Difference between revisions of "Vacuum Deposition Recipes"
Jump to navigation
Jump to search
Line 654: | Line 654: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
− | | bgcolor="EEFFFF" | |
+ | | bgcolor="EEFFFF" | | {{rl|ALD Recipes|SiO2 deposition (ALD)}} |
− | | bgcolor="EEFFFF" | |
+ | | bgcolor="EEFFFF" | | {{rl|IBD Recipes|SiO2 deposition (IBD)}} |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |