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This special page shows all uploaded files.
Date | Name | Thumbnail | Size | User | Description | Versions |
---|---|---|---|---|---|---|
12:29, 23 November 2022 | ADT SOP Rev G.pdf (file) | 800 KB | Sawyer l | 1 | ||
13:59, 16 March 2023 | ADT SOP Rev H.pdf (file) | 2.77 MB | Sawyer l | 1 | ||
06:32, 3 August 2023 | ADT SOP Rev I.pdf (file) | 2.85 MB | Sawyer l | 1 | ||
14:57, 30 October 2023 | ADT SOP Rev J.pdf (file) | 2.98 MB | Sawyer l | 3 | ||
17:02, 13 March 2014 | ADV.PECVD OXIDE-March 2014.pdf (file) | 91 KB | Biljana | 1 | ||
14:31, 24 March 2014 | ADV. PECVD OXIDE data-March 2014.pdf (file) | 105 KB | Biljana | 1 | ||
16:36, 13 March 2014 | ADV OXIDE data.pdf (file) | 88 KB | Biljana | 1 | ||
13:51, 7 April 2014 | ADV OXIDE data April 2014.pdf (file) | 106 KB | Biljana | 1 | ||
13:49, 7 April 2014 | ADV PECVD NITRIDE2-Data April 2014.pdf (file) | 125 KB | Biljana | 1 | ||
16:47, 24 March 2014 | ADV PECVD NITRIDE2-Data March 2014.pdf (file) | 125 KB | Biljana | 1 | ||
11:45, 31 March 2014 | AET RTA Operating Instructions.pdf (file) | 34 KB | Biljana | 1 | ||
11:26, 6 September 2012 | ALD-Al2O3-100-Recipe.pdf (file) | 1.08 MB | Zwarburg | 1 | ||
11:26, 6 September 2012 | ALD-Al2O3-300-Recipe.pdf (file) | 1.09 MB | Zwarburg | 1 | ||
11:25, 6 September 2012 | ALD-Al2O3-300-Saturated-Recipe.pdf (file) | 1.2 MB | Zwarburg | 1 | ||
11:26, 6 September 2012 | ALD-Al2O3-Plasma-300C-Recipe.pdf (file) | 992 KB | Zwarburg | 1 | ||
11:30, 6 September 2012 | ALD-AlN-300-recipe.pdf (file) | 1.09 MB | Zwarburg | 1 | ||
11:30, 6 September 2012 | ALD-HfO2-100-recipe.pdf (file) | 1.09 MB | Zwarburg | 1 | ||
11:30, 6 September 2012 | ALD-HfO2-300-recipe.pdf (file) | 1.08 MB | Zwarburg | 1 | ||
10:50, 22 August 2012 | ALD-Operating-Instrucitons.pdf (file) | 68 KB | Zwarburg | 1 | ||
11:33, 6 September 2012 | ALD-SiO2-100-recipe.pdf (file) | 1.08 MB | Zwarburg | 1 | ||
11:33, 6 September 2012 | ALD-SiO2-300-recipe.pdf (file) | 1.09 MB | Zwarburg | 1 | ||
11:33, 6 September 2012 | ALD-ZrO2-300-recipe.pdf (file) | 1.08 MB | Zwarburg | 1 | ||
08:51, 21 March 2014 | ALD operating instructions-1.pdf (file) | 66 KB | Biljana | 1 | ||
08:52, 23 July 2012 | AP 3000 Adhesion Promoter MSDS.pdf (file) | 141 KB | Zwarburg | {{MSDS}} | 1 | |
14:20, 22 April 2013 | AR2-Anti-Reflective-Coating.pdf (file) | 91 KB | Thibeault | 1 | ||
11:18, 9 September 2019 | ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg (file) | 294 KB | John d | 1 | ||
09:00, 23 July 2012 | ARC i-CON-16 MSDS.pdf (file) | 147 KB | Zwarburg | {{MSDS}} | 1 | |
08:52, 23 July 2012 | ARC i-CON-7 Anti Reflective MSDS.pdf (file) | 19 KB | Zwarburg | {{MSDS}} | 1 | |
17:45, 27 June 2012 | ASML.jpg (file) | 48 KB | Zwarburg | {{toolimage}} | 1 | |
16:30, 18 May 2023 | ASML CD Cals - Example Plot.jpg (file) | 32 KB | John d | 1 | ||
16:28, 18 May 2023 | ASML CD Cals - Example Table.jpg (file) | 100 KB | John d | 1 | ||
12:50, 13 September 2023 | ASML IQC Focus Mean Correction screenshot.jpg (file) | 165 KB | John d | Cleaner straightened photo | 2 | |
11:26, 1 April 2014 | ASML Job Set-Up Guide.pdf (file) | 3.13 MB | Abrahamsen | 1 | ||
11:51, 3 June 2016 | ASML Job Set-Up Guide simple v1.pdf (file) | 1.6 MB | Thibeault | 1 | ||
16:47, 10 April 2015 | ASML Job Set-Up Guide v2.pdf (file) | 1.81 MB | Thibeault | 1 | ||
17:26, 2 April 2015 | ASML Mask Making Guidelines.pdf (file) | 176 KB | Thibeault | 1 | ||
16:31, 31 January 2019 | ASML On Wafer Mark.gds (file) | 4 KB | John d | CAD file for ASML Alignment Marks | 1 | |
14:53, 26 March 2020 | ASML Reticle Programming Params - DEM-2020-03 v1.xlsx (file) | 10 KB | John d | CAD Tutorial - example programming spreadsheet for ASML Stepper | 1 | |
11:47, 14 February 2022 | ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (file) | 11 KB | John d | More comments to help users fill this out. | 7 | |
14:58, 21 February 2018 | ASML Stepper 3 - Field Sizes - Screen Shot 2018-02-21 at 1.40.22 PM.png (file) | 45 KB | John d | 1 | ||
11:09, 13 September 2023 | ASML Stepper 3 - HELP button error log screenshot.png (file) | 54 KB | John d | 1 | ||
14:39, 28 July 2016 | ASi deposition and film stress using AV dep tool.pdf (file) | 1.07 MB | Ningcao | 1 | ||
10:01, 8 April 2020 | AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx (file) | 3.27 MB | Biljana | 1 | ||
20:32, 7 April 2020 | AUTOSTEP 200-PIECES instruction 6-20-19.pptx (file) | 4.72 MB | Biljana | 1 | ||
15:53, 8 January 2024 | AUTOSTEP 200 User Accessible Commands 010524.pdf (file) | 77 KB | Biljana | 1 | ||
12:14, 1 December 2022 | AXP4000pb-Datasheet.pdf (file) | 1.86 MB | John d | New datasheet, actually the "addiitonal information" sheet from Microchem Includes spin curves for ALL 4000 series PR's. from here: https://www.microchemicals.com/products/photoresists/az_p4110.html | 2 | |
17:08, 8 November 2012 | AZ300MIF-Developer-Datasheet.pdf (file) | 77 KB | Zwarburg | 1 | ||
17:09, 8 November 2012 | AZ300T-Resist-Remover.pdf (file) | 383 KB | Zwarburg | 1 | ||
17:07, 8 November 2012 | AZ400K-Developer-Datasheet.pdf (file) | 77 KB | Zwarburg | 1 | ||
16:57, 8 November 2012 | AZ5214-Negative-Resist-Datasheet.pdf (file) | 101 KB | Zwarburg | 1 |