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Date Name Thumbnail Size User Description Versions
12:29, 23 November 2022 ADT SOP Rev G.pdf (file) 800 KB Sawyer l   1
13:59, 16 March 2023 ADT SOP Rev H.pdf (file) 2.77 MB Sawyer l   1
06:32, 3 August 2023 ADT SOP Rev I.pdf (file) 2.85 MB Sawyer l   1
14:57, 30 October 2023 ADT SOP Rev J.pdf (file) 2.98 MB Sawyer l   3
17:02, 13 March 2014 ADV.PECVD OXIDE-March 2014.pdf (file) 91 KB Biljana   1
14:31, 24 March 2014 ADV. PECVD OXIDE data-March 2014.pdf (file) 105 KB Biljana   1
16:36, 13 March 2014 ADV OXIDE data.pdf (file) 88 KB Biljana   1
13:51, 7 April 2014 ADV OXIDE data April 2014.pdf (file) 106 KB Biljana   1
13:49, 7 April 2014 ADV PECVD NITRIDE2-Data April 2014.pdf (file) 125 KB Biljana   1
16:47, 24 March 2014 ADV PECVD NITRIDE2-Data March 2014.pdf (file) 125 KB Biljana   1
11:45, 31 March 2014 AET RTA Operating Instructions.pdf (file) 34 KB Biljana   1
11:26, 6 September 2012 ALD-Al2O3-100-Recipe.pdf (file) 1.08 MB Zwarburg   1
11:26, 6 September 2012 ALD-Al2O3-300-Recipe.pdf (file) 1.09 MB Zwarburg   1
11:25, 6 September 2012 ALD-Al2O3-300-Saturated-Recipe.pdf (file) 1.2 MB Zwarburg   1
11:26, 6 September 2012 ALD-Al2O3-Plasma-300C-Recipe.pdf (file) 992 KB Zwarburg   1
11:30, 6 September 2012 ALD-AlN-300-recipe.pdf (file) 1.09 MB Zwarburg   1
11:30, 6 September 2012 ALD-HfO2-100-recipe.pdf (file) 1.09 MB Zwarburg   1
11:30, 6 September 2012 ALD-HfO2-300-recipe.pdf (file) 1.08 MB Zwarburg   1
10:50, 22 August 2012 ALD-Operating-Instrucitons.pdf (file) 68 KB Zwarburg   1
11:33, 6 September 2012 ALD-SiO2-100-recipe.pdf (file) 1.08 MB Zwarburg   1
11:33, 6 September 2012 ALD-SiO2-300-recipe.pdf (file) 1.09 MB Zwarburg   1
11:33, 6 September 2012 ALD-ZrO2-300-recipe.pdf (file) 1.08 MB Zwarburg   1
08:51, 21 March 2014 ALD operating instructions-1.pdf (file) 66 KB Biljana   1
08:52, 23 July 2012 AP 3000 Adhesion Promoter MSDS.pdf (file) 141 KB Zwarburg {{MSDS}} 1
14:20, 22 April 2013 AR2-Anti-Reflective-Coating.pdf (file) 91 KB Thibeault   1
11:18, 9 September 2019 ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg (file) 294 KB John d   1
09:00, 23 July 2012 ARC i-CON-16 MSDS.pdf (file) 147 KB Zwarburg {{MSDS}} 1
08:52, 23 July 2012 ARC i-CON-7 Anti Reflective MSDS.pdf (file) 19 KB Zwarburg {{MSDS}} 1
17:45, 27 June 2012 ASML.jpg (file) 48 KB Zwarburg {{toolimage}} 1
16:30, 18 May 2023 ASML CD Cals - Example Plot.jpg (file) 32 KB John d   1
16:28, 18 May 2023 ASML CD Cals - Example Table.jpg (file) 100 KB John d   1
12:50, 13 September 2023 ASML IQC Focus Mean Correction screenshot.jpg (file) 165 KB John d Cleaner straightened photo 2
11:26, 1 April 2014 ASML Job Set-Up Guide.pdf (file) 3.13 MB Abrahamsen   1
11:51, 3 June 2016 ASML Job Set-Up Guide simple v1.pdf (file) 1.6 MB Thibeault   1
16:47, 10 April 2015 ASML Job Set-Up Guide v2.pdf (file) 1.81 MB Thibeault   1
17:26, 2 April 2015 ASML Mask Making Guidelines.pdf (file) 176 KB Thibeault   1
16:31, 31 January 2019 ASML On Wafer Mark.gds (file) 4 KB John d CAD file for ASML Alignment Marks 1
14:53, 26 March 2020 ASML Reticle Programming Params - DEM-2020-03 v1.xlsx (file) 10 KB John d CAD Tutorial - example programming spreadsheet for ASML Stepper 1
11:47, 14 February 2022 ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (file) 11 KB John d More comments to help users fill this out. 7
14:58, 21 February 2018 ASML Stepper 3 - Field Sizes - Screen Shot 2018-02-21 at 1.40.22 PM.png (file) 45 KB John d   1
11:09, 13 September 2023 ASML Stepper 3 - HELP button error log screenshot.png (file) 54 KB John d   1
14:39, 28 July 2016 ASi deposition and film stress using AV dep tool.pdf (file) 1.07 MB Ningcao   1
10:01, 8 April 2020 AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx (file) 3.27 MB Biljana   1
20:32, 7 April 2020 AUTOSTEP 200-PIECES instruction 6-20-19.pptx (file) 4.72 MB Biljana   1
15:53, 8 January 2024 AUTOSTEP 200 User Accessible Commands 010524.pdf (file) 77 KB Biljana   1
12:14, 1 December 2022 AXP4000pb-Datasheet.pdf (file) 1.86 MB John d New datasheet, actually the "addiitonal information" sheet from Microchem Includes spin curves for ALL 4000 series PR's. from here: https://www.microchemicals.com/products/photoresists/az_p4110.html 2
17:08, 8 November 2012 AZ300MIF-Developer-Datasheet.pdf (file) 77 KB Zwarburg   1
17:09, 8 November 2012 AZ300T-Resist-Remover.pdf (file) 383 KB Zwarburg   1
17:07, 8 November 2012 AZ400K-Developer-Datasheet.pdf (file) 77 KB Zwarburg   1
16:57, 8 November 2012 AZ5214-Negative-Resist-Datasheet.pdf (file) 101 KB Zwarburg   1
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