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12:55, 31 January 2019
IP180508.pdf
(
file
)
67 KB
1
12:54, 31 January 2019
IP180508.pptx
(
file
)
377 KB
1
12:48, 31 January 2019
IP180606.pdf
(
file
)
62 KB
1
12:38, 31 January 2019
IP180705.pdf
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file
)
52 KB
1
12:35, 31 January 2019
IP180805.pdf
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file
)
49 KB
1
10:23, 31 January 2019
SiO2 Etch using ICP2-no O2.pdf
(
file
)
414 KB
2
10:20, 31 January 2019
SiO2 Etch using ICP2 with O2.pdf
(
file
)
264 KB
2
12:14, 29 January 2019
I11901.pdf
(
file
)
49 KB
1
11:57, 29 January 2019
I11902.pdf
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file
)
47 KB
1
10:37, 29 January 2019
SiO2 Etch using ICP2 with O2-a.pdf
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file
)
52 KB
1
10:24, 29 January 2019
SiO2 Etch using ICP2-no O2-a.pdf
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file
)
55 KB
1
11:56, 11 December 2018
IP180909.pdf
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file
)
59 KB
1
16:15, 11 October 2018
Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-8-13-2018-A.pdf
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file
)
243 KB
1
14:02, 2 July 2018
SiO2-Mask Etch Recipe for Unaxis Cl2 Etch.pdf
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file
)
446 KB
1
11:18, 14 March 2018
Cu Film using Sputter-3.pdf
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file
)
153 KB
1
13:58, 10 August 2017
TiO2 film using Sputter4.pdf
(
file
)
1.45 MB
1
16:11, 17 July 2017
SiNx Films by PECVD2.pdf
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file
)
125 KB
1
11:15, 5 July 2017
Lower-Etch-Rate InP Etch using Unaxis PM1 tool at 200 C.pdf
(
file
)
1.05 MB
1
10:02, 27 June 2017
Al-Sputter4-5mT-200W-30m.pdf
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file
)
229 KB
1
09:53, 27 June 2017
Au-Sputter4-5mT-200W-120s.pdf
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file
)
688 KB
1
09:33, 27 June 2017
TiW-Sputter4-4.5mT-300W-300s.pdf
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file
)
957 KB
1
09:15, 27 June 2017
Pt-Sputter4.pdf
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file
)
1.21 MB
1
08:59, 27 June 2017
Pt-Sputter4-3mT-50W-360s.pdf
(
file
)
722 KB
1
16:25, 11 May 2017
ITO film-200C-O2-35sccm-EBeam2.pdf
(
file
)
312 KB
1
15:54, 13 January 2017
51-SiNx-Etch-Recipe-using-RIE3.pdf
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file
)
1.07 MB
1
08:51, 30 August 2016
Ni Sputtering Film using Sputter 3-a.pdf
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file
)
436 KB
1
09:19, 19 August 2016
Ti Sputtering Film using Sputter 3.pdf
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file
)
276 KB
1
08:58, 19 August 2016
Ni Sputtering Film using Sputter 3.pdf
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file
)
383 KB
1
11:35, 2 August 2016
SiO2-Etch-Recipe-using-RIE-3-a.pdf
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file
)
283 KB
1
10:23, 29 July 2016
InGaAsSb etch.pdf
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file
)
47 KB
1
10:08, 29 July 2016
ZnS Plasma Etch-1.pdf
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file
)
668 KB
1
09:24, 29 July 2016
ITO Deposition-250C-Ebeam2-HCl-Wet-Etch.pdf
(
file
)
259 KB
1
15:26, 28 July 2016
CeO2 Deposition-EBeam2.pdf
(
file
)
674 KB
1
15:01, 28 July 2016
Ta and Cr E-beam deposition and wet etch test.pdf
(
file
)
600 KB
1
14:39, 28 July 2016
ASi deposition and film stress using AV dep tool.pdf
(
file
)
1.07 MB
1
14:11, 28 July 2016
Amorphous Silicon Film Deposition using 12.5W bias on SiO2-Si.pdf
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file
)
943 KB
1
11:06, 28 July 2016
Rapid Thermal Annealing on Room-temperature grown ITO.pdf
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file
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336 KB
1
16:24, 17 February 2016
50-InP Etch-2-17-2016.pdf
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file
)
842 KB
1
16:39, 16 February 2016
49-Photolithography of SU8-2015-a.pdf
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file
)
327 KB
1
16:30, 16 February 2016
48-Photolithography of SU8-2010.pdf
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file
)
360 KB
1
16:22, 16 February 2016
47-Photolithography of SU8-2005.pdf
(
file
)
1.55 MB
1
16:42, 16 December 2015
46-Mo Film using Sputter3.pdf
(
file
)
143 KB
1
16:23, 1 December 2015
45-Etching Nickel with Al2O3 Mask using Oxford Ion Mill Tool.pdf
(
file
)
1.87 MB
1
15:49, 9 October 2015
44-Etching Gold with Al2O3 Mask using Oxford Ion Mill Tool.pdf
(
file
)
2.28 MB
1
14:36, 2 September 2015
43-Issue with the etch of InP-InGaAs-and- InAlAs-b.pdf
(
file
)
838 KB
1
14:08, 22 July 2015
42-Etching Platinum using Oxford Ion Mill Tool-a.pdf
(
file
)
1.62 MB
1
13:58, 22 July 2015
42-Etching Platinum using Oxford Ion Mill Tool.pdf
(
file
)
1.62 MB
1
12:07, 30 June 2015
39-Medium-stress SiNx at 100C using Unaxis ICP deposition tool.pdf
(
file
)
48 KB
1
11:55, 30 June 2015
38-High-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf
(
file
)
43 KB
1
11:39, 30 June 2015
37-Low-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf
(
file
)
169 KB
1
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