Difference between revisions of "Tony Bosch"
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*[[Vacuum Oven (YES)]] |
*[[Vacuum Oven (YES)]] |
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*[[Sputter 3 (AJA ATC 2000-F)]] |
*[[Sputter 3 (AJA ATC 2000-F)]] |
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| + | *[[Sputter 4 (AJA ATC 2200-V)]] |
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| + | *[[Sputter 5 (AJA ATC 2200-V)]] |
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*[[ICP-PECVD (Unaxis VLR)]] |
*[[ICP-PECVD (Unaxis VLR)]] |
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*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
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| − | *[[UV Ozone Reactor]] |
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*[[Gold Plating Bench]] |
*[[Gold Plating Bench]] |
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| + | *[[ICP Etch 2 (Panasonic E640)]] |
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| − | *[[Strip Annealer]] |
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*[[Tube Furnace (Tystar 8300)]] |
*[[Tube Furnace (Tystar 8300)]] |
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*[[Probe Station & Curve Tracer]] |
*[[Probe Station & Curve Tracer]] |
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*[[Optical Film Thickness (Filmetrics)]] |
*[[Optical Film Thickness (Filmetrics)]] |
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| − | *[[SEM Sample Coater (Hummer)]] |
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*[[Resistivity Mapper (CDE RESMAP)]] |
*[[Resistivity Mapper (CDE RESMAP)]] |
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*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
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Revision as of 09:55, 20 April 2020
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About
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Tools
Tony Bosch is the supervisor for the following tools.