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Date Name Thumbnail Size Description Versions
12:55, 31 January 2019 IP180508.pdf (file) 67 KB   1
12:54, 31 January 2019 IP180508.pptx (file) 377 KB   1
12:48, 31 January 2019 IP180606.pdf (file) 62 KB   1
12:38, 31 January 2019 IP180705.pdf (file) 52 KB   1
12:35, 31 January 2019 IP180805.pdf (file) 49 KB   1
10:23, 31 January 2019 SiO2 Etch using ICP2-no O2.pdf (file) 414 KB   2
10:20, 31 January 2019 SiO2 Etch using ICP2 with O2.pdf (file) 264 KB   2
12:14, 29 January 2019 I11901.pdf (file) 49 KB   1
11:57, 29 January 2019 I11902.pdf (file) 47 KB   1
10:37, 29 January 2019 SiO2 Etch using ICP2 with O2-a.pdf (file) 52 KB   1
10:24, 29 January 2019 SiO2 Etch using ICP2-no O2-a.pdf (file) 55 KB   1
11:56, 11 December 2018 IP180909.pdf (file) 59 KB   1
16:15, 11 October 2018 Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-8-13-2018-A.pdf (file) 243 KB   1
14:02, 2 July 2018 SiO2-Mask Etch Recipe for Unaxis Cl2 Etch.pdf (file) 446 KB   1
11:18, 14 March 2018 Cu Film using Sputter-3.pdf (file) 153 KB   1
13:58, 10 August 2017 TiO2 film using Sputter4.pdf (file) 1.45 MB   1
16:11, 17 July 2017 SiNx Films by PECVD2.pdf (file) 125 KB   1
11:15, 5 July 2017 Lower-Etch-Rate InP Etch using Unaxis PM1 tool at 200 C.pdf (file) 1.05 MB   1
10:02, 27 June 2017 Al-Sputter4-5mT-200W-30m.pdf (file) 229 KB   1
09:53, 27 June 2017 Au-Sputter4-5mT-200W-120s.pdf (file) 688 KB   1
09:33, 27 June 2017 TiW-Sputter4-4.5mT-300W-300s.pdf (file) 957 KB   1
09:15, 27 June 2017 Pt-Sputter4.pdf (file) 1.21 MB   1
08:59, 27 June 2017 Pt-Sputter4-3mT-50W-360s.pdf (file) 722 KB   1
16:25, 11 May 2017 ITO film-200C-O2-35sccm-EBeam2.pdf (file) 312 KB   1
15:54, 13 January 2017 51-SiNx-Etch-Recipe-using-RIE3.pdf (file) 1.07 MB   1
08:51, 30 August 2016 Ni Sputtering Film using Sputter 3-a.pdf (file) 436 KB   1
09:19, 19 August 2016 Ti Sputtering Film using Sputter 3.pdf (file) 276 KB   1
08:58, 19 August 2016 Ni Sputtering Film using Sputter 3.pdf (file) 383 KB   1
11:35, 2 August 2016 SiO2-Etch-Recipe-using-RIE-3-a.pdf (file) 283 KB   1
10:23, 29 July 2016 InGaAsSb etch.pdf (file) 47 KB   1
10:08, 29 July 2016 ZnS Plasma Etch-1.pdf (file) 668 KB   1
09:24, 29 July 2016 ITO Deposition-250C-Ebeam2-HCl-Wet-Etch.pdf (file) 259 KB   1
15:26, 28 July 2016 CeO2 Deposition-EBeam2.pdf (file) 674 KB   1
15:01, 28 July 2016 Ta and Cr E-beam deposition and wet etch test.pdf (file) 600 KB   1
14:39, 28 July 2016 ASi deposition and film stress using AV dep tool.pdf (file) 1.07 MB   1
14:11, 28 July 2016 Amorphous Silicon Film Deposition using 12.5W bias on SiO2-Si.pdf (file) 943 KB   1
11:06, 28 July 2016 Rapid Thermal Annealing on Room-temperature grown ITO.pdf (file) 336 KB   1
16:24, 17 February 2016 50-InP Etch-2-17-2016.pdf (file) 842 KB   1
16:39, 16 February 2016 49-Photolithography of SU8-2015-a.pdf (file) 327 KB   1
16:30, 16 February 2016 48-Photolithography of SU8-2010.pdf (file) 360 KB   1
16:22, 16 February 2016 47-Photolithography of SU8-2005.pdf (file) 1.55 MB   1
16:42, 16 December 2015 46-Mo Film using Sputter3.pdf (file) 143 KB   1
16:23, 1 December 2015 45-Etching Nickel with Al2O3 Mask using Oxford Ion Mill Tool.pdf (file) 1.87 MB   1
15:49, 9 October 2015 44-Etching Gold with Al2O3 Mask using Oxford Ion Mill Tool.pdf (file) 2.28 MB   1
14:36, 2 September 2015 43-Issue with the etch of InP-InGaAs-and- InAlAs-b.pdf (file) 838 KB   1
14:08, 22 July 2015 42-Etching Platinum using Oxford Ion Mill Tool-a.pdf (file) 1.62 MB   1
13:58, 22 July 2015 42-Etching Platinum using Oxford Ion Mill Tool.pdf (file) 1.62 MB   1
12:07, 30 June 2015 39-Medium-stress SiNx at 100C using Unaxis ICP deposition tool.pdf (file) 48 KB   1
11:55, 30 June 2015 38-High-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf (file) 43 KB   1
11:39, 30 June 2015 37-Low-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf (file) 169 KB   1
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