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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 10:14, 7 July 2022 John d talk contribs changed group membership for Pakala from staff (temporary, until 10:24, 1 August 2022) to (none) (left the lab)
- 10:13, 7 July 2022 John d talk contribs changed group membership for Noahdutra from (none) to staff
- 08:04, 6 July 2022 John d talk contribs created page File:Microscopes - DIC filters and light path.png
- 08:04, 6 July 2022 John d talk contribs uploaded File:Microscopes - DIC filters and light path.png
- 07:49, 6 July 2022 John d talk contribs created page File:Microscopes - Filter Out position-detent.png
- 07:49, 6 July 2022 John d talk contribs uploaded File:Microscopes - Filter Out position-detent.png
- 03:02, 27 June 2022 John d talk contribs created page File:TOOL template - example image.png (example of the tool infobox)
- 03:02, 27 June 2022 John d talk contribs uploaded File:TOOL template - example image.png (example of the tool infobox)
- 00:51, 27 June 2022 John d talk contribs created page Template:StaffContactInfo DJ (copied #IFEQ section of "tool2_DJ")
- 07:15, 22 June 2022 John d talk contribs created page DUMMY TOOL (pasted nanonex source)
- 06:41, 22 June 2022 John d talk contribs created page Hummer SEM Sample Coater - Techniques to reduce charging in SEMs (added BillM's technique) Tag: Visual edit
- 20:42, 19 May 2022 John d talk contribs created page File:Oxford InP 60C XS05.jpg
- 20:42, 19 May 2022 John d talk contribs uploaded File:Oxford InP 60C XS05.jpg
- 20:41, 19 May 2022 John d talk contribs created page File:Oxford InP 60C 45DEG05.jpg
- 20:41, 19 May 2022 John d talk contribs uploaded File:Oxford InP 60C 45DEG05.jpg
- 20:39, 19 May 2022 John d talk contribs created page File:Oxford InP 60C 45DEG02.jpg
- 20:39, 19 May 2022 John d talk contribs uploaded File:Oxford InP 60C 45DEG02.jpg
- 17:17, 10 May 2022 John d talk contribs created page Process Group - Process Control Data (Links to all PECVD and IBD data pages) Tag: Visual edit
- 16:34, 27 April 2022 John d talk contribs created page Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer (added Tips, copied from DUV Liftoff page) Tag: Visual edit
- 13:08, 15 April 2022 John d talk contribs created page Unaxis VLR Etch - Process Control Data (pasted table from Oxford ICP) Tag: Visual edit: Switched
- 21:08, 7 April 2022 John d talk contribs created page ASML Stepper 3 - Job Creator (initial description of usage and caveats) Tag: Visual edit
- 12:51, 31 March 2022 John d talk contribs uploaded a new version of File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png (fixed "110nm" to "1100nm")
- 12:49, 31 March 2022 John d talk contribs created page IBD: Calibrating Optical Thickness (initial version, full method described, images inserted.) Tag: Visual edit
- 12:43, 31 March 2022 John d talk contribs created page File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png
- 12:43, 31 March 2022 John d talk contribs uploaded File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png
- 12:36, 31 March 2022 John d talk contribs created page File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 12:36, 31 March 2022 John d talk contribs uploaded File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 12:57, 8 March 2022 John d talk contribs changed group membership for Millerski w from (none) to staff (new staff added)
- 12:28, 3 March 2022 John d talk contribs moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect (this page is not linked anywhere, looks like 2014 data only)
- 15:06, 1 March 2022 John d talk contribs moved page Wafer Cleaver (PELCO LatticeAx) to Wafer Cleaver (PELCO Flip-Scribe) without leaving a redirect (wrong name)
- 09:35, 1 March 2022 John d talk contribs created page File:LatticeAx.jpg (Image of PELCO LAtticeAx tool)
- 09:35, 1 March 2022 John d talk contribs uploaded File:LatticeAx.jpg (Image of PELCO LAtticeAx tool)
- 09:27, 1 March 2022 John d talk contribs created page Wafer Cleaver (PELCO LatticeAx) (new tool page)
- 11:48, 14 February 2022 John d talk contribs moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (Rename to include reticle barcode in filename)
- 11:47, 14 February 2022 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (More comments to help users fill this out.)
- 13:22, 11 February 2022 John d talk contribs created page MediaWiki:Deletereason-dropdown (added common NanoFab reasons for deletion)
- 13:20, 11 February 2022 John d talk contribs deleted page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer) (pasted data into https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_etching_SiO2_with_CHF3/CF4-ICP1)
- 13:12, 11 February 2022 John d talk contribs deleted page SiO2 Etch Test using CF4/CHF3 (old FL-ICP data - consolidated into new page "https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_Etching_SiO2_with_CHF3/CF4-Fluorine_ICP_Etcher")
- 10:49, 3 February 2022 John d talk contribs moved page REMOVED - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) to UNAVAILABLE - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) without leaving a redirect (change title to "unavailable")
- 10:46, 3 February 2022 John d talk contribs moved page Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) to REMOVED - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) without leaving a redirect (tool is removed from lab)
- 11:24, 1 February 2022 John d talk contribs changed group membership for Pakala from staff to staff (temporary, until 10:24, 1 August 2022)
- 11:24, 1 February 2022 John d talk contribs changed group membership for Pakala from (none) to staff (NanoFab undergrad staff)
- 09:37, 1 February 2022 John d talk contribs created page File:Vernier Template.gds (Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.)
- 09:37, 1 February 2022 John d talk contribs uploaded File:Vernier Template.gds (Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.)
- 23:03, 13 January 2022 John d talk contribs created page File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (Oxford ICP Etch Cals03)
- 23:03, 13 January 2022 John d talk contribs uploaded File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (Oxford ICP Etch Cals03)
- 22:55, 13 January 2022 John d talk contribs created page File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (Oxford ICP Cal SEMs)
- 22:55, 13 January 2022 John d talk contribs uploaded File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (Oxford ICP Cal SEMs)
- 22:51, 13 January 2022 John d talk contribs created page File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (Oxford ICP Etch Cal SEMs)
- 22:51, 13 January 2022 John d talk contribs uploaded File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (Oxford ICP Etch Cal SEMs)
- 14:21, 13 January 2022 John d talk contribs created page Oxford ICP Etcher - Process Control Data (pasted ICP2 data table) Tag: Visual edit: Switched
- 08:43, 7 January 2022 John d talk contribs created page Video Training - Introduction (Internal) (general methods - Demis) Tag: Visual edit
- 12:50, 4 January 2022 John d talk contribs created page File:ADT Dicing - Blade Exposure diagram.png
- 12:50, 4 January 2022 John d talk contribs uploaded File:ADT Dicing - Blade Exposure diagram.png
- 16:10, 21 December 2021 John d talk contribs uploaded a new version of File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png (Added scale bars 200µm)
- 11:50, 21 December 2021 John d talk contribs created page File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 11:50, 21 December 2021 John d talk contribs uploaded File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 07:35, 15 December 2021 John d talk contribs created page Old Deposition Data - 2021-12-15 (Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d...") Tag: Visual edit: Switched
- 07:31, 15 December 2021 John d talk contribs created page Deposition Data - temporary 2021-12-15 (pasted old data)
- 12:16, 8 December 2021 John d talk contribs created page MA6 Backside Alignment - Allowed Mark Locations (100-mm BSA chuck with cutouts measurements) Tag: Visual edit
- 12:15, 8 December 2021 John d talk contribs created page File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg
- 12:15, 8 December 2021 John d talk contribs uploaded File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg
- 11:22, 24 November 2021 John d talk contribs created page Photolithography - Manual Edge-Bead Removal Techniques (added razor, EBR100 and lithographic methods) Tag: Visual edit
- 11:12, 24 November 2021 John d talk contribs moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect (more generalized page title)
- 11:11, 24 November 2021 John d talk contribs created page Photolithography - HMDS Process for Improving Adhesion (added Underlayers for PR adhesion) Tag: Visual edit
- 13:45, 22 November 2021 John d talk contribs created page Old Deposition Data - NastaziaM 2021-11-22 (Created page with "Testing") Tag: Visual edit
- 13:39, 22 November 2021 John d talk contribs changed group membership for Nastazia from (none) to administrator (temporary, until 13:39, 22 November 2022) and staff (temporary, until 13:39, 22 November 2022)
- 15:07, 18 November 2021 John d talk contribs created page File:Surfscan Low-Particle Example - G2.png
- 15:07, 18 November 2021 John d talk contribs uploaded File:Surfscan Low-Particle Example - G2.png
- 15:05, 18 November 2021 John d talk contribs created page File:Surfscan Low-Particle Example - G4.png
- 15:05, 18 November 2021 John d talk contribs uploaded File:Surfscan Low-Particle Example - G4.png
- 08:51, 1 November 2021 John d talk contribs uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg (Moved left AlMk to left corner, instead of along edge. User JeurgenM from FP said this is better.)
- 12:15, 22 October 2021 John d talk contribs created page Template:StaffInfoSecondary DJ (Copy of NickL's "StaffInfoSecondary" template)
- 12:13, 22 October 2021 John d talk contribs created page Template:Tool2 DJ (copy of NickL's "Tool2" template)
- 12:12, 22 October 2021 John d talk contribs created page Template:StaffInfo DJ (copy of original StaffInfo tempalte)
- 11:49, 12 October 2021 John d talk contribs created page File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg
- 11:49, 12 October 2021 John d talk contribs uploaded File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg
- 13:59, 8 October 2021 John d talk contribs created page File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08)
- 13:59, 8 October 2021 John d talk contribs uploaded File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08)
- 13:55, 8 October 2021 John d talk contribs created page File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao)
- 13:55, 8 October 2021 John d talk contribs uploaded File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao)
- 10:42, 29 September 2021 John d talk contribs uploaded a new version of File:OxfordPlasmaPro.jpg (shrunk to 400px)
- 10:41, 29 September 2021 John d talk contribs created page File:OxfordPlasmaPro.jpg (Photo from User Manual)
- 10:41, 29 September 2021 John d talk contribs uploaded File:OxfordPlasmaPro.jpg (Photo from User Manual)
- 19:16, 28 September 2021 John d talk contribs created page File:MLA Quarter-Wafer Alignment.jpg
- 19:16, 28 September 2021 John d talk contribs uploaded File:MLA Quarter-Wafer Alignment.jpg
- 17:23, 21 September 2021 John d talk contribs created page File:CAD Tutorial for ASML Reticle v1 GDS.gds
- 17:23, 21 September 2021 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1 GDS.gds
- 15:38, 9 September 2021 John d talk contribs created page File:GCA Local Alignment Mark Dotted.gds
- 15:38, 9 September 2021 John d talk contribs uploaded File:GCA Local Alignment Mark Dotted.gds
- 15:36, 9 September 2021 John d talk contribs created page File:GCA Local Alignment Mark.gds
- 15:36, 9 September 2021 John d talk contribs uploaded File:GCA Local Alignment Mark.gds
- 15:27, 9 September 2021 John d talk contribs created page File:GCA Global Mark.gds
- 15:27, 9 September 2021 John d talk contribs uploaded File:GCA Global Mark.gds
- 13:38, 3 September 2021 John d talk contribs created page Oxford ICP Etcher (PlasmaPro 100 Cobra) (first attempt at page)
- 12:55, 3 September 2021 John d talk contribs uploaded a new version of File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg (v2 - indicated when PR was fully removed)
- 13:01, 27 August 2021 John d talk contribs changed group membership for Nplaviola from administrator (temporary, until 21:59, 23 August 2022) to administrator (temporary, until 13:01, 27 August 2022) and interface administrator (temporary, until 13:01, 27 August 2022) (wiki editing)
- 21:59, 23 August 2021 John d talk contribs changed group membership for Nplaviola from (none) to administrator (temporary, until 21:59, 23 August 2022) (update StaffInfo & Tool templates to allow multiple supervisors)
- 14:15, 4 August 2021 John d talk contribs uploaded File:GCA Stepper MaskPlate Master-DarkField 5x.gds (GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied.)
- 10:46, 13 July 2021 John d talk contribs uploaded File:200um square v1.gds (TESTING only - please delte)