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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 14:38, 11 January 2024 John d talk contribs moved page Stepper 2 (Autostep 200) - Job Programming to Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences (more descriptive title)
- 11:02, 11 January 2024 Biljana talk contribs created page File:IBD Troubleshooting Guide.pdf
- 11:02, 11 January 2024 Biljana talk contribs uploaded File:IBD Troubleshooting Guide.pdf
- 11:02, 11 January 2024 Biljana talk contribs created page File:IBD SOP.pdf
- 11:02, 11 January 2024 Biljana talk contribs uploaded File:IBD SOP.pdf
- 10:57, 11 January 2024 Biljana talk contribs created page File:IBD SOP.docx
- 10:57, 11 January 2024 Biljana talk contribs uploaded File:IBD SOP.docx
- 15:26, 9 January 2024 Biljana talk contribs created page File:Autostep 200 Stepper manual focus.pdf
- 15:26, 9 January 2024 Biljana talk contribs uploaded File:Autostep 200 Stepper manual focus.pdf
- 14:44, 9 January 2024 Sawyer l talk contribs uploaded a new version of File:DUV Flood Expose SOP Rev C.pdf
- 16:46, 8 January 2024 Biljana talk contribs created page File:Focus and exposure optimization- Autostep200-II.pdf
- 16:46, 8 January 2024 Biljana talk contribs uploaded File:Focus and exposure optimization- Autostep200-II.pdf
- 16:34, 8 January 2024 Biljana talk contribs created page File:General information about AUTOSTEP 200.pdf
- 16:34, 8 January 2024 Biljana talk contribs uploaded File:General information about AUTOSTEP 200.pdf
- 15:53, 8 January 2024 Biljana talk contribs created page File:AUTOSTEP 200 User Accessible Commands 010524.pdf
- 15:53, 8 January 2024 Biljana talk contribs uploaded File:AUTOSTEP 200 User Accessible Commands 010524.pdf
- 15:43, 8 January 2024 Biljana talk contribs created page File:Autostep200 Training Old Training Manual.pdf
- 15:43, 8 January 2024 Biljana talk contribs uploaded File:Autostep200 Training Old Training Manual.pdf
- 12:39, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:39, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:33, 8 January 2024 Biljana talk contribs created page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:33, 8 January 2024 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:33, 8 January 2024 Biljana talk contribs deleted page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:33, 8 January 2024 Biljana talk contribs deleted page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:30, 8 January 2024 Biljana talk contribs created page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:30, 8 January 2024 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:19, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:19, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 11:58, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf
- 11:58, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf
- 11:41, 8 January 2024 Biljana talk contribs created page File:Autostep 200 - Setting up the Job.pdf
- 11:41, 8 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Setting up the Job.pdf
- 11:41, 8 January 2024 Biljana talk contribs deleted page File:Autostep 200 - Setting up the Job.pdf
- 11:35, 8 January 2024 Biljana talk contribs created page File:Autostep 200 - Setting up the Job.pdf
- 11:35, 8 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Setting up the Job.pdf
- 10:59, 8 January 2024 Biljana talk contribs uploaded a new version of File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 Biljana talk contribs created page File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 Biljana talk contribs uploaded File:Running the JOB- One Page Instructions.pdf
- 17:39, 5 January 2024 Biljana talk contribs created page File:Autostep 200 - Standard Operating Procedure-2023.pdf
- 17:39, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Standard Operating Procedure-2023.pdf
- 17:20, 5 January 2024 Biljana talk contribs created page File:Autostep200+chucks+shims.pdf
- 17:20, 5 January 2024 Biljana talk contribs uploaded File:Autostep200+chucks+shims.pdf
- 17:12, 5 January 2024 Biljana talk contribs created page File:Autostep 200 chucks-2023.pdf
- 17:12, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 chucks-2023.pdf
- 17:00, 5 January 2024 Biljana talk contribs created page File:Autostep 200 Chucks table.pdf
- 17:00, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 Chucks table.pdf
- 16:30, 5 January 2024 Biljana talk contribs created page File:Autostep 200 Running a JOB One Page Instructions.pdf
- 16:30, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 Running a JOB One Page Instructions.pdf
- 15:43, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 010524.pdf
- 15:43, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 010524.pdf
- 15:40, 5 January 2024 Biljana talk contribs deleted page File:GCA 6300 Standard Operating Procedure 122823.pdf (have two files with the same name)
- 15:39, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:39, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:38, 5 January 2024 Biljana talk contribs deleted page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:34, 5 January 2024 Biljana talk contribs uploaded a new version of File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:28, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Available chucks 2023.pdf
- 15:28, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Available chucks 2023.pdf
- 15:26, 5 January 2024 Biljana talk contribs created page File:GCA 6300+chucks+shims 2023 (1).pdf
- 15:26, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300+chucks+shims 2023 (1).pdf
- 15:11, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Chucks table 2023.pdf
- 15:11, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Chucks table 2023.pdf
- 15:07, 5 January 2024 Biljana talk contribs created page File:GCA 6300+chucks+shims 2023.xlsx
- 15:07, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300+chucks+shims 2023.xlsx
- 15:07, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Available chucks 2023.pptx
- 15:07, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Available chucks 2023.pptx
- 18:16, 4 January 2024 John d talk contribs created page User:John d Demis D. John (redirect to Demis_D._John) Tags: New redirect Visual edit: Switched
- 17:38, 4 January 2024 Biljana talk contribs created page File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 Biljana talk contribs uploaded File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 small substrates.pdf
- 17:38, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 small substrates.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 15:39, 4 January 2024 Sawyer l talk contribs created page File:DUV Flood Expose SOP Rev C.pdf
- 15:39, 4 January 2024 Sawyer l talk contribs uploaded File:DUV Flood Expose SOP Rev C.pdf
- 14:40, 4 January 2024 John d talk contribs uploaded a new version of File:Vernier Template.gds (Corrected first tooth had 0 offset)
- 11:36, 4 January 2024 John d talk contribs created page Surfscan Errors and Workarounds (added keuyboard workaround) Tag: Visual edit
- 11:31, 4 January 2024 John d talk contribs deleted page KLA-Tencor Surfscan - Standard Operating Procedure (Moved data to another page: content was: "This tool can be used for scanning 4", 6" and 8" wafers. Pieces could be also scanned, but they need to be mounted on either 4" or 8" wafer. The maximum thickness of a wafer (or a wafer+mounted piece) is up to 1mm. ==SURFSCAN 6200== LOG IN using the access code: '''boss''' ( if the keyboard is not working use the virtual keyboard on the monitor). Double click on the icon...", and the only contributor was "Biljana"...)
- 15:37, 29 December 2023 Biljana talk contribs created page File:GCA 6300 - Commands.pdf
- 15:37, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 - Commands.pdf
- 12:46, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 12:46, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 122823.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA6300 Optimizing the process 6.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA6300 Optimizing the process 6.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Shutdown and Start up.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Shutdown and Start up.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Reboot frozen keyboard.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Reboot frozen keyboard.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.pdf
- 12:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 General Information about system 4.pdf
- 12:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 General Information about system 4.pdf
- 12:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Running a JOB 3.pdf
- 12:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Running a JOB 3.pdf
- 11:54, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.docx
- 11:54, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.docx
- 17:15, 21 December 2023 Biljana talk contribs deleted page File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf