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12:12, 20 March 2014
New PECVD1 SIN Data-March 2014 SIN data.pdf
(
file
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117 KB
1
12:00, 24 March 2014
Operating Ebeam1-2.pdf
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file
)
130 KB
1
16:39, 30 March 2020
PECVD.docx
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file
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79 KB
1
11:42, 21 October 2014
PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf
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file
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733 KB
1
16:37, 5 December 2014
PECVD1-LS SIN recipe 2014.pdf
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file
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1.03 MB
1
12:18, 10 December 2014
PECVD1-LS SION-recipe2014 LS SION recipe.pdf
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file
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1.24 MB
1
16:23, 3 December 2014
PECVD1-LS SION recipe 2014.pdf
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file
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1.24 MB
1
16:53, 12 March 2014
PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf
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file
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106 KB
1
15:39, 20 March 2014
PECVD1-SiN-1000A Standard recipe.pdf
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file
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296 KB
1
14:43, 19 March 2014
PECVD1-SiN-standard recipe.pdf
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file
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189 KB
1
14:55, 15 April 2014
PECVD1-SiN-standard recipe 1000A-April 2014.pdf
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file
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19 KB
1
12:08, 20 March 2014
PECVD1-SiN-standard recipe 1000A.pdf
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file
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295 KB
1
14:58, 15 April 2014
PECVD1-SiN-standard recipe 2014.pdf
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file
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298 KB
1
10:25, 10 December 2014
PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf
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file
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298 KB
1
10:00, 13 March 2014
PECVD1-SiN Calibration-February 2014.pdf
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file
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105 KB
1
10:07, 13 March 2014
PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf
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file
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103 KB
1
14:55, 19 March 2014
PECVD1-SiN Data-March 2014.pdf
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file
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101 KB
1
09:37, 13 March 2014
PECVD1-SiN data.pdf
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file
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106 KB
1
10:32, 10 December 2014
PECVD1-SiN standard recipe 2014.pdf
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file
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299 KB
1
16:34, 21 March 2014
PECVD1-SiO2-standard recipe 1000A.pdf
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file
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1,007 KB
1
15:42, 15 April 2014
PECVD1-SiO2-standard recipe 2014.pdf
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file
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299 KB
1
11:22, 10 December 2014
PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
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file
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299 KB
1
10:53, 1 October 2014
PECVD1-SiON-recipe 2014 LS SION recipe.pdf
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file
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1.24 MB
1
15:24, 10 October 2014
PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf
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file
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1.24 MB
1
09:55, 11 September 2013
PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
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file
)
130 KB
1
12:06, 13 March 2014
PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf
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file
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113 KB
1
11:20, 13 March 2014
PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf
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file
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112 KB
1
14:14, 7 April 2020
PECVD1-cleaning.png
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file
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1.79 MB
1
13:46, 20 March 2014
PECVD1 Operating Instructions.pdf
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file
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64 KB
1
14:02, 20 March 2014
PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
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file
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82 KB
2
16:59, 20 March 2014
PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf
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file
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62 KB
1
15:29, 15 April 2014
PECVD1 SIN Data-April 2014 SIN data.pdf
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file
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117 KB
1
15:35, 20 March 2014
PECVD1 SIN Data-March 2014 SIN data.pdf
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file
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117 KB
1
14:05, 20 March 2014
PECVD1 SIN Thickness &index uniformity March 2014.pdf
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file
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103 KB
1
14:12, 20 March 2014
PECVD1 SIN Thickness and index uniformity March 2014.pdf
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file
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94 KB
1
17:09, 12 March 2014
PECVD1 SiN data-February 2014 AFM roughness.pdf
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file
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156 KB
1
15:44, 15 April 2014
PECVD1 SiO2 Data-April 2014 SiO2 Data.pdf
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file
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116 KB
1
12:06, 21 March 2014
PECVD1 SiO2 Data-March 2014 SiO2 Data.pdf
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file
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116 KB
1
09:50, 7 April 2020
PECVD1 particulates in 2019.jpg
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file
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6.68 MB
1
11:59, 3 October 2012
PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
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file
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41 KB
1
11:55, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
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file
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42 KB
1
12:00, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
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file
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42 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
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file
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41 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
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file
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41 KB
1
12:06, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
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file
)
42 KB
1
12:17, 3 October 2012
PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
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file
)
375 KB
1
12:12, 3 October 2012
PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
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file
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41 KB
1
15:36, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
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file
)
34 KB
1
15:38, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
(
file
)
34 KB
1
16:53, 3 October 2012
PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
(
file
)
658 KB
1
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