Difference between revisions of "Lithography Recipes"

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(→‎Lift-Off Recipes: link to I-Line Liftoff w/ LOL underlayer)
(link to Auto-coater recipes)
 
(16 intermediate revisions by the same user not shown)
Line 1: Line 1:
__NOTOC__
+
__NOTOC__
 
{| class="wikitable"
 
{| class="wikitable"
 
|+
 
|+
Line 24: Line 24:
 
#***[[Lithography Recipes#E-Beam Lithography Recipes|JEOL JBX-6300FS EBL]]
 
#***[[Lithography Recipes#E-Beam Lithography Recipes|JEOL JBX-6300FS EBL]]
 
#***[[Lithography Recipes#FIB Lithography Recipes .28Raith Velion.29|Raith Velion FIB]]
 
#***[[Lithography Recipes#FIB Lithography Recipes .28Raith Velion.29|Raith Velion FIB]]
 +
#**[[Lithography Recipes#Automated Coat.2FDevelop System Recipes .28S-Cubed Flexi.29|Automated Coater Recipes (S-Cubed Flexi)]]
 
#[[Lithography Recipes#General Photolithography Techniques|'''General Photolithography Techniques''']]
 
#[[Lithography Recipes#General Photolithography Techniques|'''General Photolithography Techniques''']]
 
#*''Techniques for improving litho. or solving common photolith. problems.''
 
#*''Techniques for improving litho. or solving common photolith. problems.''
Line 38: Line 39:
 
#*''Recipes for silicon substrates are provided, and have been translated to other substrates by users.''
 
#*''Recipes for silicon substrates are provided, and have been translated to other substrates by users.''
 
#*''Datasheets are provided with starting recipes and usage info.''
 
#*''Datasheets are provided with starting recipes and usage info.''
 +
#[[Lithography Recipes#Edge-Bead Removal|'''Edge-Bead Removal''']]
 +
#*''Edge photoresist removal methods needed for clamp-based etchers''
 +
#*''Improves resolution for contact lithography''
 
|-
 
|-
 
|
 
|
Line 69: Line 73:
 
==General Photolithography Techniques==
 
==General Photolithography Techniques==
  
*[[Photolithography - Improving Adhesion Photoresist Adhesion|HMDS Process for Improving Adhesion]]
+
*[[Photolithography - Improving Adhesion Photoresist Adhesion|'''HMDS Process for Improving Adhesion''']]
 
**''Use these procedures if you are finding poor adhesion PR lifting-off), or for chemicals (like BHF) that attack the PR adhesion interface strongly.''
 
**''Use these procedures if you are finding poor adhesion PR lifting-off), or for chemicals (like BHF) that attack the PR adhesion interface strongly.''
*[[Photolithography - Manual Edge-Bead Removal Techniques|Manual Edge-Bead Removal Techniques]]
+
*[[Photolithography - Manual Edge-Bead Removal Techniques|'''Edge-Bead Removal Techniques''']]
**''Removing the edge-bead from your substrate will help with contact litho resolution and alignment.''
+
**''These techniques are required for loading full-wafers into etchers that use top-side clamps, to prevent photoresist from sticking to the clamp (and potentially destroying your wafer).''
 +
**''For contact lithography, this improves the proximity of the mask plate and sample, improving resolution. For some projection systems, such as the [[Maskless Aligner (Heidelberg MLA150)|Maskless Aligner]], EBR can help with autofocus issues.''
 +
*[https://www.microchemicals.com/technical_information/reflow_photoresist.pdf '''Photoresist reflow (MicroChem)'''], to create slanted sidewalls or curved surfaces.
  
 
==Photolithography Recipes==
 
==Photolithography Recipes==
  
{{Recipe Table Explanation}}
+
*<small>'''R''': ''Recipe is available. Clicking this link will take you to the recipe.''</small>
 +
*<small>'''A''': ''Material is available for use, but no recipes are provided.''</small>
  
 
''Click the tool title to go to recipes for that tool.''  
 
''Click the tool title to go to recipes for that tool.''  
Line 289: Line 296:
 
|
 
|
 
|
 
|
|{{rl|Stepper Recipes|DUV-42P}}
+
|{{rl|Stepper Recipes|DUV-42P-6}}
 +
|
 
|
 
|
 
|-
 
|-
Line 311: Line 319:
 
*[[Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer|I-Line Lift-Off: Bi-Layer Process with LOL2000 Underlayer]]
 
*[[Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer|I-Line Lift-Off: Bi-Layer Process with LOL2000 Underlayer]]
 
**''Single Expose/Develop process for simplicity''
 
**''Single Expose/Develop process for simplicity''
**''Up to ~130nm metal thickness & ≥500nm gap between metal.''
+
**''Up to ~130nm metal thickness & ≥500nm-1000nm gap between metal.''
**''Can use any I-Line litho tool (Stepper, Contact aligner, MLA)''
+
**''Can use any I-Line litho tool (GCA Stepper, Contact aligner, MLA)''
 
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|I-Line Lift-Off: Bi-Layer Process with PMGI Underlayer and Contact Aligner}}
 
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|I-Line Lift-Off: Bi-Layer Process with PMGI Underlayer and Contact Aligner}}
 
**''Multiple processes for Metal thicknesses ~800nm to ~2.5µm''
 
**''Multiple processes for Metal thicknesses ~800nm to ~2.5µm''
**''Using DUV Flood exposure to create undercut.''
+
**''Uses multiple DUV Flood exposure/develop cycles to create undercut.''
 
**''Can be transferred to other I-Line litho tools (Stepper, MLA etc.)''
 
**''Can be transferred to other I-Line litho tools (Stepper, MLA etc.)''
 
*[[Lift-Off with DUV Imaging + PMGI Underlayer|DUV Lift-Off: UV6 Imaging Resist + PMGI Underlayer]]
 
*[[Lift-Off with DUV Imaging + PMGI Underlayer|DUV Lift-Off: UV6 Imaging Resist + PMGI Underlayer]]
**''Single-expose/develop process''  
+
**''Single-expose/develop process''
 
**''Up to ~65nm metal thickness & ~350nm gap between metal''
 
**''Up to ~65nm metal thickness & ~350nm gap between metal''
 
**''Use thicker PMGI for thicker metals''
 
**''Use thicker PMGI for thicker metals''
Line 331: Line 339:
 
==[[Automated Coat/Develop System (S-Cubed Flexi)|Automated Coat/Develop System Recipes (S-Cubed Flexi)]]==
 
==[[Automated Coat/Develop System (S-Cubed Flexi)|Automated Coat/Develop System Recipes (S-Cubed Flexi)]]==
 
Recipes pre-loaded on the S-Cubed Flexi automated coat/bake/develop system. Only staff may write new recipes, contact the tool supervisor for more info.
 
Recipes pre-loaded on the S-Cubed Flexi automated coat/bake/develop system. Only staff may write new recipes, contact the tool supervisor for more info.
 +
{| class="wikitable"
 +
|+''Ask [[Tony Bosch|Staff]] if you need a new recipe.''
 +
|'''''<u>Coating Material</u>'''''
 +
|'''''<u>Route/Chain</u>'''''
 +
|'''''<u>Name</u>''': User: "UCSB Users"''
 +
|'''''<u>Spin Speed (krpm)</u>'''''
 +
|'''''<u>Bake Temp</u>'''''
 +
|'''''<u>Notes</u>'''''
 +
|-
 +
|'''''DS-K101'''''
 +
|''Route''
 +
| colspan="4" |''DSK101's Develop Rate depends on Bake temp - you can use this to control undercut.'' 
 +
 +
''See: [[DS-K101-304 Bake Temp. versus Develop Rate|DSK Bake vs. Dev rate]]''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-220C
 +
|5.0
 +
|220°C
 +
|''Requires: HP4=220°C''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-210C
 +
|5.0
 +
|210°C
 +
|''Requires: HP4=210°C''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-200C
 +
|5.0
 +
|200°C
 +
|''Requires: HP4=200°C''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-185C
 +
|5.0
 +
|185°C
 +
|''Requires: HP4=185°C''
 +
|-
 +
|'''''UV6-0.8'''''
 +
|''Route''
 +
|Coat-UV6[2K]-135C
 +
|2.0
 +
|135°C
 +
|''Requires: HP1=135°C''
 +
|-
 +
|
 +
|
 +
|Coat-UV6[2.5K]-135C
 +
|2.5
 +
|135°C
 +
|
 +
|-
 +
|
 +
|
 +
|Coat-UV6[3K]-135C
 +
|3.0
 +
|135°C
 +
|
 +
|-
 +
|
 +
|
 +
|Coat-UV6[3.5K]-135C
 +
|3.5
 +
|135°C
 +
|
 +
|-
 +
|
 +
|
 +
|Coat-UV6[4K]-135C
 +
|4.0
 +
|135°C
 +
|
 +
|-
 +
|
 +
|
 +
|Coat-UV6[5K]-135C
 +
|5.0
 +
|135°C
 +
|
 +
|-
 +
|
 +
|
 +
|Coat-UV6[6K]-135C
 +
|6.0
 +
|135°C
 +
|
 +
|-
 +
|'''''DS-K101 @ 220°C'''''
 +
'''''+ UV6'''''
 +
|''Chain''
 +
|Coat-DSK101[5K]-220C-UV6[2K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 2.0krpm''
 +
|DSK: 220°C
 +
UV6: 135°C
 +
|''Requires:''
 +
''– HP4=220°C''
 +
 +
''– HP1=135°C''
 +
 +
''Plan for ~10-15 min per wafer.''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-220C-UV6[2.5K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 2.5krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-220C-UV6[3K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 3.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-220C-UV6[3.5K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 3.5krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-220C-UV6[4K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 4.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-220C-UV6[5K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 5.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-220C-UV6[6K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 6.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|'''''DS-K101 @ 185°C'''''
 +
'''''+ UV6'''''
 +
|''Chain''
 +
|Coat-DSK101[5K]-185C-UV6[2K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 2.0krpm''
 +
|DSK: 185°C
 +
UV6: 135°C
 +
|''Requires:''
 +
''– HP4=185°C''
  
''To Be Added''
+
''– HP1=135°C''
  
 +
''Plan for ~10-15 min per wafer.''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-185C-UV6[2.5K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 2.5krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-185C-UV6[3K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 3.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-185C-UV6[3.5K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 3.5krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-185C-UV6[4K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 4.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-185C-UV6[5K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 5.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|
 +
|
 +
|Coat-DSK101[5K]-185C-UV6[6K]-135C
 +
|''DSK: 5krpm''
 +
''UV6: 6.0krpm''
 +
|''same as above''
 +
|''same as above''
 +
|-
 +
|'''''Hotplate Set'''''
 +
|''Route''
 +
|''SET-HP4-220C''
 +
|
 +
|220°C
 +
|''Hotplate 4 (top) between 218-222°C when done.''
 +
|-
 +
|
 +
|
 +
|''SET-HP4-210C''
 +
|
 +
|210°C
 +
|
 +
|-
 +
|
 +
|
 +
|''SET-HP4-200C''
 +
|
 +
|200°C
 +
|
 +
|-
 +
|
 +
|
 +
|''SET-HP4-185C''
 +
|
 +
|185*C
 +
|
 +
|}
 
==[[Holographic Lith/PL Setup (Custom)|Holography Recipes]]==
 
==[[Holographic Lith/PL Setup (Custom)|Holography Recipes]]==
 
''The Holography recipes here use the BARC layer XHRiC-11 & the high-res. I-Line photoresist THMR-IP3600HP-D.''
 
''The Holography recipes here use the BARC layer XHRiC-11 & the high-res. I-Line photoresist THMR-IP3600HP-D.''
Line 358: Line 609:
  
 
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
 
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
 +
*{{Fl|Az_p4620_photoresist_data_package.pdf|AZ P4620}}
 
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
 
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
 
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}
 
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}

Latest revision as of 13:38, 8 November 2022

Table of Contents

Photolithography Processes

  1. UV Optical Lithography
  2. General Photolithography Techniques
    • Techniques for improving litho. or solving common photolith. problems.
  3. Lift-Off Recipes
    • Verified Recipes for lift-off using various photolith. tools
    • General educational description of this technique and it's limitations/considerations.
  4. E-beam Lithography
  5. Holography
    • For 1-D and 2-D gratings with 220nm nominal period, available on substrates up to 1 inch square.
    • Recipes for silicon substrates are provided, and have been translated to other substrates by users.
    • Datasheets are provided with starting recipes and usage info.
  6. Edge-Bead Removal
    • Edge photoresist removal methods needed for clamp-based etchers
    • Improves resolution for contact lithography

Photolithography Chemicals/Materials

  1. Underlayers
    • These are used beneath resists for both adhesive purposes and to enable bi-layer lift-off profiles for use with photoresist.
    • Datasheets are provided.
  2. Anti-Reflection Coatings:
    • The Photoresist Recipes section contains recipes using these materials.
    • Bottom Anti-Reflection Coatings (BARC) are used in the stepper systems, underneath the resists to eliminate substrate reflections that can affect resolution and repeatability for small, near resolution limited, feature sizes.
    • Datasheets are provided for reference on use of the materials.
  3. Contrast Enhancement Materials (CEM)
    • The Photoresist Recipes section contains recipes using these materials.
    • Used for resolution enhancement. Not for use in contact aligners, typically used on I-Line Steppers.
    • Datasheets provided with usage info.
  4. Adhesion Promoters
    • These are used to improve wetting of photoresists to your substrate.
    • Datasheets are provided on use of these materials.
  5. Low-K Spin-on Dielectrics
  6. Developers and Removers
    • Datasheets provided for reference.
    • Remover and Photoresist Strippers are used to dissolve PR during lift-off or after etching.

General Photolithography Techniques

  • HMDS Process for Improving Adhesion
    • Use these procedures if you are finding poor adhesion PR lifting-off), or for chemicals (like BHF) that attack the PR adhesion interface strongly.
  • Edge-Bead Removal Techniques
    • These techniques are required for loading full-wafers into etchers that use top-side clamps, to prevent photoresist from sticking to the clamp (and potentially destroying your wafer).
    • For contact lithography, this improves the proximity of the mask plate and sample, improving resolution. For some projection systems, such as the Maskless Aligner, EBR can help with autofocus issues.
  • Photoresist reflow (MicroChem), to create slanted sidewalls or curved surfaces.

Photolithography Recipes

  • R: Recipe is available. Clicking this link will take you to the recipe.
  • A: Material is available for use, but no recipes are provided.

Click the tool title to go to recipes for that tool.

Click the photoresist title to get the datasheet, also found in Stocked Chemicals + Datasheets.

Photolithography Recipes
Contact Aligner Recipes Stepper Recipes Direct-Write Litho. Recipes
Positive Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)
AZ4110 R R A A R
AZ4210 R R A A A
AZ4330RS R R A A R
AZ4620 A A A A A
OCG 825-35CS A A A A A
SPR 955 CM-0.9 A R R R R
SPR 955 CM-1.8 A A R R A
SPR 220-3.0 R R R R R
SPR 220-7.0 R R R R A
THMR-IP3600 HP D A A R
UV6-0.8 R
UV210-0.3 R
UV26-2.5 A
Negative Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)
AZ5214-EIR R R R R R
AZnLOF 2020 R R R R R
AZnLOF 2035 A A A A A
AZnLOF 2070 A A A A A
AZnLOF 5510 A A R R A
UVN30-0.8 R
SU-8 2005,2010,2015 A R A A A
SU-8 2075 A A A A R
NR9-1000,3000,6000PY R R A R A
Anti-Reflection Coatings SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)
XHRiC-11 A A A
DUV42-P R
DS-K101-304 R
SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)

Lift-Off Recipes

E-Beam Lithography Recipes (JEOL JBX-6300FS)

  • Under Development.

FIB Lithography Recipes (Raith Velion)

To Be Added

Automated Coat/Develop System Recipes (S-Cubed Flexi)

Recipes pre-loaded on the S-Cubed Flexi automated coat/bake/develop system. Only staff may write new recipes, contact the tool supervisor for more info.

Ask Staff if you need a new recipe.
Coating Material Route/Chain Name: User: "UCSB Users" Spin Speed (krpm) Bake Temp Notes
DS-K101 Route DSK101's Develop Rate depends on Bake temp - you can use this to control undercut.

See: DSK Bake vs. Dev rate

Coat-DSK101[5K]-220C 5.0 220°C Requires: HP4=220°C
Coat-DSK101[5K]-210C 5.0 210°C Requires: HP4=210°C
Coat-DSK101[5K]-200C 5.0 200°C Requires: HP4=200°C
Coat-DSK101[5K]-185C 5.0 185°C Requires: HP4=185°C
UV6-0.8 Route Coat-UV6[2K]-135C 2.0 135°C Requires: HP1=135°C
Coat-UV6[2.5K]-135C 2.5 135°C
Coat-UV6[3K]-135C 3.0 135°C
Coat-UV6[3.5K]-135C 3.5 135°C
Coat-UV6[4K]-135C 4.0 135°C
Coat-UV6[5K]-135C 5.0 135°C
Coat-UV6[6K]-135C 6.0 135°C
DS-K101 @ 220°C

+ UV6

Chain Coat-DSK101[5K]-220C-UV6[2K]-135C DSK: 5krpm

UV6: 2.0krpm

DSK: 220°C

UV6: 135°C

Requires:

– HP4=220°C

– HP1=135°C

Plan for ~10-15 min per wafer.

Coat-DSK101[5K]-220C-UV6[2.5K]-135C DSK: 5krpm

UV6: 2.5krpm

same as above same as above
Coat-DSK101[5K]-220C-UV6[3K]-135C DSK: 5krpm

UV6: 3.0krpm

same as above same as above
Coat-DSK101[5K]-220C-UV6[3.5K]-135C DSK: 5krpm

UV6: 3.5krpm

same as above same as above
Coat-DSK101[5K]-220C-UV6[4K]-135C DSK: 5krpm

UV6: 4.0krpm

same as above same as above
Coat-DSK101[5K]-220C-UV6[5K]-135C DSK: 5krpm

UV6: 5.0krpm

same as above same as above
Coat-DSK101[5K]-220C-UV6[6K]-135C DSK: 5krpm

UV6: 6.0krpm

same as above same as above
DS-K101 @ 185°C

+ UV6

Chain Coat-DSK101[5K]-185C-UV6[2K]-135C DSK: 5krpm

UV6: 2.0krpm

DSK: 185°C

UV6: 135°C

Requires:

– HP4=185°C

– HP1=135°C

Plan for ~10-15 min per wafer.

Coat-DSK101[5K]-185C-UV6[2.5K]-135C DSK: 5krpm

UV6: 2.5krpm

same as above same as above
Coat-DSK101[5K]-185C-UV6[3K]-135C DSK: 5krpm

UV6: 3.0krpm

same as above same as above
Coat-DSK101[5K]-185C-UV6[3.5K]-135C DSK: 5krpm

UV6: 3.5krpm

same as above same as above
Coat-DSK101[5K]-185C-UV6[4K]-135C DSK: 5krpm

UV6: 4.0krpm

same as above same as above
Coat-DSK101[5K]-185C-UV6[5K]-135C DSK: 5krpm

UV6: 5.0krpm

same as above same as above
Coat-DSK101[5K]-185C-UV6[6K]-135C DSK: 5krpm

UV6: 6.0krpm

same as above same as above
Hotplate Set Route SET-HP4-220C 220°C Hotplate 4 (top) between 218-222°C when done.
SET-HP4-210C 210°C
SET-HP4-200C 200°C
SET-HP4-185C 185*C

Holography Recipes

The Holography recipes here use the BARC layer XHRiC-11 & the high-res. I-Line photoresist THMR-IP3600HP-D.

Low-K Spin-On Dielectric Recipes

Chemicals Stocked + Datasheets

The following is a list of the lithography chemicals we stock in the lab, with links to the datasheets for each. The datasheets will often have important processing info such as spin-speed vs. thickness curves, typical process parameters, bake temps/times etc.

Positive Photoresists

i-line and broadband

DUV-248nm

Negative Photoresists

i-line and broadband

DUV-248nm

Underlayers
E-beam resists
Nanoimprinting
Contrast Enhancement Materials
Anti-Reflection Coatings
Adhesion Promoters
Spin-On Dielectrics

Low-K Spin-On Dielectrics such as Benzocyclobutane and Spin-on Glass

Developers
Photoresist Removers