Difference between revisions of "Vacuum Deposition Recipes"
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| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
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| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} |
| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} |
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− | | {{rl|PECVD Recipes|SiO2 deposition (ALD)}} |
+ | | {{rl|PECVD Recipes|SiO2 deposition (ALD)}} |
| {{rl|PECVD Recipes|SiO2 deposition (IBD)}} |
| {{rl|PECVD Recipes|SiO2 deposition (IBD)}} |
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