
- 22:00, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): alphabetize table sputt3 Tag: Visual edit
- 19:02, 6 February 2018 diff hist +99 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): link to AJA4 Al2O3 page Tag: Visual edit
- 19:01, 6 February 2018 diff hist +40 m ICP Etching Recipes →Al2O3 Etching (Panasonic 2): ack brian markman Tag: Visual edit
- 19:00, 6 February 2018 diff hist +296 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): Al2O3 etch data Tag: Visual edit: Switched
- 18:56, 6 February 2018 diff hist 0 N File:Brian Markman - Al2O3 ICP2 Etch Rates 2018.pdf current
- 18:46, 6 February 2018 diff hist +72 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): unfinished Al2O3 etching on ICP2 Tag: Visual edit
- 18:44, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize TiN Tag: Visual edit
- 18:43, 6 February 2018 diff hist 0 Sputtering Recipes →Al2O3 Deposition (Sputter 4): alphabetize Tag: Visual edit
- 18:40, 6 February 2018 diff hist +57 Vacuum Deposition Recipes added "R" for Sput4 Al & Al2O3 Tag: Visual edit: Switched
- 18:35, 6 February 2018 diff hist +253 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 Dep sputter 4 + cauchy params Tag: Visual edit
- 18:30, 6 February 2018 diff hist +102 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 addition to table Tag: Visual edit
- 18:18, 6 February 2018 diff hist +84 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Al2O3 (AJA#4) in 300 MiF Tag: Visual edit
- 12:42, 30 January 2018 diff hist +745 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added HF etch rates for PECVD SiO2, and IBD Al2O3 HF/700-MIF rates Tag: Visual edit
- 08:14, 26 January 2018 diff hist -4 Demis D. John update email addr.
- 18:56, 24 January 2018 diff hist +18 Film Stress (Tencor Flexus) Added model
- 16:27, 24 January 2018 diff hist +734 Frequently Asked Questions Added Nanofiles info. Tag: Visual edit
- 16:20, 24 January 2018 diff hist +125 Calculators + Utilities →General Calculators: link to pyvisa Tag: Visual edit
- 16:18, 24 January 2018 diff hist -16 m Calculators + Utilities →General Calculators: minor italics remove Tag: Visual edit
- 16:16, 24 January 2018 diff hist +1 Tube Furnace (Tystar 8300) fix 'model' typo
- 16:14, 24 January 2018 diff hist +177 Template:Tool added Mike Day & Demis to the staff info template as options. Removed duplicate "model" variable
- 16:06, 24 January 2018 diff hist +89 Template:Tool added Model field
- 16:03, 24 January 2018 diff hist +20 Tube Furnace (Tystar 8300) added model
- 16:01, 24 January 2018 diff hist -55 m Tube Furnace (Tystar 8300) →See Also: fix typo Tag: Visual edit
- 16:01, 24 January 2018 diff hist +307 Tube Furnace (Tystar 8300) →See Also: link to stanford TOX calc Tag: Visual edit
- 15:58, 24 January 2018 diff hist +588 Tube Furnace (Tystar 8300) →Process Information: recipe descriptions, added AlGaAs.001 Tag: Visual edit
- 15:39, 24 January 2018 diff hist +4 m Calculators + Utilities minor italics Tag: Visual edit
- 15:39, 24 January 2018 diff hist +212 Calculators + Utilities →Fabrication Processes & Converters: added Stanford thermal ox calc Tag: Visual edit
- 14:39, 20 January 2018 diff hist +33 m Microscopes →Nikon: make measurements Tag: Visual edit
- 14:38, 20 January 2018 diff hist +101 m Tool List placeholder link for microscope mounted Filmetrics Tag: Visual edit
- 14:36, 20 January 2018 diff hist +24 Optical Film Thickness (Filmetrics) added model
- 08:32, 18 January 2018 diff hist -37 m Wet Etching Recipes update links to master table Tag: Visual edit
- 08:30, 18 January 2018 diff hist +25 m Wet Etching Recipes →Compound Semiconductor Etching: update HLink
- 08:29, 18 January 2018 diff hist +651 Wet Etching Recipes added references section Tag: Visual edit
- 08:44, 17 January 2018 diff hist +210 Atomic Layer Deposition Recipes added "contact bill mitchell" and Added Ru Tag: Visual edit
- 14:36, 16 January 2018 diff hist +22 Optical Film Thickness (Filmetrics) updated tool location & description in template Tag: Visual edit
- 09:49, 12 January 2018 diff hist +177 Chemical List - OLD 2018-09-05 added "1020" to chromium mask etchant to clarify which one we have Tag: Visual edit
- 17:10, 11 January 2018 diff hist +63 Tom Reynolds →Current Work: contact to get lab access Tag: Visual edit
- 13:22, 10 January 2018 diff hist -23 m Template:News fix comment tag
- 13:21, 10 January 2018 diff hist 0 Template:News fix feed tags
- 13:19, 10 January 2018 diff hist +29 m Template:News disabled feedburner link
- 13:19, 8 January 2018 diff hist -1 m Dry Etching Recipes fixed RIE5 GaN link Tag: Visual edit: Switched
- 13:17, 8 January 2018 diff hist +1 Dry Etching Recipes fixed RIE5 links Tag: Visual edit
- 13:15, 8 January 2018 diff hist +19 m Template:Rl/doc arguments heading current
- 13:14, 8 January 2018 diff hist +795 Template:Rl/doc added example, verbose description
- 13:01, 8 January 2018 diff hist +81 Dry Etching Recipes Added "hptotoresist & ARC" row, with A recipes Tag: Visual edit: Switched
- 10:42, 8 January 2018 diff hist +27 Dry Etching Recipes added space to ICP1/2 recipe links, hopefully fixes targeted links Tag: Visual edit