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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 13:45, 2 November 2023 John d talk contribs deleted page SSI Solaris 150 - Operating Procedure (Moved data to another page: content was: "'''Solaris (SSI) RTP Operating Instructions''' 1) On the main system press the green power on button. You will hear a loud click and hear air flowing. If you do not hear anything after pressing the green button, try rotating the EMO button and then press the green power on button again. 2) Press down on the door lever and gently pull out the wafer tray. Verify that a previou...", and the only contributor was "Lingg"...)
- 17:08, 1 November 2023 John d talk contribs deleted page UNAVAILABLE - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) (Equipment is not available anymore: content was: "{{tool |name=Optical Profilometer - Filmetrics Profilm3D |picture=Filmetrics_Profilm3D_System_Photo.png |type = Inspection, Test and Characterization |super= |location=UNAVAILABLE |description = Optical Profilometer |manufacturer = [http://filmetrics.com Filmetrics Inc.] |model = Profilm3D |toolid= }} '''THIS TOOL HAS BEEN REMOVED FROM THE LAB AND IS UNAVAILABLE as of 2019.'''...", and the only contributor was "[[Special:Contributions/John d...)
- 17:07, 1 November 2023 John d talk contribs deleted page Profilm3D - Quick Start - Surface Roughness Measurement (PSI Mode) (Equipment is not available anymore: content was: " '''THIS TOOL IS CURRENTLY UNAVAILABLE.''' Please see the <u>Olympus LEXT Confocal Microscope</u> for similar capabilities. ==Measurement Procedure== *Turn objective to 10x *Select Recipe - '''''PSI Roughness''''' or '''''WLI Step Height''''' (re-selecting reloads defaults, removing the ''<unsaved>'' label) **If it asks you to rotate the objective, click "''Update Recipe''" to keep it on the...)
- 16:56, 1 November 2023 John d talk contribs deleted page Step Profile (Dektak IIA) (Equipment is not available anymore: content was: "{{tool|{{PAGENAME}} |picture=Dektak2A.jpg |type = Inspection, Test and Characterization |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 4 |email=silva@ece.ucsb.edu |description = Dektak Profilometer |manufacturer = Sloan (now Veeco) |materials = }} '''This tool has been decommissioned and removed from the lab, as of 2018-10-09.''' '''Information on this page is for reference/historical purposes only.''' = About = The Dektak is a...)
- 16:50, 1 November 2023 John d talk contribs deleted page GCA 6300 Stepper Training MAnual-Full version (Broken redirect: content was: "GCA 6300 Stepper Training Manual - Full version. pdf", and the only contributor was "Biljana" (talk))
- 16:48, 1 November 2023 John d talk contribs deleted page File:Logitech WBS7 Bonder Schematic from Manual.png (Copyright violation)
- 15:43, 1 November 2023 John d talk contribs deleted page File:Olympus - BHM Microscope - Instruction Manual.pdf (Copyright violation: also not linked anywhere on site)
- 12:14, 1 November 2023 John d talk contribs deleted page File:CompleteEASE Manual.pdf (Copyright violation: proprietary requested removal by Woollam)
- 20:35, 30 October 2023 John d talk contribs created page Template:News - Older Articles (pasted news from ~2022 bthibeault culling)
- 20:21, 30 October 2023 John d talk contribs deleted page Template:Homepage RightSideBar (merged into main homepage, removed right side bar entriely. content was: "'''Other Links:''' * [http://signupmonkey.ece.ucsb.edu SignUpMonkey] * [http://nanofab.ucsb.edu NanoTech Homepage] * [http://www.ece.ucsb.edu UCSB EE Dept.] * [https://nanofab.ucsb.edu/services Get into the Lab] * [https://nanofab.ucsb.edu/services#fabrication-services Fabrication Services]", and the only contributor was "John d" (talk))
- 20:12, 30 October 2023 John d talk contribs created page Template:Homepage RightSideBar (Created page with "'''Other Links:''' * [http://signupmonkey.ece.ucsb.edu SignUpMonkey] * [http://nanofab.ucsb.edu NanoTech Homepage] * [http://www.ece.ucsb.edu UCSB EE Dept.] * [https://nanofab...")
- 20:06, 30 October 2023 John d talk contribs created page Template:Homepage GeneralInfo (pasted from template `FeaturedArticle`)
- 19:50, 30 October 2023 John d talk contribs created page Template:Homepage BottomBanner (pasted from template `nav2`, change contact to NanoFab-it@ece...)
- 19:44, 30 October 2023 John d talk contribs created page Template:Homepage Topbanners (pasted from `nav` template)
- 14:57, 30 October 2023 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf
- 14:56, 30 October 2023 Millerski w talk contribs created page File:XeF2 Etch Operating Instructions.pdf (Updated SOP)
- 14:56, 30 October 2023 Millerski w talk contribs uploaded File:XeF2 Etch Operating Instructions.pdf (Updated SOP)
- 14:56, 30 October 2023 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf
- 14:51, 30 October 2023 Millerski w talk contribs created page File:Tube Furnace Wafer Bonding SOP.pdf (Updated SOP)
- 14:51, 30 October 2023 Millerski w talk contribs uploaded File:Tube Furnace Wafer Bonding SOP.pdf (Updated SOP)
- 14:46, 30 October 2023 Millerski w talk contribs created page File:Logitech Wafer Bonder Operating Instructions.pdf
- 14:46, 30 October 2023 Millerski w talk contribs uploaded File:Logitech Wafer Bonder Operating Instructions.pdf
- 14:45, 30 October 2023 Millerski w talk contribs uploaded a new version of File:RTA SSI Operating Instructions.pdf (Updated SOP)
- 14:42, 30 October 2023 Millerski w talk contribs created page File:CDE ResMap Operating Instructions.pdf (SOP Update)
- 14:42, 30 October 2023 Millerski w talk contribs uploaded File:CDE ResMap Operating Instructions.pdf (SOP Update)
- 11:06, 30 October 2023 Sawyer l talk contribs created page File:EVG Plasma Activation SOP Rev E.pdf
- 11:06, 30 October 2023 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev E.pdf
- 15:10, 17 October 2023 Sawyer l talk contribs created page File:ADT SOP Rev J.pdf
- 15:10, 17 October 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev J.pdf
- 12:39, 16 October 2023 John d talk contribs moved page Amscope Quickstart Usage Guide to Measurements and Imaging with Amscope Camera - Quickstart Usage Guide (more descriptive title for printing)
- 14:26, 28 September 2023 Sawyer l talk contribs uploaded a new version of File:RIE 2 SOP Rev D.pdf
- 11:46, 27 September 2023 John d talk contribs protected Nanofab Staff Internal Pages [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) (hist)
- 11:02, 27 September 2023 Hopkins a talk contribs created page File:EDS SOP.pdf
- 11:02, 27 September 2023 Hopkins a talk contribs uploaded File:EDS SOP.pdf
- 08:21, 26 September 2023 Hopkins a talk contribs created page File:JEOL IT800SHL Operating Procedure.docx
- 08:21, 26 September 2023 Hopkins a talk contribs uploaded File:JEOL IT800SHL Operating Procedure.docx
- 08:15, 26 September 2023 Hopkins a talk contribs created page File:Loomis Scriber SOP.docx
- 08:15, 26 September 2023 Hopkins a talk contribs uploaded File:Loomis Scriber SOP.docx
- 15:41, 25 September 2023 John d talk contribs created page Nanofab New User Onboarding (inital page) Tag: Visual edit
- 14:05, 22 September 2023 John d talk contribs created page Photomask Ordering Procedure for UCSB Users (pasted procedure from email) Tag: Visual edit
- 18:26, 20 September 2023 John d talk contribs created page Homepage Draft1 (pasted Main_Page source code)
- 07:28, 20 September 2023 Hopkins a talk contribs created page File:Suss Bonder Recipe Guidelines.docx (Bonder Recipe Guidelines)
- 07:28, 20 September 2023 Hopkins a talk contribs uploaded File:Suss Bonder Recipe Guidelines.docx (Bonder Recipe Guidelines)
- 07:21, 20 September 2023 Hopkins a talk contribs created page File:Bonder Pressure Rules Vis Aid.docx (Bonder Pressure Rules Visual Aid)
- 07:21, 20 September 2023 Hopkins a talk contribs uploaded File:Bonder Pressure Rules Vis Aid.docx (Bonder Pressure Rules Visual Aid)
- 16:46, 18 September 2023 Barreraz talk contribs created page File:EB1 9-18-23.jpg (Post automation upgrade)
- 16:46, 18 September 2023 Barreraz talk contribs uploaded File:EB1 9-18-23.jpg (Post automation upgrade)
- 09:27, 18 September 2023 Barreraz talk contribs created page File:EB-1 operation instructions 9-18-23.pdf
- 09:27, 18 September 2023 Barreraz talk contribs uploaded File:EB-1 operation instructions 9-18-23.pdf
- 09:24, 18 September 2023 Barreraz talk contribs uploaded a new version of File:EB-1 Operation Instructions.pdf
- 12:50, 13 September 2023 John d talk contribs uploaded a new version of File:ASML IQC Focus Mean Correction screenshot.jpg (Cleaner straightened photo)
- 11:09, 13 September 2023 John d talk contribs created page File:ASML Stepper 3 - HELP button error log screenshot.png
- 11:09, 13 September 2023 John d talk contribs uploaded File:ASML Stepper 3 - HELP button error log screenshot.png
- 08:23, 13 September 2023 Sawyer l talk contribs created page File:Ultron 1042R Film specs.pdf
- 08:23, 13 September 2023 Sawyer l talk contribs uploaded File:Ultron 1042R Film specs.pdf
- 15:20, 12 September 2023 John d talk contribs moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL) (new tool., old tool replaced)
- 11:48, 8 September 2023 User account Ernestosan talk contribs was created
- 11:52, 30 August 2023 Mehalana v talk contribs created page Nanofab-IT - Add Device to Network (copy/pasted from parent page) Tag: Visual edit
- 09:16, 29 August 2023 Sawyer l talk contribs uploaded a new version of File:UV Ozone SOP Rev A.pdf
- 08:42, 29 August 2023 Sawyer l talk contribs created page File:UV Ozone SOP Rev A.pdf
- 08:42, 29 August 2023 Sawyer l talk contribs uploaded File:UV Ozone SOP Rev A.pdf
- 11:31, 25 August 2023 Sawyer l talk contribs created page File:EB2 SOP Rev H.pdf
- 11:31, 25 August 2023 Sawyer l talk contribs uploaded File:EB2 SOP Rev H.pdf
- 10:52, 22 August 2023 Sawyer l talk contribs uploaded a new version of File:ICP -1 Standard Etch Recipes.pdf
- 11:09, 17 August 2023 Sawyer l talk contribs created page File:ICP -1 Standard Etch Recipes.pdf
- 11:09, 17 August 2023 Sawyer l talk contribs uploaded File:ICP -1 Standard Etch Recipes.pdf
- 10:59, 16 August 2023 Hopkins a talk contribs created page File:IMG 0554.jpg
- 10:59, 16 August 2023 Hopkins a talk contribs uploaded File:IMG 0554.jpg
- 15:12, 15 August 2023 Ffoong talk contribs created page Wafer Cleaver Recipes (LSD-155LT) (New page for Loomis cleaver recipes) Tag: Visual edit
- 06:32, 3 August 2023 Sawyer l talk contribs created page File:ADT SOP Rev I.pdf
- 06:32, 3 August 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev I.pdf
- 09:33, 2 August 2023 Sawyer l talk contribs uploaded a new version of File:MA-6 SOP Rev D.pdf
- 07:54, 21 July 2023 Sawyer l talk contribs created page File:RIE 2 SOP Rev D.pdf
- 07:54, 21 July 2023 Sawyer l talk contribs uploaded File:RIE 2 SOP Rev D.pdf
- 16:49, 18 July 2023 John d talk contribs created page File:JEOL 7600F UserManual.pdf (v08.12, from Bill Mitchell)
- 16:49, 18 July 2023 John d talk contribs uploaded File:JEOL 7600F UserManual.pdf (v08.12, from Bill Mitchell)
- 08:57, 15 June 2023 Millerski w talk contribs created page File:RTA AET Operating Instructions.pdf (Operating Instructions)
- 08:57, 15 June 2023 Millerski w talk contribs uploaded File:RTA AET Operating Instructions.pdf (Operating Instructions)
- 16:33, 9 June 2023 Ffoong talk contribs created page Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture. (Created page with "left|thumb|900x900px|Positive ash rate vs differnt gas mixtures. Especially between O2 only vs O2/N2 gas mixtures") Tag: Visual edit
- 16:31, 9 June 2023 Ffoong talk contribs created page File:Gas mixture comparison.jpg
- 16:31, 9 June 2023 Ffoong talk contribs uploaded File:Gas mixture comparison.jpg
- 16:17, 9 June 2023 Ffoong talk contribs created page File:Au oxidation by O2-N2 ash.jpg
- 16:17, 9 June 2023 Ffoong talk contribs uploaded File:Au oxidation by O2-N2 ash.jpg
- 16:14, 9 June 2023 Ffoong talk contribs created page Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe. (Gold surface darkened after O2/N2 ashing recipe treatment, XPS data showed that Au can oxidize in the high oxidization condition)
- 23:36, 5 June 2023 John d talk contribs created page File:Surfscan 230113A7G2 after low particles.jpg
- 23:36, 5 June 2023 John d talk contribs uploaded File:Surfscan 230113A7G2 after low particles.jpg
- 23:35, 5 June 2023 John d talk contribs created page File:Surfscan - 230113A7 Gain4 high particles.jpg
- 23:35, 5 June 2023 John d talk contribs uploaded File:Surfscan - 230113A7 Gain4 high particles.jpg
- 10:00, 5 June 2023 Ffoong talk contribs created page SPR220-7 at 3kW various temperature without N2 gas (add data file) Tag: Visual edit
- 09:39, 5 June 2023 Ffoong talk contribs created page File:PPR 220-7 Etch Rates vs Temperature.jpg
- 09:39, 5 June 2023 Ffoong talk contribs uploaded File:PPR 220-7 Etch Rates vs Temperature.jpg
- 09:34, 5 June 2023 Ffoong talk contribs created page File:PPR220-7 Etch Rates vs Temperature.jpg
- 09:34, 5 June 2023 Ffoong talk contribs uploaded File:PPR220-7 Etch Rates vs Temperature.jpg
- 09:28, 5 June 2023 Ffoong talk contribs created page File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png
- 09:28, 5 June 2023 Ffoong talk contribs uploaded File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png
- 09:19, 5 June 2023 Ffoong talk contribs created page File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp.png
- 09:19, 5 June 2023 Ffoong talk contribs uploaded File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp.png
- 12:08, 2 June 2023 John d talk contribs uploaded a new version of File:PECVD1 SiN Stress vs. N2 plot.jpg (better formatting, colors axes mathcing markers etc)
- 11:52, 2 June 2023 John d talk contribs created page File:PECVD1 SiN Stress vs. N2 plot.jpg
- 11:52, 2 June 2023 John d talk contribs uploaded File:PECVD1 SiN Stress vs. N2 plot.jpg