Difference between revisions of "Vacuum Deposition Recipes"
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! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub> |
! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub> |
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| | {{rl|ALD Recipes|SiO2 deposition (ALD)}} |
| | {{rl|ALD Recipes|SiO2 deposition (ALD)}} |
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+ | | |{{rl|AIBD Recipes|SiO2 deposition (IBD)}} |
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! bgcolor="#D0E7FF" align="center" | Ti |
! bgcolor="#D0E7FF" align="center" | Ti |