Difference between revisions of "Vacuum Deposition Recipes"
Jump to navigation
Jump to search
Line 483: | Line 483: | ||
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
||
| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} |
| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} |
||
+ | | {{rl|PECVD Recipes|SiO2 deposition (ALD)}}| |
||
− | | |
||
+ | | {{rl|PECVD Recipes|SiO2 deposition (IBD)}} |
||
− | | |
||
− | | |
||
|- |
|- |
||
! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub> |
! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub> |