Difference between revisions of "Surface Analysis (KLA/Tencor Surfscan)"

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(reorg, remove old SOP, replaced with new PDF SOP's for each wafer size)
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==Documentation==
  
==Documentation==
   
  +
=== Operating Procedures ===
−
*[[KLA-Tencor Surfscan - Standard Operating Procedure|Standard Operating Procedure]]
  
  +
−
*[https://wiki.nanotech.ucsb.edu/w/images/9/96/Surfscan-Operation-Manual.pdf Operations Manual]
  
  ⚫
*[https://wiki.nanofab.ucsb.edu/w/images/0/04/SURFSCAN_6200_8inch_wafers.pdf Surfscan 6200 8inch wafers] *
⚫
**''For detailed measurement info, it is highly recommended that you read the manual.''
  
  ⚫
*[https://wiki.nanofab.ucsb.edu/w/images/d/d6/SURFSCAN_6200_6inch_wafers.pdf Surfscan 6200 6inch wafers] *
  ⚫
*[https://wiki.nanofab.ucsb.edu/w/images/8/87/SURFSCAN_6200_4inch_wafers.pdf Surfscan 6200 4inch wafers] *
  ⚫
*[https://wiki.nanofab.ucsb.edu/w/images/1/1a/SURFSCAN_6200_2_and_3inch_wafers.pdf Surfscan 6200 2 and 3inch wafers] *
  +
*[https://wiki.nanofab.ucsb.edu/w/images/4/4e/SURFSCAN_6200_Small_substrates.pdf Surfscan 6200 Small samples] *
 
*[[Wafer scanning process traveler]]
  
*[[Wafer scanning process traveler]]
  +
**''This is the procedure Staff uses to calibrate particle counts on our deposition tools.''
⚫
*[[Glossary]]
  
−
*[[Errors]]
  
   
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=== Other Documentation ===
−
==Standard Recipes==
  
   
−
* [https://wiki.nanofab.ucsb.edu/w/images/0/04/SURFSCAN_6200_8inch_wafers.pdf Surfscan 6200 8inch wafers] *
 +
* [https://wiki.nanotech.ucsb.edu/w/images/9/96/Surfscan-Operation-Manual.pdf Operations Manual]
  ⚫
**''For detailed measurement info, it is highly recommended that you read the manual.''
⚫
* [https://wiki.nanofab.ucsb.edu/w/images/d/d6/SURFSCAN_6200_6inch_wafers.pdf Surfscan 6200 6inch wafers] *
  
  +
⚫
* [https://wiki.nanofab.ucsb.edu/w/images/8/87/SURFSCAN_6200_4inch_wafers.pdf Surfscan 6200 4inch wafers] *
  
  ⚫
*[[Glossary]]
⚫
* [https://wiki.nanofab.ucsb.edu/w/images/1/1a/SURFSCAN_6200_2_and_3inch_wafers.pdf Surfscan 6200 2 and 3inch wafers] *
  
  +
*[[Surfscan Errors and Workarounds|Common Errors & Workarounds]]
⚫
* [https://wiki.nanofab.ucsb.edu/w/images/4/4e/SURFSCAN_6200_Small_substrates.pdf Surfscan 6200 Small samples] *
  
   
 
==Examples==
  
==Examples==

Revision as of 11:34, 4 January 2024

Surface Analysis (KLA/Tencor Surfscan)
KLA.jpg
Location Bay 5
Tool Type Inspection, Test and Characterization
Manufacturer Tencor
Description Surface Analysis 
KLA/Tencor Surfscan
Primary Supervisor Biljana Stamenic
(805) 893-4002
biljana@ece.ucsb.edu

Secondary Supervisor

Don Freeborn

Recipes N/A


About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 8 inches.

Documentation

Operating Procedures

Other Documentation

  • Operations Manual
    • For detailed measurement info, it is highly recommended that you read the manual.

Examples


A low-particle 4-inch wafer example:
Gain 4: Small Particles

(0.160µm – 1.60µm)

Gain 2: Large Particles

(1.60µm – 28.0µm)

Surfscan Low-Particle Example - G4.png Surfscan Low-Particle Example - G2.png
A high-particle 4-inch wafer example:
Gain 4: Small Particles

(0.160µm – 1.60µm)

Gain 2: Large Particles

(1.60µm – 28.0µm)

Surfscan - 230113A7 Gain4 high particles.jpg Surfscan 230113A7G2 after low particles.jpg
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